Patent US5530715A successfully refreshed from Google Patents.
US5530715A
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US
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Vertical cavity surface emitting laser having continuous grading
Assignee: Motorola Solutions Inc
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Filing: 1994-11-29
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Granted: 1996-06-25
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Expires: 2014-11-29
Abstract
Abstract A first stack of distributed Bragg mirrors having alternating layers of aluminum gallium arsenide differing in concentrations of an aluminum are disposed on a surface of a substrate with a first plurality of continuous gradient layers positioned between the alternating layers of differing aluminum concentrations to dynamically move the aluminum concentration from one of the alternating layer to another alternating layers. A first cladding region is disposed on the first stack of distributed Bragg mirrors. An active region is disposed on the first cladding region with a second cladding region being dispose on the active region. A second stack of distributed Bragg mirrors having alternating layers of aluminum gallium arsenide differing concentrations of aluminum are disposed on the second cladding region with a second plurality of continuous gradient layers being positioned between the alternating layers of differing aluminum concentrations to dynamically change the aluminum concentration from one of the altering layers to another alternating layers.
Inventors
- 👤 Chan-Long Shieh
- 👤 Michael S. Lebby
- 👤 Hsing-Chung Lee
- 👤 Piotr Grodzinski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 21:44
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/183; B; B82; B82Y; B82Y20/00; H01S5/30; H01S5/305; H01S5/3054; H01S5/32; H01S5/3211; H01S5/3215; H01S5/34; H01S5/343; H01S5/34313
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
373 words
A vertical cavity surface emitting laser comprising: a substrate having a surface; a first stack of distributed Bragg reflectors having a first dopant with a first dopant concentration disposed on the surface of the substrate, the first stack of distributed Bragg reflectors include alternating layers of a first aluminum gallium arsenide layer having a first aluminum concentration and a second aluminum gallium arsenide layer having a second aluminum concentration with a continuous grading layer positioned between the first aluminum gallium arsenide layer and the second aluminum gallium arsenide layer, wherein the continuous grading layer provides an aluminum gradient between the alternating layers of the first aluminum gallium arsenide layer and the second aluminum gallium arsenide layer; a first cladding region disposed on the first stack of distributed Bragg reflectors, the first cladding region including a third aluminum gallium arsenide layer having the first dopant with a second dopant concentration disposed on the first stack of distributed Bragg reflectors and a forth aluminum gallium arsenide layer deposited on the third aluminum gallium arsenide layer; an active region disposed on the first cladding region, the active region including a strained layer between a first barrier layer and a second barrier layer, wherein the first barrier layer is disposed on the first cladding region, and wherein the second barrier layer is disposed on the strained layer; a second cladding region disposed on the active region, the second cladding region including a fifth aluminum gallium arsenide layer having an second dopant with a third dopant concentration disposed on the second barrier layer and an sixth aluminum gallium arsenide layer deposited on the fifth aluminum gallium arsenide layer; and a second stack of distributed Bragg reflectors having a second dopant with a fourth dopant concentration disposed on the second cladding region, the second stack of distributed Bragg reflectors including alternating layers of a seventh aluminum gallium arsenide layer having a third aluminum concentration and a eighth aluminum gallium arsenide layer having a fourth aluminum concentration with a continuous grading layer position between the first aluminum gallium arsenide layer and the second aluminum gallium arsenide layer, wherein the continuous grading layer provides an aluminum gradient between the first aluminum gallium arsenide layer and the second aluminum gallium arsenide layer.
Claim 2
Dependent Claim
373 words
A vertical cavity surface emitting laser comprising: a substrate having a surface; a first stack of distributed Bragg reflectors having a first dopant with a first dopant concentration disposed on the surface of the substrate, the first stack of distributed Bragg reflectors include alternating layers of a first aluminum gallium arsenide layer having a first aluminum concentration and a second aluminum gallium arsenide layer having a second aluminum concentration with a continuous grading layer positioned between the first aluminum gallium arsenide layer and the second aluminum gallium arsenide layer, wherein the continuous grading layer provides an aluminum gradient between the alternating layers of the first aluminum gallium arsenide layer and the second aluminum gallium arsenide layer; a first cladding region disposed on the first stack of distributed Bragg reflectors, the first cladding region including a third aluminum gallium arsenide layer having the first dopant with a second dopant concentration disposed on the first stack of distributed Bragg reflectors and a forth aluminum gallium arsenide layer deposited on the third aluminum gallium arsenide layer; an active region disposed on the first cladding region, the active region including a strained layer between a first barrier layer and a second barrier layer, wherein the first barrier layer is disposed on the first cladding region, and wherein the second barrier layer is disposed on the strained layer; a second cladding region disposed on the active region, the second cladding region including a fifth aluminum gallium arsenide layer having an second dopant with a third dopant concentration disposed on the second barrier layer and an sixth aluminum gallium arsenide layer deposited on the fifth aluminum gallium arsenide layer; and a second stack of distributed Bragg reflectors having a second dopant with a fourth dopant concentration disposed on the second cladding region, the second stack of distributed Bragg reflectors including alternating layers of a seventh aluminum gallium arsenide layer having a third aluminum concentration and a eighth aluminum gallium arsenide layer having a fourth aluminum concentration with a continuous grading layer position between the first aluminum gallium arsenide layer and the second aluminum gallium arsenide layer, wherein the continuous grading layer provides an aluminum gradient between the first aluminum gallium arsenide layer and the second aluminum gallium arsenide layer.
