US5343487A
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US
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Electrical pumping scheme for vertical-cavity surface-emitting lasers
Assignee: W.L. Gore and Associates Inc
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Filing: 1992-10-01
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Granted: 1994-08-30
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Expires: 2012-10-01
Abstract
Abstract In a vertical-cavity surface-emitting laser (VCSEL) with an active region, and first and second mirror stacks forming a resonant cavity, the VCSEL having a radial electrode configuration with a first electrode disposed around the base of the first mirror stack near one side of the active region, a second electrode on the other side of the active region with a first contacting region and a second contacting region on each side of the active region in contact with the respective electrodes, each of the contacting regions providing a current path for distributed current through the active region, the improvement wherein there is a nonlinear grading of resistivity in at least one of the contacting regions between at least one of the electrodes and the active region. Specifically, in one embodiment, the first contacting region has a first layered section abutting the first electrode which is highly conductive to radial current flow and at least a second layered section between the first layered section and the active region which is more resistive to axial current flow than to radial current flow in the first layered section. In a further embodiment, one of the two contacting regions includes a layered section which is radially graded in resistivity so as to restrict the current injection to a radius less than that of the resonant cavity, thereby improving device efficiency and preferentially supporting single mode operation.
Inventors
- 👤 Jeffery W. Scott
- 👤 Larry A. Coldren
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 22:53
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/183; H01S5/18308; H01S5/18322; H01S5/1833; H01S5/18333; H01S2301/00; H01S2301/16; H01S2301/166; H01S5/18341; H01S5/20; H01S5/2054; H01S5/2059; H01S5/22; H01S5/2205; H01S5/2222; H01S5/2227
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
183 words
A vertical-cavity surface emitting laser device (VCSEL), said VCSEL device having an active region, first and second mirror stacks forming a resonant cavity, a radial like electrode configuration with a first electrode disposed largely around a base of the first mirror stack near a first side of the active region, a second electrode on an opposing second side of the active region, a first contacting region and a second contacting region on each first and second side of the active region in contact with said respective first electrode and said second electrode, each one of said contacting regions providing a current path for distributed current through the active region, the improvement comprising: a nonlinear increasing resistivity profile in at least one of said contacting regions between at least one of said first or second electrodes and said active region where said increasing resistivity is such that the resistivity adjacent to said active region is at least one order of magnitude greater that the resistivity in contact with said first or second electrode to minimize current crowding at perimeter edges of said active region.
Claim 2
Dependent Claim
183 words
A vertical-cavity surface emitting laser device (VCSEL), said VCSEL device having an active region, first and second mirror stacks forming a resonant cavity, a radial like electrode configuration with a first electrode disposed largely around a base of the first mirror stack near a first side of the active region, a second electrode on an opposing second side of the active region, a first contacting region and a second contacting region on each first and second side of the active region in contact with said respective first electrode and said second electrode, each one of said contacting regions providing a current path for distributed current through the active region, the improvement comprising: a nonlinear increasing resistivity profile in at least one of said contacting regions between at least one of said first or second electrodes and said active region where said increasing resistivity is such that the resistivity adjacent to said active region is at least one order of magnitude greater that the resistivity in contact with said first or second electrode to minimize current crowding at perimeter edges of said active region.
Claim 3
Dependent Claim
68 words
The device according to claim 1 wherein said first contacting region comprises: a first layered section abutting said first electrode, said first layered section being highly conductive to radial current flow; and at least a second layered section between said first layered section and said active region, said second layered section being more resistive to longitudinal current flow than to radial current flow in said first layered section.
Claim 4
Dependent Claim
60 words
The device according to claim 2 wherein said first contacting region and said second contacting region each further comprises: means for forming a radially graded resistivity profile so as to restrict the current injection to a smaller radius than the optical mode, thereby enhancing the gain of the fundamental optical mode of the resonant cavity and thus improving device efficiency.
Claim 5
Dependent Claim
43 words
The device according to claim 3 wherein the radially graded resistivity profile further comprises: a radial grading of resistivity producing a current injection profile that preferentially supports single radial (lateral) mode operation by maximizing current injection near the center of the resonant cavity.
