US5523580A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reticle having a number of subfields
Assignee: GlobalFoundries Inc
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Filing: 1993-12-23
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Granted: 1996-06-04
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Expires: 2013-12-23
Abstract
Abstract A reticle for an electron beam system for direct writing applications has a base layer that contains a reticle pattern; a set of reinforcing struts connected to the base layer separating the base layer into a set of non-contiguous subfields; in which the pattern is carried by a set of apertures areas in said base layer; and in which the set of non-contiguous subfields has overlapping rim portions in which the overlap portions of corresponding lines have a pattern that produces the correct exposure when the subfields are correctly aligned and minimizes pattern feature discontinuities when the subfields are misaligned. A corresponding method consists of overlapping the reticle at the field or subfield boundaries and forming a spatial breakup or a partially transmissive area of the pattern elements contained in the overlapped areas, preventing shorts and open failures in the lines or pattern elements and providing additional tolerance for the alignment of the adjacent fields or subfields.
Inventors
- 👤 Donald E. Davis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 00:08
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; H10; H10P; H10P76/00; B; B82; B82Y; B82Y10/00; B82Y40/00; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31761; H01J2237/31764; H01J2237/31777; H01J2237/31788; H01J2237/31793; H01J2237/31794
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
274 words
A reticle for patterning an incident beam of charged particle radiation comprising: a base layer of a base thickness and containing a reticle pattern; and a set of reinforcing struts connected to said base layer on a first side thereof for separating said base layer into a set of non-contiguous subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; those of said elements of said set of non-contiguous subfields that come within an overlap rim of a boundary are patterned with a radiation modulation pattern including radiation-hindering areas and apertures for permitting the unhindered passage of radiation that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of apertures in which said radiation-hindering areas have areas substantially greater than said set of apertures; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of apertures in which said radiation-hindering areas have areas substantially greater than said set of apertures and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of apertures from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 2
Dependent Claim
274 words
A reticle for patterning an incident beam of charged particle radiation comprising: a base layer of a base thickness and containing a reticle pattern; and a set of reinforcing struts connected to said base layer on a first side thereof for separating said base layer into a set of non-contiguous subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; those of said elements of said set of non-contiguous subfields that come within an overlap rim of a boundary are patterned with a radiation modulation pattern including radiation-hindering areas and apertures for permitting the unhindered passage of radiation that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of apertures in which said radiation-hindering areas have areas substantially greater than said set of apertures; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of apertures in which said radiation-hindering areas have areas substantially greater than said set of apertures and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of apertures from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 3
Dependent Claim
292 words
A reticle for patterning an incident beam of radiation comprising: a base layer of a base thickness and containing a reticle pattern; and a set of reinforcing struts connected to said base layer on a first side thereof for separating said base layer into a set of non-contiguous subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; and those of said elements of said set of non-contiguous subfields that come within an overlap rim of a boundary are patterned with a radiation modulation pattern including radiation-hindering areas having a first degree of resistance to radiation and a set of passage areas for permitting the passage of radiation with less hindrance that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of passage areas from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 4
Dependent Claim
292 words
A reticle for patterning an incident beam of radiation comprising: a base layer of a base thickness and containing a reticle pattern; and a set of reinforcing struts connected to said base layer on a first side thereof for separating said base layer into a set of non-contiguous subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; and those of said elements of said set of non-contiguous subfields that come within an overlap rim of a boundary are patterned with a radiation modulation pattern including radiation-hindering areas having a first degree of resistance to radiation and a set of passage areas for permitting the passage of radiation with less hindrance that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of passage areas from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 5
Dependent Claim
245 words
A reticle for patterning an incident beam of radiation comprising: a base layer of a base thickness and containing a reticle pattern with a set of subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; and those of said elements that come within an overlap rim of a subfield are patterned with an radiation modulation pattern including radiation-hindering areas and apertures for permitting the unhindered passage of radiation that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of apertures in which said radiation-hindering areas have areas substantially greater than said set of apertures; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of apertures in which said radiation-hindering areas have areas substantially greater than said set of apertures and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of apertures from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 6
Dependent Claim
245 words
