US5494712A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming a plasma polymerized film
Assignee: Dow Chemical Co
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Filing: 1994-11-17
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Granted: 1996-02-27
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Expires: 2014-11-17
Abstract
Abstract A method of preparing a coated substrate is disclosed. The substrate is coated with a plasma generated polymer containing Si, O, C and H in specific atom ratio wherein the polymer also contains certain functional groups. A power density of about 10 6 to about 10 8 J/Kg is employed in the plasma polymerization process.
Inventors
- 👤 Ing-Feng Hu
- 👤 James C. Tou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 16:52
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45565; C23C16/22; C23C16/30; C23C16/45561; C23C16/50; C23C16/505; C23C16/509; C23C16/5096; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244; H01J37/3266
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
129 words
A method of forming a plasma polymerized organosilicone film on a surface of a substrate which comprises: a) providing the substrate within a a reaction zone of a reaction vessel, b) providing a vacuum within said reaction vessel ranging from about 10 -3 to about 1 Torr, c) forming a plasma of reaction gases from organosilicone monomer and excess oxygen while flowing said reaction gases essentially perpendicular to the surface of said substrate, and d) intensifying the plasma by magnetic confinement of at least 100 gauss to form a concentrated reaction plasma said magnetic confinement being positioned within said reaction zone at a point adjacent to and extending into said concentrated reaction plasma and, e) continuing said film formation to a thickness of about 2 to about 8 microns.
Claim 2
Independent Claim
129 words
A method of forming a plasma polymerized organosilicone film on a surface of a substrate which comprises: a) providing the substrate within a a reaction zone of a reaction vessel, b) providing a vacuum within said reaction vessel ranging from about 10 -3 to about 1 Torr, c) forming a plasma of reaction gases from organosilicone monomer and excess oxygen while flowing said reaction gases essentially perpendicular to the surface of said substrate, and d) intensifying the plasma by magnetic confinement of at least 100 gauss to form a concentrated reaction plasma said magnetic confinement being positioned within said reaction zone at a point adjacent to and extending into said concentrated reaction plasma and, e) continuing said film formation to a thickness of about 2 to about 8 microns.
Claim 3
Dependent Claim
22 words
The method of claim 1 wherein said organosilicone monomer is selected from the group consisting of silanes, siloxanes, silazanes or mixtures thereof.
Claim 4
Dependent Claim
21 words
The method of claim 1 wherein the organosilicone monomer is selected from the group consisting of tetramethyldisiloxane, hexamethyldisiloxane or mixture thereof.
Claim 5
Dependent Claim
21 words
The method of claim 1 wherein the organosilicone monomer is selected from the group consisting of hexamethylsilazane, tetramethylsiloxane or mixture thereof.
Claim 6
Dependent Claim
37 words
The method of claim 1 wherein the organosilicone monomer is selected from the group consisting of dimethoxydimethylsilane, methyltrimethoxysilane, tetramethoxysilane, ethyltrimethoxysilane, diethoxydimethylsilane, methyltriethoxysilane, octamethylcyclotetrasilane, triethoxyvinylsilane, tetraethoxysilane, dimethoxy-methylphenylsilane, phenyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-methacryloxy-propyltrimthoxysilane, diethoxymethylphenylsilane, tris(2-methoxyethoxy)vinylsilane, phenyltriethoxysilane, and dimethoxydiphenylsilane or mixtures thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-02-26 | 1999-08-28 | 2000-02-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-02-26 | 2003-08-28 | 2004-02-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-02-26 | 2007-08-28 | 2008-02-27 | $7700.00 | Window Closed / Lapsed |