Circularly symmetric sputtering apparatus with hollow-cathode plasma devices

Claim 2

A sputtering apparatus for depositing electrically conductive or insulating thin films on substrates, said apparatus comprising: a process chamber having therein a central sputtering region and an annular plasma distribution region surrounding and open to the central sputtering region, wherein both the central sputtering region and the annular plasma distribution region are substantially free from externally-applied magnetic fields; two planar disk diodes positioned in the central sputtering region of the process chamber and each having a sputtering target facing the central sputtering region, wherein the sputtering targets may be composed of either conductive or insulating material; positioning means for positioning a substrate within the central sputtering region adjacent to the planar disk diode; and plasma generation means for supplying plasma to the annular plasma distribution region of the process chamber from two symmetrically-positioned plasma sources for diffusion into the central sputtering region of the process chamber to create a substantially uniform plasma therein.

Claim 3

A sputtering apparatus as recited in claim 1 wherein the central sputtering region and the annular plasma distribution region are centered about a process chamber axis.

Claim 4

A sputtering apparatus as recited in claim 2 wherein the plasma distribution region of the process chamber extends along the process chamber axis to a greater extent than does the sputtering region.

Claim 5

A sputtering apparatus as recited in claim 2 wherein the planar disk diodes are circularly symmetric with respect to the process chamber axis.

Claim 6

A sputtering apparatus as recited in claim 1 wherein the two planar disk diodes define opposite lateral boundaries of the process chamber in the sputtering region.

Claim 7

A sputtering apparatus as recited in claim 1 wherein the planar disk diodes are mounted to the process chamber by a mounting ring having means for attaching the mounting ring to the outside of the process chamber.

Claim 8

A sputtering apparatus as recited in claim 1 further comprising transfer means for moving the positioning means into and out of the sputtering region of the process chamber and for stopping the positioning means during a sputtering operation.

Claim 9

A sputtering apparatus as recited in claim 1 further comprising means for applying radiofrequency power to the planar disk diodes.

Claim 10

A sputtering apparatus as recited in claim 8 wherein the means for applying radiofrequency power to the planar disk diodes includes two power supplies each comprised of an impedance-matching network and a radiofrequency generator having one terminal connected to a planar disk diode and the other terminal connected to ground, and further includes insulation means for electrically isolating the planar disk diodes from the process chamber.

Claim 11

A sputtering apparatus as recited in claim 1 wherein said plasma generation means includes two or more coldwall hollow-cathode plasma devices symmetrically disposed about and attached to the annular plasma distribution region of the process chamber, and wherein each coldwall hollow-cathode plasma device supplies a plasma of ionized gas through an outlet thereof to the annular plasma distribution region of the process chamber.

Claim 12

A sputtering apparatus as recited in claim 10 wherein each coldwall hollow-cathode plasma device is electrically insulated from the process chamber and is driven by a separate radiofrequency power supply.

Claim 13

A sputtering apparatus as recited in claim 10 wherein each of the coldwall hollow-cathode plasma devices comprises: a hollow-cathode chamber including an outlet therefrom, wherein the hollow-cathode chamber is composed of an electrically conductive material and has one or more walls; means for introducing gas into the hollow-cathode chamber; a multipolar magnet array surrounding at least a portion of the hollow-cathode chamber for confining a plasma to a region isolated from the walls of the hollow-cathode chamber; and means for applying radiofrequency power to the hollow-cathode chamber.

Claim 14

A sputtering apparatus as recited in claim 10 wherein the hollow-cathode chamber is cylindrical in shape and has a longitudinal axis and wherein the magnet array is coaxial to the longitudinal axis of the hollow-cathode chamber and surrounds the circumference of the hollow-cathode chamber along at least a portion of the longitudinal axis of the hollow-cathode chamber.

Claim 15

A sputtering apparatus as recited in claim 10 further comprising an aperture plate having an aperture therein providing the outlet from the hollow-cathode chamber.

Claim 16

A sputtering apparatus as recited in claim 10 wherein the hollow-cathode chamber is cylindrical in shape, and wherein the plasma device further comprises a solenoidal magnet coil positioned coaxially to a longitudinal axis of the hollow-cathode chamber and generating a magnetic field within the hollow-cathode chamber for confining the plasma within the hollow-cathode chamber to a region proximate the outlet from the hollow-cathode chamber.

Claim 17

A sputtering apparatus as recited in claim 11 further comprising a thermionic conductor within the hollow-cathode chamber and means for supplying current to the thermionic conductor.

Claim 18

A sputtering apparatus as recited in claim 1 further comprising means for connecting the process chamber to a process chamber of an adjacent sputtering apparatus of similar construction to allow substrates to be transferred between adjacent process chambers.

