Method of manufacturing a semiconductor device with a passivated side

Abstract

Abstract A method of manufacturing semiconductor devices with a passivated semiconductor body (1) provided with an electrode (2) and fastened on an electrically conducting support body (3), in which method a slice of semiconductor material (5) is fastened on a surface (6) of an electrically conducting auxiliary slice (7), and mesa structures (8) are formed in the slice of semiconductor material (5) by the application of grooves (9) in the slice of semiconductor material (5) subsequently, a layer of insulating material (10) is provided on the walls of the grooves (9), electrodes (2) are provided on upper sides (11) of the mesa structures (8), and the auxiliary slice (7) with the mesa structures (8) is split up at the areas of the grooves (9) into individual semiconductor bodies (1) each fastened on its own support body (3). According to the invention, the electrodes (2) are provided in that an electrically conducting layer (25) is deposited both on the upper side (11) of the mesa structures (8) and on the layer of insulating material (10) and, during splitting-up of the auxiliary slice (7) with mesa structures (8), this layer (25) is also split up into separate electrodes (2) which lie on the upper side (11) of a mesa structure (8) as well as on the layer of insulating material (10). The method according to the invention is simpler than a known method. Moreover, semiconductor devices are made by the method according to the invention which have a better resistance to higher voltages because the electrodes (2) also extend over the insulating material (10).

Inventors

• 👤 Geert J. Duinkerken
• 👤 Roelvinus M. M. Fonville

Bibliographic Details