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US4715637A Expired / Lapsed US ⏱️ 0.0 years remaining

Grip device for sheet-like objects

Assignee: Hitachi Ltd
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Filing: 1986-04-17
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Granted: 1987-12-29
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Expires: 2006-04-17
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Abstract

Abstract A gripping device for gripping an outer peripheral edge of an object to be grasped such as, for example, a semiconductor wafer, with the gripping device including a base, gripping members for gripping the object to be grasped, elastic members disposed between the base and the grip members so as to urge the respective grip members in an opening or closing direction. A driver for the grip members is provided, with the driver being fashioned as a linear or flat shape memory alloy member which is connected across the grip members.

Inventors

  • 👤 Yuji Hosoda
  • 👤 Kazuo Honma
  • 👤 Masakatsu Fujie

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 18:17
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7602; B; B25; B25J; B25J15/00; B25J15/02; B25J9/00; B25J9/10; B25J9/1085; B25J9/14; B25J9/142; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/141

Claims Analysis

Total Claims: 34
Claim 1
Independent Claim 95 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, and a power source connected to said shape memory means through a switch means.
Claim 2
Dependent Claim 95 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, and a power source connected to said shape memory means through a switch means.
Claim 3
Dependent Claim 37 words
A gripping means according to claim 1, further comprising another shape memory alloy means extending between said base means and one of said grip members for coupling said base means to said one of said grip members.
Claim 4
Dependent Claim 57 words
A gripping means according to claim 1, further comprising a pair of protrusion means, each of said protrusion means including an end face disposed in opposition to a respective grip member, the respective end face of each of said protrusion means being adapted to come into contact with an associated grip member when the object is gripped.
Claim 5
Dependent Claim 26 words
A gripping means according to claim 1, wherein said at least one shape memory alloy means is a linear member adapted to drive said grip members.
Claim 6
Dependent Claim 26 words
A gripping means according to claim 1, wherein said at least one shape memory alloy means is a flat member adapted to drive said grip members.
Claim 7
Dependent Claim 30 words
A gripping means according to one of claims 1 or 3, wherein said at least one shape memory alloy means includes a pipe-shaped member of a shape memory alloy material.
Claim 8
Dependent Claim 30 words
A gripping means according to one of claims 1 or 3 wherein said at least one shape memory alloy means includes a linear member having at least one looped portion.
Claim 9
Dependent Claim 59 words
A gripping means according to claim 1, further comprising means for urging the object in a direction toward distal ends of the respective grip members including at least a pair of holder members respectively adapted to engage spaced outer peripheral edge portions of the object, and means for pressing said holder members against the peripheral edge of the object.
Claim 10
Dependent Claim 52 words
A gripping means according to claim 8, wherein said holder members each include a first end mounted on opposed end faces of the respective grip members, and wherein said means for pressing includes at least a pair of shape memory alloy members respectively interposed between the holder members and associated grip members.
Claim 11
Dependent Claim 176 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means for urging the object in a direction toward distal ends of the respective grip members including a holder member adapted to conduct at least one portion of an outer peripheral edge of the object, and drive means interposed between said holder member and base means for pressing said holder member against the object, and wherein said drive means for pressing said holder member includes an elastic means for urging said holder member to move, and a shape memory alloy member adapted to operate in opposition to said elastic means urging said holder to move.
Claim 12
Dependent Claim 176 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means for urging the object in a direction toward distal ends of the respective grip members including a holder member adapted to conduct at least one portion of an outer peripheral edge of the object, and drive means interposed between said holder member and base means for pressing said holder member against the object, and wherein said drive means for pressing said holder member includes an elastic means for urging said holder member to move, and a shape memory alloy member adapted to operate in opposition to said elastic means urging said holder to move.
Claim 13
Dependent Claim 156 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object. elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means for urging the object in a direction toward distal ends of the respective grip members including a holder member adapted to conduct at least one portion of an outer peripheral edge of the object, and drive means interposed between said holder member and base means for pressing said holder member against the object, and wherein said drive means for pressing said holder member includes a shape memory alloy member for moving said holder member.
Claim 14
Dependent Claim 156 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object. elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means for urging the object in a direction toward distal ends of the respective grip members including a holder member adapted to conduct at least one portion of an outer peripheral edge of the object, and drive means interposed between said holder member and base means for pressing said holder member against the object, and wherein said drive means for pressing said holder member includes a shape memory alloy member for moving said holder member.
Claim 15
Dependent Claim 30 words
A gripping means according to one of claims 11 or 3, wherein said at least one shape memory alloy means includes a corrugated flat member of a shape alloy material.
Claim 16
Dependent Claim 144 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means for urging the object in a direction toward distal ends of the respective grip members, and wherein said means for urging includes a holder member adapted to contact at least one portion of the outer peripheral edge of the object, and a drive means interposed between said holder member and an associated grip member for pressing said holder member against the object.
