Patent US5531018A successfully refreshed from Google Patents.
US5531018A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of micromachining electromagnetically actuated current switches with polyimide reinforcement seals, and switches produced thereby
Assignee: General Electric Co
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Filing: 1993-12-20
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Granted: 1996-07-02
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Expires: 2013-12-20
Abstract
Abstract An insulating layer with at least one via is provided over a metal plate. A sacrificial layer is applied over a portion of the insulating layer so that the sacrificial layer extends into the via. A metal bridge having at least one opening is provided over a portion of the sacrificial layer and a portion of the insulating layer so that the metal bridge extends over the via and the opening is situated adjacent a portion of the sacrificial layer. A reinforcing seal layer with a well is provided over the metal bridge so that the well is situated adjacent to at least a portion of the opening. The sacrificial layer is then removed.
Inventors
- 👤 Richard J. Saia
- 👤 Mario Ghezzo
- 👤 Bharat S. K. Bagepalli
- 👤 Kevin M. Durocher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 11:59
CPC Classifications
B; B81; B81B; B81B7/00; B81B7/0009; B81B7/0012; H; H01; H01H; H01H50/00; H01H50/005; B81B2201/00; B81B2201/01; B81B2201/012; B81B2201/018; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49105
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
145 words
A method of fabricating a switch, comprising the steps of: providing an insulating layer over a metal plate, said insulating layer having at least one via extending to said metal plate; providing a sacrificial layer over a portion of said insulating layer so that said sacrificial layer extends conformally into said at least one via; providing a metal bridge over a portion of said sacrificial layer and a portion of said insulating layer so that said metal bridge extends over said at least one via, said metal bridge having at least one opening therein situated adjacent said portion of said sacrificial layer for providing access for the removal of said sacrificial layer; providing a reinforcing seal layer over said metal bridge, said seal layer having a well situated adjacent to at least a portion of said at least one opening; and removing said sacrificial layer.
Claim 2
Independent Claim
145 words
A method of fabricating a switch, comprising the steps of: providing an insulating layer over a metal plate, said insulating layer having at least one via extending to said metal plate; providing a sacrificial layer over a portion of said insulating layer so that said sacrificial layer extends conformally into said at least one via; providing a metal bridge over a portion of said sacrificial layer and a portion of said insulating layer so that said metal bridge extends over said at least one via, said metal bridge having at least one opening therein situated adjacent said portion of said sacrificial layer for providing access for the removal of said sacrificial layer; providing a reinforcing seal layer over said metal bridge, said seal layer having a well situated adjacent to at least a portion of said at least one opening; and removing said sacrificial layer.
Claim 3
Dependent Claim
87 words
The method of claim 1, wherein the step of providing said insulating layer comprises: applying said insulating layer over said metal plate, applying a mask over said insulating layer, said mask having at least one hole extending to said insulating layer, a sacrificial portion of said mask acting as a bottom portion of said sacrificial layer, and forming said at least one via through said at least one hole; and further including the step of removing said sacrificial portion of said mask when removing said sacrificial layer.
Claim 4
Dependent Claim
67 words
The method of claim 1, wherein said metal plate and said at least one via comprise a switch contact plate and a switch contact via, respectively, and wherein the step of providing said insulating layer over said switch contact plate includes providing said insulating layer over a metal stationary contact plate, said insulating layer having at least one stationary contact via extending to said stationary contact plate.
Claim 5
Dependent Claim
38 words
The method of claim 3, wherein the step of providing said metal bridge is performed so as to extend said metal bridge directly into said at least one additional via and make contact with said additional metal plate.
Claim 6
Dependent Claim
25 words
The method of claim 1, further including the step of attaching a magnet in said well of said seal layer after removing said sacrificial layer.
Claim 7
Dependent Claim
46 words
The method of claim 5, further including the step of providing on said insulating layer a metal coil having turns surrounding said metal bridge and said well after the step of providing said insulating layer and prior to the step of providing said reinforcing seal layer.
Claim 8
Independent Claim
169 words
A method of fabricating a switch, comprising the steps of: providing an insulating layer over a plurality of metal plates, said insulating layer having a plurality of vias, each one of said plurality of vias extending to a predetermined respective one of said metal plates; providing a sacrificial layer over a portion of said insulating layer so that said sacrificial layer extends conformally into at least a respective one of said plurality of vias and contacts a selected one of said plurality of metal plates; providing a metal bridge over a portion of said sacrificial layer and a portion of said insulating layer so that said metal bridge extends over said at least one of said plurality of vias, said metal bridge having at least one opening therein situated adjacent said portion of said sacrificial layer; providing a reinforcing seal layer over said metal bridge, said seal layer having a well situated adjacent to at least a portion of said at least one opening; and removing said sacrificial layer.
Claim 9
Independent Claim
169 words
A method of fabricating a switch, comprising the steps of: providing an insulating layer over a plurality of metal plates, said insulating layer having a plurality of vias, each one of said plurality of vias extending to a predetermined respective one of said metal plates; providing a sacrificial layer over a portion of said insulating layer so that said sacrificial layer extends conformally into at least a respective one of said plurality of vias and contacts a selected one of said plurality of metal plates; providing a metal bridge over a portion of said sacrificial layer and a portion of said insulating layer so that said metal bridge extends over said at least one of said plurality of vias, said metal bridge having at least one opening therein situated adjacent said portion of said sacrificial layer; providing a reinforcing seal layer over said metal bridge, said seal layer having a well situated adjacent to at least a portion of said at least one opening; and removing said sacrificial layer.
Claim 10
Dependent Claim
108 words
The method of claim 7, further including the step of providing a metal coil on said insulating layer after providing said insulating layer and prior to providing said reinforcing seal layer, said coil having turns surrounding said metal bridge and said well, wherein said plurality of metal plates includes a first coil contact plate and a second coil contact plate, with one end of said coil extending into a respective one of said plurality of vias to contact said first coil contact plate and the other end of said coil extending into a respective other one of said plurality of vias to contact said second coil contact plate.
Claim 11
Dependent Claim
21 words
The method of claim 8, wherein said sacrificial layer and at least a portion of said metal coil are provided simultaneously.
Claim 12
Dependent Claim
25 words
The method of claim 9, further including the step of attaching a magnet in said well of said seal layer after removing said sacrificial layer.
Claim 13
Dependent Claim
90 words
The method of claim 7, wherein the step of providing said insulating layer over said metal plate comprises: applying said insulating layer over said metal plate, applying a metal mask over said insulating layer, said mask having a plurality of holes extending to said insulating layer, a sacrificial portion of said mask acting as a bottom portion of said sacrificial layer, and forming said plurality of vias through said plurality of holes; and further including the step of removing said sacrificial portion of said mask while removing said sacrificial layer.
References Cited (Backward Citations)
US5262000A
Cited
US5374792A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-07-02 | 2000-01-01 | 2000-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-07-02 | 2004-01-01 | 2004-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-07-02 | 2008-01-01 | 2008-07-02 | $7700.00 | Window Closed / Lapsed |