Claim 6
Dependent Claim
50 words
The device according to claim 4 wherein the radially-graded resistivity profile defines a constriction radius allowing current to flow within the constriction radius and blocking all current flow outside the constriction radius, the constriction radius being at least One micrometer less than that of the radius of the resonant cavity.
Claim 7
Dependent Claim
30 words
The device according to claim 3 wherein a current blocking layer is provided to restrict current to a radius at least one micrometer less than that of the resonant cavity.
Claim 8
Dependent Claim
25 words
The device according to claim 6 wherein said second layered section comprises a current blocking layer in an annulus around the center of the device.
Claim 9
Dependent Claim
16 words
The device according to claim 7 wherein said current blocking layer is formed by ion implantation.
Claim 10
Dependent Claim
16 words
The device according to claim 7 wherein said current blocking layer is formed by multiple diffusions.
Claim 11
Dependent Claim
34 words
The device according to claim 6 wherein said current blocking layer is incorporated into crystalline structure as grown, and a punch-through layer is formed in a central area in order to funnel the current.
Claim 12
Dependent Claim
15 words
The device according to claim 10 wherein said punch-through layer is formed by ion implantation.
Claim 13
Dependent Claim
14 words
The device according to claim 10 wherein said punch-through layer is formed by diffusion.
Claim 14
Dependent Claim
52 words
The device according to claim 2 wherein said second layered section comprises: a plurality of layers of semiconductor materials of differing optical indexes designed to provide optical feedback, including layers of one-quarter wavelength in thickness), to reduce absorption losses associated with the first layered section, said first layered section being heavily doped.
Claim 15
Dependent Claim
60 words
The device according to claim 1 wherein said first contacting region and said second contacting region each further comprises: means for forming a radially graded resistivity profile so as to restrict the current injection to a smaller radius than the optical mode, thereby enhancing the gain of the fundamental optical mode of the resonant cavity and thus improving device efficiency.
Claim 16
Dependent Claim
43 words
The device according to claim 14 wherein the radially graded resistivity profile further comprises: a radial grading of resistivity producing a current injection profile that preferentially supports single radial (lateral) mode operation by maximizing current injection near the center of the resonant cavity.
Claim 17
Dependent Claim
50 words
The device according to claim 1 wherein said active region comprises: a radially-bounded active region so as to confine carriers in a radius smaller than the optical mode of the resonant cavity, thereby enhancing the gain of the fundamental optical mode of the resonant cavity and thus improving device efficiency.
Claim 18
Independent Claim
216 words
A method for constructing a vertical-cavity surface emitting laser device (VCSEL), said VCSEL device having an active region, first and second mirror stacks forming a resonant cavity, a radial electrode configuration with a first electrode disposed around a base of the first mirror stack near one side of the active region, a second electrode on the other side of the active region, a first contacting region and a second contacting region on each side of the active region in contact with said respective first electrode and said second electrode, each one of said contacting regions providing a current path for distributed current through the active region, the method comprising: constructing a nonlinear grading of resistivity in at least one of said contacting regions between at least one of said first or second electrodes and said active region to minimize current crowding at perimeter edges of said active region by: a) placing a second layered section upon said active region, said second layered section being more resistive to longitudinal current flow than to radial current flow in a first layered section; b) placing a first layered section upon said second layered section, said first layered section being highly conductive to radial current flow; and c) placing said one electrode in radial contact with said first layered section.
Claim 19
Independent Claim
216 words
A method for constructing a vertical-cavity surface emitting laser device (VCSEL), said VCSEL device having an active region, first and second mirror stacks forming a resonant cavity, a radial electrode configuration with a first electrode disposed around a base of the first mirror stack near one side of the active region, a second electrode on the other side of the active region, a first contacting region and a second contacting region on each side of the active region in contact with said respective first electrode and said second electrode, each one of said contacting regions providing a current path for distributed current through the active region, the method comprising: constructing a nonlinear grading of resistivity in at least one of said contacting regions between at least one of said first or second electrodes and said active region to minimize current crowding at perimeter edges of said active region by: a) placing a second layered section upon said active region, said second layered section being more resistive to longitudinal current flow than to radial current flow in a first layered section; b) placing a first layered section upon said second layered section, said first layered section being highly conductive to radial current flow; and c) placing said one electrode in radial contact with said first layered section.
