X-ray analyzer for scanning electron microscope or the like

Abstract

Abstract PURPOSE: To increase the fetch angle and collecting stereoscopic angle of an X-ray in the state for horizontally holding a specimen in a scanning electron microscope by forming annular non-dispersion type detector and disposing it in the vicinity of an electron beam/route so that electron beam passes inside the detector. CONSTITUTION: Non-dispersion type X-ray detector 19 is formed annularly and disposed in the vicinity of electron beam route so that the beam passes inside the detector 19. A detector retaining plate 14 thermally integrally formed with an external cooling tank 15 is disposed, for example, between a specimen 12 in a specimen chamber 10 under an objective lens 6 and a magnetic pole 8 under the lens, and an annular semiconductor X-ray detecting element 19 of Si or the like deposited with Be thin film on the detecting surface thereof is buried on the back surface of the edge in a hole 18 for passing the electron beam as formed at the plate 14. Thus, the X-ray can be detected at an X-ray fetch angle near 90° in narrow space without necessity of inclining the specimen 12, and X-ray collecting stereoscopic angle is increased to enhance the detecting sensitivity of an electron microscope. COPYRIGHT: (C)1980,JPO&Japio

Inventors

• 👤 Katsuyoshi Ueno
• 👤 Shigemasa Sakurai
• 👤 Yoshio Noguchi

Bibliographic Details