Patent US5498580A successfully refreshed from Google Patents.
US5498580A
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Ceramic substrate and a method for producing the same
Assignee: Murata Manufacturing Co Ltd
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Filing: 1994-03-29
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Granted: 1996-03-12
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Expires: 2014-03-29
Abstract
Abstract The ceramic substrate comprising a glass and a crystal is characterized by the glass comprising a MgO-Al2O3-SiO2-B2O3-R2 O-base glass(R:alkali metal) and containing a 2MgO.2Al2O3.5SiO2 crystal (cordierire) as the crystal. Due to the composition, the softening point of the glass becomes less than 720 DEG C. and the porosity decreases, so that the substrate can be dense. As a result, the coefficient of thermal expansion thereof can be close to silicon, the specific inductive capacity thereof can be small and the substrate can be excellent in transverse strength, moisture resistance, water resistance, etc. And, due to the lowered softening point, a ceramic substrate having the above characteristics can be produced even by sintering at between 800 DEG C. and 1000 DEG C., and ceramic substrate having an inner circuit interconnection made of Ag or Cu, etc. can be produced.
Inventors
- 👤 Yoshiaki Yamade
- 👤 Yoichi Moriya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 16:58
CPC Classifications
C; C03; C03C; C03C10/00; C03C10/0036; C03C10/0045; C03C14/00; C03C14/004; C03C2214/00; C03C2214/20
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
91 words
A ceramic substrate, comprising a crystallized MgO--Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass (R:alkali metal) containing 2MgO.2Al 2 O 3 .5SiO 2 crystal, the ceramic substrate being obtained by sintering a mixture of glass powder and a crystal grain filler of Al 2 O 3 at a temperature of more than 800° C. to below 1000° C. wherein a proportion of the glass powder is 65-80 wt % and that of the crystal grain filler of Al 2 O 3 is 35-20 wt %.
Claim 2
Dependent Claim
91 words
A ceramic substrate, comprising a crystallized MgO--Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass (R:alkali metal) containing 2MgO.2Al 2 O 3 .5SiO 2 crystal, the ceramic substrate being obtained by sintering a mixture of glass powder and a crystal grain filler of Al 2 O 3 at a temperature of more than 800° C. to below 1000° C. wherein a proportion of the glass powder is 65-80 wt % and that of the crystal grain filler of Al 2 O 3 is 35-20 wt %.
Claim 3
Independent Claim
114 words
A method for producing a ceramic substrate comprising a crystallized MgO-- Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass (R:alkali metal) containing 2MgO.2Al 2 O 3 .5SiO 2 crystal, the method comprising the steps of: mixing a glass powder comprising MgO, Al 2 O 3 , SiO 2 , B 2 O 3 , and R 2 O(R:alkali metal) with a crystal grain filler of Al 2 O 3 wherein a proportion of glass powder is 65-80 wt % and that of crystal grain filler of Al 2 O 3 is 35-20 wt %; and sintering at a temperature of more than 800° C. to below 1000° C.
Claim 4
Independent Claim
114 words
A method for producing a ceramic substrate comprising a crystallized MgO-- Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass (R:alkali metal) containing 2MgO.2Al 2 O 3 .5SiO 2 crystal, the method comprising the steps of: mixing a glass powder comprising MgO, Al 2 O 3 , SiO 2 , B 2 O 3 , and R 2 O(R:alkali metal) with a crystal grain filler of Al 2 O 3 wherein a proportion of glass powder is 65-80 wt % and that of crystal grain filler of Al 2 O 3 is 35-20 wt %; and sintering at a temperature of more than 800° C. to below 1000° C.
Claim 5
Dependent Claim
49 words
A method according to claim 2, wherein the glass powder consists of MgO of 10-30 wt %, Al 2 O 3 of 5-20 wt %, SiO 2 of 40-55 wt %, B 2 O 3 of 10-20 wt % and R 2 O of less than 5 wt %.
