Method for fabricating dynamic random access memory capacitor

Claim 1

A method for fabricating a dynamic random access memory capacitor, comprising the steps of: (a) sequentially forming an interlayer insulating film, a planarizing layer, a first insulating film, a first conduction layer and a second insulating film over a semiconductor substrate including a field oxide film, a gate oxide film and gates; (b) sequentially removing portions of the second insulating film, first conduction layer, first insulating film and the planarizing layer disposed over a region of the semiconductor substrate whereby said interlayer insulating film is exposed, thereby forming a primary contact hole; (c) forming a first insulating spacer on an inner side wall of the primary contact hole, partially removing the interlayer insulating film by using the first insulating spacer as a mask to form a secondary contact hole, and completely removing the second insulating film to expose the first conduction layer; (d) forming a second conduction layer over the entire exposed surface of the resulting structure to cover the exposed first conduction layer and the first insulating spacer and fill the secondary contact hole, forming a third insulating film over the second conduction layer, and forming a fourth insulating film over the third insulating film, the fourth insulating film being made of a material exhibiting a slower etch rate than said third insulating film; (e) sequentially removing portions of the fourth insulating film and third insulating film disposed over the primary contact hole and wet etching to selectively remove exposed portions of said third insulating film, thereby forming a pattern of the fourth insulating film and a pattern of the third insulating film disposed beneath the fourth insulating film pattern and having an undercut portion; (f) coating a third conduction layer over the entire exposed surface of the resulting structure such that the third conduction layer has a stepped portion filling the undercut portion of the third insulating film pattern by both the fourth insulating film pattern and the third insulating film pattern, and then forming a second insulating spacer on a side surface of the stepped portion of the third conduction layer; (g) sequentially removing exposed portions of the third, second and first conduction layers by an anisotropic etch process under a condition that the second insulating spacer and fourth insulating layer are used as masks, thereby isolating a capacitor while a portion of the first conduction layer exposed between the fourth insulating layer and the second insulating spacer is not removed; and (h) removing the second insulating spacer, the fourth insulating film pattern and the third insulating film pattern, and sequentially forming a fifth insulating film over exposed surfaces of said conduction and planarizing layers and forming a plate electrode over said fifth insulating film.

Claim 2

A method for fabricating a dynamic random access memory capacitor, comprising the steps of: (a) sequentially forming an interlayer insulating film, a planarizing layer, a first insulating film, a first conduction layer and a second insulating film over a semiconductor substrate including a field oxide film, a gate oxide film and gates; (b) sequentially removing portions of the second insulating film, first conduction layer, first insulating film and the planarizing layer disposed over a region of the semiconductor substrate whereby said interlayer insulating film is exposed, thereby forming a primary contact hole; (c) forming a first insulating spacer on an inner side wall of the primary contact hole, partially removing the interlayer insulating film by using the first insulating spacer as a mask to form a secondary contact hole, and completely removing the second insulating film to expose the first conduction layer; (d) forming a second conduction layer over the entire exposed surface of the resulting structure to cover the exposed first conduction layer and the first insulating spacer and fill the secondary contact hole, forming a third insulating film over the second conduction layer, and forming a fourth insulating film over the third insulating film, the fourth insulating film being made of a material exhibiting a slower etch rate than said third insulating film; (e) sequentially removing portions of the fourth insulating film and third insulating film disposed over the primary contact hole and wet etching to selectively remove exposed portions of said third insulating film, thereby forming a pattern of the fourth insulating film and a pattern of the third insulating film disposed beneath the fourth insulating film pattern and having an undercut portion; (f) coating a third conduction layer over the entire exposed surface of the resulting structure such that the third conduction layer has a stepped portion filling the undercut portion of the third insulating film pattern by both the fourth insulating film pattern and the third insulating film pattern, and then forming a second insulating spacer on a side surface of the stepped portion of the third conduction layer; (g) sequentially removing exposed portions of the third, second and first conduction layers by an anisotropic etch process under a condition that the second insulating spacer and fourth insulating layer are used as masks, thereby isolating a capacitor while a portion of the first conduction layer exposed between the fourth insulating layer and the second insulating spacer is not removed; and (h) removing the second insulating spacer, the fourth insulating film pattern and the third insulating film pattern, and sequentially forming a fifth insulating film over exposed surfaces of said conduction and planarizing layers and forming a plate electrode over said fifth insulating film.