Patent US5448364A successfully refreshed from Google Patents.
US5448364A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Particle detection system with reflective line-to-spot collector
Assignee: ADE Optical Systems Corp
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Filing: 1993-03-22
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Granted: 1995-09-05
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Expires: 2013-03-22
Abstract
Abstract The surface inspection system has a scanning head for scanning the laser beam along a predetermined scan line across the surface of an article. A collector receives the light reflected from the article surface along the scan line. The collector has a first mirror position for receiving light reflected from the article surface, a second mirror oriented with respect to the first mirror to receive light reflected from the first mirror, and the first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot. A photodetector is positioned for receiving the thus formed spot of light. The method of inspecting the surface of an article includes the steps of scanning a laser beam along a predetermined scan line across the surface of the article, collectively receiving the light reflected from the article surface along the scan line with a plurality of mirrors so as to concentrate the reflected light from a line into a spot.
Inventors
- 👤 Kevin E. Moran
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 04:52
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/94
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
119 words
A surface inspection system, comprising: means for scanning a laser beam along a predetermined scan line across the surface of an article; a collector for receiving light reflected from the article surface along said scan line, said collector comprising a first mirror positioned for receiving light reflected from the article surface, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented to reflect light from each of the first and second mirrors a plurality of times so as to concentrate the reflected light from a line into a spot; and a photodetector positioned for receiving the thus formed spot of light.
Claim 2
Dependent Claim
119 words
A surface inspection system, comprising: means for scanning a laser beam along a predetermined scan line across the surface of an article; a collector for receiving light reflected from the article surface along said scan line, said collector comprising a first mirror positioned for receiving light reflected from the article surface, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented to reflect light from each of the first and second mirrors a plurality of times so as to concentrate the reflected light from a line into a spot; and a photodetector positioned for receiving the thus formed spot of light.
Claim 3
Dependent Claim
32 words
A surface inspection system according to claim 1, wherein at least one of said mirrors is curved so that the line of reflected light received thereon is focused into a predetermined spot.
Claim 4
Dependent Claim
41 words
A surface inspection system according to claim 1, wherein said first mirror is curved and said second mirror is flat, and the curvature of said first mirror causes the light along said scan line to be focused into a predetermined spot.
Claim 5
Dependent Claim
53 words
A surface inspection system according to claim 1, further comprising means for splitting the light reflected into a spot into first and second light paths, a second photodetector in addition to said first mentioned photodetector, and wherein said first and second photodetectors detect the respective light from said first and second light paths.
Claim 6
Dependent Claim
53 words
A surface inspection system according to claim 4, further comprising a first spatial filter positioned between said beam splitting means and said first photodetector for detecting only the specular field light and a second spatial filter positioned between said beam splitting means and said second photodetector for detecting only the near field light.
Claim 7
Dependent Claim
36 words
A surface inspection system according to claim 1, further comprising an edge detector positioned below the underside of the article for detecting the edges of the article as the laser beam scans across the surface thereof.
Claim 8
Dependent Claim
68 words
A surface inspection system according to claim 6, wherein said edge detector comprises a first mirror positioned for receiving light scattered from the edges of the article, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot.
Claim 9
Dependent Claim
17 words
A surface inspection system according to claim 1, wherein said laser scanning means comprises a scanning head.
Claim 10
Dependent Claim
68 words
A surface inspection system according to claim 8, wherein said laser scanning means further comprises a first mirror positioned for receiving light from said scanning head, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to reflectively form a scan line across the surface of the article.
Claim 11
Dependent Claim
169 words
A surface inspection system, comprising: means for scanning a laser beam along a predetermined scan line across the surface of an article; a collector for receiving light reflected from the article surface along said scan line, said collector comprising a folded optical cell having a first mirror positioned for receiving light reflected from the article surface, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, at least one of said first and second mirrors being curved, said first and second mirrors of said folded optical cell being configured and oriented to reflect light from each of the first and second mirrors a plurality of times so as to concentrate the reflected light from a line into a spot; means positionally aligned with said folded optical cell for splitting the concentrated light reflected into a spot into first and second light paths; and first and second photodetectors positioned for receiving the respective light from said first and second light paths.
Claim 12
Dependent Claim
169 words
A surface inspection system, comprising: means for scanning a laser beam along a predetermined scan line across the surface of an article; a collector for receiving light reflected from the article surface along said scan line, said collector comprising a folded optical cell having a first mirror positioned for receiving light reflected from the article surface, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, at least one of said first and second mirrors being curved, said first and second mirrors of said folded optical cell being configured and oriented to reflect light from each of the first and second mirrors a plurality of times so as to concentrate the reflected light from a line into a spot; means positionally aligned with said folded optical cell for splitting the concentrated light reflected into a spot into first and second light paths; and first and second photodetectors positioned for receiving the respective light from said first and second light paths.
Claim 13
Dependent Claim
53 words
A surface inspection system according to claim 10, further comprising a first spatial filter positioned between said beam splitting means and said first photodetector for detecting only the specular field light and a second spatial filter positioned between said beam splitting means and said second photodetector for detecting only the near field light.
