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US5351256A Expired / Lapsed US ⏱️ 0.0 years remaining

Electrically injected visible vertical cavity surface emitting laser diodes

Assignee: National Technology and Engineering Solutions of Sandia LLC
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Filing: 1993-04-28
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Granted: 1994-09-27
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Expires: 2013-04-28
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Abstract

Abstract Visible laser light output from an electrically injected vertical cavity surface emitting laser (VSCEL) diode is enabled by the addition of phase-matching spacer layers on either side of the active region to form the optical cavity. The spacer layers comprise InAlP which act as charge carrier confinement means. Distributed Bragg reflector layers are formed on either side of the optical cavity to act as mirrors.

Inventors

  • 👤 Richard P. Schneider
  • 👤 James A. Lott

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 10:07
CPC Classifications
B; B82; B82Y; B82Y20/00; H; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/183; H01S5/18361; H01S5/18358; H01S5/30; H01S5/32; H01S5/3211; H01S5/34; H01S5/343; H01S5/34326

Claims Analysis

Total Claims: 27
Claim 1
Independent Claim 163 words
An electrically injected vertical cavity laser diode for emitting light at a visible wavelength comprising: a III-V compound substrate of a first conductivity type connected to a first electrode; a first multiplicity of distributed Bragg reflectors (DBRs) being of the first conductivity type formed above the substrate; an optical cavity formed above the first DBRs and comprising a first optical phase matching spacer layer located adjacent the first DBRs and of the same conductivity, an active region having an active lasing means located adjacent to and above the first spacer layer, and a second optical phase matching spacer layer adjacent to and above the active region and of the opposite conductivity type from the first spacer layer, wherein each spacer layer has a thickness of between one wavelength and three wavelengths of the emitted light; a second multiplicity of distributed Bragg reflectors (DBRs) of the opposite conductivity type formed above the optical cavity; and a second electrode means located above the active region.
Claim 2
Dependent Claim 163 words
An electrically injected vertical cavity laser diode for emitting light at a visible wavelength comprising: a III-V compound substrate of a first conductivity type connected to a first electrode; a first multiplicity of distributed Bragg reflectors (DBRs) being of the first conductivity type formed above the substrate; an optical cavity formed above the first DBRs and comprising a first optical phase matching spacer layer located adjacent the first DBRs and of the same conductivity, an active region having an active lasing means located adjacent to and above the first spacer layer, and a second optical phase matching spacer layer adjacent to and above the active region and of the opposite conductivity type from the first spacer layer, wherein each spacer layer has a thickness of between one wavelength and three wavelengths of the emitted light; a second multiplicity of distributed Bragg reflectors (DBRs) of the opposite conductivity type formed above the optical cavity; and a second electrode means located above the active region.
Claim 3
Dependent Claim 21 words
The laser of claim 1 wherein the optical phase-matching layers have higher bandgaps than the materials comprising the active lasing means.
Claim 4
Dependent Claim 22 words
The laser of claim 1 wherein the optical phase-matching layers comprise materials which optimize charge carrier injection efficiency into the active region.
Claim 5
Dependent Claim 12 words
The laser of claim 1 wherein the optical phase-matching layers comprise AlInP.
Claim 6
Dependent Claim 16 words
The laser of claim 1 wherein the active lasing means comprises at least one quantum well.
Claim 7
Dependent Claim 17 words
The laser of claim 5 wherein the active lasing means comprises at least one strained quantum well.
Claim 8
Dependent Claim 26 words
The laser of claim 6 wherein the active lasing means further comprises lattice-matched barrier means on either side of the at least one strained quantum well.
Claim 9
Dependent Claim 16 words
The laser of claim 7 wherein various components of the active lasing means comprise InAlGaP compounds.
Claim 10
Dependent Claim 26 words
The laser of claim 8 wherein the composition of the InAlGaP compounds is defined as In x (Al y Ga 1-y ) 1-x P, where 0≦y≦1.
Claim 11
Dependent Claim 15 words
The laser of claim 1 wherein the active lasing means comprises a bulk semiconductor material.
Claim 12
Dependent Claim 186 words
An electrically injected vertical cavity laser diode for emitting light at a visible wavelength comprising: a III-V compound substrate of a first conductivity type connected to a first electrode; a first multiplicity of distributed Bragg reflectors (DBRs) being of the first conductivity type formed above the substrate; an optical cavity formed above the first DBRs and comprising an active region having at least one strained quantum well surrounded by lattice-matched barrier means, a first optical phase matching spacer layer located adjacent the first DBRs and of the same conductivity, and a second optical phase matching spacer layer on the other side of the active region and of the opposite conductivity type, wherein each spacer layer has a thickness of between one wavelength and three wavelengths of the emitted light and the optical phase matching layers have higher bandgaps than the materials comprising the DBR's; a second multiplicity of distributed Bragg reflectors (DBRs) of the opposite conductivity type formed above the optical cavity; and a second electrode means, such that the second electrode means has an opening within it for the transmission of the laser light output.
