Patent US4584191A successfully refreshed from Google Patents.
Patent US5481109A successfully refreshed from Google Patents.
US5481109A
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Surface analysis method and apparatus for carrying out the same
Assignee: Hitachi Ltd
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Filing: 1993-09-27
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Granted: 1996-01-02
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Expires: 2013-09-27
Abstract
Abstract A surface analysis method and an apparatus for carrying out the samein which the method involves the detection of fluorescence X-rays emitted from the surface of a sample in response to a finely focused electron beam irradiated thereto, whereby residues on the sample surface are analyzed qualitatively and quantitatively. An electron beam (1) is irradiated through a hole (9) at the center of an X-ray detector (8) into a fine hole (h) on the surface of a sample (2). In response, fluorescence X-rays are emitted from inside the fine hole (h) and are detected by an annular X-ray detector (8) having an energy analysis function near the axis of the electron beam (1) (preferably within 20 degrees with respect to the center axis of the electron beam). This arrangement allows the fluorescence X-rays from the fine hole (h) to reach the X-ray detector (8) without being absorbed by the substance of the material. That in turn ensures qualitative and quantitative analysis of high accuracy about residues in fine holes of large aspect ratios. Since the method is of non-destructive nature, the analyzed sample may be placed unscathed back into the fabrication process.
Inventors
- 👤 Ken Ninomiya
- 👤 Hideo Todokoro
- 👤 Tokuo Kure
- 👤 Yasuhiro Mitsui
- 👤 Katsuhiro Kuroda
- 👤 Hiroyasu Shichi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:46
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/22; G01N23/225; G01N23/2251; G01N23/2252; H; H01; H01J; H01J37/00; H01J37/252; G01N2223/00; G01N2223/07; G01N2223/076; H01J2237/00; H01J2237/244; H01J2237/2441; H01J2237/24415
Claims Analysis
Total Claims: 84
Claim 1
Independent Claim
93 words
A surface analysis method for analyzing residues inside small holes on the surface of a sample by irradiating an accelerated and focused electron beam into said small holes and by observing fluorescence X-rays emitted therefrom in return, said surface analysis method comprising the step of observing said fluorescence X-rays within an angle α with respect to the center axis of the electron beam, said angle being defined as tan α=(a/d) where, a multiplied by 2 stands for the inner diameter of any one of said small holes and d for the depth thereof.
Claim 2
Dependent Claim
93 words
A surface analysis method for analyzing residues inside small holes on the surface of a sample by irradiating an accelerated and focused electron beam into said small holes and by observing fluorescence X-rays emitted therefrom in return, said surface analysis method comprising the step of observing said fluorescence X-rays within an angle α with respect to the center axis of the electron beam, said angle being defined as tan α=(a/d) where, a multiplied by 2 stands for the inner diameter of any one of said small holes and d for the depth thereof.
Claim 3
Dependent Claim
29 words
A surface analysis method according to claim 1, wherein said residues include at least one atom selected from the group consisting of carbon atoms, oxygen atoms and silicon atoms.
Claim 4
Dependent Claim
47 words
A surface analysis method according to claim 1, wherein the energy of said electron beam is such as to excite, for the purpose of fluorescence X-ray emission from said sample, at least one atom selected from the group consisting of carbon atoms, oxygen atoms and silicon atoms.
Claim 5
Dependent Claim
21 words
A surface analysis method according to claim 1, wherein the energy of said electron beam is not greater than 5 keV.
Claim 6
Dependent Claim
30 words
A surface analysis method according to claim 1, wherein the energy of said electron beam is not greater than 10 times the energy of the fluorescence X-rays to be observed.
Claim 7
Dependent Claim
45 words
A surface analysis method according to claim 1, wherein said fluorescence X-rays are observed by use of an annular X-ray detector which spectrally detects said fluorescence X-rays, said annular X-ray detector having a center hole coaxially arranged around the center axis of said electron beam.
Claim 8
Dependent Claim
26 words
A surface analysis method according to claim 6, wherein said electron beam is irradiated onto the sample surface through said center hole of said X-ray detector.
