US5494843A
Expired / Lapsed
US
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Method for forming MOSFET devices
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1995-06-28
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Granted: 1996-02-27
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Expires: 2015-06-28
Abstract
Abstract A method for fabricating CMOS chips, using a SRAM cell composed of, both NFET and PFET devices, or only NFETs, as well as incorporating NFET and PFET peripheral devices, is described. This process features an NFET, used in the SRAM cell, where a lightly doped arsenic source and drain region is used to achieve maximum device performance, in terms of saturation current, as well as gate to diffusion overlap capacitance. However the NFET used for the peripheral device is fabricated using a lightly doped phosphorous source and drain region, to allow for more protection against the deleterious hot carrier injection phenomena.
Inventors
- 👤 Jenn-Ming Huang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 21:30
CPC Classifications
H; H10; H10B; H10B10/00; H10B10/12; H10B10/18; Y; Y10; Y10S; Y10S148/00; Y10S148/082
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
334 words
A method for forming MOSFET devices on semiconductor substrates, comprising the steps of: growing a screen oxide on said semiconductor substrate; ion implanting a first conductivity imparting dopant into a first specific area of said semiconductor substrate; ion implanting a second conductivity imparting dopant into a second specific area of said semiconductor substrate; forming field oxide regions in said semiconductor substrate, for isolation of device regions; ion implantation of a third conductivity imparting dopant into said semiconductor substrate, not covered by said field oxide regions; removal of said screen oxide from said semiconductor substrate, not covered by said field oxide regions; growing a gate oxide on surface of said semiconductor substrate, not covered by said field oxide regions; depositing a polysilicon layer on said gate oxide, and on said field oxide regions; ion implanting a fourth conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form polysilicon gate structures on said gate oxide; ion implanting a fifth conductivity imparting dopant into said device region, in an area of said second specific region of said semiconductor substrate, not covered by said polysilicon gate structure; annealing of said semiconductor substrate; ion implanting a sixth conductivity imparting dopant into said device region, in a different area of said second specific region of said semiconductor substrate, not covered by said polysilicon gate structure; ion implanting a seventh conductivity imparting dopant into said device region, in said first specific region of said semiconductor substrate, not covered by polysilicon gate structure; depositing a first insulator layer on surface of said semiconductor substrate; anisotropic etching to remove said first insulator layer to form insulator spacer on sidewalls of said polysilicon gate structure; ion implanting an eighth conductivity imparting dopant into said device region, in said second specific region of said semiconductor substrate, not covered by said polysilicon gate structure; and ion implanting a ninth conductivity imparting dopant into said device region, in said first specific region of said semiconductor substrate, not covered by said polysilicon gate structure.
Claim 2
Independent Claim
334 words
A method for forming MOSFET devices on semiconductor substrates, comprising the steps of: growing a screen oxide on said semiconductor substrate; ion implanting a first conductivity imparting dopant into a first specific area of said semiconductor substrate; ion implanting a second conductivity imparting dopant into a second specific area of said semiconductor substrate; forming field oxide regions in said semiconductor substrate, for isolation of device regions; ion implantation of a third conductivity imparting dopant into said semiconductor substrate, not covered by said field oxide regions; removal of said screen oxide from said semiconductor substrate, not covered by said field oxide regions; growing a gate oxide on surface of said semiconductor substrate, not covered by said field oxide regions; depositing a polysilicon layer on said gate oxide, and on said field oxide regions; ion implanting a fourth conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form polysilicon gate structures on said gate oxide; ion implanting a fifth conductivity imparting dopant into said device region, in an area of said second specific region of said semiconductor substrate, not covered by said polysilicon gate structure; annealing of said semiconductor substrate; ion implanting a sixth conductivity imparting dopant into said device region, in a different area of said second specific region of said semiconductor substrate, not covered by said polysilicon gate structure; ion implanting a seventh conductivity imparting dopant into said device region, in said first specific region of said semiconductor substrate, not covered by polysilicon gate structure; depositing a first insulator layer on surface of said semiconductor substrate; anisotropic etching to remove said first insulator layer to form insulator spacer on sidewalls of said polysilicon gate structure; ion implanting an eighth conductivity imparting dopant into said device region, in said second specific region of said semiconductor substrate, not covered by said polysilicon gate structure; and ion implanting a ninth conductivity imparting dopant into said device region, in said first specific region of said semiconductor substrate, not covered by said polysilicon gate structure.
Claim 3
Dependent Claim
36 words
The method of claim 1, wherein said MOSFET devices are designed as a static randon access memory, (SRAM), cell configuration, with P type and N type MOSFET cell devices, and N type of peripheral MOSFET devices.
Claim 4
Dependent Claim
26 words
The method of claim 1, wherein said MOSFET devices are designed as LOGIC/ASIC, (application specific integrated circuit), configurations, with P type and N type MOSFET devices.
Claim 5
Dependent Claim
33 words
The method of claim 1, wherein said first conductivity imparting dopant is phosphorous, ion implanted at an energy between about 100 to 200 Kev., at a dose between about 5E12 to 1E13 atoms/cm2.
