US5486267A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for applying photoresist
Assignee: International Business Machines Corp
•
Filing: 1994-02-28
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Granted: 1996-01-23
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Expires: 2014-02-28
Abstract
Abstract The invention provides a method for substrate preparation prior to applying photoresist to the substrate. A substrate, such as a TEOS-based silicon dioxide or silicon nitride film, is selected and treated with reactive oxygen. The reactive oxygen can comprise ozone or ozone plasma, for example. After treatment of the substrate, the photoresist, preferably an acid-catalyzed photoresist for use with deep UV sensitization, is applied.
Inventors
- 👤 Stephen E. Knight
- 👤 Stephen E. Luce
- 👤 Thomas L. McDevitt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:29
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/65; H10P14/6516; H10P14/6529; H10P14/6532; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/694; H10P14/6943; H10P14/69433; H10P95/00; Y; Y10; Y10S; Y10S438/00; Y10S438/906; Y10S438/942; Y10S438/948
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
43 words
A method for substrate preparation comprising: providing a substrate comprising a film selected from the group of silicon dioxide and silicon nitride; treating said substrate with ozone; then applying a resist to said treated substrate and patterning said resist over said treated substrate.
Claim 2
Independent Claim
43 words
A method for substrate preparation comprising: providing a substrate comprising a film selected from the group of silicon dioxide and silicon nitride; treating said substrate with ozone; then applying a resist to said treated substrate and patterning said resist over said treated substrate.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein said film comprises silicon dioxide.
Claim 4
Dependent Claim
13 words
The method of claim 1 wherein said film comprises a tetraethoxysilane-based silicon dioxide.
Claim 5
Dependent Claim
11 words
The method of claim 1 wherein said film comprises silicon nitride.
Claim 6
Dependent Claim
12 words
The method of claim 1 wherein said film is chemically vapor deposited.
Claim 7
Dependent Claim
23 words
The method of claim 1 further comprising applying electromagnetic excitation to said ozone to generate a reactive ozone plasma to treat said substrate.
Claim 8
Dependent Claim
12 words
The method of claim 1 wherein said resist comprises an acid-catalyzed resist.
Claim 9
Dependent Claim
21 words
The method of claim 1 wherein said ozone is present in a concentration from 5% by weight to 100% by weight.
Claim 10
Independent Claim
29 words
A method for substrate preparation comprising: selecting a substrate; treating said substrate with one of ozone and an oxygen plasma; and applying an acid-catalyzed resist to said treated substrate.
Claim 11
Independent Claim
29 words
A method for substrate preparation comprising: selecting a substrate; treating said substrate with one of ozone and an oxygen plasma; and applying an acid-catalyzed resist to said treated substrate.
Claim 12
Dependent Claim
15 words
The method of claim 9 wherein treating said substrate comprises treatment with an ozone plasma.
Claim 13
Independent Claim
28 words
A method for substrate preparation comprising: providing a substrate comprising a tetraethoxysilane-based silicon dioxide film; treating said substrate with ozone; and applying a resist to said treated substrate.
Claim 14
Independent Claim
28 words
A method for substrate preparation comprising: providing a substrate comprising a tetraethoxysilane-based silicon dioxide film; treating said substrate with ozone; and applying a resist to said treated substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1999-01-22 | 1999-07-24 | 2000-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-01-22 | 2003-07-24 | 2004-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-01-22 | 2007-07-24 | 2008-01-23 | $7700.00 | Window Closed / Lapsed |