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US5436848A
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Method of and device for transporting semiconductor substrate in semiconductor processing system
Assignee: Dainippon Screen Manufacturing Co Ltd
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Filing: 1993-04-15
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Granted: 1995-07-25
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Expires: 2013-04-15
Abstract
Abstract A robot (12) takes a wafer (3f) out of an indexer (1) and then transports the same to a heat processing part (41). A wafer (3e), which has already introduced in the heat processing part (41) is took out thereof by the robot (5). The wafer (3f) is introduced in the heat processing part (41) after a waiting time (18a) so that an excess heat processing in the heat processing part (41) can be avoided. The wafer (3e) is transported to a processing part (43) and introduced therein by the robot (5). After the robot (5) repeats the similar processings in processing parts (13, 42, 44), it returns to the wafer transferring robot (12) to receive a next wafer. At that time, the robot (5) waits for a predetermined time thereby a cycle time is adjusted. After the waiting, the robot (5) takes out the wafer (3f), which has been introduced in the heat processing part (41), out thereof. Since the cycle time is set in common for different lots, the waiting times (18a, 18b) are set individually for each lot.
Inventors
- 👤 Masami Nishida
- 👤 Masahiro Himoto
- 👤 Tetsuya Hamada
- 👤 Noriaki Yokono
- 👤 Takeo Okamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:37
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0432; H10P72/30; H10P72/33; H10P72/3304
Claims Analysis
Total Claims: 66
Claim 1
Independent Claim
376 words
A method of sequentially transporting semiconductor substrates with a transportation means in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said method comprising the steps of: (a) determining parameter values including: a single cycle time T 0 common to the first to N-th processing parts and a waiting time T wj for each number j satisfying 1≦j≦N; and (b) serially transporting said semiconductor substrates to said first to N-th processing parts with said transporting means such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, comprising the steps of: (b-1) obtaining a state in which semiconductor substrates S j-i , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th, j-th and (j+1)-th processing parts, respectively; (b-2) transporting the semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part with said transporting means; (b-3) waiting before the j-th processing part until said cycle time T 0 is past since said transporting means having taken the semiconductor substrate S j+1 out of the j-th processing part; (b-4) taking the semiconductor substrate S j out of the j-th processing part when said cycle time T 0 is past; (b-5) waiting for said waiting time T wj ; (b-6) introducing said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (b-7) transporting the semiconductor substrate S j to the (j+1)-th with said transporting means; and (b-8) repeating the steps (b-1) to (b-7) for j=1, 2, . . . ,N, where: the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 2
Independent Claim
376 words
A method of sequentially transporting semiconductor substrates with a transportation means in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said method comprising the steps of: (a) determining parameter values including: a single cycle time T 0 common to the first to N-th processing parts and a waiting time T wj for each number j satisfying 1≦j≦N; and (b) serially transporting said semiconductor substrates to said first to N-th processing parts with said transporting means such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, comprising the steps of: (b-1) obtaining a state in which semiconductor substrates S j-i , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th, j-th and (j+1)-th processing parts, respectively; (b-2) transporting the semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part with said transporting means; (b-3) waiting before the j-th processing part until said cycle time T 0 is past since said transporting means having taken the semiconductor substrate S j+1 out of the j-th processing part; (b-4) taking the semiconductor substrate S j out of the j-th processing part when said cycle time T 0 is past; (b-5) waiting for said waiting time T wj ; (b-6) introducing said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (b-7) transporting the semiconductor substrate S j to the (j+1)-th with said transporting means; and (b-8) repeating the steps (b-1) to (b-7) for j=1, 2, . . . ,N, where: the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 3
Dependent Claim
67 words
The method of claim 1, wherein; the step (a) comprises the steps of: (a-1) for each number j satisfying 1≦j≦N, determining a processing time T j representing how long said semiconductor substrates are to be processed in the j-th processing part; and (a-2) determining said cycle time T 0 so that the following first condition (I) is satisfied for each number j satisfying 1≦j≦N: T.sub.0 ≧T.sub.j (I)
Claim 4
Dependent Claim
61 words
The method of claim 2, wherein; the step (a) further comprises the steps of: (a-3) determining a transporting time T c which is a minimum time for said transporting means to circulate said transporting path; and (a-4) determining said cycle time T 0 so that the following second condition (II) as well as said first condition are satisfied: T.sub.0 ≧T.sub.c (II)
Claim 5
Dependent Claim
83 words
The method of claim 3, wherein; said semiconductor substrates are classified into a plurality of lots; and the step (a) further comprises the step of: (a-5) determining said waiting time t wj so that the following third condition (III) as well as said first and second conditions are satisfied: T.sub.0 ≦T.sub.c +S.sub.m (III) where the value S m is defined according to the following expression (E1): ##EQU4## and the number m is a positive integer designating an m-th lot of said semiconductor substrates.