Claim 9
Dependent Claim
39 words
A surface analysis method according to claim 1, wherein said fluorescence X-rays are observed by use of an X-ray detector located on or near the center axis of said electron beam, said X-ray detector detecting said fluorescence X-rays spectrally.
Claim 10
Dependent Claim
26 words
A surface analysis method according to claim 8, wherein said electron beam is deflected to bypass said X-ray detector before being irradiated onto the sample surface.
Claim 11
Dependent Claim
23 words
A surface analysis method according to claim 7, wherein said X-ray detector is located inside an electron lens for focusing said electron beam.
Claim 12
Dependent Claim
62 words
A surface analysis method according to claim 1, wherein said fluorescence X-rays are observed by use of an X-ray reflector located near the center axis of said electron beam and by use of an X-ray detector located outside said center axis of said electron beam, said X-ray reflector reflecting said fluorescence X-rays, the reflected X-rays being spectrally detected by said X-ray detector.
Claim 13
Dependent Claim
22 words
A surface analysis method according to claim 11, wherein said X-ray reflector is a total reflector for totally reflecting said fluorescence X-rays.
Claim 14
Dependent Claim
16 words
A surface analysis method according to claim 11, wherein said X-ray reflector is a plane mirror.
Claim 15
Dependent Claim
35 words
A surface analysis method according to claim 11, wherein said X-ray reflector is a mirror selected from the group consisting of cylindrical mirrors, spherical mirrors, toroidal mirrors, and non-spherical mirrors comprising a revolutional conicoid each.
Claim 16
Dependent Claim
21 words
A surface analysis method according to claim 11, wherein the curvature of the reflecting surface of said X-ray reflector is variable.
Claim 17
Dependent Claim
66 words
A surface analysis method according to claim 1, wherein said fluorescence X-rays are observed by use of a multilayer film reflector located near the center axis of said electron beam and by use of an X-ray detector located outside said center axis of said electron beam, said multilayer film reflector spectrally reflecting said fluorescence X-rays, the spectrally reflected fluorescence X-rays being detected by said X-ray detector.
Claim 18
Dependent Claim
48 words
A surface analysis method according to claim 16, wherein said multilayer film reflector is rotated to vary the spectral condition of said fluorescence X-rays, said X-ray detector being relocated in synchronism with the rotation of said multilayer film reflector so as to detect said spectrally reflected fluorescence X-rays.
Claim 19
Dependent Claim
25 words
A surface analysis method according to claim 16, wherein said X-ray detector is a two-dimensional detector having a plurality of X-ray detecting devices arranged two-dimensionally.
Claim 20
Dependent Claim
63 words
A surface analysis method according to claim 1, wherein said fluorescence X-rays are observed by use of diffraction gratings located near the center axis of said electron beam and by use of an X-ray detector located outside said center axis of said electron beam, said diffraction gratings spectrally reflecting said fluorescence X-rays, the spectrally reflected fluorescence X-rays being detected by said X-ray detector.
Claim 21
Dependent Claim
25 words
A surface analysis method according to claim 19, wherein said X-ray detector is a two-dimensional detector having a plurality of X-ray detecting devices arranged two-dimensionally.
Claim 22
Dependent Claim
21 words
A surface analysis method according to claim 1, wherein said electron beam is deflected immediately before incidence on the sample surface.
Claim 23
Dependent Claim
25 words
A surface analysis method according to claim 1, wherein that spot on the sample surface to which said electron beam is irradiated is heated locally.
Claim 24
Dependent Claim
24 words
A surface analysis method according to claim 22, wherein the local heating is carried out at a temperature between 100° C. and 200° C.
Claim 25
Dependent Claim
26 words
A surface analysis method according to claim 23, wherein the local heating is carried out by focusing a light beam onto the spot to be heated.
Claim 26
Dependent Claim
26 words
A surface analysis method according to claim 22, wherein the local heating is carried out by focusing a light beam onto the spot to be heated.
