US5338390A
Expired / Lapsed
US
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Contactless real-time in-situ monitoring of a chemical etching process
Assignee: GlobalFoundries Inc
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Filing: 1992-12-04
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Granted: 1994-08-16
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Expires: 2012-12-04
Abstract
Abstract A contactless method and apparatus for real-time in-situ monitoring of a chemical etching process for the etching of at least one wafer in a wet chemical etchant bath are disclosed. The method comprises the steps of providing at least two conductive electrodes in the wet chemical bath, said at least two electrodes being proximate to but not in contact with the at least one wafer; and monitoring an electrical characteristic between the at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process. Such a method and apparatus are particularly useful in a wet chemical etch station.
Inventors
- 👤 Steven G. Barbee
- 👤 Tony F. Heinz
- 👤 Leping Li
- 👤 Eugene H. Ratzlaff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:46
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; G; G01; G01N; G01N29/00; G01N29/34; G01N29/348; G01N29/36; G01N29/42; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/3021; G03F7/3028; H; H10; H10P; H10P74/00; H10P74/23; H10P74/238; G01N2291/00; G01N2291/02; G01N2291/023; G01N2291/0231; G01N2291/26; G01N2291/269; G01N2291/2694
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
102 words
A contactless method for real-time in-situ monitoring of a chemical etching process during etching of at least one wafer in a wet chemical etchant bath, said method comprising the steps of: a) providing two conductive electrodes in the wet chemical bath, the two electrodes being proximate to but not in contact with the at lest one wafer and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; and b) monitoring an impedance between the two electrodes, wherein a prescribed change in the impedance is indicative of a prescribed condition of the etching process.
Claim 2
Dependent Claim
102 words
A contactless method for real-time in-situ monitoring of a chemical etching process during etching of at least one wafer in a wet chemical etchant bath, said method comprising the steps of: a) providing two conductive electrodes in the wet chemical bath, the two electrodes being proximate to but not in contact with the at lest one wafer and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; and b) monitoring an impedance between the two electrodes, wherein a prescribed change in the impedance is indicative of a prescribed condition of the etching process.
Claim 3
Dependent Claim
113 words
A contactless method for real-time in-situ monitoring of a chemical etching process during etching of at least one wafer in a wet chemical etchant bath, said method comprising the steps of: a) providing at least two conductive electrodes in the wet chemical bath, the at least two electrodes being proximate to but not in contact with the at least one wafer; and b) monitoring an electrical characteristic between the at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process, wherein the monitoring of an electrical characteristic comprises monitoring impedance and further wherein the prescribed change comprises a prescribed change in impedance.
Claim 4
Dependent Claim
113 words
A contactless method for real-time in-situ monitoring of a chemical etching process during etching of at least one wafer in a wet chemical etchant bath, said method comprising the steps of: a) providing at least two conductive electrodes in the wet chemical bath, the at least two electrodes being proximate to but not in contact with the at least one wafer; and b) monitoring an electrical characteristic between the at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process, wherein the monitoring of an electrical characteristic comprises monitoring impedance and further wherein the prescribed change comprises a prescribed change in impedance.
Claim 5
Dependent Claim
17 words
The method of claim 1, wherein the prescribed condition in step b) comprises an etching end point.
Claim 6
Dependent Claim
119 words
A contactless method for real-time in-situ monitoring of a chemical etching process during etching of at least one wafer in a wet chemical etchant bath, said method comprising the steps of: a) providing at least two conductive electrodes in the wet chemical bath, the at least two electrodes being proximate to but not in contact with the at least one wafer, wherein the at least two electrodes comprise two electrodes and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; and b) monitoring an electrical characteristic between the at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process.
Claim 7
Dependent Claim
119 words
A contactless method for real-time in-situ monitoring of a chemical etching process during etching of at least one wafer in a wet chemical etchant bath, said method comprising the steps of: a) providing at least two conductive electrodes in the wet chemical bath, the at least two electrodes being proximate to but not in contact with the at least one wafer, wherein the at least two electrodes comprise two electrodes and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; and b) monitoring an electrical characteristic between the at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process.
Claim 8
Dependent Claim
129 words
A contactless real-time in-situ chemical etch monitor for providing an indication of a prescribed condition of an etching process during etching of at least one wafer in a wet chemical etchant bath, said monitor comprising: a) at lest two conductive electrodes, wherein said at least two electrodes comprise two electrodes; b) means for positioning said at least two conductive electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer and further wherein each of the electrodes is positioned on an opposite side of the at least on wafer; and c) means for monitoring an impedance between said at least two electrodes, wherein a prescribed change in the impedance is indicative of the prescribed condition of the etching process.