Claim 6
Dependent Claim
49 words
The method of claim 4, wherein; the step (a-5) comprises the step of: (a-5-1) determining said waiting time T wj so that the following fourth condition (IV) as well as said first through third conditions are satisfied: T.sub.0 T.sub.c +T.sub.wj (IV) where j=1, 2, . . . , N.
Claim 7
Dependent Claim
123 words
The method of claim 5, wherein; said plurality of lots include k lots of semiconductor substrates, where k is a positive integer larger than one; different sets of processing times T j for j=1, 2, . . . N are determined for said k lots of semiconductor substrates to obtain T 1 , T 2 , . . . T N2 , where N2=K.N; and the step (a-5-1) comprises the step of: determining said cycle time T 0 according to the following expression (E2): T.sub.0 =max (T.sub.1, T.sub.2, . . . ,T.sub.N2, T.sub.c) (E2) where the symbol max represents the maximum value among the respective values of T 1 , T 2 , . . . ,T N2 , and T c .
Claim 8
Dependent Claim
31 words
The method of claim 6, wherein; the step (a-5) further comprises the step of: (a-5-2) providing a non-zero value to said waiting time T wj only for said heat processing part.
Claim 9
Dependent Claim
36 words
The method of claim 7, wherein; the step (b) further comprises the step of: (b-9) waiting at said station until said cycle time T 0 is past since said transporting means started said station last time.
Claim 10
Independent Claim
462 words
A device for sequentially transporting semiconductor substrates in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said device comprising: (a) transportation means for transporting a semiconductor substrate along said processing path; (b ) means for holding parameter values including: a single cycle time T 0 common to the first to N-th processing parts and a waiting time T wj for each number j satisfying 1≦j≦N; (c) control means for generating control signal as a function of said parameter values to deliver said control signal to said transportation means in order to serially transport said semiconductor substrates to said first to N-th processing parts such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, said control means comprising: (c-1) means for recognizing that said system is in a state in which semiconductor substrates S j-1 , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th and (j+1)-th processing parts, respectively; (c-2) means for controlling said transporting means so as to transport a semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part; (c-3) means for controlling said transportation means so as to wait before the j-th processing part until said cycle time T 0 is past since said transportation means having taken the semiconductor substrate S j+1 out of the j-th processing part; (c-4) means for controlling said transportation means so as to take the semiconductor substrate S j out of the j-th processing part when said cycle time T 0 is past; (c-5) means for controlling said transportation means so as to wait for said waiting time T wj ; (c-6) means for controlling said transportation means so as to introduce said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (c-7) means for controlling said transportation means so as to transport the semiconductor substrate S j to the (j+1)-th processing part; and (c-8) means for serially enabling the means (c-1) to (c-7) for j-1, 2, . . . , N, where the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 11
Independent Claim
462 words
A device for sequentially transporting semiconductor substrates in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said device comprising: (a) transportation means for transporting a semiconductor substrate along said processing path; (b ) means for holding parameter values including: a single cycle time T 0 common to the first to N-th processing parts and a waiting time T wj for each number j satisfying 1≦j≦N; (c) control means for generating control signal as a function of said parameter values to deliver said control signal to said transportation means in order to serially transport said semiconductor substrates to said first to N-th processing parts such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, said control means comprising: (c-1) means for recognizing that said system is in a state in which semiconductor substrates S j-1 , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th and (j+1)-th processing parts, respectively; (c-2) means for controlling said transporting means so as to transport a semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part; (c-3) means for controlling said transportation means so as to wait before the j-th processing part until said cycle time T 0 is past since said transportation means having taken the semiconductor substrate S j+1 out of the j-th processing part; (c-4) means for controlling said transportation means so as to take the semiconductor substrate S j out of the j-th processing part when said cycle time T 0 is past; (c-5) means for controlling said transportation means so as to wait for said waiting time T wj ; (c-6) means for controlling said transportation means so as to introduce said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (c-7) means for controlling said transportation means so as to transport the semiconductor substrate S j to the (j+1)-th processing part; and (c-8) means for serially enabling the means (c-1) to (c-7) for j-1, 2, . . . , N, where the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 12
