Patent US5478456A successfully refreshed from Google Patents.
US5478456A
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Sputtering target
Assignee: 3M Co
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Filing: 1993-10-01
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Granted: 1995-12-26
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Expires: 2013-10-01
Abstract
Abstract Electrically conductive sputtering target comprising yttria and amorphous carbon, a method of making the same, and a method of using the same.
Inventors
- 👤 Kathleen M. Humpal
- 👤 James P. Mathers
- 👤 Michael B. Hintz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:16
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C04; C04B; C04B35/00; C04B35/01; C04B35/013; C04B35/50; C04B35/505; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; Y; Y02; Y02T; Y02T50/00; Y02T50/60
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
54 words
An electrically conductive sputtering target comprising (a) at least 35 volume percent yttria, based on the total volume of the target, present as a porous structure having a series of interconnecting channels, and (b) a substantially continuous amorphous carbon coating on internal surfaces of said porous structure such that said target is electrically conductive.
Claim 2
Dependent Claim
54 words
An electrically conductive sputtering target comprising (a) at least 35 volume percent yttria, based on the total volume of the target, present as a porous structure having a series of interconnecting channels, and (b) a substantially continuous amorphous carbon coating on internal surfaces of said porous structure such that said target is electrically conductive.
Claim 3
Dependent Claim
26 words
The sputtering target of claim 1 comprising at least about 75 percent by weight of said yttria, based on the total weight of said sputtering target.
Claim 4
Dependent Claim
12 words
The sputtering target of claim 1 further comprising at least one stabilizer.
Claim 5
Dependent Claim
13 words
The sputtering target of claim 1 further comprising silicon carbide as a stabilizer.
Claim 6
Dependent Claim
31 words
The sputtering target of claim 1 wherein said silicon carbide is present in an amount no greater than about 30% by volume, based on the total volume of said sputtering target.
Claim 7
Dependent Claim
24 words
The sputtering target of claim 1 wherein said amorphous carbon coating has a thickness in the range from about 5 to about 200 Å.
Claim 8
Dependent Claim
30 words
The sputtering target of claim 1 wherein said amorphous carbon is present in the range from about 0.40 to about 2.5% by weight, based upon total weight of said target.
Claim 9
Dependent Claim
16 words
The sputtering target of claim 1, having an electrical resistivity no greater than about 3500 ohm-cm.
Claim 10
Independent Claim
140 words
A method of preparing an electrically conductive sputtering target, the method comprising the steps of: a) providing a green body comprising a sufficient amount of organic binder and a sufficient amount of yttria particles to provide after steps (b) and (c) an electrically conductive sputtering target comprising amorphous carbon and at least 35 volume percent yttria, based on the total volume of the target; b) pyrolyzing said green body to provide a pyrolyzed product; and c) firing said pyrolyzed product in a nonoxidizing atmosphere to provide an electrically conductive sputtering target comprising (i) at least 35 volume percent yttria, based on the total volume of the target, present as a porous structure having a series of interconnecting channels, and (ii) a substantially continuous amorphous carbon coating on internal surfaces of said porous structure such that said target is electrically conductive.
Claim 11
Independent Claim
140 words
A method of preparing an electrically conductive sputtering target, the method comprising the steps of: a) providing a green body comprising a sufficient amount of organic binder and a sufficient amount of yttria particles to provide after steps (b) and (c) an electrically conductive sputtering target comprising amorphous carbon and at least 35 volume percent yttria, based on the total volume of the target; b) pyrolyzing said green body to provide a pyrolyzed product; and c) firing said pyrolyzed product in a nonoxidizing atmosphere to provide an electrically conductive sputtering target comprising (i) at least 35 volume percent yttria, based on the total volume of the target, present as a porous structure having a series of interconnecting channels, and (ii) a substantially continuous amorphous carbon coating on internal surfaces of said porous structure such that said target is electrically conductive.
Claim 12
Dependent Claim
44 words
The method of claim 9, wherein said green body comprises a sufficient amount of said yttria particles to provide after step (b) an electrically conductive sputtering target comprising at least about 75 percent by weight yttria, based on the total weight of said target.
Claim 13
Dependent Claim
19 words
The method of claim 10 wherein said firing is conducted at a temperature no greater than about 1650° C.
Claim 14
Dependent Claim
28 words
The method of claim 10 wherein said organic binder is an organic resin selected from the group consisting of phenolic, polyphenylene, polymethylphenylene, coal tar pitch, and combinations thereof.
Claim 15
Dependent Claim
15 words
The method of claim 10 wherein said green body further comprises at least one stabilizer.
Claim 16
Dependent Claim
17 words
The method of claim 10 wherein said green body further comprises a stabilizer which is silicon carbide.
Claim 17
Dependent Claim
48 words
The method of claim 10 wherein said organic binder is present in an amount sufficient to provide after steps (b) and (c) said electrically conductive sputtering target with amorphous carbon in an amount from about 0.40 to about 2.5% by weight, based upon total weight of said target.
Claim 18
Dependent Claim
18 words
The method of claim 10 wherein said target has an electrical resistivity no greater than about 3500 ohm-cm.
Claim 19
Dependent Claim
51 words
An electrically conductive sputtering target comprising a substantially continuous pore network of yttria and a substantially continuous amorphous carbon coating on internal surfaces of said pore network such that said target is electrically conductive, said target comprising at least 35 volume percent yttria, based on the total volume of said target.
Claim 20
Dependent Claim
51 words
An electrically conductive sputtering target comprising a substantially continuous pore network of yttria and a substantially continuous amorphous carbon coating on internal surfaces of said pore network such that said target is electrically conductive, said target comprising at least 35 volume percent yttria, based on the total volume of said target.
Claim 21
Dependent Claim
26 words
The sputtering target of claim 17, comprising at least about 75 percent by weight of said yttria, based on the total weight of said sputtering target.
Claim 22
Dependent Claim
12 words
The sputtering target of claim 17 further comprising at least one stabilizer.
Claim 23
Dependent Claim
13 words
The sputtering target of claim 17 further comprising silicon carbide as a stabilizer.
Claim 24
Dependent Claim
31 words
The sputtering target of claim 20 wherein said silicon carbide is present in an amount no greater than about 30% by volume, based on the total volume of said sputtering target.
Claim 25
Dependent Claim
24 words
The sputtering target of claim 17 wherein said amorphous carbon coating has a thickness in the range from about 5 to about 200 Å.
Claim 26
Dependent Claim
30 words
The sputtering target of claim 17 wherein said amorphous carbon is present in the range from about 0.40 to about 2.5% by weight, based upon total weight of said target.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-12-25 | 1999-06-26 | 1999-12-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-12-25 | 2003-06-26 | 2003-12-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-12-25 | 2007-06-26 | 2007-12-26 | $7700.00 | Window Closed / Lapsed |