Claim 6
Dependent Claim
47 words
A method according to claim 2, wherein the glass powder consists of MgO of 10-20 wt %, Al 2 O 3 of 10-20 wt %, SiO 2 of 40-55 wt %, B 2 O 3 of 10-20 wt % and R 2 O of 1-5 wt %.
Claim 7
Dependent Claim
147 words
A ceramic substrate, comprising a crystallized MgO--Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass(R:alkali metal) containing 2MgO.2Al 2 O 3 .5SiO 2 crystal, the ceramic substrate being obtained by sintering a mixture of glass powder and a crystal grain filler containing 2MgO.2Al 2 O 3 .5SiO 2 filler or 2MgO.2Al 2 O 3 .5SiO 2 filler and Al 2 O 3 filler at a temperature of more than 850° C. to below 1000° C., and wherein a 2MgO.2Al 2 O 3 .5SiO 2 crystal grows from the surface of the 2MgO.2Al 2 O 3 .5SiO 2 filler, or the surfaces of the 2MgO.2Al 2 O 3 .5SiO 2 filler and the Al 2 O 3 filler, wherein a proportion of alumina is 0-30 wt % and that of 2MgO.2Al 2 O 3 .5SiO 2 filler is 1 to 20 wt %.
Claim 8
Dependent Claim
147 words
A ceramic substrate, comprising a crystallized MgO--Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass(R:alkali metal) containing 2MgO.2Al 2 O 3 .5SiO 2 crystal, the ceramic substrate being obtained by sintering a mixture of glass powder and a crystal grain filler containing 2MgO.2Al 2 O 3 .5SiO 2 filler or 2MgO.2Al 2 O 3 .5SiO 2 filler and Al 2 O 3 filler at a temperature of more than 850° C. to below 1000° C., and wherein a 2MgO.2Al 2 O 3 .5SiO 2 crystal grows from the surface of the 2MgO.2Al 2 O 3 .5SiO 2 filler, or the surfaces of the 2MgO.2Al 2 O 3 .5SiO 2 filler and the Al 2 O 3 filler, wherein a proportion of alumina is 0-30 wt % and that of 2MgO.2Al 2 O 3 .5SiO 2 filler is 1 to 20 wt %.
Claim 9
Independent Claim
172 words
A method for producing a ceramic substrate comprising a crystallized MgO--Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass(R:alkali metal) containing 2MgO.2Al 2 O 3 .5SiO 2 crystal, the method comprising the steps of mixing a glass powder comprising MgO, Al 2 O 3 , SiO 2 , B 2 O 3 and R 2 O(R:alkali metal) with a crystal grain filler of 2MgO.2Al 2 O 3 .5SiO 2 , or a crystal grain filler of 2MgO.2Al 2 O 3 .5SiO 2 and a crystal grain filler of Al 2 O 3 , and sintering at a temperature of more than 850° C. to below 1000° C., so as to grow a 2MgO.2Al 2 O 3 .5SiO 2 crystal from the surface of 2MgO.2Al 2 O 3 .5SiO 2 filler, or the surfaces of both 2MgO.2Al 2 O 3 .5SiO 2 filler and Al 2 O 3 filler, wherein a proportion of alumina is 0-30 wt % and that of crystal grain filler is 1-20 wt %.
Claim 10
Independent Claim
172 words
A method for producing a ceramic substrate comprising a crystallized MgO--Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass(R:alkali metal) containing 2MgO.2Al 2 O 3 .5SiO 2 crystal, the method comprising the steps of mixing a glass powder comprising MgO, Al 2 O 3 , SiO 2 , B 2 O 3 and R 2 O(R:alkali metal) with a crystal grain filler of 2MgO.2Al 2 O 3 .5SiO 2 , or a crystal grain filler of 2MgO.2Al 2 O 3 .5SiO 2 and a crystal grain filler of Al 2 O 3 , and sintering at a temperature of more than 850° C. to below 1000° C., so as to grow a 2MgO.2Al 2 O 3 .5SiO 2 crystal from the surface of 2MgO.2Al 2 O 3 .5SiO 2 filler, or the surfaces of both 2MgO.2Al 2 O 3 .5SiO 2 filler and Al 2 O 3 filler, wherein a proportion of alumina is 0-30 wt % and that of crystal grain filler is 1-20 wt %.
