US5541748A
Expired / Lapsed
US
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Liquid crystal display having patterned insulating and semiconductor layers and a method of fabricating the same
Assignee: Panasonic Liquid Crystal Display Co Ltd
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Filing: 1994-06-07
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Granted: 1996-07-30
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Expires: 2014-06-07
Abstract
Abstract A liquid crystal display provided with a matrix of inverted-stagger thin-film transistors has a plurality of gate insulating films formed over gate lines and including one insulating film formed in contact with gate electrodes of the thin-film transistors and in self-alignment with gate lines in the picture display area of the liquid crystal display. The rest of the gate insulating films not crossing the gate electrodes and in contact with a semiconductor layer are patterned in conformity with drain electrodes (data lines), and a semiconductor layer and an insulating film not crossing the drain electrode and crossing the gate electrodes are patterned at the same time. The method has less steps than the conventional method, is capable of fabricating a liquid crystal display capable of displaying pictures in a high picture quality at a high yield rate.
Inventors
- 👤 Kikuo Ono
- 👤 Junichi Ohwada
- 👤 Hideaki Yamamoto
- 👤 Hiroaki Asuma
- 👤 Nobutake Konishi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:28
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/1368; H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; H10D86/00; H10D86/40; H10D86/441; H10D86/60; G02F1/136286
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
169 words
A method of fabricating a liquid crystal display comprising: a substrate having a main surface, metal gate lines formed on the main surface of said substrate, data lines formed so as to intersect the gate lines, with respect to a plan view of the substrate main surface, at substantially right angles, thin-film transistors formed-near the intersections of the gate lines and the data lines, and pixel electrodes connected to the thin-film transistors to drive a liquid crystal material; comprising the steps of: anodizing upper and end side surfaces of the gate lines formed on the main surface of said substrate, respectively; and continuously patterning insulating films and semiconductor layers stacked thereon, respectively, in a manner such that, with respect to a plan view of the substrate main surface, the patterns effected for each stacked pair of an insulating film and a semiconductor layer are substantially the same and coincide, each such stacked pair covering at least part of the anodized oxide film on respective ones of said gate lines.
Claim 2
Independent Claim
169 words
A method of fabricating a liquid crystal display comprising: a substrate having a main surface, metal gate lines formed on the main surface of said substrate, data lines formed so as to intersect the gate lines, with respect to a plan view of the substrate main surface, at substantially right angles, thin-film transistors formed-near the intersections of the gate lines and the data lines, and pixel electrodes connected to the thin-film transistors to drive a liquid crystal material; comprising the steps of: anodizing upper and end side surfaces of the gate lines formed on the main surface of said substrate, respectively; and continuously patterning insulating films and semiconductor layers stacked thereon, respectively, in a manner such that, with respect to a plan view of the substrate main surface, the patterns effected for each stacked pair of an insulating film and a semiconductor layer are substantially the same and coincide, each such stacked pair covering at least part of the anodized oxide film on respective ones of said gate lines.
Claim 3
Dependent Claim
109 words
A liquid crystal display comprising: a substrate; gate lines formed on said substrate; data lines intersecting with said gate lines in a matrix shape; thin-film transistors formed near the intersections of said gate lines and said data lines, respectively; pixel electrodes connected to said thin-film transistors, respectively, to drive a liquid crystal material provided in said display, said pixel electrodes being formed on said substrate, respectively; an insulating layer formed on said substrate along said data lines, respectively; and a semiconductor layer formed on said insulating layer and having substantially a same pattern as that of said insulating layer, wherein said data lines are formed on said semiconductor layer.
Claim 4
Dependent Claim
109 words
A liquid crystal display comprising: a substrate; gate lines formed on said substrate; data lines intersecting with said gate lines in a matrix shape; thin-film transistors formed near the intersections of said gate lines and said data lines, respectively; pixel electrodes connected to said thin-film transistors, respectively, to drive a liquid crystal material provided in said display, said pixel electrodes being formed on said substrate, respectively; an insulating layer formed on said substrate along said data lines, respectively; and a semiconductor layer formed on said insulating layer and having substantially a same pattern as that of said insulating layer, wherein said data lines are formed on said semiconductor layer.
Claim 5
Dependent Claim
22 words
A liquid crystal display according to claim 2, wherein said insulating layer is disposed to be partially overlapping with said pixel electrodes.
Claim 6
Dependent Claim
28 words
A liquid crystal display according to claim 2, wherein said semiconductor layer is dimensioned to have a width which is greater than that of said data lines, respectively.
Claim 7
Dependent Claim
19 words
A liquid crystal display according to claim 2, wherein said semiconductor layer consists of an intrinsic type semiconductor layer.
