Patent US3914889A successfully refreshed from Google Patents.
Patent US5445172A successfully refreshed from Google Patents.
US5445172A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer holder with flexibly mounted gripping fingers
Assignee: Semitool Inc
•
Filing: 1993-03-08
•
Granted: 1995-08-29
•
Expires: 2013-03-08
Abstract
Abstract A single wafer processing apparatus includes a portable processing head that can be a portable module or a movable unit mounted to a supporting machine frame. The processing head has movable fingers adapted to grip a wafer. The fingers protrude from a protective wafer plate. Indexing and rotation monitoring assemblies are provided for automation of the wafer processing steps. A complementary processing base includes an upwardly-open bowl that receives a wafer held by the portable processing head. It has a full-diameter movable bottom wall for rapid draining purposes. Liquid and/or gas jets and nozzles supply fluids required within the bowl for processing of wafers.
Inventors
- 👤 Raymon F. Thompson
- 👤 Aleksander Owczarz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:14
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7608; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0422; H10P72/0424; H10P72/0426; H10P72/7602; H10P72/7624; G; G11; G11B; G11B7/00; G11B7/24; G11B7/26; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 93
Claim 1
Independent Claim
119 words
A wafer holder for holding a wafer, such as semiconductor wafers, substrates, magnetic disks, or optical disks, during processing, comprising: a wafer support member; at least one wafer gripping finger having an inner end and an outer end; said outer end extending to engage and support a wafer along peripheral edges thereof; at least one flexible supporting diaphragm connecting the at least one wafer gripping finger to the wafer support member to allow angular displacement of the wafer gripping finger; said at least one flexible Supporting diaphragm being integrally connected with portions of the wafer gripping finger; at least one finger actuator connected to operate said at least one wafer gripping finger for angularly displacing the wafer gripping finger.
Claim 2
Dependent Claim
119 words
A wafer holder for holding a wafer, such as semiconductor wafers, substrates, magnetic disks, or optical disks, during processing, comprising: a wafer support member; at least one wafer gripping finger having an inner end and an outer end; said outer end extending to engage and support a wafer along peripheral edges thereof; at least one flexible supporting diaphragm connecting the at least one wafer gripping finger to the wafer support member to allow angular displacement of the wafer gripping finger; said at least one flexible Supporting diaphragm being integrally connected with portions of the wafer gripping finger; at least one finger actuator connected to operate said at least one wafer gripping finger for angularly displacing the wafer gripping finger.
Claim 3
Dependent Claim
17 words
A wafer holder according to claim 1 wherein the flexible supporting diaphragm surrounds the wafer gripping finger.
Claim 4
Dependent Claim
28 words
A wafer holder according to claim 1 wherein the wafer gripping finger has a notch along the outer end to receive a peripheral edge of the wafer therein.
Claim 5
Dependent Claim
19 words
A wafer holder according to claim 1 wherein the finger actuator is pivotally connected to the wafer gripping finger.
Claim 6
Dependent Claim
15 words
A wafer holder according to claim 1 wherein the wafer gripping finger has two parts.
Claim 7
Dependent Claim
34 words
A wafer holder according to claim 1 wherein the wafer gripping finger has an outer end part connected to the flexible supporting diaphragm and an inner end part which connects with the finger actuator.
Claim 8
Dependent Claim
35 words
A wafer holder according to claim 1 wherein the wafer gripping finger has an outer end part integrally connected to the flexible supporting diaphragm and an inner end part which connects with the finger actuator.
Claim 9
Dependent Claim
22 words
A wafer holder according to claim 1 wherein the finger actuator includes a linkage bar pivotally connected to the wafer gripping finger.
Claim 10
Dependent Claim
34 words
A wafer holder according to claim 1 wherein the finger actuator includes a linkage bar pivotally connected to the wafer gripping finger, said linkage bar also being pivotally connected to the wafer support member.
Claim 11
Dependent Claim
23 words
A wafer holder according to claim 1 wherein the finger actuator includes a biasing means for biasing the finger into a desired position.
Claim 12
Dependent Claim
39 words
A wafer holder according to claim 1 wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar.