Claim 3
Dependent Claim
17 words
A vertical cavity surface emitting laser as claimed in claim 1 wherein the first dopant is n-type.
Claim 4
Dependent Claim
21 words
A vertical cavity surface emitting laser as claimed in claim 2 wherein the first dopant concentration ranges from 5E17 to 5E18.
Claim 5
Dependent Claim
22 words
A vertical cavity surface emitting laser as claimed in claim 1 wherein the first aluminum concentration ranges from 0 to 20 percent.
Claim 6
Dependent Claim
23 words
A vertical cavity surface emitting laser as claimed in claim 4 wherein the first aluminum concentration preferably ranges from 13 to 17 percent.
Claim 7
Dependent Claim
23 words
A vertical cavity surface emitting laser as claimed in claim 5 wherein the first aluminum concentration is on the order of 15 percent.
Claim 8
Dependent Claim
22 words
A vertical cavity surface emitting laser as claimed in claim 1 wherein the second aluminum concentration ranges from 75 to 100 percent.
Claim 9
Dependent Claim
23 words
A vertical cavity surface emitting laser as claimed in claim 7 wherein the second aluminum concentration preferably ranges from 78 to 82 percent.
Claim 10
Dependent Claim
23 words
A vertical cavity surface emitting laser as claimed in claim 8 wherein the second aluminum concentration is on the order of 80 percent.
Claim 11
Dependent Claim
17 words
A vertical cavity surface emitting laser as claimed in claim 1 wherein the second dopant is p-type.
Claim 12
Dependent Claim
41 words
A vertical cavity surface emitting laser as claimed in claim 10 wherein the p-type doping concentration is achieved by selecting one of the following p-type doping materials: carbon tetrachloride, carbon tetrabromide, or using intrinsic carbon doping with tBAs or trimethylarsenic (tMAs).
Claim 13
Dependent Claim
21 words
A vertical cavity surface emitting laser as claimed in claim 1 wherein the fourth dopant concentration ranges from 5E17 to 1E19.
Claim 14
Dependent Claim
22 words
A vertical cavity surface emitting laser as claimed in claim 12 wherein the fourth dopant concentration is on the order of 1E18.
Claim 15
Dependent Claim
17 words
A vertical cavity surface emitting laser as claimed in claim 1 wherein the substrate is gallium arsenide.
Claim 16
Dependent Claim
49 words
A vertical cavity surface emitting laser as claimed in claim 1 further including a contact layer, the contact layer including an aluminum gallium arsenide layer having a fifth aluminum concentration with the second dopant with a third dopant concentration and a gallium arsenide layer with a p-type dopant concentration.
Claim 17
Dependent Claim
22 words
A vertical cavity surface emitting laser as claimed in claim 15 wherein the fifth aluminum concentration ranges from 13 to 17 percent.
Claim 18
Dependent Claim
23 words
A vertical cavity surface emitting laser as claimed in claim 16 wherein the fifth aluminum concentration is on the order of 15 percent.
Claim 19
Dependent Claim
150 words
A vertical cavity surface emitting laser comprising: a substrate having a surface: a first stack of distributed Bragg mirrors having alternating layers of differing concentrations of an aluminum disposed on the surface of the substrate; first continuous gradient layers positioned between the alternating layers of differing aluminum concentrations to dynamically move the aluminum concentration from one of the alternating layers to another of the alternating layers; a first cladding region disposed on the first stack of distributed Bragg mirrors; an active region disposed on the first cladding region; a second cladding region dispose on the active region; a second stack of distributed Bragg mirrors having alternating layer of differing concentrations of aluminum disposed on the second cladding region; and second continuous gradient layers positioned between the alternating layer of differing aluminum concentrations to dynamically move the aluminum concentration from one of the altering layers to another of the alternating layers.
Claim 20
Dependent Claim
150 words
A vertical cavity surface emitting laser comprising: a substrate having a surface: a first stack of distributed Bragg mirrors having alternating layers of differing concentrations of an aluminum disposed on the surface of the substrate; first continuous gradient layers positioned between the alternating layers of differing aluminum concentrations to dynamically move the aluminum concentration from one of the alternating layers to another of the alternating layers; a first cladding region disposed on the first stack of distributed Bragg mirrors; an active region disposed on the first cladding region; a second cladding region dispose on the active region; a second stack of distributed Bragg mirrors having alternating layer of differing concentrations of aluminum disposed on the second cladding region; and second continuous gradient layers positioned between the alternating layer of differing aluminum concentrations to dynamically move the aluminum concentration from one of the altering layers to another of the alternating layers.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-25 | 1999-12-25 | 2000-06-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-25 | 2003-12-25 | 2004-06-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-25 | 2007-12-25 | 2008-06-25 | $7700.00 | Window Closed / Lapsed |