Claim 8
Dependent Claim
20 words
A liquid crystal display according to claim 2, wherein said gate lines are coated with an anodic oxide film, respectively.
Claim 9
Dependent Claim
47 words
A liquid crystal display according to claim 2, wherein each of said thin-film transistors uses a corresponding one of said gate lines as a gate electrode, a corresponding said insulating layer being formed on said gate electrode and said semiconductor layer being formed on said insulating layer.
Claim 10
Dependent Claim
28 words
A liquid crystal display according to claim 7, wherein each of said thin-film transistors has a drain and a source electrode which are formed on said semiconductor layer.
Claim 11
Dependent Claim
25 words
A liquid crystal display according to claim 8, wherein said insulating layer and semiconductor layer formed on said gate electrode have substantially a same pattern.
Claim 12
Dependent Claim
27 words
A liquid crystal display according to claim 9, wherein said source electrode corresponding to each of said thin-film transistors is shaped to have a bending plane pattern.
Claim 13
Dependent Claim
33 words
A liquid crystal display according to claim 2, wherein an angle of inclination of an edge surface of said insulating layer is smaller than that of an edge surface of said semiconductor layer.
Claim 14
Dependent Claim
215 words
A liquid crystal display comprising: a substrate; gate lines formed on said substrate; data lines intersecting with said gate lines in a matrix shape; thin-film transistors formed near the intersections of said gate lines and said data lines, respectively, wherein each of said thin-film transistors uses a corresponding one of said gate lines as a gate electrode and each of said thin-film transistors has one of a drain and source electrode which is connected to a corresponding one of said data lines; pixel electrodes each of which is electrically connected to the other of the drain and source electrode of a corresponding one of said thin-film transistors to drive a liquid crystal material provided in said display, said pixel electrodes being formed on said substrate, respectively; an insulating layer formed on said substrate along said data lines, respectively, and on said gate electrode of each of said thin-film transistors corresponding thereto; and a semiconductor layer formed on said insulating layer and having substantially a same pattern as that of said insulating layer, wherein said data lines and said source and drain electrodes of each of said thin-film transistors are formed on said semiconductor layer, and wherein said semiconductor layer is dimensioned to have a width which is greater than that of said data lines, respectively.
Claim 15
Dependent Claim
215 words
A liquid crystal display comprising: a substrate; gate lines formed on said substrate; data lines intersecting with said gate lines in a matrix shape; thin-film transistors formed near the intersections of said gate lines and said data lines, respectively, wherein each of said thin-film transistors uses a corresponding one of said gate lines as a gate electrode and each of said thin-film transistors has one of a drain and source electrode which is connected to a corresponding one of said data lines; pixel electrodes each of which is electrically connected to the other of the drain and source electrode of a corresponding one of said thin-film transistors to drive a liquid crystal material provided in said display, said pixel electrodes being formed on said substrate, respectively; an insulating layer formed on said substrate along said data lines, respectively, and on said gate electrode of each of said thin-film transistors corresponding thereto; and a semiconductor layer formed on said insulating layer and having substantially a same pattern as that of said insulating layer, wherein said data lines and said source and drain electrodes of each of said thin-film transistors are formed on said semiconductor layer, and wherein said semiconductor layer is dimensioned to have a width which is greater than that of said data lines, respectively.
Claim 16
Dependent Claim
22 words
A liquid crystal display according to claim 12, wherein said insulating layer is disposed to be partially overlapping with said pixel electrodes.
Claim 17
Dependent Claim
19 words
A liquid crystal display according to claim 12, wherein said semiconductor layer consists of an intrinsic type semiconductor layer.
Claim 18
Dependent Claim
20 words
A liquid crystal display according to claim 12, wherein said gate lines are coated with an anodic oxide film, respectively.
Claim 19
Dependent Claim
33 words
A liquid crystal display according to claim 12, wherein an angle of inclination of an edge surface of said insulating layer is smaller than that of an edge surface of said semiconductor layer.
Claim 20
Dependent Claim
27 words
A liquid crystal display according to claim 12, wherein said source electrode corresponding to each of said thin-film transistors is shaped to have a bending plane pattern.
Claim 21
Dependent Claim
33 words
A liquid crystal display according to claim 12, wherein each of said gate lines consists of a single-metal layer and an anodized oxide film of metal formed on upper and side surfaces thereof.
Claim 22
Dependent Claim
16 words
A liquid crystal display according to claim 13, wherein said single-metal layer is formed of aluminum.
Claim 23
Dependent Claim
32 words
A liquid crystal display according to claim 18, wherein each of said data lines and said source and drain electrodes is constituted by a stacked arrangement of first and second metal layers.
Claim 24
Dependent Claim
19 words
A liquid crystal display according to claim 18, wherein each of said data lines consists of a single-metal layer.
References Cited (Backward Citations)
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