Claim 13
Dependent Claim
16 words
A wafer holder according to claim 1 wherein there are a plurality of wafer gripping fingers.
Claim 14
Dependent Claim
25 words
A wafer holder according to claim 1 wherein there are a plurality of wafer gripping fingers arranged to contract or expand in a coordinated manner.
Claim 15
Dependent Claim
24 words
A wafer holder according to claim 1 wherein the flexible supporting diaphragm is retained to the wafer support member using a detachable retaining ring.
Claim 16
Dependent Claim
28 words
A wafer holder according to claim 1 wherein the flexible supporting diaphragm comprises a seal which seals with the wafer support member to impede movement of processing fluids.
Claim 17
Dependent Claim
50 words
A wafer holder according to claim 46 wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar; a biasing means for biasing the finger into a desired position.
Claim 18
Dependent Claim
119 words
A wafer holder for holding a wafer, such as semiconductor wafers, substrates, magnetic disks, or optical disks, during processing, comprising: a wafer support member; at least one wafer gripping finger having an inner end and an outer end; said outer end extending to engage and support a wafer along peripheral edges thereof; at least one flexible supporting diaphragm connecting the at least one wafer gripping finger to the wafer support member to allow angular displacement of the wafer gripping finger: at least one finger actuator connected to operate said at least one wafer gripping finger for angularly displacing the wafer gripping finger: wherein the flexible supporting diaphragm is retained to the wafer support member using a detachable retaining ring.
Claim 19
Dependent Claim
119 words
A wafer holder for holding a wafer, such as semiconductor wafers, substrates, magnetic disks, or optical disks, during processing, comprising: a wafer support member; at least one wafer gripping finger having an inner end and an outer end; said outer end extending to engage and support a wafer along peripheral edges thereof; at least one flexible supporting diaphragm connecting the at least one wafer gripping finger to the wafer support member to allow angular displacement of the wafer gripping finger: at least one finger actuator connected to operate said at least one wafer gripping finger for angularly displacing the wafer gripping finger: wherein the flexible supporting diaphragm is retained to the wafer support member using a detachable retaining ring.
Claim 20
Dependent Claim
28 words
A wafer holder according to claim 17 wherein the wafer gripping finger has a notch along the outer end to receive a peripheral edge of the wafer therein.
Claim 21
Dependent Claim
19 words
A wafer holder according to claim 17 wherein the finger actuator is pivotally connected to the wafer gripping finger.
Claim 22
Dependent Claim
15 words
A wafer holder according to claim 17 wherein the wafer gripping finger has two parts.
Claim 23
Dependent Claim
34 words
A wafer holder according to claim 17 wherein the wafer gripping finger has an outer end part connected to the flexible supporting diaphragm and an inner end part which connects with the finger actuator.
Claim 24
Dependent Claim
28 words
A wafer holder according to claim 17 wherein the flexible supporting diaphragm comprises a seal which seals with the wafer support member to impede movement of processing fluids.
Claim 25
Dependent Claim
22 words
A wafer holder according to claim 17 wherein the finger actuator includes a linkage bar pivotally connected to the wafer gripping finger.
Claim 26
Dependent Claim
34 words
A wafer holder according to claim 17 wherein the finger actuator includes a linkage bar pivotally connected to the wafer gripping finger, said linkage bar also being pivotally connected to the wafer support member.
Claim 27
Dependent Claim
23 words
A wafer holder according to claim 17 wherein the finger actuator includes a biasing means for biasing the finger into a desired position.
Claim 28
Dependent Claim
39 words
A wafer holder according to claim 17 wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar.
Claim 29
Dependent Claim
50 words
A wafer holder according to claim 17 wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar; a biasing means for biasing the finger into a desired position.
Claim 30
Dependent Claim
16 words
A wafer holder according to claim 17 wherein there are a plurality of wafer gripping fingers.
Claim 31
Dependent Claim
25 words
A wafer holder according to claim 17 wherein there are a plurality of wafer gripping fingers arranged to contract or expand in a coordinated manner.
