Method for chemical vapor deposition

Claim 1

A method of producing a coating on the surface of a heated base through a chemical reaction of a film forming component contained in a gas contacted with the heated base surface, which comprises: forming a high-velocity, V-shaped stream of a gas containing a film forming component comprising particles of at least one film forming substance selected from the group consisting of an organometal compound and a metal halide, at least one reaction gas selected from the group consisting of oxygen, hydrogen, ammonia and nitrogen, and a carrier gas by shooting said gas through a jetting means in the form of a high speed stream of gas at a velocity of 1-10 m/sec toward a base surface at an inclination of 20°-60° relative to the base surface and subjecting the shot gas before it contacts the base surface to the action of a high speed sucking stream of air produced by a suction means disposed downstream from said jetting means in the path of the flow of the gas, said sucking stream having a velocity of 1-10 m/sec; the ratio of the sucking velocity of the sucking stream of air to the shooting velocity of the gas being from 1.1 to 5.0; said V-shaped stream of gas having a bottom point vertex zone at an intermediate portion between said jetting means and said suction means and having a portion turned upward at an angle of 20°-45° relative to the base surface, and contacting the heated base surface at said bottom point vertex zone of the bent flow path thereby causing formation of a coating on the base with the film forming component.

Claim 2

A method of producing a coating on the surface of a heated base through a chemical reaction of a film forming component contained in a gas contacted with the heated base surface, which comprises: forming a high-velocity, V-shaped stream of a gas containing a film forming component comprising particles of at least one film forming substance selected from the group consisting of an organometal compound and a metal halide, at least one reaction gas selected from the group consisting of oxygen, hydrogen, ammonia and nitrogen, and a carrier gas by shooting said gas through a jetting means in the form of a high speed stream of gas at a velocity of 1-10 m/sec toward a base surface at an inclination of 20°-60° relative to the base surface and subjecting the shot gas before it contacts the base surface to the action of a high speed sucking stream of air produced by a suction means disposed downstream from said jetting means in the path of the flow of the gas, said sucking stream having a velocity of 1-10 m/sec; the ratio of the sucking velocity of the sucking stream of air to the shooting velocity of the gas being from 1.1 to 5.0; said V-shaped stream of gas having a bottom point vertex zone at an intermediate portion between said jetting means and said suction means and having a portion turned upward at an angle of 20°-45° relative to the base surface, and contacting the heated base surface at said bottom point vertex zone of the bent flow path thereby causing formation of a coating on the base with the film forming component.

Claim 11

A method of producing a coating on the surface of a heated base through a chemical reaction of a film forming component contained in a gas contacted with the heated base surface, and which comprises: forming a V-shaped stream of a gas containing a film forming component by shooting the gas through a jetting means toward a heated base surface and simultaneously subjecting the shot gas to the action of a high speed sucking stream, said V-shaped stream of gas having a bottom point vertex zone, and contacting the heated base surface with the gas at the bottom point vertex zone, thereby causing formation of a coating on the base with the film-forming component.

Claim 12

A method of producing a coating on the surface of a heated base through a chemical reaction of a film forming component contained in a gas contacted with the heated base surface, and which comprises: forming a V-shaped stream of a gas containing a film forming component by shooting the gas through a jetting means toward a heated base surface and simultaneously subjecting the shot gas to the action of a high speed sucking stream, said V-shaped stream of gas having a bottom point vertex zone, and contacting the heated base surface with the gas at the bottom point vertex zone, thereby causing formation of a coating on the base with the film-forming component.