US5493577A
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US
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Efficient semiconductor light-emitting device and method
Assignee: National Technology and Engineering Solutions of Sandia LLC
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Filing: 1994-12-21
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Granted: 1996-02-20
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Expires: 2014-12-21
Abstract
Abstract A semiconductor light-emitting device and method. The semiconductor light-emitting device is provided with at least one control layer or control region which includes an annular oxidized portion thereof to channel an injection current into the active region, and to provide a lateral refractive index profile for index guiding the light generated within the device. A periodic composition grading of at least one of the mirror stacks in the device provides a reduced operating voltage of the device. The semiconductor light-emitting device has a high efficiency for light generation, and may be formed either as a resonant-cavity light-emitting diode (RCLED) or as a vertical-cavity surface-emitting laser (VCSEL).
Inventors
- 👤 Kent D. Choquette
- 👤 Kevin L. Lear
- 👤 Richard P. Schneider, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 04:26
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/814; H10H20/8142; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/183; H01S5/18308; H01S5/18311; H01S5/18313; H01S2301/00; H01S2301/16; H01S2301/166; H01S5/18322; H01S5/1833; H01S5/18361; H01S5/20; H01S5/22; H01S5/2205; H01S5/30; H01S5/32; H01S5/3211; H01S5/3215; H10H20/816; H10H20/8162
Claims Analysis
Total Claims: 50
Claim 1
Independent Claim
115 words
A semiconductor light-emitting device comprising: (a) a substrate; (b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, at least one control layer proximate to the active region and including an oxidized portion therein, and a second mirror stack above the active region and having a second doping type and further having a composition different from the non-oxidized portion of the at least one control layer; (c) a mesa extending downward through the semiconductor layers at least to the control layer; and (d) an upper electrode above the second mirror stack.
Claim 2
Dependent Claim
115 words
A semiconductor light-emitting device comprising: (a) a substrate; (b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, at least one control layer proximate to the active region and including an oxidized portion therein, and a second mirror stack above the active region and having a second doping type and further having a composition different from the non-oxidized portion of the at least one control layer; (c) a mesa extending downward through the semiconductor layers at least to the control layer; and (d) an upper electrode above the second mirror stack.
Claim 3
Dependent Claim
21 words
The semiconductor light-emitting device of claim 1 in which the oxidized portion of the control layer comprises an oxide of aluminum.
Claim 4
Dependent Claim
16 words
The semiconductor light-emitting device of claim 1 in which the control layer comprises an aluminum alloy.
Claim 5
Dependent Claim
28 words
The semiconductor light-emitting device of claim 3 in which the aluminum alloy includes at least one element selected from the group consisting of As, Ga, In, and P.
Claim 6
Dependent Claim
20 words
The semiconductor light-emitting device of claim 3 in which the aluminum alloy is Al x Ga 1-x As with 0.8≦x≦1.
Claim 7
Dependent Claim
32 words
The semiconductor light-emitting device of claim 3 in which the aluminum alloy has an aluminum composition higher than any aluminum composition of any of the semiconductor layers of the second mirror stack.
Claim 8
Dependent Claim
23 words
The semiconductor light-emitting device of claim 1 in which at least one of the mirror stacks includes a periodic alloy composition grading therein.
Claim 9
Dependent Claim
21 words
The semiconductor light-emitting device of claim 1 in which the active region includes cladding layers surrounding at least one quantum-well layer.
Claim 10
Dependent Claim
32 words
The semiconductor light-emitting device of claim 8 in which the quantum-well layer is comprised of a semiconductor alloy selected from the group consisting of InGaAs, GaAs, AlGaAs, AlGalnP, InGaAsP, AlGaAsP, and InAlGaAs.
Claim 11
Dependent Claim
24 words
The semiconductor light-emitting device of claim 1 in which the oxidized portion of the control layer defines a current channel into the active region.
Claim 12
Dependent Claim
23 words
The semiconductor light-emitting device of claim 1 in which the control layer defines a lateral refractive index profile for index guiding the light.
Claim 13
Dependent Claim
17 words
The semiconductor light-emitting device of claim 1 including means for defining a polarization state for the light.
Claim 14
Dependent Claim
31 words
The semiconductor light-emitting device of claim 12 in which the means for defining a polarization state for the light is an asymmetric shape of the oxidized portion of the control layer.
Claim 15
Dependent Claim
17 words
The semiconductor light-emitting device of claim 1 including means for defining a lateral mode for the light.
Claim 16
Dependent Claim
31 words
The semiconductor light-emitting device of claim 14 in which the means for defining a lateral mode for the light is an asymmetric shape of the oxidized portion of the control layer.