Claim 32
Dependent Claim
123 words
A wafer holder for holding a wafer, such as semiconductor wafers, substrates, magnetic disk.S, or optical disks, during processing, comprising: a wafer support member; at least one wafer gripping finger having an inner end and an outer end; said outer end extending to engage and support a wafer along peripheral edges thereof; at least one flexible supporting diaphragm connecting the at least one wafer gripping finger to the wafer support member to allow angular displacement of the wafer gripping finger; at least one finger actuator connected to operate said at least one wafer gripping finger for angularly displacing the wafer gripping finger; wherein the flexible supporting diaphragm comprises a seal which seals with the wafer support member to impede movement of processing fluids.
Claim 33
Dependent Claim
123 words
A wafer holder for holding a wafer, such as semiconductor wafers, substrates, magnetic disk.S, or optical disks, during processing, comprising: a wafer support member; at least one wafer gripping finger having an inner end and an outer end; said outer end extending to engage and support a wafer along peripheral edges thereof; at least one flexible supporting diaphragm connecting the at least one wafer gripping finger to the wafer support member to allow angular displacement of the wafer gripping finger; at least one finger actuator connected to operate said at least one wafer gripping finger for angularly displacing the wafer gripping finger; wherein the flexible supporting diaphragm comprises a seal which seals with the wafer support member to impede movement of processing fluids.
Claim 34
Dependent Claim
28 words
A wafer holder according to claim 30 wherein the wafer gripping finger has a notch along the outer end to receive a peripheral edge of the wafer therein.
Claim 35
Dependent Claim
19 words
A wafer holder according to claim 30 wherein the finger actuator is pivotally connected to the wafer gripping finger.
Claim 36
Dependent Claim
15 words
A wafer holder according to claim 30 wherein the wafer gripping finger has two parts.
Claim 37
Dependent Claim
34 words
A wafer holder according to claim 30 wherein the wafer gripping finger has an outer end part connected to the flexible supporting diaphragm and an inner end part which connects with the finger actuator.
Claim 38
Dependent Claim
24 words
A wafer holder according to claim 30 wherein the flexible supporting diaphragm is retained to the wafer support member using a detachable retaining ring.
Claim 39
Dependent Claim
22 words
A wafer holder according to claim 30 wherein the finger actuator includes a linkage bar pivotally connected to the wafer gripping finger.
Claim 40
Dependent Claim
34 words
A wafer holder according to claim 30 wherein the finger actuator includes a linkage bar pivotally connected to the wafer gripping finger, said linkage bar also being pivotally connected to the wafer support member.
Claim 41
Dependent Claim
23 words
A wafer holder according to claim 30 wherein the finger actuator includes a biasing means for biasing the finger into a desired position.
Claim 42
Dependent Claim
39 words
A wafer holder according to claim 30 wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar.
Claim 43
Dependent Claim
50 words
A wafer holder according to claim 30 wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar; a biasing means for biasing the finger into a desired position.
Claim 44
Dependent Claim
16 words
A wafer holder according to claim 30 wherein there are a plurality of wafer gripping fingers.
Claim 45
Dependent Claim
25 words
A wafer holder according to claim 30 wherein there are a plurality of wafer gripping fingers arranged to contract or expand in a coordinated manner.
Claim 46
Dependent Claim
145 words
A wafer holder for holding a wafer, such as semiconductor wafers, substrates, magnetic disks, or optical disks, during processing, comprising: a wafer support member; at least one wafer gripping finger having an inner end and an outer end; said outer end extending to engage and support a wafer along peripheral edges thereof; at least one flexible supporting diaphragm connecting the at least one wafer gripping finger to the wafer support member to allow annular displacement of the wafer gripping finger; at least one finger actuator connected to operate said at least one wafer grippi.ng finger for angularly displacing the wafer gripping finger; wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar; a biasing means for biasing the finger into a desired position.
