Patent US5510289A successfully refreshed from Google Patents.
US5510289A
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Method for fabricating stack capacitor of semiconductor device
Assignee: SK Hynix Inc
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Filing: 1995-06-01
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Granted: 1996-04-23
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Expires: 2015-06-01
Abstract
Abstract A method for fabricating a stack capacitor to be used for a highly integrated semiconductor device such as a DRAM of 64 mega grade or greater. Using the characteristic that a selective oxide film is likely to be deposited only over an oxide film and a good step coverage characteristic of polysilicon film, the stack capacitor is fabricated to have wing structures of a right 90°-inverted U shape and a left 90°-inverted U shape respectively at opposite ends of its storage electrode. These wing structures result in an increase in the surface area of the storage electrode.
Inventors
- 👤 Yang K. Choi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:55
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10D; H10D1/00; H10D1/01; H10D1/041; H10D1/042; H10D1/60; H10D1/68; H10D1/692; H10D1/711; H10D1/714; H10D1/716
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
268 words
A method for fabricating a stack capacitor of a semiconductor device, comprising the steps of: forming a first oxide film for a planarization over a substrate, depositing a first nitride film over the first oxide film, and then forming a capacitor contact hole in the resulting structure obtained after the deposition of the first nitride film; depositing a doped, first polysilicon film over the entire exposed surface of the resulting structure obtained after the formation of the contact hole such that the polysilicon film fills the contact hole, and then sequentially depositing a second nitride film and a second oxide film over the first polysilicon film; sequentially etching the second oxide film, the second nitride film and the first polysilicon film by a lithography process using a storage electrode mask, thereby forming a pattern constituted by the films left after the etching; thickly growing a selective, third oxide film over the second oxide film; depositing a doped, second polysilicon film over the entire exposed surface of the resulting structure obtained after the growth of the third oxide film; etching the second polysilicon film using a blanket dry etch, thereby forming patterns of the second polysilicon film respectively on side walls of the pattern of the first polysilicon film and second nitride film; removing the third oxide film and the second oxide film; removing the second nitride film and the first nitride film; and forming a dielectric film over a storage electrode constituted by the pattern of the first polysilicon film and the patterns of the second polysilicon film, and then forming a plate electrode over the dielectric film.
Claim 2
Independent Claim
268 words
A method for fabricating a stack capacitor of a semiconductor device, comprising the steps of: forming a first oxide film for a planarization over a substrate, depositing a first nitride film over the first oxide film, and then forming a capacitor contact hole in the resulting structure obtained after the deposition of the first nitride film; depositing a doped, first polysilicon film over the entire exposed surface of the resulting structure obtained after the formation of the contact hole such that the polysilicon film fills the contact hole, and then sequentially depositing a second nitride film and a second oxide film over the first polysilicon film; sequentially etching the second oxide film, the second nitride film and the first polysilicon film by a lithography process using a storage electrode mask, thereby forming a pattern constituted by the films left after the etching; thickly growing a selective, third oxide film over the second oxide film; depositing a doped, second polysilicon film over the entire exposed surface of the resulting structure obtained after the growth of the third oxide film; etching the second polysilicon film using a blanket dry etch, thereby forming patterns of the second polysilicon film respectively on side walls of the pattern of the first polysilicon film and second nitride film; removing the third oxide film and the second oxide film; removing the second nitride film and the first nitride film; and forming a dielectric film over a storage electrode constituted by the pattern of the first polysilicon film and the patterns of the second polysilicon film, and then forming a plate electrode over the dielectric film.
Claim 3
Dependent Claim
35 words
A method in accordance with claim 1, wherein the third oxide film is comprised of an O 3 -tetra ethyl ortho silicate film, a phospo silicate glass film or a tetra ethyl ortho silicate film.
Claim 4
Independent Claim
296 words
A method for fabricating a stack capacitor of a semiconductor device, comprising the steps of: forming a first oxide film for a planarization over a substrate, and then forming a capacitor contact hole in the resulting structure obtained after the formation of the first oxide film; depositing a doped, first polysilicon film over the entire exposed surface of the resulting structure obtained after the formation of the contact hole such that the polysilicon film fills the contact hole, and then depositing a second oxide film over the first polysilicon film; sequentially etching the second oxide film and the first polysilicon film by a lithography process using a storage electrode mask, thereby forming a pattern constituted by the films left after the etching; forming a photoresist film over a portion of the first oxide film exposed after the etching such that the photoresist film extends up to a selected height portion of the second oxide film; growing a selective, third oxide film over a portion of the second oxide film exposed after the formation of the photoresist film, and then removing the remaining photoresist film; depositing a doped, second polysilicon film over the entire exposed surface of the resulting structure obtained after the removal of the photoresist film, and then etching the second polysilicon film using a dry etch, thereby forming patterns of the second polysilicon film respectively on side walls of the pattern of the first polysilicon film and second oxide film; removing the third oxide film and the second oxide film and simultaneously forming undercuts beneath the patterns of the first and second polysilicon films; and forming a dielectric film over a storage electrode constituted by the patterns of the first and second polysilicon films, and then forming a plate electrode over the dielectric film.
Claim 5
Independent Claim
296 words
A method for fabricating a stack capacitor of a semiconductor device, comprising the steps of: forming a first oxide film for a planarization over a substrate, and then forming a capacitor contact hole in the resulting structure obtained after the formation of the first oxide film; depositing a doped, first polysilicon film over the entire exposed surface of the resulting structure obtained after the formation of the contact hole such that the polysilicon film fills the contact hole, and then depositing a second oxide film over the first polysilicon film; sequentially etching the second oxide film and the first polysilicon film by a lithography process using a storage electrode mask, thereby forming a pattern constituted by the films left after the etching; forming a photoresist film over a portion of the first oxide film exposed after the etching such that the photoresist film extends up to a selected height portion of the second oxide film; growing a selective, third oxide film over a portion of the second oxide film exposed after the formation of the photoresist film, and then removing the remaining photoresist film; depositing a doped, second polysilicon film over the entire exposed surface of the resulting structure obtained after the removal of the photoresist film, and then etching the second polysilicon film using a dry etch, thereby forming patterns of the second polysilicon film respectively on side walls of the pattern of the first polysilicon film and second oxide film; removing the third oxide film and the second oxide film and simultaneously forming undercuts beneath the patterns of the first and second polysilicon films; and forming a dielectric film over a storage electrode constituted by the patterns of the first and second polysilicon films, and then forming a plate electrode over the dielectric film.
Claim 6
Dependent Claim
35 words
A method in accordance with claim 3, wherein the third oxide film is comprised of an O 3 -tetra ethyl ortho silicate film, a phospo silicate glass film or a tetra ethyl ortho silicate film.
Claim 7
Dependent Claim
71 words
A method in accordance with claim 3, wherein the step of forming the photoresist film comprises the steps of: coating a photoresist film over the entire exposed surface of the resulting structure obtained after etching the second oxide film and the first polysilicon film; and blanket-etching the photoresist film to a selected depth such that the photoresist film is left up to the selected height portion of the second oxide film.
Claim 8
Dependent Claim
38 words
A method in accordance with claim 3, wherein the step of removing the third oxide film and the second oxide film and simultaneously forming the undercuts is carried out using a buffer oxide etchant or an HF solution.
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 1999-04-23 | 1999-10-23 | 2000-04-23 | $2000.00 | Window Closed / Lapsed |
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