Claim 9
Dependent Claim
129 words
A contactless real-time in-situ chemical etch monitor for providing an indication of a prescribed condition of an etching process during etching of at least one wafer in a wet chemical etchant bath, said monitor comprising: a) at lest two conductive electrodes, wherein said at least two electrodes comprise two electrodes; b) means for positioning said at least two conductive electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer and further wherein each of the electrodes is positioned on an opposite side of the at least on wafer; and c) means for monitoring an impedance between said at least two electrodes, wherein a prescribed change in the impedance is indicative of the prescribed condition of the etching process.
Claim 10
Dependent Claim
125 words
A contactless real-time in-situ chemical etch monitor for providing an indication of a prescribed condition of an etching process during etching of at least one wafer in a wet chemical etchant bath, said monitor comprising: a) at least two conductive electrodes; b) means for positioning said at least two conductive electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer; and c) means for monitoring an electrical characteristic between said at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of the prescribed condition of the etching process, wherein said monitoring means comprises means for monitoring an impedance and further wherein the prescribed change comprises a prescribed change in impedance.
Claim 11
Dependent Claim
125 words
A contactless real-time in-situ chemical etch monitor for providing an indication of a prescribed condition of an etching process during etching of at least one wafer in a wet chemical etchant bath, said monitor comprising: a) at least two conductive electrodes; b) means for positioning said at least two conductive electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer; and c) means for monitoring an electrical characteristic between said at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of the prescribed condition of the etching process, wherein said monitoring means comprises means for monitoring an impedance and further wherein the prescribed change comprises a prescribed change in impedance.
Claim 12
Dependent Claim
130 words
A contactless real-time in-situ chemical etch monitor for providing an indication of a prescribed condition of an etching process during etching of at least one wafer in a wet chemical etchant bath, said monitor comprising: a) at least two conductive electrodes, wherein said at least two electrodes comprise two electrodes; b) means for positioning said at least two electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; and c) means for monitoring an electrical characteristic between said at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of the prescribed condition of the etching process.
Claim 13
Dependent Claim
130 words
A contactless real-time in-situ chemical etch monitor for providing an indication of a prescribed condition of an etching process during etching of at least one wafer in a wet chemical etchant bath, said monitor comprising: a) at least two conductive electrodes, wherein said at least two electrodes comprise two electrodes; b) means for positioning said at least two electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; and c) means for monitoring an electrical characteristic between said at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of the prescribed condition of the etching process.
Claim 14
Dependent Claim
125 words
A contactless method for real-time in-situ control of an etching process during etching of at least one wafer in an etch station, the etch station having a wet chemical etchant bath, said method comprising the steps of: a) providing two conductive electrodes in the wet chemical bath, the two electrodes being proximate to but not in contact with the at least one wafer, and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; b) monitoring an impedance between the two electrodes, wherein a prescribed change in the impedance is indicative of a prescribed condition of the etching process; and c) controlling the etching process in response to the monitoring of the prescribed change in the impedance.
Claim 15
Dependent Claim
125 words
A contactless method for real-time in-situ control of an etching process during etching of at least one wafer in an etch station, the etch station having a wet chemical etchant bath, said method comprising the steps of: a) providing two conductive electrodes in the wet chemical bath, the two electrodes being proximate to but not in contact with the at least one wafer, and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; b) monitoring an impedance between the two electrodes, wherein a prescribed change in the impedance is indicative of a prescribed condition of the etching process; and c) controlling the etching process in response to the monitoring of the prescribed change in the impedance.
Claim 16
Dependent Claim
136 words
A contactless method for real-time in-situ control of an etching process during etching of at least one wafer in an etch station, the etch station having a wet chemical etchant bath, said method comprising the steps of: a) providing at least two conductive electrodes in the wet chemical bath, the at least two electrodes being proximate to but not in contact with the at least one wafer; b) monitoring an electrical characteristic between the at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process, wherein monitoring of an electrical characteristic comprises monitoring impedance and further wherein the prescribed change comprises a prescribed change in impedance; and c) controlling the etching process in response to the monitoring of the prescribed change in the electrical characteristic.
Claim 17
Dependent Claim
136 words
A contactless method for real-time in-situ control of an etching process during etching of at least one wafer in an etch station, the etch station having a wet chemical etchant bath, said method comprising the steps of: a) providing at least two conductive electrodes in the wet chemical bath, the at least two electrodes being proximate to but not in contact with the at least one wafer; b) monitoring an electrical characteristic between the at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process, wherein monitoring of an electrical characteristic comprises monitoring impedance and further wherein the prescribed change comprises a prescribed change in impedance; and c) controlling the etching process in response to the monitoring of the prescribed change in the electrical characteristic.
