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Nonlinear optical materials and their manufacturing method

Assignee: Panasonic Holdings Corp
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Filing: 1994-08-11
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Granted: 1995-10-03
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Expires: 2014-08-11
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Abstract

Abstract This invention is directed to new non-linear optical materials and methods for manufacturing these materials. A new materials are non-oxide amorphous thin films which are doped with semiconductor microcrystallites. The use of non-oxide materials as the amorphous thin film prevents the occurrence of undesirable chemical reactions, such as the oxidation of the semiconductor microcrystallites doped therein. The disclosed materials may be manufactured by simultaneously sputtering a target of the selected semiconductor material and a target of the non-oxide amorphous material. Alternatively, reactive sputtering in a non-oxide gas environment may be utilized to deposit the non-oxide amorphous material doped with semiconductor microcrystallites.

Inventors

  • 👤 Yoshio Manabe
  • 👤 Ichiro Tanahashi
  • 👤 Tsuneo Mitsuyu

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 06:47
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/35; G02F1/355; G02F1/3551

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 43 words
An optical material comprising an amorphous layer selected from the group consisting of nitrides and carbides, other than silicon carbide, and semiconductor micro-crystallites having a size less than about 10 nanometers dispersed within said amorphous layer, said optical material exhibiting non-linear optical properties.
Claim 2
Dependent Claim 43 words
An optical material comprising an amorphous layer selected from the group consisting of nitrides and carbides, other than silicon carbide, and semiconductor micro-crystallites having a size less than about 10 nanometers dispersed within said amorphous layer, said optical material exhibiting non-linear optical properties.
Claim 3
Dependent Claim 26 words
An optical material in accordance with claim 1 wherein the optical bandgap of said amorphous layer is greater than the optical bandgap of said semiconductor micro-crystallites.
Claim 4
Dependent Claim 24 words
An optical material in accordance with claim 1, wherein said amorphous layer is selected from the group consisting of boron carbide and titanium carbide.
Claim 5
Dependent Claim 50 words
An optical material comprising an amorphous layer, and semi-conductor micro-crystallites having a size less than about 10 nanometers dispersed within said amorphous layer, said optical material exhibiting non-linear optical properties, wherein said amorphous layer is selected from the group consisting of boron nitride, aluminum nitride, titanium nitride and silicon nitride.
Claim 6
Dependent Claim 50 words
An optical material comprising an amorphous layer, and semi-conductor micro-crystallites having a size less than about 10 nanometers dispersed within said amorphous layer, said optical material exhibiting non-linear optical properties, wherein said amorphous layer is selected from the group consisting of boron nitride, aluminum nitride, titanium nitride and silicon nitride.

References Cited (Backward Citations)

US5017308A Cited
US5021103A Cited
US4957604A Cited
US5103284A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-10-02 1999-04-03 1999-10-03 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-10-02 2003-04-03 2003-10-03 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-10-02 2007-04-03 2007-10-03 $7700.00 Window Closed / Lapsed

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