Patent US6174785B1 successfully refreshed from Google Patents.
US5508531A
Expired / Lapsed
US
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Thin film transistor (TFT) and method of manufacturing thereof
Assignee: SK Hynix Inc
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Filing: 1995-02-22
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Granted: 1996-04-16
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Expires: 2015-02-22
Abstract
Abstract There is provided a TFT having a trench surrounding gate structure that is capable of decreasing the leakage current generated during the Off-State of the TFT by securing enough channel length despite the smallness of the area, increasing the driving current by securing a sufficient cross-sectional area of an inverted channel during the On-State of the TFT, and improving the resolution of the LCD by reducing the space occupied by the TFT in the panel during the manufacturing of the LCD.
Inventors
- 👤 Hyoung C. Ha
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 22:34
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; H10D30/6757; H10D30/01; H10D30/021; H10D30/031; H10D30/0312; H10D30/0314; H10D30/0321; H10D30/6704; H10D30/6713; H10D30/6729; H10D30/673; H10D30/6733; H10D30/6735; H10D30/674; H10D30/6741; H10D30/6743; H10D30/6745; H10D64/00; H10D64/20; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D64/512; H10D64/513
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
170 words
A thin film transistor having a trench surrounding gate structure comprising: a first trench formed in a first oxide layer, said first trench having a bottom and sides; a first gate on the surface of said first trench bottom and sides, said first gate forming a second trench having a bottom and sides; a first gate oxide layer on the surface of said second trench bottom and sides, said first gate oxide layer forming a third trench having a bottom and sides; a channel on the surface of said third trench bottom and sides, said channel forming a fourth trench having a bottom and sides; a second gate oxide layer on the surface of said fourth trench bottom and sides, said second gate oxide layer forming a fifth trench having a bottom and sides; a second gate on the surface of said fifth trench bottom and sides, said second gate being electrically connected to said first gate; and a source and a drain formed at respective terminals of said channel.
Claim 2
Dependent Claim
170 words
A thin film transistor having a trench surrounding gate structure comprising: a first trench formed in a first oxide layer, said first trench having a bottom and sides; a first gate on the surface of said first trench bottom and sides, said first gate forming a second trench having a bottom and sides; a first gate oxide layer on the surface of said second trench bottom and sides, said first gate oxide layer forming a third trench having a bottom and sides; a channel on the surface of said third trench bottom and sides, said channel forming a fourth trench having a bottom and sides; a second gate oxide layer on the surface of said fourth trench bottom and sides, said second gate oxide layer forming a fifth trench having a bottom and sides; a second gate on the surface of said fifth trench bottom and sides, said second gate being electrically connected to said first gate; and a source and a drain formed at respective terminals of said channel.
Claim 3
Dependent Claim
21 words
The Thin Film Transistor having a trench surrounding gate structure of claim 1, wherein said Thin Film Transistor gate comprises polysilicon.
Claim 4
Dependent Claim
23 words
The Thin Film Transistor having a trench surrounding gate structure of claim 1, wherein said Thin Film Transistor channel comprises polysilicon or amorphous.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-04-16 | 1999-10-16 | 2000-04-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-16 | 2003-10-16 | 2004-04-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-16 | 2007-10-16 | 2008-04-16 | $7700.00 | Window Closed / Lapsed |