Claim 19

A sputtering apparatus for depositing thin films on substrates, said apparatus comprising: a process chamber having therein a central sputtering region and an annular plasma distribution region surrounding and open to the central sputtering region, wherein the central sputtering region is cylindrical in shape with two planar disk diodes forming opposite lateral sides thereof and a circumferential periphery thereof being open to and surrounded by the annular plasma distribution region, and wherein the central sputtering region and the annular plasma distribution region are coaxial to a process chamber axis; two planar disk diodes positioned in facing relationship in the sputtering region of the process chamber and coaxial to the process chamber axis, each planar disk diode having a sputtering target facing the central sputtering region in a plane normal to the process chamber axis; means for applying radiofrequency power to the planar disk diodes; positioning means for positioning a substrate within the central sputtering region between the two planar disk diodes in a plane normal to the process chamber axis; plasma generation means for generating and supplying plasma to the annular plasma distribution region of the process chamber for diffusion into the central sputtering region of the process chamber to create a substantially uniform plasma therein, said plasma generation means including two or more coldwall hollow-cathode plasma devices symmetrically disposed about and attached to the annular plasma distribution region of the process chamber, and wherein each coldwall hollow-cathode plasma device supplies a plasma of ionized gas through an outlet thereof to the annular plasma distribution region of the process chamber.

Claim 20

A sputtering apparatus for depositing thin films on substrates, said apparatus comprising: a process chamber having therein a central sputtering region and an annular plasma distribution region surrounding and open to the central sputtering region, wherein the central sputtering region is cylindrical in shape with two planar disk diodes forming opposite lateral sides thereof and a circumferential periphery thereof being open to and surrounded by the annular plasma distribution region, and wherein the central sputtering region and the annular plasma distribution region are coaxial to a process chamber axis; two planar disk diodes positioned in facing relationship in the sputtering region of the process chamber and coaxial to the process chamber axis, each planar disk diode having a sputtering target facing the central sputtering region in a plane normal to the process chamber axis; means for applying radiofrequency power to the planar disk diodes; positioning means for positioning a substrate within the central sputtering region between the two planar disk diodes in a plane normal to the process chamber axis; plasma generation means for generating and supplying plasma to the annular plasma distribution region of the process chamber for diffusion into the central sputtering region of the process chamber to create a substantially uniform plasma therein, said plasma generation means including two or more coldwall hollow-cathode plasma devices symmetrically disposed about and attached to the annular plasma distribution region of the process chamber, and wherein each coldwall hollow-cathode plasma device supplies a plasma of ionized gas through an outlet thereof to the annular plasma distribution region of the process chamber.

Claim 23

A method as recited in claim 19 wherein the step of generating a plasma is performed by two or more coldwall hollow-cathode plasma devices symmetrically disposed about and attached to the annular plasma distribution region of the process chamber, and wherein each coldwall hollow-cathode plasma device supplies a plasma of ionized gas through an outlet thereof to the annular plasma distribution region of the process chamber.

Claim 24

A sputtering apparatus for depositing thin films on substrates, said apparatus comprising: a process chamber having therein a central sputtering region and an annular plasma distribution region surrounding and open to the central sputtering region, wherein both the central sputtering region and the annular plasma distribution region are substantially free from externally-applied magnetic fields; two planar disk diodes positioned in the central sputtering region of the process chamber and each having a sputtering target facing the central sputtering region; positioning means for positioning a substrate within the central sputtering region adjacent to the planar disk diode; and plasma generation means for generating and supplying plasma to the annular plasma distribution region of the process chamber for diffusion into the central sputtering region of the process chamber, said plasma generation means including two or more coldwall hollow-cathode plasma devices symmetrically disposed about and attached to the annular plasma distribution region of the process chamber, and wherein each coldwall hollow-cathode plasma device supplies a plasma of ionized gas through an outlet thereof to create a substantially uniform plasma within the annular plasma distribution region of the process chamber.

Claim 25

A sputtering apparatus for depositing thin films on substrates, said apparatus comprising: a process chamber having therein a central sputtering region and an annular plasma distribution region surrounding and open to the central sputtering region, wherein both the central sputtering region and the annular plasma distribution region are substantially free from externally-applied magnetic fields; two planar disk diodes positioned in the central sputtering region of the process chamber and each having a sputtering target facing the central sputtering region; positioning means for positioning a substrate within the central sputtering region adjacent to the planar disk diode; and plasma generation means for generating and supplying plasma to the annular plasma distribution region of the process chamber for diffusion into the central sputtering region of the process chamber, said plasma generation means including two or more coldwall hollow-cathode plasma devices symmetrically disposed about and attached to the annular plasma distribution region of the process chamber, and wherein each coldwall hollow-cathode plasma device supplies a plasma of ionized gas through an outlet thereof to create a substantially uniform plasma within the annular plasma distribution region of the process chamber.