US5525552A
Expired / Lapsed
US
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Method for fabricating a MOSFET device with a buried contact
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1995-06-08
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Granted: 1996-06-11
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Expires: 2015-06-08
Abstract
Abstract A process for fabricating MOSFET devices, using an optimized buried contact approach, has been developed. The process includes the provision of thermal oxide (10) and polysilicon spacer (12) adjacent polysilicon buried contact (7) and gate (4). This process is forgiving for non-optimized photolithographic alignments, which when used as masks for dry etching, can result in the creation of trenches or crevices in the device region, to a polysilicon contact structure. Films used to create the spacer sidewalls on polysilicon gate structures, also fill the unwanted trench or crevice. Therefore materials, such as silicon nitride and tantalum oxide are chosen, that will result in the creation of a more conductive contact path, between the buried contact region and a polysilicon contact structure, due to the accumulation layer formed below these sidewall spacer materials.
Inventors
- 👤 Jenn M. Huang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 14:35
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D62/00; H10D62/01; H10D62/021; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/0698; Y; Y10; Y10S; Y10S257/00; Y10S257/90; Y10S438/00; Y10S438/975
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
311 words
A method for fabricating a MOSFET device, with a buried contact, on a semiconductor substrate, comprising the steps of: forming a field oxide pattern on specific regions of said substrate while leaving bare silicon on remaining regions of said substrate; growing a gate oxide on said bare silicon regions; depositing a first polysilicon layer on said gate oxide, and said field oxide regions; opening a contact hole to said substrate, through said first polysilicon layer, and through said gate oxide; ion implanting a first conductivity imparting dopant into said contact hole opening to said substrate; depositing a second polysilicon layer on said first polysilicon layer, and on said exposed substrate, in said contact hole; ion implanting a second conductivity imparting dopant into said second polysilicon layer; patterning of said second polysilicon layer, said first polysilicon layer, and said gate oxide, to form polysilicon gate structure, and polysilicon contact structure; growing a thermal oxide layer on exposed surfaces of said polysilicon gate structure, said polysilicon contact structure, and on said substrate regions, between said polysilicon gate structure and said polysilicon contact structure; ion implanting a third conductivity imparting dopant into said polysilicon gate structure, into said polysilicon contact structure, and into region of said substrate, between said polysilicon gate structure and said polysilicon contact structure; depositing a first insulator layer on said thermal oxide layer; anisotropic etching of said first insulator layer, to form a spacer of said first insulator layer, on sidewalls of said polysilicon gate structure, and on sidewalls of said polysilicon structure; ion implanting a fourth conductivity imparting dopant into said polysilicon gate structure, into said polysilicon contact structure, and into region of said substrate, between said polysilicon gate structure and said polysilicon contact structure; and annealing to activate said dopants, and to connect regions of said second conductivity imparting dopant, to regions of said fourth conductivity imparting dopant.
Claim 2
Independent Claim
311 words
A method for fabricating a MOSFET device, with a buried contact, on a semiconductor substrate, comprising the steps of: forming a field oxide pattern on specific regions of said substrate while leaving bare silicon on remaining regions of said substrate; growing a gate oxide on said bare silicon regions; depositing a first polysilicon layer on said gate oxide, and said field oxide regions; opening a contact hole to said substrate, through said first polysilicon layer, and through said gate oxide; ion implanting a first conductivity imparting dopant into said contact hole opening to said substrate; depositing a second polysilicon layer on said first polysilicon layer, and on said exposed substrate, in said contact hole; ion implanting a second conductivity imparting dopant into said second polysilicon layer; patterning of said second polysilicon layer, said first polysilicon layer, and said gate oxide, to form polysilicon gate structure, and polysilicon contact structure; growing a thermal oxide layer on exposed surfaces of said polysilicon gate structure, said polysilicon contact structure, and on said substrate regions, between said polysilicon gate structure and said polysilicon contact structure; ion implanting a third conductivity imparting dopant into said polysilicon gate structure, into said polysilicon contact structure, and into region of said substrate, between said polysilicon gate structure and said polysilicon contact structure; depositing a first insulator layer on said thermal oxide layer; anisotropic etching of said first insulator layer, to form a spacer of said first insulator layer, on sidewalls of said polysilicon gate structure, and on sidewalls of said polysilicon structure; ion implanting a fourth conductivity imparting dopant into said polysilicon gate structure, into said polysilicon contact structure, and into region of said substrate, between said polysilicon gate structure and said polysilicon contact structure; and annealing to activate said dopants, and to connect regions of said second conductivity imparting dopant, to regions of said fourth conductivity imparting dopant.
Claim 3
Dependent Claim
29 words
The method of claim 1, wherein said gate oxide is grown at a temperature between about 750° to 1000° C., to a thickness between about 50 to 300 Angstroms.
