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US5453652A
Expired / Lapsed
US
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Surface acoustic wave device with interdigital transducers formed on a holding substrate thereof and a method of producing the same
Assignee: Panasonic Holdings Corp
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Filing: 1993-12-16
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Granted: 1995-09-26
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Expires: 2013-12-16
Abstract
Abstract A surface acoustic wave device includes: a holding substrate; a piezoelectric substrate; an interdigital transducer formed on the holding substrate; and supports for holding said piezoelectric substrate on the holding substrate so that the interdigital transducer is evenly in contact with the piezoelectric substrate.
Inventors
- 👤 Kazuo Eda
- 👤 Yutaka Taguchi
- 👤 Keiji Onishi
- 👤 Shun-ichi Seki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 18:48
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/05; H03H9/10; H03H9/1064; H03H9/1092
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
101 words
A surface acoustic wave device comprising: a holding substrate; a piezoelectric substrate; an interdigital transducer formed on said holding substrate; and means, provided between said holding substrate and said piezoelectric substrate, for holding said piezoelectric substrate on said interdigital transducer so that said interdigital transducer is evenly in contact with said piezoelectric substrate and excites a surface acoustic wave on a surface of said piezoelectric substrate, wherein said holding means is bonded with one of said holding substrate and said piezoelectric substrate through at least one of covalent bonding with oxygen atoms and hydrogen bonding with hydroxyl groups by direct bonding.
Claim 2
Dependent Claim
101 words
A surface acoustic wave device comprising: a holding substrate; a piezoelectric substrate; an interdigital transducer formed on said holding substrate; and means, provided between said holding substrate and said piezoelectric substrate, for holding said piezoelectric substrate on said interdigital transducer so that said interdigital transducer is evenly in contact with said piezoelectric substrate and excites a surface acoustic wave on a surface of said piezoelectric substrate, wherein said holding means is bonded with one of said holding substrate and said piezoelectric substrate through at least one of covalent bonding with oxygen atoms and hydrogen bonding with hydroxyl groups by direct bonding.
Claim 3
Dependent Claim
46 words
A surface acoustic wave device according to claim 1, wherein said holding substrate has a recess and protrusions formed by said recess, said interdigital transducer is formed on a recessed position of said holding substrate, and said holding means includes said protrusions of said holding substrate.
Claim 4
Dependent Claim
47 words
A surface acoustic wave device according to claim 1, wherein said piezoelectric substrate has a recess and protrusions formed by said recess, said interdigital transducer is in contact with a recessed position of said piezoelectric substrate, and said holding means includes said protrusions of said piezoelectric substrate.
Claim 5
Dependent Claim
18 words
A surface acoustic wave device according to claim 1, wherein said holding means includes at least one spacer.
Claim 6
Dependent Claim
52 words
A surface acoustic wave device according to claim 1, wherein the thermal expansion coefficients of said holding substrate is smaller than the thermal expansion coefficient of said piezoelectric substrate, and said piezoelectric substrate is made of a material selected from the group consisting of lithium niobate, lithium tantalate, lithium borate and quartz.
Claim 7
Dependent Claim
32 words
A surface acoustic wave device according to claim 1, wherein said piezoelectric substrate is made of a material selected from the group consisting of lithium niobate, lithium tantalate, lithium borate and quartz.
Claim 8
Dependent Claim
21 words
A surface acoustic wave device according to claim 1, wherein said holding substrate is made of one of glass and silicon.
Claim 9
Dependent Claim
37 words
A surface acoustic wave device according to claim 1, wherein an air gap formed by said holding substrate and said piezoelectric substrate is sealed by a hermetic sealing adhesive, thereby hermetically sealing at least said interdigital transducer.
Claim 10
Dependent Claim
98 words
A surface acoustic wave device comprising: a holding substrate; a piezoelectric substrate; an interdigital transducer formed on said holding substrate; and means, provided between said holding substrate and said piezoelectric substrate for holding said piezoelectric substrate above said interdigital transducer with an air gap interposed therebetween so that said interdigital transducer excites a surface acoustic wave on a surface of said piezoelectric substrate, wherein said holding means is bonded with one of said holding substrate and said piezoelectric substrate through at least one of covalent bonding with oxygen atoms and hydrogen bonding with hydroxyl groups by direct bonding.
Claim 11
Dependent Claim
98 words
A surface acoustic wave device comprising: a holding substrate; a piezoelectric substrate; an interdigital transducer formed on said holding substrate; and means, provided between said holding substrate and said piezoelectric substrate for holding said piezoelectric substrate above said interdigital transducer with an air gap interposed therebetween so that said interdigital transducer excites a surface acoustic wave on a surface of said piezoelectric substrate, wherein said holding means is bonded with one of said holding substrate and said piezoelectric substrate through at least one of covalent bonding with oxygen atoms and hydrogen bonding with hydroxyl groups by direct bonding.
Claim 12
Dependent Claim
46 words
A surface acoustic wave device according to claim 9, wherein said holding substrate has a recess and protrusions formed by said recess, said interdigital transducer is formed on a recessed position of said holding substrate, and said holding means includes said protrusions of said holding substrate.
Claim 13
Dependent Claim
33 words
A surface acoustic wave device according to claim 9, wherein said piezoelectric substrate has a recess and protrusions formed by said recess, and said holding means includes said protrusions of said piezoelectric substrate.
Claim 14
Dependent Claim
18 words
A surface acoustic wave device according to claim 9, wherein said holding means includes at least one spacer.
Claim 15
Dependent Claim
52 words
A surface acoustic wave device according to claim 9, wherein the thermal expansion coefficients of said holding substrate is smaller than the thermal expansion coefficient of said piezoelectric substrate, and said piezoelectric substrate is made of a material selected from the group consisting of lithium niobate, lithium tantalate, lithium borate and quartz.
Claim 16
Dependent Claim
32 words
A surface acoustic wave device according to claim 9, wherein said piezoelectric substrate is made of a material selected from the group consisting of lithium niobate, lithium tantalate, lithium borate and quartz.
Claim 17
Dependent Claim
21 words
A surface acoustic wave device according to claim 9, wherein said holding substrate is made of one of glass and silicon.
Claim 18
Dependent Claim
35 words
A surface acoustic wave device according to claim 9, wherein an air gap formed by said holding substrate and said piezoelectric substrate is sealed by a hermetic sealing adhesive thereby hermetically sealing said interdigital transducer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-09-25 | 1999-03-27 | 1999-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-09-25 | 2003-03-27 | 2003-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-09-25 | 2007-03-27 | 2007-09-26 | $7700.00 | Window Closed / Lapsed |