Dependent Claim
68 words
The device of claim 9, wherein; the means (b) comprises: (b-1) means for holding a processing time T j representing how long said semiconductor substrates are to be processed in the j-th processing part for each number j satisfying 1≦j≦N; and (b-2) means for accepting said cycle time T 0 only when the following first condition (I) is satisfied for each number j satisfying 1≦j≦N: T.sub.0 ≧T.sub.j (I)
Claim 13
Dependent Claim
62 words
The device of claim 10, wherein; the means (b) further comprises: (b-3) means for holding a transporting time T c which is a minimum time for said transporting means to circulate said transporting path; and (b-4) means for accepting said cycle time T 0 only when the following second condition (II) as well as said first condition are satisfied: T.sub.0 ≧T.sub.c (II)
Claim 14
Dependent Claim
82 words
The device of claim 11, wherein; said semiconductor substrates are classified into a plurality of lots; and the means (b) further comprises: (b-5) means for accepting said waiting time T wj only when the following third condition (III) as well as said first and second conditions are satisfied: T.sub.0 ≧T.sub.c ≧S.sub.m (III) where the value S m is defined according to the following expression (E1): ##EQU5## and the number m is a positive integer designating an m-th lot of said semiconductor substrates.
Claim 15
Dependent Claim
49 words
The device of claim 12, wherein; the means (b) further comprises: (b-6) means for accepting said waiting time T wj only when the following fourth condition (IV) as well as said first through third conditions are satisfied: T.sub.0 ≧T.sub.j +T.sub.wj (IV) where j=1, 2, . . . , N.
Claim 16
Dependent Claim
124 words
The device of claim 13, wherein; said plurality of lot include k lots of semiconductor substrates, where k is a positive integer larger than one; different sets of processing times T j for j=1, 2, . . . N are determined for said k lots of semiconductor substrates to obtain T 1 , T 2 , . . . T N2 where N2=k.N; and the means (b-6) further comprises: (b-7) means for accepting said cycle time T 0 determined according to the following expression (E2): T.sub.0 -max (T.sub.1, T.sub.2, . . . ,T.sub.N2, T.sub.c) (E2) where the symbol max represents the maximum value among the respective values of T 1 , T 2 , . . . ,T N2 , and T c .
Claim 17
Dependent Claim
30 words
The device of claim 14, wherein; the means (b) further comprises: (b-8) means for accepting a non-zero value of said waiting time T wj only for said heat processing part.
Claim 18
Dependent Claim
98 words
The device of claim 15, wherein; the means (b) further comprises: (b-9) means for inputting a trial value for said cycle time T 0 ; the means (b-2) comprises: (b-2-1) means for comparing said trial value for said cycle time T 0 with said processing times T 1 , T 2 , . . . T N2 ; (b-2-2) means for employing said trial value for said cycle time T 0 when the condition (I) is satisfied; and (b-2-3) means for inputting another trial value for said cycle time T 0 when the condition (I) is not satisfied.
Claim 19
Dependent Claim
76 words
The device of claim 16, wherein; the means (b-4) comprises: (b-4-1) means for comparing said trial value for said cycle time T 0 with said transporting time T c ; (b-4-2) means for employing said trial value for said cycle time T 0 when the condition (II) as well as said condition (I) are satisfied; and (b-4-3) means for inputting another trail value for said cycle time T 0 when the condition (II) is not satisfied.
Claim 20
Dependent Claim
152 words
The device of claim 17, wherein; the means (b) further comprises: (b-10) means for inputting respective trial values for said waiting times T 1 , T 2 , . . . T N2 ; the means (b-5) comprises: (b-5-1) means for comparing said cycle time T 0 with a sum of said transportation time T c and said respective trial values for said waiting times T 1 , T 2 , . . . T N2 ; (b-5-2) means for employing said respective trial values for said waiting times T 1 , T 2 , . . . T N2 as said waiting times T 1 , T 2 , . . . T N2 when the condition (III) is satisfied; and (b-5-3) means for inputting other respective trial values for said waiting times T 1 , T 2 , . . . T N2 when the condition (III) is not satisfied.