A reticle for patterning an incident beam of radiation comprising: a base layer of a base thickness and containing a reticle pattern with a set of subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; and those of said elements that come within an overlap rim of a subfield are patterned with an radiation modulation pattern including radiation-hindering areas and apertures for permitting the unhindered passage of radiation that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of apertures in which said radiation-hindering areas have areas substantially greater than said set of apertures; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of apertures in which said radiation-hindering areas have areas substantially greater than said set of apertures and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of apertures from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 7
Dependent Claim
292 words
A reticle for patterning an incident beam of radiation comprising: a base layer of a base thickness and containing a reticle pattern; and a set of reinforcing struts connected to said base layer on a first side thereof for separating said base layer into a set of non-contigugus subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; and those of said elements of said set of non-contiguous subfields that come within an overlap rim of a boundary are patterned with a radiation modulation pattern including radiation-hindering areas having a first degree of resistance to radiation and a set of passage areas for permitting the passage of radiation with less hindrance that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of passage areas from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 8
Dependent Claim
292 words
A reticle for patterning an incident beam of radiation comprising: a base layer of a base thickness and containing a reticle pattern; and a set of reinforcing struts connected to said base layer on a first side thereof for separating said base layer into a set of non-contigugus subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; and those of said elements of said set of non-contiguous subfields that come within an overlap rim of a boundary are patterned with a radiation modulation pattern including radiation-hindering areas having a first degree of resistance to radiation and a set of passage areas for permitting the passage of radiation with less hindrance that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of passage areas from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 9
Dependent Claim
241 words
A reticle for patterning an incident beam of radiation comprising: a base layer of a base thickness and containing a reticle pattern with a set of non-contiguous subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; and those of said elements that come within an overlap rim of a subfield are patterned with an radiation modulation pattern that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of apertures for permitting the unhindered passage of radiation in which said radiation-hindering areas have areas substantially greater than said set of apertures; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of apertures in which said radiation-hindering areas have areas substantially greater than said set of apertures and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of apertures from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 10
Dependent Claim
241 words
A reticle for patterning an incident beam of radiation comprising: a base layer of a base thickness and containing a reticle pattern with a set of non-contiguous subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; and those of said elements that come within an overlap rim of a subfield are patterned with an radiation modulation pattern that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of apertures for permitting the unhindered passage of radiation in which said radiation-hindering areas have areas substantially greater than said set of apertures; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of apertures in which said radiation-hindering areas have areas substantially greater than said set of apertures and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of apertures from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 11
Dependent Claim
265 words
A reticle for patterning an incident beam of radiation comprising: a base layer of a base thickness and containing a reticle pattern with a set of non-contiguous subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; and those of said elements that come within an overlap rim of a subfield are patterned with an radiation modulation pattern including radiation-hindering areas having a first degree of resistance to radiation and a set of passage areas for permitting the passage of radiation with less hindrance that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of passage areas from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
Claim 12
Dependent Claim
265 words
A reticle for patterning an incident beam of radiation comprising: a base layer of a base thickness and containing a reticle pattern with a set of non-contiguous subfields, characterized in that; said pattern is carried by a set of elements in said base layer; each subfield is surrounded by a boundary which comprises an overlap rim; and those of said elements that come within an overlap rim of a subfield are patterned with an radiation modulation pattern including radiation-hindering areas having a first degree of resistance to radiation and a set of passage areas for permitting the passage of radiation with less hindrance that provides for desired exposure when said elements are correctly aligned; said radiation modulation pattern in a first subset of said set of non-contiguous subfields comprises a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas; those of said elements in an overlap rim of a second subset of said set of non-contiguous subfields have a complementary radiation modulation pattern comprising a set of alternating radiation-hindering areas and a set of passage areas in which said radiation-hindering areas have areas substantially greater than said set of passage areas and in which complementary pattern said radiation-hindering areas are disposed such that the image of said set of passage areas from said radiation modulation pattern is aligned with the image of said radiation-hindering areas from said complementary radiation modulation pattern when the images of said element and said complementary element are aligned to form the desired pattern.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1999-06-04 | 1999-12-04 | 2000-06-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-04 | 2003-12-04 | 2004-06-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-04 | 2007-12-04 | 2008-06-04 | $7700.00 | Window Closed / Lapsed |