Claim 47
Dependent Claim
145 words
A wafer holder for holding a wafer, such as semiconductor wafers, substrates, magnetic disks, or optical disks, during processing, comprising: a wafer support member; at least one wafer gripping finger having an inner end and an outer end; said outer end extending to engage and support a wafer along peripheral edges thereof; at least one flexible supporting diaphragm connecting the at least one wafer gripping finger to the wafer support member to allow annular displacement of the wafer gripping finger; at least one finger actuator connected to operate said at least one wafer grippi.ng finger for angularly displacing the wafer gripping finger; wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar; a biasing means for biasing the finger into a desired position.
Claim 48
Dependent Claim
86 words
A semiconductor wafer processing head for holding and supporting a wafer, comprising: a movable wafer support member; a plurality of wafer gripping fingers mounted in the wafer support member; a plurality of flexible supporting diaphragms connecting the wafer gripping fingers to the wafer support member to allow angular displacement of the wafer gripping fingers; said flexible supporting diaphragms being integrally connected with portions of the wafer gripping fingers; at least one finger actuator connected to operate the wafer gripping fingers to provide controlled angular displacement thereof.
Claim 49
Dependent Claim
86 words
A semiconductor wafer processing head for holding and supporting a wafer, comprising: a movable wafer support member; a plurality of wafer gripping fingers mounted in the wafer support member; a plurality of flexible supporting diaphragms connecting the wafer gripping fingers to the wafer support member to allow angular displacement of the wafer gripping fingers; said flexible supporting diaphragms being integrally connected with portions of the wafer gripping fingers; at least one finger actuator connected to operate the wafer gripping fingers to provide controlled angular displacement thereof.
Claim 50
Dependent Claim
19 words
A semiconductor wafer processing head according to claim 44 wherein the flexible supporting diaphragms surround the wafer gripping fingers.
Claim 51
Dependent Claim
29 words
A semiconductor wafer processing head according to claim 44 wherein the wafer gripping fingers have notches along the outer ends to receive a peripheral edge of the wafer therein.
Claim 52
Dependent Claim
24 words
A semiconductor wafer processing head according to claim 44 wherein the finger actuator includes members which are pivotally connected to the wafer gripping fingers.
Claim 53
Dependent Claim
21 words
A semiconductor wafer processing head according to claim 44 wherein at least one of the wafer gripping fingers has two parts.
Claim 54
Dependent Claim
40 words
A semiconductor wafer processing head according to claim 44 wherein at least one of the wafer gripping fingers has an outer end part connected to the flexible supporting diaphragm and an inner end part which connects with the finger actuator.
Claim 55
Dependent Claim
24 words
A semiconductor wafer process.ing head according to claim 44 wherein the finger actuator includes a linkage bar pivotally connected to the wafer gripping finger.
Claim 56
Dependent Claim
36 words
A semiconductor wafer processing head according to claim 44 wherein the finger actuator includes a linkage bar pivotally connected to the wafer gripping finger, said linkage bar also being pivotally connected to the wafer support member.
Claim 57
Dependent Claim
25 words
A semiconductor wafer processing head according to claim 44 wherein the finger actuator includes a biasing means for biasing the finger into a desired position.
Claim 58
Dependent Claim
41 words
A semiconductor wafer processing head according to claim 44 wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar.
Claim 59
Dependent Claim
52 words
A semiconductor wafer processing head according to claim 44 wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar; a biasing means for biasing the finger into a desired position.
Claim 60
Dependent Claim
26 words
A semiconductor wafer processing head according to claim 44 wherein the flexible supporting diaphragms are retained to the wafer support member using a detachable retaining ring.
Claim 61
Dependent Claim
30 words
A semiconductor wafer processing head according to claim 44 wherein the flexible supporting diaphragms comprise a seal which seals with the wafer support member to impede movement of processing fluids.
Claim 62
Dependent Claim
89 words
A semiconductor wafer processing head for holding and supporting a wafer comprising:. a movable wafer support member; a plurality of wafer gripping fingers mounted in the wafer support member; a plurality of flexible supporting diaphragms connecting the wafer gripping fingers to the wafer support member to allow angular displacement of the wafer gripping fingers; at least one finger actuator connected to operate the wafer gripping fingers to provide controlled angular displacement thereof; wherein the flexible supporting diaphragms are retained to the wafer support member using a detachable retaining ring.