Claim 18
Dependent Claim
17 words
The method of claim 8, wherein the prescribed condition in step b) comprises an etching end point.
Claim 19
Dependent Claim
143 words
A contactless method for real-time in-situ control of an etching process during etching of at least one wafer in an etch station, the etch station having a wet chemical etchant bath, said method comprising the steps of: a) providing at least two conductive electrodes in the wet chemical bath, the at least two electrodes being proximate to but not in contact with the at least one wafer, wherein the at least two electrodes comprise two electrodes and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; b) monitoring an electrical characteristic between the at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process; and c) controlling the etching process in response to the monitoring of the prescribed change in the electrical characteristic.
Claim 20
Dependent Claim
143 words
A contactless method for real-time in-situ control of an etching process during etching of at least one wafer in an etch station, the etch station having a wet chemical etchant bath, said method comprising the steps of: a) providing at least two conductive electrodes in the wet chemical bath, the at least two electrodes being proximate to but not in contact with the at least one wafer, wherein the at least two electrodes comprise two electrodes and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; b) monitoring an electrical characteristic between the at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process; and c) controlling the etching process in response to the monitoring of the prescribed change in the electrical characteristic.
Claim 21
Dependent Claim
142 words
An etch station having contactless real-time in-situ control of an etching process during etching of at least one wafer in a wet chemical etchant bath, said etch station comprising: a) at least two conductive electrodes, wherein said at least two electrodes comprise two electrodes; b) means for positioning said at least two conductive electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; c) means for monitoring an impedance between said at least two electrodes, wherein a prescribed change in the impedance is indicative of a prescribed condition of the etching process; and d) means for controlling the etching process in response to the monitoring of the prescribed change in the impedance.
Claim 22
Dependent Claim
142 words
An etch station having contactless real-time in-situ control of an etching process during etching of at least one wafer in a wet chemical etchant bath, said etch station comprising: a) at least two conductive electrodes, wherein said at least two electrodes comprise two electrodes; b) means for positioning said at least two conductive electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; c) means for monitoring an impedance between said at least two electrodes, wherein a prescribed change in the impedance is indicative of a prescribed condition of the etching process; and d) means for controlling the etching process in response to the monitoring of the prescribed change in the impedance.
Claim 23
Dependent Claim
139 words
An etch station having contactless real-time in-situ control of an etching process during etching of at least one wafer in a wet chemical etchant bath, said etch station comprising: a) at least two conductive electrodes; b) means for positioning said at least two conductive electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer; c) means for monitoring an electrical characteristic between said at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process, wherein said monitoring means comprises means for monitoring an impedance and further wherein the prescribed change comprises a prescribed change in impedance; and d) means for controlling the etching process in response to the monitoring of the prescribed change in the electrical characteristic.
Claim 24
Dependent Claim
139 words
An etch station having contactless real-time in-situ control of an etching process during etching of at least one wafer in a wet chemical etchant bath, said etch station comprising: a) at least two conductive electrodes; b) means for positioning said at least two conductive electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer; c) means for monitoring an electrical characteristic between said at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process, wherein said monitoring means comprises means for monitoring an impedance and further wherein the prescribed change comprises a prescribed change in impedance; and d) means for controlling the etching process in response to the monitoring of the prescribed change in the electrical characteristic.
Claim 25
Dependent Claim
145 words
An etch station having contactless real-time in-situ control of an etching process during etching of at least one wafer in a wet chemical etchant bath, said etch station comprising: a) at least tow conductive electrodes, wherein said at least two electrodes comprise two electrodes; b) means for positioning said at least two conductive electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; c) means for monitoring an electrical characteristic between said at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process; and d) means for controlling the etching process in response to the monitoring of the prescribed change in the electrical characteristic.
Claim 26
Dependent Claim
145 words
An etch station having contactless real-time in-situ control of an etching process during etching of at least one wafer in a wet chemical etchant bath, said etch station comprising: a) at least tow conductive electrodes, wherein said at least two electrodes comprise two electrodes; b) means for positioning said at least two conductive electrodes inside the wet chemical etchant bath to be proximate to but not in contact with the at least one wafer and further wherein each of the electrodes is positioned on an opposite side of the at least one wafer; c) means for monitoring an electrical characteristic between said at least two electrodes, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process; and d) means for controlling the etching process in response to the monitoring of the prescribed change in the electrical characteristic.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-08-15 | 1998-02-14 | 1998-08-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-15 | 2002-02-14 | 2002-08-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-15 | 2006-02-14 | 2006-08-16 | $7700.00 | Window Closed / Lapsed |