Patent US5499599A successfully refreshed from Google Patents.
US5499599A
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US
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Method for continuous control of composition and doping of pulsed laser deposited films by pressure control
Assignee: Lockheed Martin Energy Systems Inc
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Filing: 1994-08-11
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Granted: 1996-03-19
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Expires: 2014-08-11
Abstract
Abstract A method for growing a deposit upon a substrate of semiconductor material involves the utilization of pulsed laser deposition techniques within a low-pressure gas environment. The substrate and a target of a first material are positioned within a deposition chamber and a low-pressure gas atmosphere is developed within the chamber. The substrate is then heated, and the target is irradiated, so that atoms of the target material are ablated from the remainder of the target, while atoms of the gas simultaneously are adsorbed on the substrate/film surface. The ablated atoms build up upon the substrate, together with the adsorbed gas atoms to form the thin-film deposit on the substrate. By controlling the pressure of the gas of the chamber atmosphere, the composition of the formed deposit can be controlled, and films of continuously variable composition or doping can be grown from a single target of fixed composition.
Inventors
- 👤 Douglas H. Lowndes
- 👤 James W. McCamy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:53
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/0617; C23C14/0021; Y; Y10; Y10S; Y10S148/00; Y10S148/064; Y10S438/00; Y10S438/914; Y10S438/925
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
173 words
A method for growing a thin-film compound semiconductor deposit upon a substrate including the steps of: positioning a target and a substrate in a low-pressure gas atmosphere; heating the substrate to an elevated temperature so that a film can be grown and the gas of the atmosphere may dissociate to an atomic or smaller molecular level; irradiating the target with a laser so that the near-surface of the target is ablated from the remainder of the target and deposited upon the heated substrate, together with the atoms of the gas, in a thin-film deposit; and continuously controlling the accumulation of atoms of the gas upon the substrate during the laser irradiating step to thereby control the concentration of gas atoms within the thin-film deposit being built upon the substrate by controlling the pressure of the gas of the atmosphere throughout the laser irradiating step so that an adjustment in the pressure of the gas of the atmosphere effects a corresponding adjustment in the accumulation of the atoms of the gas upon the substrate.
Claim 2
Independent Claim
173 words
A method for growing a thin-film compound semiconductor deposit upon a substrate including the steps of: positioning a target and a substrate in a low-pressure gas atmosphere; heating the substrate to an elevated temperature so that a film can be grown and the gas of the atmosphere may dissociate to an atomic or smaller molecular level; irradiating the target with a laser so that the near-surface of the target is ablated from the remainder of the target and deposited upon the heated substrate, together with the atoms of the gas, in a thin-film deposit; and continuously controlling the accumulation of atoms of the gas upon the substrate during the laser irradiating step to thereby control the concentration of gas atoms within the thin-film deposit being built upon the substrate by controlling the pressure of the gas of the atmosphere throughout the laser irradiating step so that an adjustment in the pressure of the gas of the atmosphere effects a corresponding adjustment in the accumulation of the atoms of the gas upon the substrate.
Claim 3
Dependent Claim
31 words
The method as defined in claim 1 wherein the step of controlling includes a step of maintaining the pressure of the gas at a constant level throughout the laser irradiating step.
Claim 4
Dependent Claim
29 words
The method as defined in claim 1 wherein the step of controlling includes a step of varying the gas pressure between two pressure levels during the laser irradiating step.
Claim 5
Dependent Claim
36 words
The method as defined in claim 1 wherein the gas of the atmosphere includes dopant atoms so that the deposit of target and gas atoms upon the substrate includes at least some of the dopant atoms.
Claim 6
Independent Claim
229 words
A method for growing a thin-film compound semiconductor deposit upon a substrate wherein the deposit desired to be grown includes atoms of a first material and atoms of a second material, the method comprising the steps of: positioning a substrate and a target of a first material into a deposition chamber; producing within the deposition chamber a low vacuum and then introducing into the deposition chamber a gas including the second material so that the chamber contains a low pressure atmosphere of the gas; heating the substrate so that a film with the desired properties can be grown and the gas of the atmosphere may dissociate to an atomic or molecular level; irradiating the target with a laser so that atoms of the first material are ablated from the remainder of the target and deposited upon the heated substrate together with the atoms of the gas in a thin-film deposit; and continuously controlling the accumulation of atoms of the gas upon the substrate throughout the laser irradiating step to thereby control the concentration of gas atoms within the thin-film deposit being built upon the substrate by controlling the pressure of the gas of the atmosphere throughout the laser irradiating step so that an adjustment in the pressure of the gas of the atmosphere effects a corresponding adjustment in the accumulation of the atoms of the gas upon the substrate.
Claim 7
Independent Claim
229 words
A method for growing a thin-film compound semiconductor deposit upon a substrate wherein the deposit desired to be grown includes atoms of a first material and atoms of a second material, the method comprising the steps of: positioning a substrate and a target of a first material into a deposition chamber; producing within the deposition chamber a low vacuum and then introducing into the deposition chamber a gas including the second material so that the chamber contains a low pressure atmosphere of the gas; heating the substrate so that a film with the desired properties can be grown and the gas of the atmosphere may dissociate to an atomic or molecular level; irradiating the target with a laser so that atoms of the first material are ablated from the remainder of the target and deposited upon the heated substrate together with the atoms of the gas in a thin-film deposit; and continuously controlling the accumulation of atoms of the gas upon the substrate throughout the laser irradiating step to thereby control the concentration of gas atoms within the thin-film deposit being built upon the substrate by controlling the pressure of the gas of the atmosphere throughout the laser irradiating step so that an adjustment in the pressure of the gas of the atmosphere effects a corresponding adjustment in the accumulation of the atoms of the gas upon the substrate.
Claim 8
Dependent Claim
43 words
The method as defined in claim 5 wherein the step of controlling includes a step of maintaining the pressure of the gas at a constant level throughout the laser irradiating step so that adjacent layers of the deposit include substantially the same composition.
Claim 9
Dependent Claim
40 words
The method as defined in claim 5 wherein the step of controlling includes a step of varying the gas pressure between two pressure levels during the laser irradiating step so that adjacent layers of the deposit are of different composition.
Claim 10
Dependent Claim
36 words
The method as defined in claim 5 wherein the gas of the atmosphere includes dopant atoms so that the deposit of target and gas atoms upon the substrate includes at least some of the dopant atoms.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-03-19 | 1999-09-18 | 2000-03-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-03-19 | 2003-09-18 | 2004-03-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-03-19 | 2007-09-18 | 2008-03-19 | $7700.00 | Window Closed / Lapsed |