Claim 27
Dependent Claim
23 words
A surface analysis method according to claim 25, wherein said light beam is either a visible ray beam or an infrared ray beam.
Claim 28
Dependent Claim
62 words
A surface analysis method for analyzing residues on the surface of a sample by irradiating an accelerated and focused electron beam onto the sample surface and by observing fluorescence X-rays emitted therefrom in return, said surface analysis method comprising the step of observing said fluorescence X-rays within an angle of 20 degrees with respect to the center axis of the electron beam.
Claim 29
Dependent Claim
62 words
A surface analysis method for analyzing residues on the surface of a sample by irradiating an accelerated and focused electron beam onto the sample surface and by observing fluorescence X-rays emitted therefrom in return, said surface analysis method comprising the step of observing said fluorescence X-rays within an angle of 20 degrees with respect to the center axis of the electron beam.
Claim 30
Dependent Claim
29 words
A surface analysis method according to claim 27, wherein said residues include at least one atom selected from the group consisting of carbon atoms, oxygen atoms and silicon atoms.
Claim 31
Dependent Claim
47 words
A surface analysis method according to claim 27, wherein the energy of said electron beam is such as to excite, for the purpose of fluorescence X-ray emission from said sample, at least one atom selected from the group consisting of carbon atoms, oxygen atoms and silicon atoms.
Claim 32
Dependent Claim
21 words
A surface analysis method according to claim 27, wherein the energy of said electron beam is not greater than 5 keV.
Claim 33
Dependent Claim
30 words
A surface analysis method according to claim 27, wherein the energy of said electron beam is not greater than 10 times the energy of the fluorescence X-rays to be observed.
Claim 34
Dependent Claim
45 words
A surface analysis method according to claim 27, wherein said fluorescence X-rays are observed by use of an annular X-ray detector which spectrally detects said fluorescence X-rays, said annular X-ray detector having a center hole coaxially arranged around the center axis of said electron beam.
Claim 35
Dependent Claim
39 words
A surface analysis method according to claim 27, wherein said fluorescence X-rays are observed by use of an X-ray detector located on or near the center axis of said electron beam, said X-ray detector detecting said fluorescence X-rays spectrally.
Claim 36
Dependent Claim
62 words
A surface analysis method according to claim 27, wherein said fluorescence X-rays are observed by use of an X-ray reflector located near the center axis of said electron beam and by use of an X-ray detector located outside said center axis of said electron beam, said X-ray reflector reflecting said fluorescence X-rays, the reflected X-rays being spectrally detected by said X-ray detector.
Claim 37
Dependent Claim
66 words
A surface analysis method according to claim 27, wherein said fluorescence X-rays are observed by use of a multilayer film reflector located near the center axis of said electron beam and by use of an X-ray detector located outside said center axis of said electron beam, said multilayer film reflector spectrally reflecting said fluorescence X-rays, the spectrally reflected fluorescence X-rays being detected by said X-ray detector.
Claim 38
Dependent Claim
63 words
A surface analysis method according to claim 27, wherein said fluorescence X-rays are observed by use of diffraction gratings located near the center axis of said electron beam and by use of an X-ray detector located outside said center axis of said electron beam, said diffraction gratings spectrally reflecting said fluorescence X-rays, the spectrally reflected fluorescence X-rays being detected by said X-ray detector.
Claim 39
Dependent Claim
21 words
A surface analysis method according to claim 27, wherein said electron beam is deflected immediately before incidence on the sample surface.
Claim 40
Dependent Claim
25 words
A surface analysis method according to claim 27, wherein that spot on the sample surface to which said electron beam is irradiated is heated locally.
Claim 41
Dependent Claim
108 words
A surface analysis apparatus comprising electron beam irradiating means for irradiating a finely focused electron beam into small holes on the surface of a sample, and fluorescence X-ray observing means for observing fluorescence X-rays emitted from said small holes in response to the irradiation of the electron beam, wherein said fluorescence X-ray observing means includes a function for spectrally detecting said fluorescence X-rays emitted within an angle α with respect to the center axis of said electron beam, said angle being defined as tan α=(a/d) where, a multiplied by 2 stands for the inner diameter of any one of said small holes and d for the depth thereof.