Claim 63
Dependent Claim
89 words
A semiconductor wafer processing head for holding and supporting a wafer comprising:. a movable wafer support member; a plurality of wafer gripping fingers mounted in the wafer support member; a plurality of flexible supporting diaphragms connecting the wafer gripping fingers to the wafer support member to allow angular displacement of the wafer gripping fingers; at least one finger actuator connected to operate the wafer gripping fingers to provide controlled angular displacement thereof; wherein the flexible supporting diaphragms are retained to the wafer support member using a detachable retaining ring.
Claim 64
Dependent Claim
29 words
A semiconductor wafer processing head according to claim 57 wherein the wafer gripping fingers have notches along the outer ends to receive a peripheral edge of the wafer therein.
Claim 65
Dependent Claim
24 words
A semiconductor wafer processing head according to claim 57 wherein the finger actuator includes members which are pivotally connected to the wafer gripping fingers.
Claim 66
Dependent Claim
21 words
A semiconductor wafer processing head according to claim 57 wherein at least one of the wafer gripping fingers has two parts.
Claim 67
Dependent Claim
40 words
A semiconductor wafer processing head according to claim 57 wherein at least one of the wafer gripping fingers has an outer end part connected to the flexible supporting diaphragm and an inner end part which connects with the finger actuator.
Claim 68
Dependent Claim
30 words
A semiconductor wafer processing head according to claim 57 wherein the flexible supporting diaphragms comprise a seal which seals with the wafer support member to impede movement of processing fluids.
Claim 69
Dependent Claim
93 words
A semiconductor wafer processing head for holding and supporting a wafer, comprising: a movable wafer support member; a plurality of wafer gripping fingers mounted in the wafer support member; a plurality of flexible supporting diaphragms connecting the wafer gripping fingers to the wafer support member to allow angular displacement of the wafer gripping fingers; at least one finger actuator connected to operate the wafer gripping fingers to provide controlled angular displacement thereof. wherein the flexible supporting diaphragms comprise a seal which seals with the wafer support member to impede movement of processing fluids.
Claim 70
Dependent Claim
93 words
A semiconductor wafer processing head for holding and supporting a wafer, comprising: a movable wafer support member; a plurality of wafer gripping fingers mounted in the wafer support member; a plurality of flexible supporting diaphragms connecting the wafer gripping fingers to the wafer support member to allow angular displacement of the wafer gripping fingers; at least one finger actuator connected to operate the wafer gripping fingers to provide controlled angular displacement thereof. wherein the flexible supporting diaphragms comprise a seal which seals with the wafer support member to impede movement of processing fluids.
Claim 71
Dependent Claim
29 words
A semiconductor wafer processing head according to claim 63 wherein the wafer gripping fingers have notches along the outer ends to receive a peripheral edge of the wafer therein.
Claim 72
Dependent Claim
24 words
A semiconductor wafer processing head according to claim 63 wherein the finger actuator includes members which are pivotally connected to the wafer gripping fingers.
Claim 73
Dependent Claim
21 words
A semiconductor wafer processing head according to claim 63 wherein at least one of the wafer gripping fingers has two parts.
Claim 74
Dependent Claim
40 words
A semiconductor wafer processing head according to claim 63 wherein at least one of the wafer gripping fingers has an outer end part connected to the flexible supporting diaphragm and an inner end part which connects with the finger actuator.
Claim 75
Dependent Claim
26 words
A semiconductor wafer processing head according to claim 63 wherein the flexible supporting diaphragms are retained to the wafer support member using a detachable retaining ring.
Claim 76
Dependent Claim
160 words
A wafer holder for holding a wafer, such as semiconductor wafers, substrates, magnetic disks, or optical disks, during processing, comprising: a wafer support member; said wafer support member having an outer surface which faces a semiconductor wafer being held; at least one wafer gripping finger having an inner end and an outer end; said outer end extending to engage and support a wafer along peripheral edges thereof; at least one flexible supporting diaphragm connecting the at least one wafer gripping finger to the wafer support member to allow angular displacement of the wafer gripping finger; said angular displacement of the wafer gripping fingers causing angular displacement of at least one finger axis which is oriented transverse to the outer surface of the wafer support member and a plane defined by a face surface of a wafer being held; at least one finger actuator connected to operate said at least one wafer gripping finger for angularly displacing the wafer gripping finger.
