Patent US5394034A successfully refreshed from Google Patents.
Patent US5515207A successfully refreshed from Google Patents.
US5515207A
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Multiple mirror catadioptric optical system
Assignee: Nikon Corp
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Filing: 1993-11-03
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Granted: 1996-05-07
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Expires: 2013-11-03
Abstract
Abstract A reduction projection system (10) characterized by large numerical aperture has an unobscured optical path without the need to resort to truncated lens elements. The system includes first and second reduction stages. The first reduction stage includes a first mirror group (20) and a first lens group (30). The second reduction stage includes a second mirror group (40) and a second lens group (50). Together, the first mirror group and the first lens group form an intermediate reduced image of the object at an intermediate image region (70). The second mirror group and the second lens group form a further reduced image at an image plane (15).
Inventors
- 👤 Leslie D. Foo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 10:08
CPC Classifications
G; G02; G02B; G02B17/00; G02B17/08; G02B17/0836; G02B17/0844; G02B17/0892; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70225; G03F7/70275
Claims Analysis
Total Claims: 40
Claim 1
Independent Claim
86 words
A catadioptric reduction projection optical system for producing a reduced image of an object, comprising, in a light path sequence from the object: a first reduction stage, including a first mirror group having at least one concave mirror, forming an intermediate image of reduced size at an intermediate image region; and a second reduction stage, including a second mirror group and a lens group, forming a final image of further reduced size at a final image plane, said second mirror group including a plurality of mirrors.
Claim 2
Dependent Claim
86 words
A catadioptric reduction projection optical system for producing a reduced image of an object, comprising, in a light path sequence from the object: a first reduction stage, including a first mirror group having at least one concave mirror, forming an intermediate image of reduced size at an intermediate image region; and a second reduction stage, including a second mirror group and a lens group, forming a final image of further reduced size at a final image plane, said second mirror group including a plurality of mirrors.
Claim 3
Dependent Claim
21 words
The optical system of claim 1 wherein said first reduction stage includes a lens group consisting entirely of full diameter elements.
Claim 4
Dependent Claim
23 words
The optical system of claim 1 wherein said first mirror group comprises first and second concave mirrors that provide a net optical reduction.
Claim 5
Dependent Claim
24 words
The optical system of claim 3 wherein said first mirror group further includes a folding mirror located between said first and second concave mirrors.
Claim 6
Dependent Claim
12 words
The optical system of claim 4 wherein said folding mirror is planar.
Claim 7
Dependent Claim
16 words
The optical system of claim 4, and further comprising an aperture stop proximate said folding mirror.
Claim 8
Dependent Claim
16 words
The optical system of claim 6 wherein said aperture stop is defined by said folding mirror.
Claim 9
Dependent Claim
22 words
The optical system of claim 1 wherein all elements in said lens group in said second reduction stage are full diameter elements.
Claim 10
Dependent Claim
18 words
The optical system of claim 1, wherein all the lens elements are centered on a common optical axis.
Claim 11
Dependent Claim
28 words
The optical system of claim 1 wherein said second mirror group comprises first and second concave mirrors and a convex mirror between said first and second concave mirrors.
Claim 12
Dependent Claim
19 words
The optical system of claim 1 wherein said second mirror group comprises a concave mirror and a convex mirror.
Claim 13
Dependent Claim
21 words
The optical system of claim 1, and further comprising a folding mirror located between the object and said first mirror group.
Claim 14
Dependent Claim
23 words
The optical system of claim 1, and further comprising a folding mirror located between said first reduction stage and said second mirror group.
Claim 15
Dependent Claim
20 words
The optical system of claim 1, wherein the optical system has a numerical aperture greater than or equal to 0.45.
Claim 16
Dependent Claim
17 words
The optical system of claim 1 wherein said lens group in said second reduction stage is positive.
Claim 17
Dependent Claim
103 words
A catadioptric reduction projection optical system for producing a reduced image of an object, comprising, in a light path sequence from the object: a first mirror group; a first lens group consisting entirely of full diameter elements; said first mirror group and said first lens group forming an intermediate image of reduced size at an intermediate image region; a second mirror group including a plurality of mirrors; and a second lens group, said second mirror group including a plurality of mirrors; said second mirror group and said second lens group forming a final image of further reduced size at a final image plane.