Claim 42
Dependent Claim
108 words
A surface analysis apparatus comprising electron beam irradiating means for irradiating a finely focused electron beam into small holes on the surface of a sample, and fluorescence X-ray observing means for observing fluorescence X-rays emitted from said small holes in response to the irradiation of the electron beam, wherein said fluorescence X-ray observing means includes a function for spectrally detecting said fluorescence X-rays emitted within an angle α with respect to the center axis of said electron beam, said angle being defined as tan α=(a/d) where, a multiplied by 2 stands for the inner diameter of any one of said small holes and d for the depth thereof.
Claim 43
Dependent Claim
51 words
A surface analysis apparatus according to claim 39, wherein the energy of said electron beam is such as to excite, for the purpose of fluorescence X-ray emission from said sample, at least one atom selected from the group consisting of carbon atoms, oxygen atoms and silicon atoms on the sample surface.
Claim 44
Dependent Claim
21 words
A surface analysis apparatus according to claim 39, wherein the energy of said electron beam is not greater than 5 keV.
Claim 45
Dependent Claim
30 words
A surface analysis apparatus according to claim 39, wherein the energy of said electron beam is not greater than 10 times the energy of the fluorescence X-rays to be observed.
Claim 46
Dependent Claim
67 words
A surface analysis apparatus according to claim 39, wherein said fluorescence X-ray observing means includes an annular X-ray detector capable of analyzing energy, said annular X-ray detector having a center hole coaxially arranged around the center axis of said electron beam, and wherein said electron beam irradiating means is arranged to irradiate said electron beam onto the sample surface through the center hole of the X-ray detector.
Claim 47
Dependent Claim
60 words
A surface analysis apparatus according to claim 39, wherein said fluorescence X-ray observing means includes an X-ray detector capable of analyzing energy and located on the center axis of said electron beam, and wherein said electron beam irradiating means is arranged to deflect said electron beam to bypass said X-ray detector before irradiating said electron beam onto the sample surface.
Claim 48
Dependent Claim
33 words
A surface analysis apparatus according to claim 43, wherein said electron beam irradiating means includes an electron lens for focusing said electron beam, said annular X-ray detector being located inside said electron lens.
Claim 49
Dependent Claim
52 words
A surface analysis apparatus according to claim 39, wherein said fluorescence X-ray observing means includes an X-ray reflector located near the center axis of said electron beam irradiated onto the sample surface, and an X-ray detector capable of analyzing energy, said X-ray detector detecting said fluorescence X-rays reflected by said X-ray reflector.
Claim 50
Dependent Claim
22 words
A surface analysis apparatus according to claim 46, wherein said X-ray reflector is a total reflector for totally reflecting said fluorescence X-rays.
Claim 51
Dependent Claim
16 words
A surface analysis apparatus according to claim 46, wherein said X-ray reflector is a plane mirror.
Claim 52
Dependent Claim
35 words
A surface analysis apparatus according to claim 46, wherein said X-ray reflector is a mirror selected from the group consisting of cylindrical mirrors, spherical mirrors, toroidal mirrors, and non-spherical mirrors comprising a revolutional conicoid each.
Claim 53
Dependent Claim
28 words
A surface analysis apparatus according to claim 46, wherein said fluorescence X-ray observing means includes means for varying the curvature of the reflecting surface of said X-ray reflector.
Claim 54
Dependent Claim
51 words
A surface analysis apparatus according to claim 39, wherein said fluorescence X-ray observing means includes a multilayer film X-ray reflector located near the center axis of said electron beam irradiated onto the sample surface, and an X-ray detector for detecting the fluorescence X-rays reflected spectrally by said multilayer film X-ray reflector.
