Patent US5530418A successfully refreshed from Google Patents.
US5530418A
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US
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Method for shielding polysilicon resistors from hydrogen intrusion
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1995-07-26
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Granted: 1996-06-25
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Expires: 2015-07-26
Abstract
Abstract A polysilicon resistor structure and a method by which the polysilicon resistor structure may be formed. A polysilicon resistor is formed upon the surface of a semiconductor substrate. A pair of dummy polysilicon layers is formed along opposite edges and separated from the polysilicon resistor. A pair of metal sidewalls is then formed upon the upper surfaces of the pair of dummy polysilicon layers, and a top metal layer is formed bridging the upper surfaces of the pair of metal sidewalls. The pair of dummy polysilicon layers, the pair of metal sidewalls and the top metal layer form an open ended cavity upon the semiconductor substrate within which structure the polysilicon resistor resides. The polysilicon resistor is separated from the structure by an insulating material which is not susceptible to outgassing of hydrogen.
Inventors
- 👤 Shun-Liang Hsu
- 👤 Han-Liang Tseng
- 👤 Mou-Shiung Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 06:12
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/40; H10D1/47; Y; Y10; Y10S; Y10S438/00; Y10S438/926
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
142 words
A method for forming a polysilicon resistor structure within an hydrogen annealed integrated circuit comprising: forming a polysilicon resistor upon the surface of a semiconductor substrate; forming a pair of hydrogen gettering dummy polysilicon layers along opposite edges of the polysilicon resistor, each one of the pair of dummy polysilicon layers being separated from the polysilicon resistor; forming a pair of metal sidewalls upon the upper surfaces of the pair of dummy polysilicon layers; and forming a top metal layer bridging the upper surfaces of the pair of metal sidewalls, the pair of dummy polysilicon layers, the pair of metal sidewalls and the top metal layer forming an open ended structure upon the semiconductor substrate within which structure the polysilicon resistor resides, the polysilicon resistor being separated from the structure by an insulating material which is not susceptible to outgassing of hydrogen.
Claim 2
Independent Claim
142 words
A method for forming a polysilicon resistor structure within an hydrogen annealed integrated circuit comprising: forming a polysilicon resistor upon the surface of a semiconductor substrate; forming a pair of hydrogen gettering dummy polysilicon layers along opposite edges of the polysilicon resistor, each one of the pair of dummy polysilicon layers being separated from the polysilicon resistor; forming a pair of metal sidewalls upon the upper surfaces of the pair of dummy polysilicon layers; and forming a top metal layer bridging the upper surfaces of the pair of metal sidewalls, the pair of dummy polysilicon layers, the pair of metal sidewalls and the top metal layer forming an open ended structure upon the semiconductor substrate within which structure the polysilicon resistor resides, the polysilicon resistor being separated from the structure by an insulating material which is not susceptible to outgassing of hydrogen.
Claim 3
Dependent Claim
25 words
The method of claim 1 wherein the thicknesses of the polysilicon resistor and the dummy polysilicon layers are about 2400 to about 3000 angstroms each.
Claim 4
Dependent Claim
57 words
The method of claim 1 wherein the pair of metal sidewalls is formed from a pair of successively stacked metal layers comprising a pair of first conductive contact studs, upon whose upper surfaces are formed a pair of patterned first metal layers, upon whose upper surfaces in turn are formed a pair of second conductive contact studs.
Claim 5
Dependent Claim
48 words
The method of claim 3 wherein the pair of first conductive contact studs and the pair of second conductive contact studs are formed at least in part from a material chosen from the group of materials consisting of highly doped polysilicon, tungsten, copper, aluminum and aluminum containing alloys.
Claim 6
Dependent Claim
29 words
The method of claim 4 wherein the pair of first conductive contact studs and the pair of second conductive contact studs are formed at least in part from tungsten.
Claim 7
Dependent Claim
34 words
The method of claim 3 wherein the pair of first metal layers is formed at least in part from a metal chosen from the group of metals consisting of aluminum, aluminum alloys and copper.
Claim 8
Dependent Claim
24 words
The method of claim 6 wherein the pair of first metal layers is formed at least in part from a copper containing aluminum alloy.
Claim 9
Dependent Claim
22 words
The method of claim 1 wherein the top metal layer is formed from a patterned second metal layer within an integrated circuit.
Claim 10
Dependent Claim
23 words
The method of claim 8 wherein the patterned second metal layer is formed at least in part from a copper containing aluminum alloy.
Claim 11
Dependent Claim
42 words
The method of claim 1 wherein the insulating material is formed from an inter-level dielectric layer of thickness of about 8000 to about 10000 angstroms upon which is formed an inter-metallic dielectric layer of thickness of about 8000 to about 14000 angstroms.
Claim 12
Dependent Claim
16 words
The method of claim 1 further comprising forming an inter-polysilicon oxide layer beneath the polysilicon resistor.
Claim 13
Dependent Claim
36 words
The method of claim 11 wherein the inter-polysilicon oxide layer is formed from a silicon oxide deposited through a Low Pressure Chemical Vapor Deposition (LPCVD) process at a thickness of about 400 to about 700 angstroms.
Claim 14
Dependent Claim
11 words
The method of claim 1 further comprising doping the polysilicon resistor.
Claim 15
Dependent Claim
34 words
The method of claim 13 wherein the polysilicon resistor is doped with a dopant species chosen from the group of dopant species consisting of arsenic dopant species, boron dopant species and phosphorus dopant species.
