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US5530581A
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Protective overlayer material and electro-optical coating using same
Assignee: EIC Laboratories Inc
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Filing: 1995-05-31
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Granted: 1996-06-25
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Expires: 2015-05-31
Abstract
Abstract An electro-optical device comprising a series of thin films with an electrically controllable optical state provided with a protective overlayer that has a high optical transmittance and high resistance to penetration by H2O. The protective overlayer is a film of amorphous silicon oxycarbide (a-SiOC:H) having an O to C ratio such that the optical absorption edge of the a-SiOC:H is 3 eV or greater and the H2O transport through a 500 nm thick film of a-SiOC:H is 1012 molecules/cm2-s or less.
Inventors
- 👤 Stuart F. Cogan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 06:00
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/15; G02F1/153; G02F1/1533; G02F2001/1536
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
90 words
An electro-optical device comprising; a substrate; an electrochromic coating comprising at least one thin electrochromic film, said thin electrochromic film having an electrically controllable optical state, disposed on said substrate, and a protective overlayer disposed on said electrochromic coating, said protective overlayer comprising at least one thin-film of a-SiOC:H having an oxygen to carbon ratio such that the optical absorption edge of said amorphous a-SiOC:H is at least 3 eV and the water transport is less than 10 12 molecules/sec-cm 2 through a 500 nm thick film of said a-SiOC:H.
Claim 2
Dependent Claim
90 words
An electro-optical device comprising; a substrate; an electrochromic coating comprising at least one thin electrochromic film, said thin electrochromic film having an electrically controllable optical state, disposed on said substrate, and a protective overlayer disposed on said electrochromic coating, said protective overlayer comprising at least one thin-film of a-SiOC:H having an oxygen to carbon ratio such that the optical absorption edge of said amorphous a-SiOC:H is at least 3 eV and the water transport is less than 10 12 molecules/sec-cm 2 through a 500 nm thick film of said a-SiOC:H.
Claim 3
Dependent Claim
41 words
The electro-optical device of claim 1, wherein said a-SiOC:H thin-film contains nitrogen as an impurity, the concentration of said nitrogen impurity being less than an amount necessary to shift the optical absorption edge of said a-SiOC:H to less than 3 eV.
Claim 4
Dependent Claim
52 words
The electro-optical device of claim 1, wherein said protective overlayer acts as multilayer interference filter, the indices of refraction and thickness of the a-SiOC:H and other thin-films in said protective overlayer being chosen to increase the maximum transmittance of said electro-optic device in one or more wavelength ranges in the solar spectrum.
Claim 5
Dependent Claim
75 words
The electro-optical device of claim 1, wherein said electrochromic coating comprises at least two reduction-oxidation active layers chosen singly or as a mixture from the group of electrochromic materials consisting of WO 3 , MoO 3 , Li y CrO 2+x , V 2 O 5 , Nb 2 O 5 , TiO 2 , and mixed-oxides of Cr and V and wherein a quantity of electro-active lithium is distributed between said reduction-oxidation active layers.
Claim 6
Dependent Claim
49 words
The electro-optical device of claim 1, wherein said electrochromic coating comprises at least two reduction-oxidation active layers chosen singly or as a mixture from the group WO 3 , MoO 3 , IrO 2 , and NiO, wherein one or more of said reduction-oxidation active layers is partially reduced.
Claim 7
Dependent Claim
78 words
The electro-optical device of claim 1, wherein said electrochromic coating comprises; a first electronic contact disposed over said substrate, a layer comprised of a first electrochromic material that colors on oxidation; a layer comprised of a second electrochromic material that colors on reduction; an ion conducting layer disposed between said first and second electrochromic layers; said first and second electrochromic material being disposed over said first electronic contact; and a second electronic contact disposed over said previous layers.
Claim 8
Dependent Claim
26 words
The electro-optical device of claim 1, wherein said protective overlayer comprises one or more layers of said a-SiOC:H and one or more layers of zirconium dioxide.
Claim 9
Independent Claim
178 words
A method for making an electro-optical device comprising a substrate; at least one electrochromic coating comprising at least one thin electrochromic film, wherein each of said films has an electrically controllable optical state, and a protective overlayer disposed on said electrochromic coating comprising the steps of: providing a substrate with at least one electrochromic layer disposed on said substrate to a vacuum of less than about 20 millitorr; maintaining a temperature of said substrate of at least about 100 degrees Celsius; providing a reactive gas mixture comprising at least silane, methane, and nitrous oxide at a pressure of about 200 millitorr to 1 torr; providing an RF field at about 50 kHz to 13.56 MHz at a power density of about 0.1 to 1 watt/cm 2 of substrate area for a time sufficient to provide an a-SiOC:H coating having an oxygen to carbon ratio such that the optical absorption edge of said a-SiOC:H is at least 3 eV and the water transport is less than 10 12 molecules/sec-cm 2 through a 500 nm thick film of said a-SiOC:H.
Claim 10
Independent Claim
178 words
A method for making an electro-optical device comprising a substrate; at least one electrochromic coating comprising at least one thin electrochromic film, wherein each of said films has an electrically controllable optical state, and a protective overlayer disposed on said electrochromic coating comprising the steps of: providing a substrate with at least one electrochromic layer disposed on said substrate to a vacuum of less than about 20 millitorr; maintaining a temperature of said substrate of at least about 100 degrees Celsius; providing a reactive gas mixture comprising at least silane, methane, and nitrous oxide at a pressure of about 200 millitorr to 1 torr; providing an RF field at about 50 kHz to 13.56 MHz at a power density of about 0.1 to 1 watt/cm 2 of substrate area for a time sufficient to provide an a-SiOC:H coating having an oxygen to carbon ratio such that the optical absorption edge of said a-SiOC:H is at least 3 eV and the water transport is less than 10 12 molecules/sec-cm 2 through a 500 nm thick film of said a-SiOC:H.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-25 | 1999-12-25 | 2000-06-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-25 | 2003-12-25 | 2004-06-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-25 | 2007-12-25 | 2008-06-25 | $7700.00 | Window Closed / Lapsed |