Claim 21
Dependent Claim
124 words
The device of claim 18, wherein; the means (b-6) comprises: (b-6-1) means for comparing said cycle time T 0 with a sum of each of trail value for said waiting times T 1 , T 2 , . . . T N2 and said processing time T j ; (b-6-2) means for employing said respective trial values for said waiting times T 1 , T 2 , . . . T N2 as said waiting times T 1 , T 2 , . . . T N2 when the condition (IV) is satisfied; and (b-6-3) means for inputting other respective trial values for said waiting times T 1 , T 2 , . . . ,T N2 when the condition (IV) is not satisfied.
Claim 22
Dependent Claim
43 words
The device of claim 19, wherein; the step (c) further comprises the step of: (c-9) controlling said transporting means so as to wait at said station until said cycle time T 0 is past since said transporting means started said station last time.
Claim 23
Independent Claim
396 words
A method of sequentially transporting semiconductor substrates with a transportation means in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said method comprising the steps of: (a) determining parameter values including: a single cycle time T 0 common to the first to N-th processing parts, a waiting time T wj and a processing time T j representing how long said semiconductor substrates are to be processed in the j-th processing part for each number j satisfying 1≦j≦N; and (b) serially transporting said semiconductor substrates to said first to N-th processing parts with said transporting means such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, comprising the steps of: (b-1) obtaining a state in which semiconductor substrates S j-i , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th, j-th and (j+1)-th processing parts, respectively; (b-2) transporting the semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part with said transporting means; (b-3) waiting before the j-th processing part until said processing time T j is past since said transporting means having introduced in the semiconductor substrate S j+1 into the j-th processing part; (b-4) taking the semiconductor substrate S j out of the j-th processing part when said processing time T j is past; (b-5) waiting for said waiting time T wj ; (b-6) introducing said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (b-7) transporting the semiconductor substrate S j to the (j+1)-th with said transporting means; and (b-8) repeating the steps (b-1) to (b-7) for j=1, 2, . . . ,N, where: the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 24
Independent Claim
396 words
A method of sequentially transporting semiconductor substrates with a transportation means in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said method comprising the steps of: (a) determining parameter values including: a single cycle time T 0 common to the first to N-th processing parts, a waiting time T wj and a processing time T j representing how long said semiconductor substrates are to be processed in the j-th processing part for each number j satisfying 1≦j≦N; and (b) serially transporting said semiconductor substrates to said first to N-th processing parts with said transporting means such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, comprising the steps of: (b-1) obtaining a state in which semiconductor substrates S j-i , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th, j-th and (j+1)-th processing parts, respectively; (b-2) transporting the semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part with said transporting means; (b-3) waiting before the j-th processing part until said processing time T j is past since said transporting means having introduced in the semiconductor substrate S j+1 into the j-th processing part; (b-4) taking the semiconductor substrate S j out of the j-th processing part when said processing time T j is past; (b-5) waiting for said waiting time T wj ; (b-6) introducing said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (b-7) transporting the semiconductor substrate S j to the (j+1)-th with said transporting means; and (b-8) repeating the steps (b-1) to (b-7) for j=1, 2, . . . ,N, where: the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 25
Dependent Claim
38 words
The method of claim 21, wherein; the step (a) comprises the step of: (a-1) determining said cycle time T 0 so that the following first condition (I) is satisfied for each number j satisfying 1≦j≦N: T.sub.0 ≧T.sub.j (I)
Claim 26
Dependent Claim
61 words
The method of claim 22, wherein; the step (a) further comprises the steps of: (a-2) determining a transporting time T c which is a minimum time for said transporting means to circulate said transporting path; and (a-3) determining said cycle time T 0 so that the following second condition (II) as well as said first condition are satisfied: T.sub.0 ≧T.sub.c (II)
Claim 27
Dependent Claim
83 words
The method of claim 23, wherein; said semiconductor substrates are classified into a plurality of lots; and the step (a) further comprises the step of: (a-4) determining said waiting time t wj so that the following third condition (III) as well as said first and second conditions are satisfied: T.sub.0 ≧T.sub.c +S.sub.m (III) where the value S m is defined according to the following expression (E1): ##EQU6## and the number m is a positive integer designating an m-th lot of said semiconductor substrates.
Claim 28
Dependent Claim
49 words
The method of claim 24, wherein; the step (a-4) comprises the step of: (a-4-1) determining said waiting time T wj so that the following fourth condition (IV) as well as said first through third conditions are satisfied: T.sub.0 ≧T.sub.c +T.sub.wj (IV) where j=1, 2, . . . , N.