Claim 17
Dependent Claim
36 words
The semiconductor light-emitting device of claim 1 in which a refractive index in the oxidized portion of the control layer is substantially different from the refractive index in a central oxide-free portion of the control layer.
Claim 18
Dependent Claim
37 words
The semiconductor light-emitting device of claim 16 in which the central oxide-free portion of the control layer has an effective optical thickness that is substantially equal to a multiple of one-quarter of the wavelength of the light.
Claim 19
Dependent Claim
36 words
The semiconductor light-emitting device of claim 16 in which the oxidized portion of the control layer has an effective optical thickness that is substantially equal to a multiple of one-half of the wavelength of the light.
Claim 20
Dependent Claim
55 words
The semiconductor light-emitting device of claim 16 in which a resonant optical cavity formed by the mirror stacks has a lower Q in an off-axis portion of the cavity which includes the oxidized portion of the control layer than the Q of an on-axis portion of the cavity which does not include the oxidized portion.
Claim 21
Dependent Claim
36 words
The semiconductor light-emitting device of claim 19 in which an electric field component of the light in the off-axis portion of the cavity has a field node near at least one quantum-well in the active region.
Claim 22
Dependent Claim
27 words
The semiconductor light-emitting device of claim 20 in which the field node reduces a spontaneous emission component of the light in the off-axis portion of the cavity.
Claim 23
Dependent Claim
65 words
The semiconductor light-emitting device of claim 1 in which a first cavity resonance in an on-axis portion of a resonant optical cavity formed by the mirror stacks which does not include the oxidized portion of the control layer has a wavelength that is substantially different from the wavelength of a second cavity resonance in an off-axis portion of the cavity that includes the oxidized portion.
Claim 24
Dependent Claim
148 words
A semiconductor light-emitting device comprising: (a) a substrate; (b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, and a second mirror stack having a second doping type above the active region, at least one of the mirror stacks including a control portion therein adjacent to the active region, the control portion having at least one oxidized layer with an aluminum composition higher than any aluminum composition of any of the other semiconductor layers in the mirror stack and having a lateral oxidation extent greater than any lateral oxidation extent of the other semiconductor layers in the mirror stack; (c) a mesa extending downward through the semiconductor layers at least to the control portion; and (d) an upper electrode above the second mirror stack.
Claim 25
Dependent Claim
148 words
A semiconductor light-emitting device comprising: (a) a substrate; (b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, and a second mirror stack having a second doping type above the active region, at least one of the mirror stacks including a control portion therein adjacent to the active region, the control portion having at least one oxidized layer with an aluminum composition higher than any aluminum composition of any of the other semiconductor layers in the mirror stack and having a lateral oxidation extent greater than any lateral oxidation extent of the other semiconductor layers in the mirror stack; (c) a mesa extending downward through the semiconductor layers at least to the control portion; and (d) an upper electrode above the second mirror stack.
Claim 26
Dependent Claim
21 words
The semiconductor light-emitting device of claim 23 in which the oxidized layer of the control portion comprises an oxide of aluminum.
Claim 27
Dependent Claim
16 words
The semiconductor light-emitting device of claim 23 in which the oxidized layer comprises an aluminum alloy.
Claim 28
Dependent Claim
28 words
The semiconductor light-emitting device of claim 25 in which the aluminum alloy includes at least one element selected from the group consisting of As, Ga, In, and P.
Claim 29
Dependent Claim
20 words
The semiconductor light-emitting device of claim 25 in which the aluminum alloy is Al x Ga 1-x As with 0.8≦x≦1.
Claim 30
Dependent Claim
32 words
The semiconductor light-emitting device of claim 25 in which the aluminum alloy has an aluminum composition higher than any aluminum composition of any of the semiconductor layers of the second mirror stack.
Claim 31
Dependent Claim
23 words
The semiconductor light-emitting device of claim 23 in which at least one of the mirror stacks includes a periodic alloy composition grading therein.
Claim 32
Dependent Claim
21 words
The semiconductor light-emitting device of claim 23 in which the active region includes cladding layers surrounding at least one quantum-well layer.
Claim 33
Dependent Claim
32 words
The semiconductor light-emitting device of claim 30 in which the quantum-well layer is comprised of a semiconductor alloy selected from the group consisting of InGaAs, GaAs, AlGaAs, AlGalnP, InGaAsP, AlGaAsP, and InAlGaAs.
Claim 34
Dependent Claim
20 words
The semiconductor light-emitting device of claim 23 in which the control portion defines a current channel into the active region.
