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US5468324A
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Spin-on and peel polymer film method of data recording duplication and micro-structure fabrication
Assignee: INTERMAG Inc
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Filing: 1994-03-08
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Granted: 1995-11-21
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Expires: 2014-03-08
Abstract
Abstract An embodiment of the present invention is a process in which a polymer solution is spin coated onto a master data recording disk, such as glass substrate with photoresist images, before separating. After drying and forming polymer, a polymer membrane results which is a faithful reproduction of micron-sized optical recording features on the surface of the master. Such membrane is either peeled-off and mounted to a pellicle-like frame or first laminated to a stiffer, stronger substrate before peeling to support the duplicate.
Inventors
- 👤 Gilbert H. Hong
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 13:02
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/26; G03F1/34; B; B29; B29C; B29C37/00; B29C37/0053; B29C41/00; B29C41/02; B29C41/04; B29C41/042; B29C41/045; B29D; B29D17/00; B29D17/005; B29L; B29L2017/00; B29L2017/001; B29L2017/003; B29L2017/005
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
110 words
A method of manufacturing optical data storage disks from a master recording disk that has physical surface features which represent data, comprising the steps of: creating a first plurality of physical surface features that correspond to data onto a surface of a master recording disk; preparing a liquid solution of polymers; spinning-on said solution onto said master recording disk while rotating; drying said solution on said master recording disk; and peeling-off a polymer film formed from a drying of said solution on said master recording disk, wherein said peeled-off film has a second plurality of physical surface features duplicating said data embodied in said surface of the master recording disk.
Claim 2
Independent Claim
110 words
A method of manufacturing optical data storage disks from a master recording disk that has physical surface features which represent data, comprising the steps of: creating a first plurality of physical surface features that correspond to data onto a surface of a master recording disk; preparing a liquid solution of polymers; spinning-on said solution onto said master recording disk while rotating; drying said solution on said master recording disk; and peeling-off a polymer film formed from a drying of said solution on said master recording disk, wherein said peeled-off film has a second plurality of physical surface features duplicating said data embodied in said surface of the master recording disk.
Claim 3
Dependent Claim
35 words
The process of claim 1, wherein: the stem of preparing of said liquid polymer solution includes using at least one of nitrocellulose, polyvinyl, polyester or polymethylmethacrylate, fluoropolymers and silicone products in a suitable polymer solvent.
Claim 4
Dependent Claim
36 words
The process of claim 1, wherein: the step of spinning-on of said liquid polymer solution includes the use of a spinner rotating in the range of several hundred revolutions per minute (RPM) to several thousand RPM.
Claim 5
Dependent Claim
37 words
The process of claim 1, wherein: the step of peeling-off of said polymer film is preceded by a lamination of a substrate to said dried polymer film to support it during and after the step of peeling-off.
Claim 6
Dependent Claim
37 words
The process of claim 1, wherein: the step of peeling-off of said polymer film is succeeded by a mounting of said dried and peeled-off polymer film to a ring frame for support and elimination of film distortions.
Claim 7
Independent Claim
98 words
A method of manufacturing phase shift masks from a mask that has physical surface features which represent an integrated circuit design, comprising the steps of: creating a first plurality of physical surface features that correspond to an integrated circuit design pattern on a surface of a master mask: preparing a liquid solution of polymers; spinning-on said solution onto master mask while rotating; drying said solution on said mask; and peeling-off a polymer film formed from a drying of said solution on said master mask, wherein said peeled-off film has physical surface features duplicating said integrated circuit design pattern.
Claim 8
Independent Claim
98 words
A method of manufacturing phase shift masks from a mask that has physical surface features which represent an integrated circuit design, comprising the steps of: creating a first plurality of physical surface features that correspond to an integrated circuit design pattern on a surface of a master mask: preparing a liquid solution of polymers; spinning-on said solution onto master mask while rotating; drying said solution on said mask; and peeling-off a polymer film formed from a drying of said solution on said master mask, wherein said peeled-off film has physical surface features duplicating said integrated circuit design pattern.
Claim 9
Dependent Claim
86 words
An optical-performance enhancement method for manufacturing an all-polymeric phase shift mask having one or more featured layers of polymeric material made by a process comprising the steps of: creating a first plurality of physical surface features that correspond to a pattern on a surface of a master mask; preparing a liquid solution of polymers; spinning-on said solution onto said master mask while rotating; drying said solution on said master mask; and peeling-off a polymer film formed from a drying of said solution on said master mask.
Claim 10
Dependent Claim
86 words
An optical-performance enhancement method for manufacturing an all-polymeric phase shift mask having one or more featured layers of polymeric material made by a process comprising the steps of: creating a first plurality of physical surface features that correspond to a pattern on a surface of a master mask; preparing a liquid solution of polymers; spinning-on said solution onto said master mask while rotating; drying said solution on said master mask; and peeling-off a polymer film formed from a drying of said solution on said master mask.
Claim 11
Dependent Claim
28 words
The method of claim 7, comprising the further step of: applying an antireflective coating to said polymer film providing for an optical performance enhancement of said polymer film.
Claim 12
Independent Claim
96 words
A method for duplicating micro-structures from a master that has surface features which represent such micro-structures, comprising the steps of: creating a first plurality of physical surface features that correspond to a pattern on a surface of a planar microstructure master; preparing a liquid solution of polymers; spinning-on said solution onto said planar micro-structure master while rotating; drying said solution on said master; and peeling-off a polymer film formed from a drying of said solution on said master, wherein said peeled-off film has physical surface features duplicating said micro-structures embodied in said surface of said master.
Claim 13
Independent Claim
96 words
A method for duplicating micro-structures from a master that has surface features which represent such micro-structures, comprising the steps of: creating a first plurality of physical surface features that correspond to a pattern on a surface of a planar microstructure master; preparing a liquid solution of polymers; spinning-on said solution onto said planar micro-structure master while rotating; drying said solution on said master; and peeling-off a polymer film formed from a drying of said solution on said master, wherein said peeled-off film has physical surface features duplicating said micro-structures embodied in said surface of said master.
Claim 14
Dependent Claim
30 words
The process of claim 9, further comprising the preliminary step of: imaging a microcuvette on said master, wherein a system of cuvettes are ultimately duplicated in said peeled-off polymer film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-11-20 | 1999-05-22 | 1999-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-11-20 | 2003-05-22 | 2003-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-11-20 | 2007-05-22 | 2007-11-21 | $7700.00 | Window Closed / Lapsed |