Claim 6
Dependent Claim
33 words
The method of claim 1, wherein said second conductivity imparting dopant is boron, ion implanted at an energy between about 70 to 120 Kev., at a dose between about 5E12 to 1E13 atoms/cm2.
Claim 7
Dependent Claim
33 words
The method of claim 1, wherein said third conductivity imparting dopant is boron, ion implanted at an energy between about 20 to 80 Kev., at a dose between about 5E11 to 5E12 atoms/cm2.
Claim 8
Dependent Claim
33 words
The method of claim 1, wherein said third conductivity imparting dopant is BF2, ion implanted at an energy between about 20 to 80 Kev., at a dose between about 5E11 to 5E12 atoms/cm2.
Claim 9
Dependent Claim
29 words
The method of claim 1, wherein said gate oxide is grown at a temperature between about 800° to 1000° C., to a thickness between about 50 to 200 Angstroms.
Claim 10
Dependent Claim
32 words
The method of claim 1, wherein said polysilicon layer is deposited using LPCVD processing, at a temperature between about 580° to 650° C., to a thickness between about 1000 to 3000 Angstroms.
Claim 11
Dependent Claim
33 words
The method of claim 1, wherein said fifth conductivity imparting dopant is arsenic, ion implanted at an energy between about 30 to 50 Kev., at a dose between about 1E13 to 1E14 atoms/cm2.
Claim 12
Dependent Claim
32 words
The method of claim 1, wherein said anneal is performed at a temperature between about 850° to 950° C., in an nitrogen ambient, for a time between about 20 to 40 min.
Claim 13
Dependent Claim
33 words
The method of claim 1, wherein said sixth conductivity imparting dopant is phosphorous, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E13 to 1E14 atoms/cm2.
Claim 14
Dependent Claim
33 words
The method of claim 1, wherein said seventh conductivity imparting dopant is BF2, ion implanted at an energy between about 20 to 60 Kev., at a dose between about 8E12 to 1E14 atoms/cm2.
Claim 15
Dependent Claim
35 words
The method of claim 1, wherein said first insulator layer is silicon oxide, depositing using LPCVD processing, at a temperature between about 650° to 750° C., to a thickness between about 1000 to 3000 Angstroms.
Claim 16
Dependent Claim
33 words
The method of claim 1, wherein said eighth conductivity imparting dopant is arsenic, ion implanted at an energy between about 30 to 60 Kev., at a dose between about 2E15 to 5E15 atoms/cm2.
Claim 17
Dependent Claim
33 words
The method of claim 1, wherein said ninth conductivity imparting dopant is BF2, ion implanted at an energy between about 25 to 60 Kev., at a dose between about 2E15 to 5E15 atoms/cm2.
Claim 18
Independent Claim
423 words
A method for fabricating a CMOS chip on a semiconductor substrate, consisting of stactic random access memory, (SRAM), cells, with both P type and N type MOSFET devices, and peripheral N type MOSFET devices, comprising the steps of: growing a screen oxide on said semiconductor substrate; ion implanting a first conductuctivity imparting dopant into a first specific region of said semiconductor substrate, to form an N well region; ion implanting a second conductivity imparting dopant into a second specific region of said semiconductor substrate, to form a P well region; forming field oxide regions in said semiconductor substrate, for isolation of device region; ion implantation of a third conductivity imparting dopant into said semiconductor substrate, not covered by said field oxide regions; removal of said screen oxide from said semiconductor substrate, not covered by said field oxide regions; growing a gate oxide on surface of said semiconductor substrate, not covered by said field oxide regions; depositing a polysilicon layer on said gate oxide and on said field oxide regions; ion implanting a fourth conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form polysilicon gate structures on said gate oxide; ion implanting a fifth conductivity imparting dopant into said device region, in a specific area of said P well region to be used for said SRAM cell, to form N type lightly doped source and drain regions; annealing of said semiconductor substrate; ion implanting a sixth conductivity imparting dopant into said device region, in another specific area of said P well region to be used for said peripheral N type MOSFET devices, to form N type lightly doped source and drain region; ion implanting a seventh conductivity imparting dopant into said device region, in a specific area of N well region, to form P type lightly doped source and drain region; depositing a first insulator layer on surface of said semiconductor substrate; anisotropic etching to remove said first insulator layer to form insulator spacer on sidewalls of said polysilicon gate structure; ion implanting an eighth conductivity imparting dopant into said device region, in said specific area of said P well region to be used for said SRAM cell, and in another said specific area of said P well region, to be used for said peripheral N type MOSFET devices, to form heavily doped, N type source and drain region; and ion implanting a ninth conductivity imparting dopant into said device region, in said specific area of N well region, to form heavily doped P type source and drain region.