Claim 14
Dependent Claim
41 words
A surface inspection system according to claim 10, wherein said first mirror is curved and said second mirror is flat, and the curvature of said first mirror causes the light along said scan line to be focused into a predetermined spot.
Claim 15
Dependent Claim
17 words
A surface inspection system according to claim 10, wherein said laser scanning means comprises a scanning head.
Claim 16
Dependent Claim
68 words
A surface inspection system according to claim 13, wherein said laser scanning means further comprises a first mirror positioned for receiving light from said scanning head, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to reflectively form a scan line across the surface of the article.
Claim 17
Dependent Claim
36 words
A surface inspection system according to claim 10, further comprising an edge detector positioned below the underside of the article for detecting the edges of the article as the laser beam scans across the surface thereof.
Claim 18
Dependent Claim
68 words
A surface inspection system according to claim 15, wherein said edge detector comprises a first mirror positioned for receiving light scattered from the edges of the article, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot.
Claim 19
Dependent Claim
206 words
A surface inspection system, comprising: means for scanning a laser beam along a predetermined scan line across the surface of an article, said laser scanning means comprising a scanning head, a first mirror positioned for receiving light from said scanning head, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented to reflect light from each of the first and second mirrors a plurality of times so as to reflectively form the scan line across the surface of the article; an edge detector positioned below the underside of the article for detecting the edges of the article as the laser beam scans across the surface thereof; a collector for receiving light reflected from the article surface along said scan line, said collector comprising a first mirror positioned for receiving light reflected from the article surface, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot; and a photodetector positioned for receiving the thus formed spot of light.
Claim 20
Dependent Claim
206 words
A surface inspection system, comprising: means for scanning a laser beam along a predetermined scan line across the surface of an article, said laser scanning means comprising a scanning head, a first mirror positioned for receiving light from said scanning head, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented to reflect light from each of the first and second mirrors a plurality of times so as to reflectively form the scan line across the surface of the article; an edge detector positioned below the underside of the article for detecting the edges of the article as the laser beam scans across the surface thereof; a collector for receiving light reflected from the article surface along said scan line, said collector comprising a first mirror positioned for receiving light reflected from the article surface, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot; and a photodetector positioned for receiving the thus formed spot of light.
Claim 21
Dependent Claim
68 words
A surface inspection system according to claim 17, wherein said edge detector comprises a first mirror positioned for receiving light scattered from the edges of the article, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot.
Claim 22
Dependent Claim
32 words
A surface inspection system according to claim 17, wherein at least one of said mirrors is curved so that the line of reflected light received thereon is focused into a predetermined spot.
Claim 23
Dependent Claim
41 words
A surface inspection system according to claim 17, wherein said first mirror is curved and said second mirror is flat, and the curvature of said first mirror causes the light along said scan line to be focused into a predetermined spot.
Claim 24
Dependent Claim
53 words
A surface inspection system according to claim 17, further comprising means for splitting the light reflected into a spot into first and second light paths, a second photodetector in addition to said first mentioned photodetector, and wherein said first and second photodetectors detect the respective light from said first and second light paths.
Claim 25
Dependent Claim
53 words
A surface inspection system according to claim 21, further comprising a first spatial filter positioned between said beam splitting means and said first photodetector for detecting only the specular field light and a second spatial filter positioned between said beam splitting means and said second photodetector for detecting only the near field light.
Claim 26
Dependent Claim
108 words
A surface inspection system, comprising: means for scanning a laser beam along a predetermined scan line across the surface of an article; and an edge detector positioned below the underside of the article for detecting the edges of the article as the laser beam scans along the surface thereof, said edge detector comprising a first mirror positioned for receiving light scattered from the edges of the article, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot.
Claim 27
Dependent Claim
108 words
A surface inspection system, comprising: means for scanning a laser beam along a predetermined scan line across the surface of an article; and an edge detector positioned below the underside of the article for detecting the edges of the article as the laser beam scans along the surface thereof, said edge detector comprising a first mirror positioned for receiving light scattered from the edges of the article, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot.
Claim 28
Dependent Claim
31 words
A surface inspection system according to claim 23, wherein said edge detector further comprises a photodetector positioned adjacent said first and second mirrors for receiving the thus formed spot of light.
Claim 29
Dependent Claim
17 words
A surface inspection system according to claim 23, wherein said laser scanning means comprises a scanning head.
Claim 30
Dependent Claim
68 words
A surface inspection system according to claim 25, wherein said laser scanning means further comprises a first mirror positioned for receiving light from said scanning head, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to reflectively form a scan line across the surface of the article.
Claim 31
Dependent Claim
190 words
A surface inspection system, comprising: means for scanning a laser beam along a predetermined scan line across the surface of an article, said laser scanning means comprising a scanning head, a first mirror positioned for receiving light from said scanning head, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to reflectively form the scan line across the surface of the article; an edge detector positioned below the underside of the article for detecting the edges of the article as the laser beam scans along the surface thereof, said edge detector comprising a first mirror positioned for receiving light scattered from the edges of the article, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot; and a photodetector positioned adjacent said first and second mirrors of said edge detector for receiving the thus formed spot of light.
