Drive transistor for CCD-type image sensor

Claim 2

A charge-coupled device type image sensor including a drive transistor comprising: a substrate of first conductivity type; a drain region of second conductivity type formed in a surface of said substrate; a source region of second conductivity type formed in said surface of said substrate spaced apart from said drain region; a depletion channel region of second conductivity type formed in said surface of said substrate between said drain region and said source region in contact with said drain region; a first gate electrode formed over said surface of said substrate between said source region and said drain region and overlaying a portion of said source region; and a second gate electrode, physically separate from said first gate electrode and electrically connected to said first electrode, formed over said surface of said substrate between said source region and said drain region and overlaying a portion of said depletion channel region.

Claim 3

A charge-coupled device type image sensor according to claim 1, further comprising an insulating layer formed over said first gate electrode; wherein said second gate electrode is formed over said insulating layer and overlays a portion of said first gate electrode.

Claim 4

A charge-coupled device type image sensor according to claim 1, wherein a first voltage applied to said drain region is greater than a second voltage applied to said first and second gate electrodes.

Claim 5

A charge-coupled device type image sensor according to claim 1, wherein an impurity concentration in said depletion channel region is less than that of said drain region.

Claim 6

A charge-coupled device type image sensor according to claim 1, wherein said drain region is formed with a first depth and said depletion channel region is formed with a second depth less than said first depth.

Claim 7

A charge-coupled device type image sensor including a drive transistor comprising: a substrate of first conductivity type; a drain region of second conductivity type formed in a surface of said substrate; a source region of second conductivity type formed in said surface of said substrate and spaced apart from said drain region; a buried drain region of second conductivity type having an impurity density less than the impurity density of said drain region formed below said surface of said substrate between said source region and said drain region in contact with said drain region; a surface depletion layer of first conductivity type, having an impurity concentration greater than said substrate, formed in said surface of said substrate between said drain region and said source region overlaying a portion of said buried drain region a gate electrode electrically formed over said substrate between said source region and said drain region such that said gate electrode overlays a portion of said source region and overlays a portion of said buried drain region.

Claim 8

A charge-coupled device type image sensor including a drive transistor comprising: a substrate of first conductivity type; a drain region of second conductivity type formed in a surface of said substrate; a source region of second conductivity type formed in said surface of said substrate and spaced apart from said drain region; a buried drain region of second conductivity type having an impurity density less than the impurity density of said drain region formed below said surface of said substrate between said source region and said drain region in contact with said drain region; a surface depletion layer of first conductivity type, having an impurity concentration greater than said substrate, formed in said surface of said substrate between said drain region and said source region overlaying a portion of said buried drain region a gate electrode electrically formed over said substrate between said source region and said drain region such that said gate electrode overlays a portion of said source region and overlays a portion of said buried drain region.