Claim 4
Dependent Claim
37 words
The method of claim 1, wherein said first polysilicon layer is grown using low pressure chemical vapor deposition, (LPCVD), at a temperature between about 450° to 650° C., to a thickness between about 250 to 1000 Angstroms.
Claim 5
Dependent Claim
39 words
The method of claim 1, wherein said first conductivity imparting dopant is arsenic or phosphorous, ion implanted at an energy between about 20 to 70 Kev, at a dose between about 5×10 14 to 3×10 15 atoms/cm 2 .
Claim 6
Dependent Claim
32 words
The method of claim 1, wherein said second polysilicon layer is grown using LPCVD, at a temperature between about 450° to 650° C., to a thickness between about 1000 to 4000 Angstroms.
Claim 7
Dependent Claim
39 words
The method of claim 1, wherein said second conductivity imparting dopant is arsenic or phosphorous, ion implanted at an energy between about 30 to 180 Kev, at a dose between about 5×10 14 to 5×10 15 atoms/cm 2 .
Claim 8
Dependent Claim
26 words
The method of claim 1, wherein said polysilicon contact structure overlays said first polysilicon layer and said gate oxide, by between about 0 to 2000 Angstroms.
Claim 9
Dependent Claim
29 words
The method of claim 1, wherein said thermal oxide is grown at a temperature between about 800° to 950° C., to a thickness between about 50 to 250 Angstroms.
Claim 10
Dependent Claim
38 words
The method of claim 1, wherein third conductivity imparting dopant is arsenic or phosphorous, ion implanted at an energy between about 20 to 100 Kev, at a dose between about 10 13 to 10 14 atoms/cm 2 .
Claim 11
Dependent Claim
35 words
The method of claim 1, wherein said first insulator spacer layer is silicon nitride, deposited using LPCVD, at a temperature between about 750° to 850° C., to a thickness between about 1000 to 3000 Angstroms.
Claim 12
Dependent Claim
27 words
The method of claim 1, wherein said first insulator spacer layer is tantalum oxide, deposited using r.f sputtering, to a thickness between about 1000 to 3000 Angstroms.
Claim 13
Dependent Claim
37 words
The method of claim 1, wherein said fourth conductivity imparting dopant is arsenic, ion implanted at an energy between about 20 to 100 Kev, at a dose between about 10 15 to 5×10 15 atoms/cm 2 .
Claim 14
Dependent Claim
30 words
The method of claim 1, wherein annealing of said dopants is performed at a temperature between about 800° to 950° C., for a time between about 20 to 100 min.
Claim 15
Dependent Claim
21 words
The method of claim 1, wherein said polysilicon contact structure does not overlay said first polysilicon layer and said gate oxide.
Claim 16
Independent Claim
351 words
A method for fabricating a MOSFET device, with a buried contact, on a semiconductor substrate, comprising the steps of: forming a field oxide pattern on specific regions of said substrate, while leaving bare silicon on remaining regions of said substrate; growing a gate oxide on said bare silicon regions; depositing a first polysilicon layer on said gate oxide, and on said field oxide regions; opening a contact hole to said substrate, through said first polysilicon layer, and through said gate oxide; ion implanting a first conductivity imparting dopant into said contact hole opening to said substrate, to create buried contact; depositing a second polysilicon layer on said first polysilicon layer, and on said buried contact region, in said substrate; ion implanting a second conductivity imparting dopant into said second polysilicon layer; patterning of said second polysilicon layer, said first polysilicon layer, and said gate oxide, to form polysilicon gate structure, and polysilicon contact structure; growing a thermal oxide layer on exposed surfaces of said polysilicon gate structure, said polysilicon contact structure, and on said substrate regions, between said polysilicon gate structure and said polysilicon contact structure; ion implanting a third conductivity imparting dopant into said polysilicon gate structure, into said polysilicon contact structure, and into region of said substrate, between said polysilicon gate structure and said polysilicon contact structure, to create lightly doped source and drain regions; removal of said thermal oxide layer from sidewall of said polysilicon contact structure; depositing a third polysilicon layer on said polysilicon gate structure, on said polysilicon contact structure, and said lightly doped source and drain regions; anisotropic removal of said third polysilicon layer, to form spacer of said third polysilicon layer, on sidewall of said polysilicon gate structure, and on sidewall of said polysilicon contact structure; ion implanting a fourth conductivity imparting dopant into said polysilicon gate structure, into said polysilicon contact structure, and into region of said substrate, between said polysilicon gate structure and said polysilicon contact structure, to create source and drain regions; and annealing to activate said dopants, and to connect said source and drain regions to said buried contact regions.