Claim 19
Independent Claim
423 words
A method for fabricating a CMOS chip on a semiconductor substrate, consisting of stactic random access memory, (SRAM), cells, with both P type and N type MOSFET devices, and peripheral N type MOSFET devices, comprising the steps of: growing a screen oxide on said semiconductor substrate; ion implanting a first conductuctivity imparting dopant into a first specific region of said semiconductor substrate, to form an N well region; ion implanting a second conductivity imparting dopant into a second specific region of said semiconductor substrate, to form a P well region; forming field oxide regions in said semiconductor substrate, for isolation of device region; ion implantation of a third conductivity imparting dopant into said semiconductor substrate, not covered by said field oxide regions; removal of said screen oxide from said semiconductor substrate, not covered by said field oxide regions; growing a gate oxide on surface of said semiconductor substrate, not covered by said field oxide regions; depositing a polysilicon layer on said gate oxide and on said field oxide regions; ion implanting a fourth conductivity imparting dopant into said polysilicon layer; patterning of said polysilicon layer to form polysilicon gate structures on said gate oxide; ion implanting a fifth conductivity imparting dopant into said device region, in a specific area of said P well region to be used for said SRAM cell, to form N type lightly doped source and drain regions; annealing of said semiconductor substrate; ion implanting a sixth conductivity imparting dopant into said device region, in another specific area of said P well region to be used for said peripheral N type MOSFET devices, to form N type lightly doped source and drain region; ion implanting a seventh conductivity imparting dopant into said device region, in a specific area of N well region, to form P type lightly doped source and drain region; depositing a first insulator layer on surface of said semiconductor substrate; anisotropic etching to remove said first insulator layer to form insulator spacer on sidewalls of said polysilicon gate structure; ion implanting an eighth conductivity imparting dopant into said device region, in said specific area of said P well region to be used for said SRAM cell, and in another said specific area of said P well region, to be used for said peripheral N type MOSFET devices, to form heavily doped, N type source and drain region; and ion implanting a ninth conductivity imparting dopant into said device region, in said specific area of N well region, to form heavily doped P type source and drain region.
Claim 20
Dependent Claim
39 words
The method of claim 17, wherein said first conductivity imparting dopant is phosphorous, ion implanted at an energy between about 100 to 200 Kev., at a dose between about 5E12 to 1E13 atoms/cm2, to form said N well region.
Claim 21
Dependent Claim
39 words
The method of claim 17, wherein said second conductivity imparting dopant is boron, ion implanted at an energy between about 70 to 120 Kev., at a dose between about 5E12 to 1E13 atoms/cm2, to form said P well region.
Claim 22
Dependent Claim
33 words
The method of claim 17, wherein said third conductivity imparting dopant is boron, ion implanted at an energy between about 20 to 80 Kev., at a dose between about 5E11 to 5E12 atoms/cm2.
Claim 23
Dependent Claim
33 words
The method of claim 17, wherein said third conductivity imparting dopant is BF2, ion implanted at an energy between about 20 to 80 Kev., at a dose between about 5E11 to 5E12 atoms/cm2.
Claim 24
Dependent Claim
29 words
The method of claim 17, wherein said gate oxide is grown at a temperature between about 800° to 1000° C., to a thickness between about 50 to 200 Angstroms.
Claim 25
Dependent Claim
32 words
The method of claim 17, wherein said polysilicon layer is deposited using LPCVD processing, at a temperature between about 580° to 650° C., to a thickness between about 1000 to 3000 Angstroms.
Claim 26
Dependent Claim
53 words
The method of claim 17, wherein said fifth conductivity imparting dopant is arsenic, ion implanted at an energy between about 30 to 50 Kev., at a dose between about 1E13 to 1E14 atoms/cm2, to form said N type, lightly doped source and drain regions, for said SRAM cell, in said P well region.
Claim 27
Dependent Claim
32 words
The method of claim 17, wherein said anneal is performed at a temperature between about 850° to 950° C., in an nitrogen ambient, for a time between about 20 to 40 min.
Claim 28
Dependent Claim
56 words
The method of claim 17, wherein said sixth conductivity imparting dopant is phosphorous, ion implanted at an energy between about 30 to 80 Kev., at a dose between about 1E13 to 1E14 atoms/cm2, to form said N type, lightly doped source and drain regions, for said peripheral N type MOSFET devices, in said P well region.
Claim 29
Dependent Claim
49 words
The method of claim 17, wherein said seventh conductivity imparting dopant is BF2, ion implanted at an energy between about 20 to 60 Kev., at a dose between about 8E12 to 1E14 atoms/cm2, to form said P type, lightly doped source and drain regions, in said N well region.
Claim 30
Dependent Claim
35 words
The method of claim 17, wherein said first insulator layer is silicon oxide, deposited using LPCVD processing, at a temperature between about 650° to 750° C., to a thickness between about 1000 to 3000 Angstroms.
Claim 31
Dependent Claim
61 words
The method of claim 17, wherein said eighth conductivity imparting dopant is arsenic, ion implanted at an energy between about 30 to 60 Kev., at a dose between about 2E15 to 5E15 atoms/cm2, to form said heavily doped, N type, source and drain region, for said SRAM cell, and for said peripheral N type MOSFET devices, in said P well region.
Claim 32
Dependent Claim
49 words
The method of claim 17, wherein said ninth conductivity imparting dopant is BF2, ion implanted at an energy between about 25 to 60 Kev., at a dose between about 2E15 to 5E15 atoms/cm2, to form said heavily doped, P type, source and drain regions, in said N well region.
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