Claim 55
Dependent Claim
79 words
A surface analysis apparatus according to claim 51, wherein said fluorescence X-ray observing means includes rotating means for rotating said multilayer film X-ray reflector to vary the incidence angle of the fluorescence X-rays that are incident on said multilayer film X-ray reflector, and moving means for moving said X-ray detector in cooperation with the rotation of said multilayer film X-ray reflector so that said X-ray detector may detect the fluorescence X-rays reflected spectrally by said multilayer film X-ray reflector.
Claim 56
Dependent Claim
46 words
A surface analysis apparatus according to claim 39, wherein said fluorescence X-ray observing means includes diffraction gratings located near the center axis of said electron beam irradiated onto the sample surface, and an X-ray detector for detecting the fluorescence X-rays reflected spectrally by said diffraction gratings.
Claim 57
Dependent Claim
25 words
A surface analysis apparatus according to claim 53, wherein said X-ray detector is a two-dimensional detector having a plurality of X-ray detecting devices arranged two-dimensionally.
Claim 58
Dependent Claim
25 words
A surface analysis apparatus according to claim 51, wherein said X-ray detector is a two-dimensional detector having a plurality of X-ray detecting devices arranged two-dimensionally.
Claim 59
Dependent Claim
29 words
A surface analysis apparatus according to claim 39, wherein said electron beam irradiating means includes deflecting means for deflecting said electron beam immediately before incidence on the sample surface.
Claim 60
Dependent Claim
28 words
A surface analysis apparatus according to claim 39, further comprising heating means for locally heating that spot on the sample surface to which said electron beam is irradiated.
Claim 61
Dependent Claim
40 words
A surface analysis apparatus according to claim 57, wherein said heating means carries out the local heating at a temperature between 100° C. and 200° C. on that spot of the sample surface to which said electron beam is irradiated.
Claim 62
Dependent Claim
37 words
A surface analysis apparatus according to claim 57, wherein said heating means includes light beam irradiating means for irradiating a focused light beam onto that spot of the sample surface to which said electron beam is irradiated.
Claim 63
Dependent Claim
39 words
A surface analysis apparatus according to claim 59, wherein said light beam irradiating means includes a light source and a condenser lens for focusing light from said light source onto the spot to be heated on said sample surface.
Claim 64
Dependent Claim
18 words
A surface analysis apparatus according to claim 59, wherein said light is either visible rays or infrared rays.
Claim 65
Dependent Claim
61 words
A surface analysis apparatus according to claim 39, further comprising measuring means for measuring a location of a spot on the sample surface to which said electron beam is irradiated, and calculating means for calculating the distance between two different beam irradiated spot locations with reference to the location of the spot on the sample surface measured by said measuring means.
Claim 66
Dependent Claim
42 words
A composite apparatus for fabricating semiconductors comprising the surface analysis apparatus of claim 39, a fabrication apparatus for finely fabricating the surface of a sample, and a transport apparatus for transporting said sample between said surface analysis apparatus and said fabrication apparatus.
Claim 67
Dependent Claim
37 words
A surface analysis apparatus according to claim 39, further comprising means for automatically determining the location to be analyzed on the sample surface in accordance with the data of the pattern coordinates established on the sample surface.
Claim 68
Dependent Claim
34 words
A surface analysis apparatus according to claim 64, further comprising display means for displaying both the pattern coordinate data and an observed picture of a sample surface area including said location to be analyzed.
Claim 69
Dependent Claim
45 words
A surface analysis apparatus according to claim 65, wherein said display means has a function for displaying a schematic cross-sectional view of the sample surface area designated by the process data resulting from the surface processing carried out on the sample surface to be analyzed.
Claim 70
Dependent Claim
77 words
A surface analysis apparatus comprising electron beam irradiating means for irradiating a finely focused electron beam onto the surface of a sample, and fluorescence X-ray observing means for observing fluorescence X-rays emitted from the sample surface in response to the irradiation of the electron beam, wherein said fluorescence X-ray observing means includes a function for spectrally detecting said fluorescence X-rays emitted within an angle of 20 degrees with respect to the center axis of said electron beam.