Claim 17
Dependent Claim 144 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means for urging the object in a direction toward distal ends of the respective grip members, and wherein said means for urging includes a holder member adapted to contact at least one portion of the outer peripheral edge of the object, and a drive means interposed between said holder member and an associated grip member for pressing said holder member against the object.
Claim 18
Dependent Claim 46 words
A gripping means according to claim 13, wherein said drive means for pressing said holder member includes an elastic means for movably urging said holder member, and a shape memory alloy member adapted to operate in opposition to said elastic means movable urging said holder member.
Claim 19
Dependent Claim 27 words
A gripping means according to claim 14, wherein said drive means for pressing said holder member includes a shape memory alloy member for moving said holder member.
Claim 20
Dependent Claim 254 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, said means for flexibly pressing including a flexible pouch-like fixing portion disposed on each of the opposed confronting end faces of the grip members, and at least one pneumatic means for applying pneumatic pressure to the respective fixing portions through means connecting said pneumatic means and the respective fixing portions, opposed end faces of distal ends with the respective grip members are provided with holding portions bent towards the base means and adapted to engage portions of an outer peripheral edge of the object, two rows of protrusion means provided along a longitudinal extent of the confronting end faces of the respective grip members, and wherein said pneumatic means includes an air pressure supply means fashioned as a pouch-like flexible member interposed between the base means and a keeper plate means coupled to said base means by another shape memory alloy member and another elastic means arranged in parallel.
Claim 21
Dependent Claim 254 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, said means for flexibly pressing including a flexible pouch-like fixing portion disposed on each of the opposed confronting end faces of the grip members, and at least one pneumatic means for applying pneumatic pressure to the respective fixing portions through means connecting said pneumatic means and the respective fixing portions, opposed end faces of distal ends with the respective grip members are provided with holding portions bent towards the base means and adapted to engage portions of an outer peripheral edge of the object, two rows of protrusion means provided along a longitudinal extent of the confronting end faces of the respective grip members, and wherein said pneumatic means includes an air pressure supply means fashioned as a pouch-like flexible member interposed between the base means and a keeper plate means coupled to said base means by another shape memory alloy member and another elastic means arranged in parallel.
Claim 22
Dependent Claim 242 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, said means for flexibly pressing including a flexible pouch-like fixing portion disposed on each of the opposed confronting end faces of the grip members, and at least one pneumatic means for applying pneumatic pressure to the respective fixing portions through means connecting said pneumatic means and the respective fixing portions, opposed end faces of distal ends with the respective grip members are provided with holding portions bent towards the base means and adapted to engage portions of an outer peripheral edge of the object, two rows of protrusion means provided along a longitudinal extent of the confronting end faces of the respective grip members, and wherein said pneumatic portion includes an air pressure supply means fashioned as a pouch-like elastic member interposed between said base means and a keeper plate means by another shape memory alloy member.
Claim 23
Dependent Claim 242 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, said means for flexibly pressing including a flexible pouch-like fixing portion disposed on each of the opposed confronting end faces of the grip members, and at least one pneumatic means for applying pneumatic pressure to the respective fixing portions through means connecting said pneumatic means and the respective fixing portions, opposed end faces of distal ends with the respective grip members are provided with holding portions bent towards the base means and adapted to engage portions of an outer peripheral edge of the object, two rows of protrusion means provided along a longitudinal extent of the confronting end faces of the respective grip members, and wherein said pneumatic portion includes an air pressure supply means fashioned as a pouch-like elastic member interposed between said base means and a keeper plate means by another shape memory alloy member.
Claim 24
Dependent Claim 262 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, said means for flexibly pressing including a flexible pouch-like fixing portion disposed on each of the opposed confronting end faces of the grip members, and at least one pneumatic means for applying pneumatic pressure to the respective fixing portions through means connecting said pneumatic means and the respective fixing portions, opposed end faces of distal ends with the respective grip members are provided with holding portions bent towards the base means and adapted to engage portions of an outer peripheral edge of the object, two rows of protrusion means provided along a longitudinal extent of the confronting end faces of the respective grip members, and wherein said pneumatic means includes an air pressure supply means fashioned as a bellows-like flexible member having one end connected to the base means and another end of the bellows-like flexible member and said base member means are coupled by another shape memory alloy member and another elastic member arranged in parallel.
Claim 25
Dependent Claim 262 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, said means for flexibly pressing including a flexible pouch-like fixing portion disposed on each of the opposed confronting end faces of the grip members, and at least one pneumatic means for applying pneumatic pressure to the respective fixing portions through means connecting said pneumatic means and the respective fixing portions, opposed end faces of distal ends with the respective grip members are provided with holding portions bent towards the base means and adapted to engage portions of an outer peripheral edge of the object, two rows of protrusion means provided along a longitudinal extent of the confronting end faces of the respective grip members, and wherein said pneumatic means includes an air pressure supply means fashioned as a bellows-like flexible member having one end connected to the base means and another end of the bellows-like flexible member and said base member means are coupled by another shape memory alloy member and another elastic member arranged in parallel.