Claim 11
Dependent Claim
51 words
A method according to claim 6, wherein the composition of glass powder consists of MgO of 10-30 wt %, Al 2 O 3 of 5-20 wt %, SiO 2 of 40-55 wt %, B 2 O 3 of 10-20 wt % and R 2 O of less than 5 wt %.
Claim 12
Dependent Claim
105 words
A ceramic substrate comprising a crystallized MgO--Al 2 O 3 --SiO--B 2 O 3 --R 2 O-base glass(R:alkali metal) containing a 2MgO.2Al 2 O 3 .5SiO 2 crystal and a SiO 2 glass and/or a SiO 2 crystal, the ceramic substrate being obtained by sintering a mixture of 60-98 wt % of glass powder and a crystal grain filler containing 1-20 wt % of 2MgO.2Al 2 O 3 .5SiO 2 crystal powder and 1 wt % to below 40 wt % of a SiO 2 glass powder and/or a SiO 2 crystal powder at a temperature of more than 850° C. to below 1000° C.
Claim 13
Dependent Claim
105 words
A ceramic substrate comprising a crystallized MgO--Al 2 O 3 --SiO--B 2 O 3 --R 2 O-base glass(R:alkali metal) containing a 2MgO.2Al 2 O 3 .5SiO 2 crystal and a SiO 2 glass and/or a SiO 2 crystal, the ceramic substrate being obtained by sintering a mixture of 60-98 wt % of glass powder and a crystal grain filler containing 1-20 wt % of 2MgO.2Al 2 O 3 .5SiO 2 crystal powder and 1 wt % to below 40 wt % of a SiO 2 glass powder and/or a SiO 2 crystal powder at a temperature of more than 850° C. to below 1000° C.
Claim 14
Independent Claim
121 words
A method for producing a ceramic substrate comprising a crystallized MgO--Al 2 O 3 --SiO--B 2 O 3 --R 2 O-base glass(R:alkali metal) containing a 2MgO.2Al 2 O 3 .5SiO 2 crystal and a SiO 2 glass and/or a SiO 2 crystal, the method comprising the steps of mixing a powder comprising 60-98wt % of MgO, Al 2 O 3 , SiO 2 , B 2 O 3 and R 2 O glass(R:alkali metal), 1-20wt % of a 2MgO.2Al 2 O 3 .5SiO 2 crystal powder and 1wt % to below 40 wt % of a SiO 2 glass powder and/or a SiO 2 crystal powder, and then, sintering at a temperature of more than 850° C. to below 1000° C.
Claim 15
Independent Claim
121 words
A method for producing a ceramic substrate comprising a crystallized MgO--Al 2 O 3 --SiO--B 2 O 3 --R 2 O-base glass(R:alkali metal) containing a 2MgO.2Al 2 O 3 .5SiO 2 crystal and a SiO 2 glass and/or a SiO 2 crystal, the method comprising the steps of mixing a powder comprising 60-98wt % of MgO, Al 2 O 3 , SiO 2 , B 2 O 3 and R 2 O glass(R:alkali metal), 1-20wt % of a 2MgO.2Al 2 O 3 .5SiO 2 crystal powder and 1wt % to below 40 wt % of a SiO 2 glass powder and/or a SiO 2 crystal powder, and then, sintering at a temperature of more than 850° C. to below 1000° C.
Claim 16
Dependent Claim
69 words
A method according to claim 9, wherein the powder comprising MgO, Al 2 O 3 , SiO 2 , B 2 O 3 and R 2 O comprises MgO of 10-30 wt % Al 2 O 3 of 5-20 wt % SiO 2 of 40-55 wt %, B 2 O 3 of 10-20 wt % and R 2 O oxide (R 2 O) of 0<R 2 O≦5 wt %.