Claim 71
Dependent Claim
77 words
A surface analysis apparatus comprising electron beam irradiating means for irradiating a finely focused electron beam onto the surface of a sample, and fluorescence X-ray observing means for observing fluorescence X-rays emitted from the sample surface in response to the irradiation of the electron beam, wherein said fluorescence X-ray observing means includes a function for spectrally detecting said fluorescence X-rays emitted within an angle of 20 degrees with respect to the center axis of said electron beam.
Claim 72
Dependent Claim
51 words
A surface analysis apparatus according to claim 67, wherein the energy of said electron beam is such as to excite, for the purpose of fluorescence X-ray emission from said sample, at least one atom selected from the group consisting of carbon atoms, oxygen atoms and silicon atoms on the sample surface.
Claim 73
Dependent Claim
21 words
A surface analysis apparatus according to claim 67, wherein the energy of said electron beam is not greater than 5 keV.
Claim 74
Dependent Claim
30 words
A surface analysis apparatus according to claim 67, wherein the energy of said electron beam is not greater than 10 times the energy of the fluorescence X-rays to be observed.
Claim 75
Dependent Claim
67 words
A surface analysis apparatus according to claim 67, wherein said fluorescence X-ray observing means includes an annular X-ray detector capable of analyzing energy, said annular X-ray detector having a center hole coaxially arranged around the center axis of said electron beam, and wherein said electron beam irradiating means is arranged to irradiate said electron beam onto the sample surface through the center hole of the X-ray detector.
Claim 76
Dependent Claim
60 words
A surface analysis apparatus according to claim 67, wherein said fluorescence X-ray observing means includes an X-ray detector capable of analyzing energy and located on the center axis of said electron beam, and wherein said electron beam irradiating means is arranged to deflect said electron beam to bypass said X-ray detector before irradiating said electron beam onto the sample surface.
Claim 77
Dependent Claim
52 words
A surface analysis apparatus according to claim 67, wherein said fluorescence X-ray observing means includes an X-ray reflector located near the center axis of said electron beam irradiated onto the sample surface, and an X-ray detector capable of analyzing energy, said X-ray detector detecting said fluorescence X-rays reflected by said X-ray reflector.
Claim 78
Dependent Claim
51 words
A surface analysis apparatus according to claim 67, wherein said fluorescence X-ray observing means includes a multilayer film X-ray reflector located near the center axis of said electron beam irradiated onto the sample surface, and an X-ray detector for detecting the fluorescence X-rays reflected spectrally by said multilayer film X-ray reflector.
Claim 79
Dependent Claim
46 words
A surface analysis apparatus according to claim 67, wherein said fluorescence X-ray observing means includes diffraction gratings located near the center axis of said electron beam irradiated onto the sample surface, and an X-ray detector for detecting the fluorescence X-rays reflected spectrally by said diffraction gratings.
Claim 80
Dependent Claim
29 words
A surface analysis apparatus according to claim 67, wherein said electron beam irradiating means includes deflecting means for deflecting said electron beam immediately before incidence on the sample surface.
Claim 81
Dependent Claim
28 words
A surface analysis apparatus according to claim 67, further comprising heating means for locally heating that spot on the sample surface to which said electron beam is irradiated.
Claim 82
Dependent Claim
61 words
A surface analysis apparatus according to claim 67, further comprising measuring means for measuring a location of a spot on the sample surface to which said electron beam is irradiated, and calculating means for calculating the distance between two different beam irradiated spot locations with reference to the location of the spot on the sample surface measured by said measuring means.
Claim 83
Dependent Claim
42 words
A composite apparatus for fabricating semiconductors comprising the surface analysis apparatus of claim 67, a fabrication apparatus for finely fabricating the surface of a sample, and a transport apparatus for transporting said sample between said surface analysis apparatus and said fabrication apparatus.
Claim 84
Dependent Claim
35 words
A surface analysis apparatus according to claim 67, further comprising means for automatically determining the location to be analyzed on the sample surface in accordance with data of pattern coordinates established on the sample surface.
References Cited (Backward Citations)
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