Patent US5438870A successfully refreshed from Google Patents.
US5438870A
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Rotation rate sensor
Assignee: Robert Bosch GmbH
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Filing: 1993-12-30
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Granted: 1995-08-08
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Expires: 2013-12-30
Abstract
Abstract A rotation rate sensor has a multi-layer structure including a monocrystalline silicon layer (10) which forms a carrier structure and a polysilicon layer (21), forming a second layer, and which includes a structural element (30) which acts as an oscillatory body. This structural element (30) is supported on the carrier structure (10) by a plurality of support strips (31), and is deflectable (2) perpendicularly to the major surface of the carrier structure (10). Capacitative or piezo-resistive detecting elements are formed from the second layer for detecting Coriolis force deflections (2), perpendicular to the major surface of said carrier (10) of the structural element (30).
Inventors
- 👤 Erich Zabler
- 👤 Jiri Marek
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 03:22
CPC Classifications
G; G01; G01C; G01C19/00; G01C19/56; G01C19/5719; G01C19/5733; G01C19/5755
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
150 words
Rotation rate sensor with a multi-layer sensor element having first and second layers (10, 21), wherein said first layer is a generally planar carrier (10) of monocrystalline silicon having a major surface; said second layer (21) comprises polysilicon and defines at least one structural element (30) which acts as an oscillatory body, being capable of oscillation in at least a first oscillation direction (1) oriented parallel to said major surface of said planar carrier (10), said structural element (30) is supported on said major surface of said planar carrier (10) by a plurality of support strips (31), said structural element (30) is deflectable (2) normal to said major surface of said carrier (10); and further comprising capacitive or piezoresistive detecting means (17, 181; 21, 182) for detecting Coriolis force deflections (2), perpendicular to said major surface of said carrier (10), of said structural element (30), formed from said second layer.
Claim 2
Dependent Claim
150 words
Rotation rate sensor with a multi-layer sensor element having first and second layers (10, 21), wherein said first layer is a generally planar carrier (10) of monocrystalline silicon having a major surface; said second layer (21) comprises polysilicon and defines at least one structural element (30) which acts as an oscillatory body, being capable of oscillation in at least a first oscillation direction (1) oriented parallel to said major surface of said planar carrier (10), said structural element (30) is supported on said major surface of said planar carrier (10) by a plurality of support strips (31), said structural element (30) is deflectable (2) normal to said major surface of said carrier (10); and further comprising capacitive or piezoresistive detecting means (17, 181; 21, 182) for detecting Coriolis force deflections (2), perpendicular to said major surface of said carrier (10), of said structural element (30), formed from said second layer.
Claim 3
Dependent Claim
27 words
Sensor according to claim 1, wherein said carrier (10) consists essentially of a material selected from the group consisting of (110)-oriented monocrystalline silicon and (100)-oriented monocrystalline silicon.
Claim 4
Dependent Claim
43 words
Sensor according to claim 1, wherein said structural element (21, 30) is a product made by the process of depositing a polysilicon layer on portions of the surface of said carrier to form an auxiliary layer, and subsequently underetching the thus-deposited auxiliary layer.
Claim 5
Dependent Claim
127 words
Rotation rate sensor with a multi-layer sensor element having first and second layers (10, 21), wherein said first layer is a generally planar carrier (10) of monocrystalline silicon having a major surface; a charge carrier diffusion (11) is formed in a portion of said major surface; said second layer (21) comprises polysilicon and defines at least one structural element (30) which acts as an oscillatory body, being capable of oscillation in at least a first oscillation direction (1) oriented parallel to said major surface of said planar carrier (10), and said charge carrier diffusion (11) and said oscillatory body define respective plates of a capacitor which serves to measure movement of said oscillatory body (30) in a direction normal to said major surface of said carrier (10).
Claim 6
Dependent Claim
127 words
Rotation rate sensor with a multi-layer sensor element having first and second layers (10, 21), wherein said first layer is a generally planar carrier (10) of monocrystalline silicon having a major surface; a charge carrier diffusion (11) is formed in a portion of said major surface; said second layer (21) comprises polysilicon and defines at least one structural element (30) which acts as an oscillatory body, being capable of oscillation in at least a first oscillation direction (1) oriented parallel to said major surface of said planar carrier (10), and said charge carrier diffusion (11) and said oscillatory body define respective plates of a capacitor which serves to measure movement of said oscillatory body (30) in a direction normal to said major surface of said carrier (10).
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-07 | 1999-02-06 | 1999-08-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-07 | 2003-02-06 | 2003-08-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-07 | 2007-02-06 | 2007-08-08 | $7700.00 | Window Closed / Lapsed |