Claim 29
Dependent Claim
123 words
The method of claim 25, wherein; said plurality of lots include k lots of semiconductor substrates, where k is a positive integer larger than one; different sets of processing times T j for j=1, 2, . . . N are determined for said k lots of semiconductor substrates to obtain T 1 , T 2 , . . . T N2 , where N2=K.N; and the step (a-4-1) comprises the step of: determining said cycle time T 0 according to the following expression (E2): T.sub.0 =max (T.sub.1, T.sub.2, . . . ,T.sub.N2, T.sub.c) (E2) where the symbol max represents the maximum value among the respective values of T 1 , T 2 , . . . ,T N2 , and T c .
Claim 30
Dependent Claim
31 words
The method of claim 26, wherein; the step (a-4) further comprises the step of: (a-4-2) providing a non-zero value to said waiting time T wj only for said heat processing part.
Claim 31
Dependent Claim
36 words
The method of claim 27, wherein; the step (b) further comprises the step of: (b-9) waiting at said station until said cycle time T 0 is past since said transporting means started said station last time.
Claim 32
Independent Claim
478 words
A device for sequentially transporting semiconductor substrates in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said device comprising: (a) transportation means for transporting a semiconductor substrate along said processing path; (b) means for holding parameter values including: a single cycle time T 0 common to the first to N-th processing parts, a waiting time T wj and a processing time T j representing how long said semiconductor substrates are to be processed in the j-th processing part for each number j satisfying 1≦j≦N; (c) control means for generating control signal as a function of said parameter values to deliver said control signal to said transportation means in order to serially transport said semiconductor substrates to said first to N-th processing parts such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, said control means comprising: (c-1) means for recognizing that said system is in a state in which semiconductor substrates S j-1 , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th and (j+1)-th processing parts, respectively; (c-2) means for controlling said transporting means so as to transport a semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part; (c-3) means for controlling said transportation means so as to wait before the j-th processing part until said processing time T j is past since said transportation means having introduced the semiconductor substrate S j+1 into the j-th processing part; (c-4) means for controlling said transportation means so as to take the semiconductor substrate S j out of the j-th processing part when said processing time T j is past; (c-5) means for controlling said transportation means so as to wait for said waiting time T wj ; (c-6) means for controlling said transportation means so as to introduce said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (c-7) means for controlling said transportation means so as to transport the semiconductor substrate S j to the (j+1)-th; and (c-8) means for serially enabling the means (c-1) to (c-7) for j-1, 2, . . . , N, where the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 33
Independent Claim
478 words
A device for sequentially transporting semiconductor substrates in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said device comprising: (a) transportation means for transporting a semiconductor substrate along said processing path; (b) means for holding parameter values including: a single cycle time T 0 common to the first to N-th processing parts, a waiting time T wj and a processing time T j representing how long said semiconductor substrates are to be processed in the j-th processing part for each number j satisfying 1≦j≦N; (c) control means for generating control signal as a function of said parameter values to deliver said control signal to said transportation means in order to serially transport said semiconductor substrates to said first to N-th processing parts such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, said control means comprising: (c-1) means for recognizing that said system is in a state in which semiconductor substrates S j-1 , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th and (j+1)-th processing parts, respectively; (c-2) means for controlling said transporting means so as to transport a semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part; (c-3) means for controlling said transportation means so as to wait before the j-th processing part until said processing time T j is past since said transportation means having introduced the semiconductor substrate S j+1 into the j-th processing part; (c-4) means for controlling said transportation means so as to take the semiconductor substrate S j out of the j-th processing part when said processing time T j is past; (c-5) means for controlling said transportation means so as to wait for said waiting time T wj ; (c-6) means for controlling said transportation means so as to introduce said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (c-7) means for controlling said transportation means so as to transport the semiconductor substrate S j to the (j+1)-th; and (c-8) means for serially enabling the means (c-1) to (c-7) for j-1, 2, . . . , N, where the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 34
Dependent Claim
37 words
The device of claim 29, wherein; the means (b) comprises: (b-1) means for accepting said cycle time T 0 only when the folllowing first condition (I) is satisfied for each number j satisfying 1≦j≦N: T.sub.0 ≧T.sub.j (I)
Claim 35
Dependent Claim
62 words
The device of claim 30, wherein; the means (b) further comprises: (b-2) means for holding a transporting time T c which is a minimum time for said transporting means to circulate said transporting path; and (b-3) means for accepting said cycle time T 0 only when the following second condition (II) as well as said first condition are satisfied: T.sub.0 ≧T.sub.c (II)
Claim 36
Dependent Claim
88 words
The device of claim 31, wherein; said semiconductor substrates are classified into a plurality of lots; and the means (b) further comprises: (b-4) means for accepting said waiting time T wj only when the following third condition (III) as well as said first and second conditions are satisfied: T.sub.0 ≧T.sub.c ≧S.sub.m (Ill) where the value S m is defined according to the following expression (E1): M.N S.sub.m =Σ T.sub.wj (E 1) j=(m-1).N+1 and the number m is a positive integer designating an m-th lot of said semiconductor substrates.
