US5500073A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Real time measurement of etch rate during a chemical etching process
Assignee: GlobalFoundries Inc
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Filing: 1995-05-08
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Granted: 1996-03-19
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Expires: 2015-05-08
Abstract
Abstract A contactless method and apparatus for real-time in-situ monitoring of a chemical etching process during etching of at least one wafer in a wet chemical etchant bath are disclosed. The method comprises the steps of providing two conductive electrodes in the wet chemical bath, wherein the two electrodes are proximate to but not in contact with a wafer; monitoring an electrical characteristic between the two electrodes as a function of time in the etchant bath of the at least one wafer, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process; and recording a plurality of values of the electrical characteristic as a function of time during etching. From the plurality of recorded values and corresponding times, instantaneous etch rates, average etch rates, and etching end points may be determined. Such a method and the apparatus therefor are particularly useful in a wet chemical etch station.
Inventors
- 👤 Steven G. Barbee
- 👤 Tony F. Heinz
- 👤 Yiping Hsiao
- 👤 Leping Li
- 👤 Eugene H. Ratzlaff
- 👤 Justin W. Wong
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:33
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; G; G01; G01N; G01N29/00; G01N29/34; G01N29/348; G01N29/36; G01N29/42; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/3021; G03F7/3028; H; H10; H10P; H10P74/00; H10P74/23; H10P74/238; G01N2291/00; G01N2291/02; G01N2291/023; G01N2291/0231; G01N2291/26; G01N2291/269; G01N2291/2694
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
129 words
A contactless real-time in-situ chemical etch monitor for providing an indication of a condition of an etching process during etching of at least one wafer in a wet chemical etchant bath, said monitor comprising: a) two conductive electrodes; b) a means for positioning said two conductive electrodes inside the wet chemical etchant bath proximate to but not in contact with the at least one wafer; c) a means for monitoring an electrical characteristic between the two electrodes as a function of time in the etchant bath of the at least one wafer, wherein a change in the electrical characteristic is indicative of a state of the etching process; and d) a means for recording a plurality of values of said electrical characteristic as a function of time during etching.
Claim 2
Dependent Claim
129 words
A contactless real-time in-situ chemical etch monitor for providing an indication of a condition of an etching process during etching of at least one wafer in a wet chemical etchant bath, said monitor comprising: a) two conductive electrodes; b) a means for positioning said two conductive electrodes inside the wet chemical etchant bath proximate to but not in contact with the at least one wafer; c) a means for monitoring an electrical characteristic between the two electrodes as a function of time in the etchant bath of the at least one wafer, wherein a change in the electrical characteristic is indicative of a state of the etching process; and d) a means for recording a plurality of values of said electrical characteristic as a function of time during etching.
Claim 3
Dependent Claim
27 words
The monitor of claim 1, wherein the monitoring means comprises an impedance monitor and further wherein the change in the electrical characteristic comprises a change in impedance.
Claim 4
Dependent Claim
46 words
The monitor of claim 2, wherein the monitoring means comprises an impedance monitor and further wherein the change in the electrical characteristic comprises a change in a component of impedance, wherein said component is selected from the group consisting of admittance, reactance, resistance, capacitance, and inductance.
Claim 5
Dependent Claim
28 words
The monitor of claim 1, further comprising a means for determining an instantaneous etch rate in real time from at least two of the recorded plurality of values.
Claim 6
Dependent Claim
31 words
The monitor of claim 4, further comprising a means for controlling the etching process in response to the instantaneous etch rate, wherein the instantaneous etch rate is determined in real time.
Claim 7
Dependent Claim
28 words
The monitor of claim 4, further comprising a means for determining an average etch rate in real time from at least two of the recorded plurality of values.
Claim 8
Dependent Claim
31 words
The monitor of claim 6, further comprising a means for controlling the etching process in response to the average etch rate, wherein the average etch rate is determined in real time.
Claim 9
Dependent Claim
28 words
The monitor of claim 1, further comprising a means for determining an etching end point in real time from at least two of the recorded plurality of values.
Claim 10
Dependent Claim
31 words
The monitor of claim 8, further comprising a means for controlling the etching process in response to the determined etching end point, wherein the end point is determined in real time.
Claim 11
Dependent Claim
144 words
An etch station having contactless real-time in-situ control of an etching process during etching of at least one wafer in a wet chemical etchant bath, said etch station comprising: a) two conductive electrodes; b) a means for positioning said two conductive electrodes inside the wet chemical etchant bath proximate to but not in contact with the at least one wafer; c) a means for monitoring an electrical characteristic between the two electrodes as a function of time in the etchant bath of the at least one wafer, wherein a change in the electrical characteristic is indicative of a state of the etching process; d) a means for recording a plurality of values of said electrical characteristic as a function of time during etching; and e) a means for controlling the etching process in response to the monitoring of the change in the electrical characteristic.
Claim 12
Dependent Claim
144 words
An etch station having contactless real-time in-situ control of an etching process during etching of at least one wafer in a wet chemical etchant bath, said etch station comprising: a) two conductive electrodes; b) a means for positioning said two conductive electrodes inside the wet chemical etchant bath proximate to but not in contact with the at least one wafer; c) a means for monitoring an electrical characteristic between the two electrodes as a function of time in the etchant bath of the at least one wafer, wherein a change in the electrical characteristic is indicative of a state of the etching process; d) a means for recording a plurality of values of said electrical characteristic as a function of time during etching; and e) a means for controlling the etching process in response to the monitoring of the change in the electrical characteristic.
Claim 13
Dependent Claim
28 words
The etch station of claim 10, wherein the monitoring means comprises an impedance monitor and further wherein the change in the electrical characteristic comprises a change in impedance.
Claim 14
Dependent Claim
47 words
The etch station of claim 11, wherein the monitoring means comprises an impedance monitor and further wherein the change in the electrical characteristic comprises a change in a component of impedance, wherein said component is selected from the group consisting of admittance, reactance, resistance, capacitance, and inductance.
Claim 15
Dependent Claim
29 words
The etch station of claim 10, further comprising a means for determining an instantaneous etch rate in real time from at least two of the recorded plurality of values.
Claim 16
Dependent Claim
29 words
The etch station of claim 10, further comprising a means for determining an average etch rate in real time from at least two of the recorded plurality of values.
Claim 17
Dependent Claim
29 words
The etch station of claim 10, further comprising a means for determining an etching end point in real time from at least two of the recorded plurality of values.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-19 | 1999-09-18 | 2000-03-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-19 | 2003-09-18 | 2004-03-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-19 | 2007-09-18 | 2008-03-19 | $7700.00 | Window Closed / Lapsed |