Claim 77
Dependent Claim
160 words
A wafer holder for holding a wafer, such as semiconductor wafers, substrates, magnetic disks, or optical disks, during processing, comprising: a wafer support member; said wafer support member having an outer surface which faces a semiconductor wafer being held; at least one wafer gripping finger having an inner end and an outer end; said outer end extending to engage and support a wafer along peripheral edges thereof; at least one flexible supporting diaphragm connecting the at least one wafer gripping finger to the wafer support member to allow angular displacement of the wafer gripping finger; said angular displacement of the wafer gripping fingers causing angular displacement of at least one finger axis which is oriented transverse to the outer surface of the wafer support member and a plane defined by a face surface of a wafer being held; at least one finger actuator connected to operate said at least one wafer gripping finger for angularly displacing the wafer gripping finger.
Claim 78
Dependent Claim
22 words
A wafer holder according to claim 69 wherein the flexible supporting diaphragm is integrally connected with portions of the wafer gripping finger.
Claim 79
Dependent Claim
28 words
A wafer holder according to claim 69 wherein the flexible supporting diaphragm surrounds the wafer gripping finger and is integrally connected with portions of the wafer gripping finger.
Claim 80
Dependent Claim
28 words
A wafer holder according to claim 69 wherein the wafer gripping finger has a notch along the outer end to receive a peripheral edge of the wafer therein.
Claim 81
Dependent Claim
19 words
A wafer holder according to claim 69 wherein the finger actuator is pivotally connected to the wafer gripping finger.
Claim 82
Dependent Claim
15 words
A wafer holder according to claim 69 wherein the wafer gripping finger has two parts.
Claim 83
Dependent Claim
34 words
A wafer holder according to claim 69 wherein the wafer gripping finger has an outer end part connected to the flexible supporting diaphragm and an inner end part which connects with the finger actuator.
Claim 84
Dependent Claim
35 words
A wafer holder according to claim 69 wherein the wafer gripping finger has an outer end part integrally connected to the flexible supporting diaphragm and an inner end part which connects with the finger actuator.
Claim 85
Dependent Claim
24 words
A wafer holder according to claim 69 wherein the flexible supporting diaphragm is retained to the wafer support member using a detachable retaining ring.
Claim 86
Dependent Claim
28 words
A wafer holder according to claim 69 wherein the flexible supporting diaphragm comprises a seal which seals with the wafer support member to impede movement of processing fluids.
Claim 87
Dependent Claim
22 words
A wafer holder according to claim 69 wherein the finger actuator includes a linkage bar pivotally connected to the wafer gripping finger.
Claim 88
Dependent Claim
34 words
A wafer holder according to claim 69 wherein the finger actuator includes a linkage bar pivotally connected to the wafer gripping finger, said linkage bar also being pivotally connected to the wafer support member.
Claim 89
Dependent Claim
23 words
A wafer holder according to claim 69 wherein the finger actuator includes a biasing means for biasing the finger into a desired position.
Claim 90
Dependent Claim
39 words
A wafer holder according to claim 69 wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar.
Claim 91
Dependent Claim
50 words
A wafer holder according to claim 69 wherein the finger actuator includes: a linkage bar pivotally connected to the wafer gripping finger; a pivot arm pivotally connected to the wafer support member and pivotally connected to the linkage bar; a biasing means for biasing the finger into a desired position.
Claim 92
Dependent Claim
16 words
A wafer holder according to claim 69 wherein there are a plurality of wafer gripping fingers.
Claim 93
Dependent Claim
25 words
A wafer holder according to claim 69 wherein there are a plurality of wafer gripping fingers arranged to contract or expand in a coordinated manner.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-28 | 1999-02-27 | 1999-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-28 | 2003-02-27 | 2003-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-28 | 2007-02-27 | 2007-08-29 | $7700.00 | Window Closed / Lapsed |