Claim 37
Dependent Claim
49 words
The device of claim 32, wherein; the means (b) further comprises: (b-5) means for accepting said waiting time T wj only when the following fourth condition (IV) as well as said first through third conditions are satisfied: T.sub.0 ≧T.sub.j +T.sub.wj (IV) where j=1, 2, . . . , N.
Claim 38
Dependent Claim
124 words
The device of claim 33, wherein; said plurality of lot include k lots of semiconductor substrates, where k is a positive integer larger than one; different sets of processing times T j for j=1, 2, . . . N are determined for said k lots of semiconductor substrates to obtain T 1 , T 2 , . . . T N2 where N2=k.N; and the means (b-5) further comprises: (b-6) means for accepting said cycle time T 0 determined according to the following expression (E2): T.sub.0 -max (T.sub.1, T.sub.2, . . . ,T.sub.N2, T.sub.c) (E2) where the symbol max represents the maximum value among the respective values of T 1 , T 2 , . . . ,T N2 , and T c .
Claim 39
Dependent Claim
30 words
The device of claim 34, wherein; the means (b) further comprises: (b-7) means for accepting a non-zero value of said waiting time T wj only for said heat processing part.
Claim 40
Dependent Claim
98 words
The device of claim 35, wherein; the means (b) further comprises: (b-8) means for inputting a trial value for said cycle time T 0 ; the means (b-1) comprises: (b-1-1) means for comparing said trial value for said cycle time T 0 with said processing times T 1 , T 2 , . . . T N2 ; (b-1-2) means for employing said trial value for said cycle time T 0 when the condition (I) is satisfied; and (b-1-3) means for inputting another trial value for said cycle time T 0 when the condition (I) is not satisfied.
Claim 41
Dependent Claim
76 words
The device of claim 36, wherein; the means (b-3) comprises: (b-3-1) means for comparing said trial value for said cycle time T 0 with said transporting time T c ; (b-3-2) means for employing said trial value for said cycle time T 0 when the condition (II) as well as said condition (I) are satisfied; and (b-3-3) means for inputting another trail value for said cycle time T 0 when, the condition (II) is not satisfied.
Claim 42
Dependent Claim
152 words
The device of claim 37, wherein; the means (b) further comprises: (b-9) means for inputting respective trial values for said waiting times T 1 , T 2 , . . . T N2 ; the means (b-4) comprises: (b-4-1) means for comparing said cycle time T 0 with a sum of said transportation time T c and said respective trial values for said waiting times T 1 , T 2 , . . . T N2 ; (b-4-2) means for employing said respective trial values for said waiting times T 1 , T 2 , . . . T N2 as said waiting times T 1 , T 2 , . . . T N2 when the condition (III) is satisfied; and (b-4-3) means for inputting other respective trial values for said waiting times T 1 , T 2 , . . . T N2 when the condition (III) is not satisfied.
Claim 43
Dependent Claim
124 words
The device of claim 38, wherein; the means (b-5) comprises: (b-5-1) means for comparing said cycle time T 0 with a sum of each of trail value for said waiting times T 1 , T 2 , . . . T N2 and said processing time T j ; (b-5-2) means for employing said respective trial values for said waiting times T 1 , T 2 , . . . T N2 as said waiting times T 1 , T 2 , . . . T N2 when the condition (IV) is satisfied; and (b-5-3) means for inputting other respective trial values for said waiting times T 1 , T 2 , . . . ,T N2 when the condition (IV) is not satisfied.
Claim 44
Dependent Claim
43 words
The device of claim 39, wherein; the step (c) further comprises the step of: (c-9) controlling said transporting means so as to wait at said station until said cycle time T 0 is past since said transporting means started said station last time.