Claim 32
Dependent Claim
190 words
A surface inspection system, comprising: means for scanning a laser beam along a predetermined scan line across the surface of an article, said laser scanning means comprising a scanning head, a first mirror positioned for receiving light from said scanning head, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to reflectively form the scan line across the surface of the article; an edge detector positioned below the underside of the article for detecting the edges of the article as the laser beam scans along the surface thereof, said edge detector comprising a first mirror positioned for receiving light scattered from the edges of the article, and a second mirror oriented with respect to said first mirror to receive light reflected from said first mirror, said first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot; and a photodetector positioned adjacent said first and second mirrors of said edge detector for receiving the thus formed spot of light.
Claim 33
Independent Claim
81 words
A method of inspecting the surface of a article for particles or flaws, comprising the steps of: scanning a laser beam along a predetermined scan line across the surface of a article; and collectively receiving light reflected from the article surface along the scan line with a plurality of mirrors being configured and oriented to reflect light from each of the plurality of mirrors a plurality of times so as to concentrate the reflected light from a line into a spot.
Claim 34
Independent Claim
81 words
A method of inspecting the surface of a article for particles or flaws, comprising the steps of: scanning a laser beam along a predetermined scan line across the surface of a article; and collectively receiving light reflected from the article surface along the scan line with a plurality of mirrors being configured and oriented to reflect light from each of the plurality of mirrors a plurality of times so as to concentrate the reflected light from a line into a spot.
Claim 35
Dependent Claim
34 words
A method according to claim 28, further comprising the step of detecting the concentrated light with a photodetector so as to determined the presence of particles or flaws on the surface of the article.
Claim 36
Dependent Claim
49 words
A method according to claim 28, further comprising the steps of: splitting the concentrated light into two light paths; filtering the two light paths so as to define a specular field and a near field; and detecting the specular field light and the near field light with respective photodetectors.
Claim 37
Dependent Claim
26 words
A method according to claim 28, further comprising the step of: detecting the edges of the article as the laser beam scans across the surface thereof.
Claim 38
Independent Claim
146 words
A method of inspecting the surface of a article for particles or flaws, comprising the steps of: scanning a laser beam along a predetermined scan line across the surface of an article; detecting the edges of the article as the laser beam scans across the surface thereof; collectively receiving light reflected from the article surface along the scan line with a plurality of mirrors so as to concentrate the reflected light from a line into a spot; splitting the concentrated light into two light paths; filtering the two light paths so as to define a specular field and a near field; detecting the specular field light and the near field light with respective photodetectors; and combining the output of the specular field photodetector and the output of the near field photodetector to thereby improve the recognition of flaws or defects on the surface of the article.
Claim 39
Independent Claim
146 words
A method of inspecting the surface of a article for particles or flaws, comprising the steps of: scanning a laser beam along a predetermined scan line across the surface of an article; detecting the edges of the article as the laser beam scans across the surface thereof; collectively receiving light reflected from the article surface along the scan line with a plurality of mirrors so as to concentrate the reflected light from a line into a spot; splitting the concentrated light into two light paths; filtering the two light paths so as to define a specular field and a near field; detecting the specular field light and the near field light with respective photodetectors; and combining the output of the specular field photodetector and the output of the near field photodetector to thereby improve the recognition of flaws or defects on the surface of the article.
References Cited (Backward Citations)
GB180929A
Cited
GB180930A
Cited
US3575668A
Cited
US3663824A
Cited
US3782803A
Cited
US3748014A
Cited
US3790287A
Cited
US3825325A
Cited
US3843890A
Cited
US3900265A
Cited
US3973833A
Cited
US3961838A
Cited
US4054361A
Cited
US4116527A
Cited
US4108533A
Cited
US4158507A
Cited
US4248537A
Cited
US4264208A
Cited
US4314763A
Cited
US4213157A
Cited
US4423331A
Cited
US4321628A
Cited
US4360275A
Cited
US4355860A
Cited
US4378159A
Cited
US4376583A
Cited
US4568835A
Cited
US4601576A
Cited
US4655592A
Cited
US4732473A
Cited
US4630276A
Cited
EP0178037A2
Cited
US4693601A
Cited
US4775238A
Cited
US4866288A
Cited
US4795911A
Cited
US4893932A
Cited
US4893932B1
Cited
US4806774A
Cited
US4898471A
Cited
US5046847A
Cited
US4875780A
Cited
US5278012A
Cited
US5127726A
Cited
US5030842A
Cited
US5076692A
Cited
US5084883A
Cited
US5220403A
Cited
US5088105A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-09-04 | 1999-03-06 | 1999-09-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-09-04 | 2003-03-06 | 2003-09-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-09-04 | 2007-03-06 | 2007-09-05 | $7700.00 | Window Closed / Lapsed |