Claim 26
Dependent Claim 251 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, said means for flexibly pressing including a flexible pouch-like fixing portion disposed on each of the opposed confronting end faces of the grip members, and at least one pneumatic means for applying pneumatic pressure to the respective fixing portions through means connecting said pneumatic means and the respective fixing portions, opposed end faces of distal ends with the respective grip members are provided with holding portions bent towards the base means and adapted to engage portions of an outer peripheral edge of the object, two rows of protrusion means provided along a longitudinal extent of the confronting end faces of the respective grip members, and wherein said pneumatic means includes an air pressure supply means fashioned as a bellows-like flexible member having one end connected to the base means and the other end thereof and the base means being coupled by another shape memory alloy member.
Claim 27
Dependent Claim 251 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, said means for flexibly pressing including a flexible pouch-like fixing portion disposed on each of the opposed confronting end faces of the grip members, and at least one pneumatic means for applying pneumatic pressure to the respective fixing portions through means connecting said pneumatic means and the respective fixing portions, opposed end faces of distal ends with the respective grip members are provided with holding portions bent towards the base means and adapted to engage portions of an outer peripheral edge of the object, two rows of protrusion means provided along a longitudinal extent of the confronting end faces of the respective grip members, and wherein said pneumatic means includes an air pressure supply means fashioned as a bellows-like flexible member having one end connected to the base means and the other end thereof and the base means being coupled by another shape memory alloy member.
Claim 28
Dependent Claim 158 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, and wherein said pneumatic means includes another elastic member having one end fixed to one of the grip members and an opposite end fixed to said shape memory alloy means, and an air pressure supply means fashioned as a pouch-like flexible member interposed between said another elastic member and an associated grip member.
Claim 29
Dependent Claim 158 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, and wherein said pneumatic means includes another elastic member having one end fixed to one of the grip members and an opposite end fixed to said shape memory alloy means, and an air pressure supply means fashioned as a pouch-like flexible member interposed between said another elastic member and an associated grip member.
Claim 30
Dependent Claim 249 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, said means for flexibly pressing including a flexible pouch-like fixing portion disposed on each of the opposed confronting end faces of the grip members, and at least one pneumatic means for applying pneumatic pressure to the respective fixing portions through means connecting said pneumatic means and the respective fixing portions, opposed end faces of distal ends with the respective grip members are provided with holding portions bent towards the base means and adapted to engage portions of an outer peripheral edge of the object, two rows of protrusion means provided along a longitudinal extent of the confronting end faces of the respective grip members, and wherein said pneumatic means includes an air pressure supply means fashioned as a pouch-like elastic member having on end coupled to one end of said shape memory alloy means and another end connected to one of said grip members.
Claim 31
Dependent Claim 249 words
A gripping means for gripping an outer peripheral edge of a sheet-like object, the gripping means comprising a base means, grip members mounted on said base means for gripping the object, elastic means disposed on respective sides of the base means for respectively connecting said grip members to said base means so as to urge the respective grip members in one of an opening and closing direction, at least one shape memory means for coupling said grip members to each other, means disposed on opposed confronting end faces of said grip member for flexibly pressing the object between said grip members during a gripping operation, said means for flexibly pressing including a flexible pouch-like fixing portion disposed on each of the opposed confronting end faces of the grip members, and at least one pneumatic means for applying pneumatic pressure to the respective fixing portions through means connecting said pneumatic means and the respective fixing portions, opposed end faces of distal ends with the respective grip members are provided with holding portions bent towards the base means and adapted to engage portions of an outer peripheral edge of the object, two rows of protrusion means provided along a longitudinal extent of the confronting end faces of the respective grip members, and wherein said pneumatic means includes an air pressure supply means fashioned as a pouch-like elastic member having on end coupled to one end of said shape memory alloy means and another end connected to one of said grip members.
Claim 32
Dependent Claim 40 words
A gripping means according to one of claims 16-21 wherein a side wall of the pouch-like flexible member adapted to contact the associated grip member is thinner than a side wall opposite thereto not in contact with the grip member.
Claim 33
Dependent Claim 31 words
A gripping means according to one of claims 20 or 21, wherein said means connecting said pneumatic means includes a tube means formed in at least one of said grip members.
Claim 34
Dependent Claim 32 words
A gripping means according to one of claims 16-21, wherein said base means includes a protuberance means adapted to contact opposed end faces of the grip members when the object is gripped.

References Cited (Backward Citations)

FR2104696A1 Cited
SU662344A1 Cited
SU727426A1 Cited
SU889591A2 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1990-12-28 1991-06-29 1991-12-29 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1994-12-28 1995-06-29 1995-12-29 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1998-12-28 1999-06-29 1999-12-29 $7700.00 Window Closed / Lapsed

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