Claim 17
Dependent Claim
27 words
A ceramic substrate according to claim 8, wherein the mixture further comprises a filler containing Al 2 O 3 and/or 3Al 2 O 3 .2SiO 2 .
Claim 18
Dependent Claim
49 words
A method for producing the ceramic substrate according to claim 9, further comprising the steps of adding a Al 2 O 3 crystal powder and/or a 3Al 2 O 3 .2SiO 2 crystal powder, mixing and sintering at a temperature of more than 850° C. to below 1000° C.
Claim 19
Dependent Claim
78 words
A method according to claim 12, wherein the mixing ratio of glass powder is 60-98 wt %, that of 2MgO .2Al 2 O 3 .5SiO 2 crystal powder is 0.1-20 wt %, that of SiO 2 glass powder and/or SiO 2 crystal powder is more than 1 wt % to below 40 wt % and that of Al 2 O 3 crystal powder and/or 3Al 2 O 3 .2SiO 2 crystal powder is up to ≦40 wt %.
Claim 20
Dependent Claim
75 words
A ceramic substrate comprising a glass and a crystal, which contains a MgO--Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass(R:alkali metal) as the glass and a 2MgO .2Al 2 O 3 . 5SiO 2 crystal as the crystal, and wherein a 2MgO .2Al 2 O 3 .5SiO 2 crystal grows from the surfaces of 2MgO.2Al 2 O 3 .5SiO 2 filler and 3Al 2 O 3 .2SiO 2 filler.
Claim 21
Dependent Claim
75 words
A ceramic substrate comprising a glass and a crystal, which contains a MgO--Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass(R:alkali metal) as the glass and a 2MgO .2Al 2 O 3 . 5SiO 2 crystal as the crystal, and wherein a 2MgO .2Al 2 O 3 .5SiO 2 crystal grows from the surfaces of 2MgO.2Al 2 O 3 .5SiO 2 filler and 3Al 2 O 3 .2SiO 2 filler.
Claim 22
Independent Claim
153 words
A method for producing a ceramic substrate comprising a crystallized MgO--Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass(R:alkali metal) containing 2MgO.2Al 2 O 3 .5SiO 2 crystal, wherein a glass powder of 94.9-50.0 wt % comprising MgO of 10-20 wt %, Al 2 O 3 of 10-20 wt %, SiO 2 of 40-55 wt %, B 2 O 3 of 10-20 wt % and R 2 O(R:alkali metal) of 0.5-5 wt %, 2MgO.2Al 2 O 3 .5SiO 2 crystal grain filler of 0.1-20 wt % and 3Al 2 O 3 .2SiO 2 crystal grain filler of 5-30 wt % are mixed and sintered at a temperature of more than 850° C. to 1000° C., so as to grow a 2MgO.2Al 2 O 3 .5SiO 2 crystal from the surfaces of the 2MgO.2Al 2 O 3 .5SiO 2 filler and the 3Al 2 O 3 .2SiO 2 filler.
Claim 23
Independent Claim
153 words
A method for producing a ceramic substrate comprising a crystallized MgO--Al 2 O 3 --SiO 2 --B 2 O 3 --R 2 O-base glass(R:alkali metal) containing 2MgO.2Al 2 O 3 .5SiO 2 crystal, wherein a glass powder of 94.9-50.0 wt % comprising MgO of 10-20 wt %, Al 2 O 3 of 10-20 wt %, SiO 2 of 40-55 wt %, B 2 O 3 of 10-20 wt % and R 2 O(R:alkali metal) of 0.5-5 wt %, 2MgO.2Al 2 O 3 .5SiO 2 crystal grain filler of 0.1-20 wt % and 3Al 2 O 3 .2SiO 2 crystal grain filler of 5-30 wt % are mixed and sintered at a temperature of more than 850° C. to 1000° C., so as to grow a 2MgO.2Al 2 O 3 .5SiO 2 crystal from the surfaces of the 2MgO.2Al 2 O 3 .5SiO 2 filler and the 3Al 2 O 3 .2SiO 2 filler.
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