Claim 17
Independent Claim
351 words
A method for fabricating a MOSFET device, with a buried contact, on a semiconductor substrate, comprising the steps of: forming a field oxide pattern on specific regions of said substrate, while leaving bare silicon on remaining regions of said substrate; growing a gate oxide on said bare silicon regions; depositing a first polysilicon layer on said gate oxide, and on said field oxide regions; opening a contact hole to said substrate, through said first polysilicon layer, and through said gate oxide; ion implanting a first conductivity imparting dopant into said contact hole opening to said substrate, to create buried contact; depositing a second polysilicon layer on said first polysilicon layer, and on said buried contact region, in said substrate; ion implanting a second conductivity imparting dopant into said second polysilicon layer; patterning of said second polysilicon layer, said first polysilicon layer, and said gate oxide, to form polysilicon gate structure, and polysilicon contact structure; growing a thermal oxide layer on exposed surfaces of said polysilicon gate structure, said polysilicon contact structure, and on said substrate regions, between said polysilicon gate structure and said polysilicon contact structure; ion implanting a third conductivity imparting dopant into said polysilicon gate structure, into said polysilicon contact structure, and into region of said substrate, between said polysilicon gate structure and said polysilicon contact structure, to create lightly doped source and drain regions; removal of said thermal oxide layer from sidewall of said polysilicon contact structure; depositing a third polysilicon layer on said polysilicon gate structure, on said polysilicon contact structure, and said lightly doped source and drain regions; anisotropic removal of said third polysilicon layer, to form spacer of said third polysilicon layer, on sidewall of said polysilicon gate structure, and on sidewall of said polysilicon contact structure; ion implanting a fourth conductivity imparting dopant into said polysilicon gate structure, into said polysilicon contact structure, and into region of said substrate, between said polysilicon gate structure and said polysilicon contact structure, to create source and drain regions; and annealing to activate said dopants, and to connect said source and drain regions to said buried contact regions.
Claim 18
Dependent Claim
28 words
The method of claim 15, wherein said gate oxide is grown at a temperature between about 750° to 1000° C., a thickness between about 50 to 300 Angstroms.
Claim 19
Dependent Claim
32 words
The method of claim 15, wherein said first polysilicon layer is grown using LPCVD, at a temperature between about 450° to 650° C., to a thickness between about 250 to 1000 Angstroms.
Claim 20
Dependent Claim
48 words
The method of claim 15, wherein said first conductivity imparting dopant, used to create the buried contact in said substrate, is arsenic or phosphorous, ion implanted at an energy between about 20 to 70 Kev, at a dose between about 5×10 14 to 3×10 15 atoms/cm 2 .
Claim 21
Dependent Claim
30 words
The method of claim 15, wherein second polysilicon layer is deposited using LPCVD, at a temperature between about 450° to 650° C., to a thickness between 1000 to 4000 Angstroms.
Claim 22
Dependent Claim
38 words
The method of claim 15, wherein second conductivity imparting dopant is arsenic or phosphorous, ion implanted at an energy between about 20 to 180 Kev, at a dose between about 5×10 14 to 5×10 15 atoms/cm 2 .
Claim 23
Dependent Claim
26 words
The method of claim 15, wherein said polysilicon contact structure overlays said first polysilicon layer and said gate oxide, by between about 0 to 2000 Angstroms.
Claim 24
Dependent Claim
28 words
The method of claim 15, wherein said thermal oxide is grown at a temperature between about 800° to 950° C., a thickness between about 50 to 250 Angstroms.
Claim 25
Dependent Claim
48 words
The method of claim 15, wherein third conductivity imparting dopant, used to create lightly doped source and drain regions in said substrate, is arsenic or phosphorous, ion implanted at an energy between about 20 to 100 Kev, dose between about 10 13 to 10 14 atoms/cm 2 .
Claim 26
Dependent Claim
18 words
The method of claim 15, wherein said themal oxide layer is removed with a buffered hydrofluoric acid solution.
Claim 27
Dependent Claim
31 words
The method of claim 15, wherein third polysilicon layer is deposited using LPCVD, at a temperature between about 450° to 650° C., to a thickness between about 1000 to 3000 Angstroms.
Claim 28
Dependent Claim
23 words
The method of claim 15, sidewall spacer is formed by anisotropic dry etching of said third polysilicon layer, using a C12 based chemistry.
Claim 29
Dependent Claim
47 words
The method of claim 15, wherein said fourth conductivity imparting dopant, used to create source and drain regions in said substrate, is arsenic, ion implanted at an energy between about 20 to 100 Kev, at a dose between about 10 15 to 5×10 15 atoms/cm 2 .
Claim 30
Dependent Claim
42 words
The method of claim 15, wherein annealing of said dopants, to connect said source and drain regions to said buried contact region, is performed at a temperature between about 800° to 950° C., for a time between about 20 to 100 min.
Claim 31
Dependent Claim
21 words
The method of claim 15, wherein said polysilicon contact structure does not overlay said first polysilicon layer and said gate oxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-11 | 1999-12-11 | 2000-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-11 | 2003-12-11 | 2004-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-11 | 2007-12-11 | 2008-06-11 | $7700.00 | Window Closed / Lapsed |