Claim 35
Dependent Claim
23 words
The semiconductor light-emitting device of claim 23 in which the control portion defines a lateral refractive index profile for index guiding the light.
Claim 36
Dependent Claim
17 words
The semiconductor light-emitting device of claim 23 including means for defining a polarization state for the light.
Claim 37
Dependent Claim
31 words
The semiconductor light-emitting device of claim 34 in which the means for defining a polarization state for the light is an asymmetric shape of the oxidized layer of the control portion.
Claim 38
Dependent Claim
17 words
The semiconductor light-emitting device of claim 23 including means for defining a lateral mode for the light.
Claim 39
Dependent Claim
31 words
The semiconductor light-emitting device of claim 36 in which the means for defining a lateral mode for the light is an asymmetric shape of the oxidized layer of the control portion.
Claim 40
Dependent Claim
48 words
The semiconductor light-emitting device of claim 23 in which a refractive index in an on axis portion of the oxidized layer including the oxidation extent is substantially different from the refractive index in a central oxide-free portion of the oxidized layer which does not include the oxidation extent.
Claim 41
Dependent Claim
36 words
The semiconductor light-emitting device of claim 38 in which the on-axis portion of the oxidized layer has an effective optical thickness that is substantially equal to a multiple of one-quarter of the wavelength of the light.
Claim 42
Dependent Claim
36 words
The semiconductor light-emitting device of claim 38 in which the off-axis portion of the oxidized layer has an effective optical thickness that is substantially equal to a multiple of one-half of the wavelength of the light.
Claim 43
Dependent Claim
39 words
The semiconductor light-emitting device of claim 38 in which a resonant optical cavity formed by the mirror stacks has a lower Q in the off-axis portion of the cavity than the Q of the on-axis portion of the cavity.
Claim 44
Dependent Claim
36 words
The semiconductor light-emitting device of claim 41 in which an electric field component of the light in the off-axis portion of the cavity has a field node near at least one quantum-well in the active region.
Claim 45
Dependent Claim
27 words
The semiconductor light-emitting device of claim 42 in which the field node reduces a spontaneous emission component of the light in the off-axis portion of the cavity.
Claim 46
Dependent Claim
65 words
The semiconductor light-emitting device of claim 23 in which a first cavity resonance in an on-axis portion of a resonant optical cavity formed by the mirror stacks which does not include the oxidation extent of the oxidized layer has a wavelength that is substantially different from the wavelength of a second cavity resonance in an off-axis portion of the cavity that includes the oxidation extent.
Claim 47
Dependent Claim
117 words
A semiconductor light-emitting device comprising: (a) a semiconductor substrate; (b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, a second mirror stack having a second doping type above the active region, and at least one control layer proximate to the active region and comprising a semiconductor alloy with an aluminum composition higher than any aluminum composition of any of the semiconductor layers of the second mirror stack; (c) a mesa extending downward through the semiconductor layers at least to the control layer; and (d) an upper electrode above the second mirror stack.
Claim 48
Dependent Claim
117 words
A semiconductor light-emitting device comprising: (a) a semiconductor substrate; (b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, a second mirror stack having a second doping type above the active region, and at least one control layer proximate to the active region and comprising a semiconductor alloy with an aluminum composition higher than any aluminum composition of any of the semiconductor layers of the second mirror stack; (c) a mesa extending downward through the semiconductor layers at least to the control layer; and (d) an upper electrode above the second mirror stack.
Claim 49
Dependent Claim
125 words
A semiconductor light-emitting device comprising: (a) a substrate; (b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, and a second mirror stack having a second doping type above the active region, at least one of the mirror stacks including a control portion therein adjacent to the active region, the control portion comprising a semiconductor alloy with an aluminum composition higher than any aluminum composition of any of the other semiconductor layers of the mirror stack; (c) a mesa extending downward through the semiconductor layers at least to the control portion; and (d) an upper electrode above the second mirror stack.
Claim 50
Dependent Claim
125 words
A semiconductor light-emitting device comprising: (a) a substrate; (b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, and a second mirror stack having a second doping type above the active region, at least one of the mirror stacks including a control portion therein adjacent to the active region, the control portion comprising a semiconductor alloy with an aluminum composition higher than any aluminum composition of any of the other semiconductor layers of the mirror stack; (c) a mesa extending downward through the semiconductor layers at least to the control portion; and (d) an upper electrode above the second mirror stack.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1999-02-19 | 1999-08-21 | 2000-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-02-19 | 2003-08-21 | 2004-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-02-19 | 2007-08-21 | 2008-02-20 | $7700.00 | Window Closed / Lapsed |