Claim 45
Independent Claim
367 words
A method of sequentially transporting semiconductor substrates with a transportation means in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said method comprising the steps of: (a) determining parameter values including: a single cycle time T 0 common to the first to N-th processing parts, a waiting time T wj and a moving time T mj for each number j satisfying 1≦j≦N; and (b) serially transporting said semiconductor substrates to said first to N-th processing parts with said transporting means such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, comprising the steps of: (b-1) obtaining a state in which semiconductor substrates S j-1 , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th, j-th and (j+1)-th processing parts, respectively; (b-2) transporting the semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part with said transporting means by said moving time T m (j-1) ; (b-3) taking the semiconductor substrate S j out of the j-th processing part when said transporting means reach the j-th processing part; (b-4) waiting for said waiting time T wj ; (b-5) introducing said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (b-6) transporting the semiconductor substrate S j to the (j+1)-th processing prart, with said transporting means by said moving time T mj ; and (b-7) repeating the steps (b-1) to (b-6) for j=1, 2, . . . ,N, where: the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 46
Independent Claim
367 words
A method of sequentially transporting semiconductor substrates with a transportation means in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said method comprising the steps of: (a) determining parameter values including: a single cycle time T 0 common to the first to N-th processing parts, a waiting time T wj and a moving time T mj for each number j satisfying 1≦j≦N; and (b) serially transporting said semiconductor substrates to said first to N-th processing parts with said transporting means such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, comprising the steps of: (b-1) obtaining a state in which semiconductor substrates S j-1 , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th, j-th and (j+1)-th processing parts, respectively; (b-2) transporting the semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part with said transporting means by said moving time T m (j-1) ; (b-3) taking the semiconductor substrate S j out of the j-th processing part when said transporting means reach the j-th processing part; (b-4) waiting for said waiting time T wj ; (b-5) introducing said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (b-6) transporting the semiconductor substrate S j to the (j+1)-th processing prart, with said transporting means by said moving time T mj ; and (b-7) repeating the steps (b-1) to (b-6) for j=1, 2, . . . ,N, where: the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 47
Dependent Claim
67 words
The method of claim 41, wherein; the step (a) comprises the step of: (a-1) for each number j satisfying 1≦j≦N, determining a processing time T j representing how long said semiconductor substsrates are to be processed in the j-th processing part; and (a-2) determining said cycle time T 0 so that the following first condition (I) is satisfied for each number j satisfying 1≦j≦N: T.sub.0 ≧T.sub.j (I)
Claim 48
Dependent Claim
61 words
The method of claim 42, wherein; the step (a) further comprises the steps of: (a-3) determining a transporting time T c which is a minimum time for said transporting means to circulate said transporting path; and (a-4) determining said cycle time T 0 so that the following second condition (II) as well as said first condition are satisfied: T.sub.0 ≧T.sub.c (II)
Claim 49
Dependent Claim
83 words
The method of claim 43, wherein; said semiconductor substrates are classified into a plurality of lots; and the step (a) further comprises the step of: (a-4) determining said waiting time t wj so that the following third condition (III) as well as said first and second conditions are satisfied: T.sub.0 ≧T.sub.c +S.sub.m (III) where the value S m is defined according to the following expression (E1): ##EQU7## and the number m is a positive integer designating an m-th lot of said semiconductor substrates.
Claim 50
Dependent Claim
49 words
The method of claim 44, wherein; the step (a-5) comprises the step of: (a-5-1) determining said waiting time T wj so that the following fourth condition (IV) as well as said first through third conditions are satisfied: T.sub.0 ≧T.sub.c +T.sub.wj (IV) where j=1, 2, . . . , N.
Claim 51
Dependent Claim
122 words
The method of claim 45, wherein; said plurality of lots include k lots of semiconductor substrates, where k is a positive integer larger than one; different sets of processing times T j for j=1, 2, . . . N are determined for said k lots of semiconductor substrates to obtain T 1 , T 2 , . . . T N2 , where N2=K.N; and the step (a-5-1) comprises the step of: determining said cycle time T 0 according to the following expression (E2): T.sub.0 =max(T.sub.1, T.sub.2, . . . ,T.sub.N2, T.sub.c) (E2) where the symbol max represents the maximum value among the respective values of T 1 , T 2 , . . . ,T N2 , and T c .