Claim 20
Dependent Claim
58 words
The method for construction according to claim 17 wherein construction of said second layered section of said first contacting region further comprises: forming a radially graded resistivity profile so as to restrict the current injection to a radius less than that of the fundamental optical mode of the resonant cavity, thereby increasing efficiency and supporting single mode operation.
Claim 21
Dependent Claim
109 words
The method according to claim 18 further including the steps of: growing a current blocking layer of opposite type doping between the second layered section and the first layered section, a current punch-through layer to be formed thereafter; stopping the growth after forming said second layered section, said current blocking layer, and said first layered section, in order to implant ions of opposite type to the doping of the current blocking layer into the current blocking layer in the central region of the device, thereby establishing a current punch-through layer; and forming a mirror stack on top of the distribution layer having a radius larger than the punch-through region.
Claim 22
Dependent Claim
212 words
A vertical-cavity surface emitting laser device (VCSEL), said VCSEL device having an active region, first and second mirror stacks forming a resonant cavity, a radial like electrode configuration with a first electrode disposed around a base of the first mirror stack near a first side of the active region, a second electrode on an opposing second side of the active region, a first contacting region and a second contacting region on each first and second side of the active region in contact with said respective first electrode and said second electrode, each one of said contacting regions providing a current path for distributed current through the active region, the improvement comprising: a nonlinear grading of resistivity in at least one of said contacting regions between at least one of said first or second electrodes and said active region to minimize current crowding at perimeter edges of said active region; and wherein said first contacting region comprises: a first layered section abutting said first electrode, said first layered section being highly conductive to radial current flow; and at least a second layered section between said first layered section and said active region, said second layered section being more resistive to longitudinal current flow than to radial current flow in said first layered section.
Claim 23
Dependent Claim
212 words
A vertical-cavity surface emitting laser device (VCSEL), said VCSEL device having an active region, first and second mirror stacks forming a resonant cavity, a radial like electrode configuration with a first electrode disposed around a base of the first mirror stack near a first side of the active region, a second electrode on an opposing second side of the active region, a first contacting region and a second contacting region on each first and second side of the active region in contact with said respective first electrode and said second electrode, each one of said contacting regions providing a current path for distributed current through the active region, the improvement comprising: a nonlinear grading of resistivity in at least one of said contacting regions between at least one of said first or second electrodes and said active region to minimize current crowding at perimeter edges of said active region; and wherein said first contacting region comprises: a first layered section abutting said first electrode, said first layered section being highly conductive to radial current flow; and at least a second layered section between said first layered section and said active region, said second layered section being more resistive to longitudinal current flow than to radial current flow in said first layered section.
Claim 24
Dependent Claim
60 words
The device according to claim 20 wherein said first contacting region and said second contacting region each further comprises: means for forming a radially graded resistivity profile so as to restrict the current injection to a smaller radius than the optical mode, thereby enhancing the gain of the fundamental optical mode of the resonant cavity and thus improving device efficiency.
Claim 25
Dependent Claim
43 words
The device according to claim 21 wherein the radially graded resistivity profile further comprises: a radial grading of resistivity producing a current injection profile that preferentially supports single radial (lateral) mode operation by maximizing current injection near the center of the resonant cavity.
Claim 26
Dependent Claim
50 words
The device according to claim 20 wherein said active region comprises: a radially-bounded active region so as to confine carriers in a radius smaller than the optical mode of the resonant cavity, thereby enhancing the gain of the fundamental optical mode of the resonant cavity and thus improving device efficiency.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-29 | 1998-02-28 | 1998-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-29 | 2002-02-28 | 2002-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-29 | 2006-02-28 | 2006-08-30 | $7700.00 | Window Closed / Lapsed |