Claim 16
Independent Claim
152 words
A method for forming a polysilicon resistor structure within an hydrogen annealed integrated circuit comprising: forming a polysilicon resistor upon the surface of a semiconductor substrate; forming a pair of dummy hydrogen gettering polysilicon layers along opposite edges of the polysilicon resistor, each one of the pair of dummy polysilicon layers being separated from the polysilicon resistor; forming a pair of patterned first metal layers upon the pair of upper surfaces of the pair of dummy polysilicon layers; and forming a patterned second metal layer bridging the upper surfaces of the pair of patterned first metal layers, the pair of dummy polysilicon layers, the pair of patterned first metal layers and the patterned second metal layer forming an open ended structure upon the semiconductor substrate within which structure the polysilicon resistor resides, the polysilicon resistor being separated from the structure by an insulating material which is not susceptible to outgassing of hydrogen.
Claim 17
Independent Claim
152 words
A method for forming a polysilicon resistor structure within an hydrogen annealed integrated circuit comprising: forming a polysilicon resistor upon the surface of a semiconductor substrate; forming a pair of dummy hydrogen gettering polysilicon layers along opposite edges of the polysilicon resistor, each one of the pair of dummy polysilicon layers being separated from the polysilicon resistor; forming a pair of patterned first metal layers upon the pair of upper surfaces of the pair of dummy polysilicon layers; and forming a patterned second metal layer bridging the upper surfaces of the pair of patterned first metal layers, the pair of dummy polysilicon layers, the pair of patterned first metal layers and the patterned second metal layer forming an open ended structure upon the semiconductor substrate within which structure the polysilicon resistor resides, the polysilicon resistor being separated from the structure by an insulating material which is not susceptible to outgassing of hydrogen.
Claim 18
Dependent Claim
141 words
A polysilicon resistor structure formed with an hydrogen annealed integrated circuit comprising: a polysilicon resistor formed upon the surface of a semiconductor substrate; a pair of hydrogen gettering dummy polysilicon layers formed along opposite edges of the polysilicon resistor, each one of the pair of dummy polysilicon layers being separated from the polysilicon resistor; a pair of metal sidewalls formed upon the pair of upper surfaces of the pair of dummy polysilicon layers; a top metal layer formed bridging the upper surfaces of the pair of metal sidewalls, the pair of dummy polysilicon layers, the pair of metal sidewalls and the top metal layer forming an open ended structure upon the semiconductor substrate within which structure the polysilicon resistor resides; and an insulating material separating the polysilicon resistor from the structure, the insulating material being not susceptible to outgassing of hydrogen.
Claim 19
Dependent Claim
141 words
A polysilicon resistor structure formed with an hydrogen annealed integrated circuit comprising: a polysilicon resistor formed upon the surface of a semiconductor substrate; a pair of hydrogen gettering dummy polysilicon layers formed along opposite edges of the polysilicon resistor, each one of the pair of dummy polysilicon layers being separated from the polysilicon resistor; a pair of metal sidewalls formed upon the pair of upper surfaces of the pair of dummy polysilicon layers; a top metal layer formed bridging the upper surfaces of the pair of metal sidewalls, the pair of dummy polysilicon layers, the pair of metal sidewalls and the top metal layer forming an open ended structure upon the semiconductor substrate within which structure the polysilicon resistor resides; and an insulating material separating the polysilicon resistor from the structure, the insulating material being not susceptible to outgassing of hydrogen.
Claim 20
Dependent Claim
28 words
The polysilicon resistor structure of claim 16 wherein the thicknesses of the polysilicon resistor and the dummy polysilicon layers are from about 2400 to about 3000 angstroms each.
Claim 21
Dependent Claim
59 words
The polysilicon resistor structure of claim 16 wherein the pair of metal sidewalls is formed from a pair of successively stacked metal layers comprising a pair of first conductive contact studs, upon whose upper surfaces are formed a pair of patterned first metal layers, upon whose upper surfaces in turn are formed a pair of second conductive contact studs.
Claim 22
Dependent Claim
24 words
The polysilicon resistor structure of claim 16 wherein the top metal layer is formed from a patterned second metal layer within an integrated circuit.
Claim 23
Dependent Claim
44 words
The polysilicon resistor structure of claim 16 wherein the insulating material is formed from an inter-level dielectric layer of thickness of about 8000 to about 10000 angstroms upon which is formed an inter-metallic dielectric layer of thickness of about 8000 to about 14000 angstroms.
Claim 24
Dependent Claim
49 words
The polysilicon resistor structure of claim 16 further comprising an inter-polysilicon oxide layer formed beneath the polysilicon resistor, the inter-polysilicon oxide layer being formed from a silicon oxide material deposited through a Low Pressure Chemical Vapor Deposition (LPCVD) process at a thickness of about 400 to about 700 angstroms.
Claim 25
Dependent Claim
37 words
The polysilicon resistor structure of claim 16 further comprising a doping of the polysilicon resistor with dopant species chosen from the group of dopant species consisting of arsenic dopant species, phosphorus dopant species and boron dopant species.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-25 | 1999-12-25 | 2000-06-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-25 | 2003-12-25 | 2004-06-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-25 | 2007-12-25 | 2008-06-25 | $7700.00 | Window Closed / Lapsed |