Patent US5470398A successfully refreshed from Google Patents.
US5470398A
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Dielectric thin film and method of manufacturing same
Assignee: Panasonic Holdings Corp
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Filing: 1991-09-23
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Granted: 1995-11-28
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Expires: 2011-09-23
Abstract
Abstract A dielectric film is provided which may be used as an insulating layer of a capacitor of a semiconductor DRAM. The dielectric film is comprised of three elements, namely, titanium, silicon and oxygen. The dielectric film has a high dielectric constant and a small leakage current. The film is manufactured from the raw materials of titanium chloride and silicon hydride, and at least one of O 2 , N 2 O, and a mixture of O 2 and N 2 O by plasma-decomposing the raw materials with the application of a strong electric field.
Inventors
- 👤 Munehiro Shibuya
- 👤 Masatoshi Kitagawa
- 👤 Takeshi Kamada
- 👤 Takashi Hirao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:58
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
60 words
A single dielectric film comprising oxides of titanium and silicon, said film having a high dielectric constant and a low leakage current resulting from a single step deposition by exposing a substrate to a plasma generated by simultaneously flowing titanium chloride, nitrogen, nitrous oxide and a monosilane into a vacuum chamber containing the substrate and means for creating said plasma.
Claim 2
Dependent Claim
60 words
A single dielectric film comprising oxides of titanium and silicon, said film having a high dielectric constant and a low leakage current resulting from a single step deposition by exposing a substrate to a plasma generated by simultaneously flowing titanium chloride, nitrogen, nitrous oxide and a monosilane into a vacuum chamber containing the substrate and means for creating said plasma.
Claim 3
Dependent Claim
39 words
A dielectric film comprising oxides of silicon and titanium said film deposited in a single step on a substrate by plasma chemical vapor deposition using titanium chloride and monosilane as reactants and nitrogen and nitrous oxide as carrier gases.
Claim 4
Dependent Claim
39 words
A dielectric film comprising oxides of silicon and titanium said film deposited in a single step on a substrate by plasma chemical vapor deposition using titanium chloride and monosilane as reactants and nitrogen and nitrous oxide as carrier gases.
Claim 5
Dependent Claim
48 words
A dielectric film deposited in a single step used as an insulating film of a capacitor in a semiconductor dynamic random access memory, said dielectric film comprises oxides of titanium and silicon with a dielectric constant about 20 and a leakage current about 10 -9 A/cm 2 .
Claim 6
Dependent Claim
48 words
A dielectric film deposited in a single step used as an insulating film of a capacitor in a semiconductor dynamic random access memory, said dielectric film comprises oxides of titanium and silicon with a dielectric constant about 20 and a leakage current about 10 -9 A/cm 2 .
Claim 7
Dependent Claim
37 words
A dielectric film of claim 3, wherein said dielectric film comprises oxides of silicon and titanium formed by plasma chemical vapor deposition using monosilane and titanium chloride simultaneously as reactants in a vacuum at least 0.4 torr.
Claim 8
Dependent Claim
34 words
A dielectric film of claim 1, wherein said dielectric constant is substantially similar to that of an SiO 2 film and said leakage current is substantially similar to that of a TiO 2 film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-11-27 | 1999-05-29 | 1999-11-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-11-27 | 2003-05-29 | 2003-11-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-11-27 | 2007-05-29 | 2007-11-28 | $7700.00 | Window Closed / Lapsed |