Claim 18
Dependent Claim
103 words
A catadioptric reduction projection optical system for producing a reduced image of an object, comprising, in a light path sequence from the object: a first mirror group; a first lens group consisting entirely of full diameter elements; said first mirror group and said first lens group forming an intermediate image of reduced size at an intermediate image region; a second mirror group including a plurality of mirrors; and a second lens group, said second mirror group including a plurality of mirrors; said second mirror group and said second lens group forming a final image of further reduced size at a final image plane.
Claim 19
Dependent Claim
13 words
The optical system of claim 16 wherein said first lens group is negative.
Claim 20
Dependent Claim
13 words
The optical system of claim 16 wherein said second lens group is positive.
Claim 21
Dependent Claim
23 words
The optical system of claim 16 wherein said first mirror group comprises first and second concave mirrors that provide a net optical reduction.
Claim 22
Dependent Claim
20 words
The optical system of claim 19, and further comprising a folding mirror located between said first and second concave mirrors.
Claim 23
Dependent Claim
12 words
The optical system of claim 20 wherein said folding mirror is planar.
Claim 24
Dependent Claim
16 words
The optical system of claim 20, and further comprising an aperture stop proximate said folding mirror.
Claim 25
Dependent Claim
24 words
The optical system of claim 22 wherein said aperture stop is defined by a folding mirror located between said first and second concave mirrors.
Claim 26
Dependent Claim
23 words
The optical system of claim 16 wherein all elements in said first lens group, and said second lens group are full diameter elements.
Claim 27
Dependent Claim
34 words
The optical system of claim 16, wherein all the lens elements are centered on a common optical axis and all curved mirror elements have their centers of curvature centered on the common optical axis.
Claim 28
Dependent Claim
28 words
The optical system of claim 16 wherein said second mirror group comprises first and second concave mirrors and a convex mirror between said first and second concave mirrors.
Claim 29
Dependent Claim
19 words
The optical system of claim 16 wherein said second mirror group comprises a concave mirror and a convex mirror.
Claim 30
Dependent Claim
23 words
The optical system of claim 16, and further comprising a folding mirror located between said first lens group and said second mirror group.
Claim 31
Dependent Claim
20 words
The optical system of claim 16, wherein the optical system has a numerical aperture greater than or equal to 0.45.
Claim 32
Dependent Claim
130 words
A catadioptric reduction projection optical system for producing a reduced image of an object, comprising, in a light path sequence from the object: a first mirror group including first and second concave mirrors and a folding mirror located between said first and second concave mirrors; a first lens group consisting entirely of full diameter elements; said first mirror group and said first lens group forming an intermediate image of reduced size at an intermediate image region; a second mirror group including first and second concave mirrors and a convex mirror between said first and second concave mirrors; and a second lens group consisting entirely of full diameter elements; said second mirror group and said second lens group forming a final image of further reduced size at a final image plane.
Claim 33
Dependent Claim
130 words
A catadioptric reduction projection optical system for producing a reduced image of an object, comprising, in a light path sequence from the object: a first mirror group including first and second concave mirrors and a folding mirror located between said first and second concave mirrors; a first lens group consisting entirely of full diameter elements; said first mirror group and said first lens group forming an intermediate image of reduced size at an intermediate image region; a second mirror group including first and second concave mirrors and a convex mirror between said first and second concave mirrors; and a second lens group consisting entirely of full diameter elements; said second mirror group and said second lens group forming a final image of further reduced size at a final image plane.
Claim 34
Dependent Claim
12 words
The optical system of claim 30 wherein said folding mirror is planar.
Claim 35
Dependent Claim
20 words
The optical system of claim 30 wherein: said first lens group is negative; and said second lens group is positive.
Claim 36
Dependent Claim
16 words
The optical system of claim 30, and further comprising an aperture stop proximate said folding mirror.
Claim 37
Dependent Claim
16 words
The optical system of claim 33 wherein said aperture stop is defined by said folding mirror.
Claim 38
Dependent Claim
34 words
The optical system of claim 30, wherein: all the lens elements are centered on a common optical axis; and all curved mirror elements have their centers of curvature centered on the common optical axis.
Claim 39
Dependent Claim
23 words
The optical system of claim 30, and further comprising a folding mirror located between said first lens group and said second mirror group.
Claim 40
Dependent Claim
20 words
The optical system of claim 30, wherein the optical system has a numerical aperture greater than or equal to 0.45.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-05-07 | 1999-11-06 | 2000-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-05-07 | 2003-11-06 | 2004-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-05-07 | 2007-11-06 | 2008-05-07 | $7700.00 | Window Closed / Lapsed |