Claim 13
Dependent Claim 186 words
An electrically injected vertical cavity laser diode for emitting light at a visible wavelength comprising: a III-V compound substrate of a first conductivity type connected to a first electrode; a first multiplicity of distributed Bragg reflectors (DBRs) being of the first conductivity type formed above the substrate; an optical cavity formed above the first DBRs and comprising an active region having at least one strained quantum well surrounded by lattice-matched barrier means, a first optical phase matching spacer layer located adjacent the first DBRs and of the same conductivity, and a second optical phase matching spacer layer on the other side of the active region and of the opposite conductivity type, wherein each spacer layer has a thickness of between one wavelength and three wavelengths of the emitted light and the optical phase matching layers have higher bandgaps than the materials comprising the DBR's; a second multiplicity of distributed Bragg reflectors (DBRs) of the opposite conductivity type formed above the optical cavity; and a second electrode means, such that the second electrode means has an opening within it for the transmission of the laser light output.
Claim 14
Dependent Claim 30 words
The laser of claim 11 wherein the optical phase-matching layers have higher bandgaps than the materials comprising the at least one strained quantum well and the surrounding lattice-matched barrier means.
Claim 15
Dependent Claim 12 words
The laser of claim 11 wherein the optical phased-matching layers comprise AlInP.
Claim 16
Dependent Claim 15 words
The laser of claim 11 wherein the active region is at least one wavelength thick.
Claim 17
Dependent Claim 25 words
The laser of claim 11 wherein various components of the at least one strained quantum well and the surrounding lattice-matched barrier means comprise InAlGaP compounds.
Claim 18
Dependent Claim 26 words
The laser of claim 15 wherein the composition of the InAlGaP compounds is defined as In x (Al y Ga 1-y ) 1-x P, wherein 0≦y≦1.
Claim 19
Dependent Claim 185 words
An electrically injected vertical cavity laser diode for emitting light at a visible wavelength comprising: a III-V compound substrate of a first conductivity type connected to a first electrode; a first multiplicity of distributed Bragg reflectors (DBRs) being of the first conductivity type formed above the substrate; an optical cavity formed above the first DBRs and comprising a first optical phase matching spacer layer located adjacent the first DBRs and of the same conductivity, an active region having an active lasing means located adjacent to and above the first spacer layer, and a second optical phase matching spacer layer adjacent to and above the active region and of the opposite conductivity type form the first spacer layer, wherein each spacer layer is an integral multiple of λ/4n in thickness where λ is the wavelength and n is the refractive index of the spacer and the total thickness of the optical cavity is an integral multiple of λ/2n; a second multiplicity of distributed Bragg reflectors (DBRs) of the opposite conductivity type formed above the optical cavity; and a second electrode means located above the active region.
Claim 20
Dependent Claim 185 words
An electrically injected vertical cavity laser diode for emitting light at a visible wavelength comprising: a III-V compound substrate of a first conductivity type connected to a first electrode; a first multiplicity of distributed Bragg reflectors (DBRs) being of the first conductivity type formed above the substrate; an optical cavity formed above the first DBRs and comprising a first optical phase matching spacer layer located adjacent the first DBRs and of the same conductivity, an active region having an active lasing means located adjacent to and above the first spacer layer, and a second optical phase matching spacer layer adjacent to and above the active region and of the opposite conductivity type form the first spacer layer, wherein each spacer layer is an integral multiple of λ/4n in thickness where λ is the wavelength and n is the refractive index of the spacer and the total thickness of the optical cavity is an integral multiple of λ/2n; a second multiplicity of distributed Bragg reflectors (DBRs) of the opposite conductivity type formed above the optical cavity; and a second electrode means located above the active region.
Claim 21
Dependent Claim 21 words
The laser of claim 17 wherein the optical phase-matching layers have higher bandgaps than the materials comprising the active lasing means.
Claim 22
Dependent Claim 12 words
The laser of claim 17 wherein the optical phase-matching layers comprise AlInP.
Claim 23
Dependent Claim 16 words
The laser of claim 17 wherein the active lasing means comprises at least one quantum well.
Claim 24
Dependent Claim 17 words
The laser of claim 17 wherein the active lasing means comprises at least one strained quantum well.
Claim 25
Dependent Claim 16 words
The laser of claim 17 wherein various components of the active lasing means comprise InAlGaP compounds.
Claim 26
Dependent Claim 26 words
The laser of claim 22 wherein the composition of the InAlGaP compounds is defined as In x (Al y Ga 1-y ) 1-x P, where 0≦y≦1.
Claim 27
Dependent Claim 15 words
The laser of claim 17 wherein the active lasing means comprises a bulk semiconductor material.

References Cited (Backward Citations)

US4949350A Cited
US5018157A Cited
US5258990A Cited
US5245622A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-09-26 1998-03-28 1998-09-27 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-09-26 2002-03-28 2002-09-27 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-09-26 2006-03-28 2006-09-27 $7700.00 Window Closed / Lapsed

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