Claim 52
Dependent Claim
31 words
The method of claim 46, wherein; the step (a-5) further comprises the step of: (a-5-2) providing a non-zero value to said waiting time T wj only for said heat processing part.
Claim 53
Dependent Claim
36 words
The method of claim 47, wherein; the step (b) further comprises the step of: (b-9) waiting at said station until said cycle time T 0 is past since said transporting means started said station last time.
Claim 54
Independent Claim
460 words
A device for sequentially transporting semiconductor substrates in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said device comprising: (a) transportation means for transporting a semiconductor substrate along said processing path by a moving time T mj when said transportation measns moves from j-th processing part for each number j satisfying 1≦j≦N; (b) means for holding parameter values including: a single cycle time T 0 common to the first to N-th processing parts, a waiting time T wj and said moving time T mj for each number j satisfying 1≦j≦N; (c) control means for generating control signal as a function of said parameter values to deliver said control signal to said transportation means in order to serially transport said semiconductor substrates to said first to N-th processing parts such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, said control means comprising: (c-1) means for recognizing that said system is in a state in which semiconductor substrates S j-1 , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th and (j+1)-th processing parts, respectively; (c-2) means for controlling said transporting means so as to transport a semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part, by said moving time T mj ; (c-3) means for controlling said transportation means so as to take the semiconductor substrate S j out of the j-th processing part when said transporting means reach the j-th processing part; (c-4) means for controlling said transportation means so as to wait for said waiting time T wj ; (c-5) means for controlling said transportation means so as to introduce said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (c-6) means for controlling said transportation means so as to transport the semiconductor substrate S j to the (j+1)-th processing part by said moving time T mj ; and (c-7) means for serially enabling the means (c-1) to (c-6) for j=1, 2, . . . N, where the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 55
Independent Claim
460 words
A device for sequentially transporting semiconductor substrates in a system having first to N-th processing parts for applying predetermined processing to said semiconductor substrates, wherein said first to N-th processing parts have at least one heat processing part for applying heat to said semiconductor substrates and said semiconductor substrates are transported along a transportation path circulating said first to N-th processing parts, where the number N is an integer larger than one, said device comprising: (a) transportation means for transporting a semiconductor substrate along said processing path by a moving time T mj when said transportation measns moves from j-th processing part for each number j satisfying 1≦j≦N; (b) means for holding parameter values including: a single cycle time T 0 common to the first to N-th processing parts, a waiting time T wj and said moving time T mj for each number j satisfying 1≦j≦N; (c) control means for generating control signal as a function of said parameter values to deliver said control signal to said transportation means in order to serially transport said semiconductor substrates to said first to N-th processing parts such that said transporting means repeatedly circulates along said processing path and a stream of said semiconductor substrates flows along said processing path via said first to N-th processing parts, said control means comprising: (c-1) means for recognizing that said system is in a state in which semiconductor substrates S j-1 , S j and S j+1 having come from the (j-2)-th, (j-1)-th and j-th processing parts are present in the (j-1)-th and (j+1)-th processing parts, respectively; (c-2) means for controlling said transporting means so as to transport a semiconductor substrate S j-1 from the (j-1)-th processing part to the j-th processing part, by said moving time T mj ; (c-3) means for controlling said transportation means so as to take the semiconductor substrate S j out of the j-th processing part when said transporting means reach the j-th processing part; (c-4) means for controlling said transportation means so as to wait for said waiting time T wj ; (c-5) means for controlling said transportation means so as to introduce said semiconductor substrate S j-1 into the j-th processing part when said waiting time T wj is past; (c-6) means for controlling said transportation means so as to transport the semiconductor substrate S j to the (j+1)-th processing part by said moving time T mj ; and (c-7) means for serially enabling the means (c-1) to (c-6) for j=1, 2, . . . N, where the (j-2)-th processing part for j=1 and 2; the (j-1)-th processing part for j=1; and the (j+1)-th processing part for j=N; represent a station for supplying said semiconductor substrate to said processing path and receiving said semiconductor substrates having been processed.
Claim 56
Dependent Claim
68 words
The device of claim 49, wherein; the means (b) comprises: (b-1) means for holding a processing time T j representing how long said seminconductor substrates are to be processed in the j-th processing part for each number j satisfying 1≦j≦N; and (b-2) means for accepting said cycle time T 0 only when the following first condition (I) is satisfied for each number j satisfying 1≦j≦N: T.sub.0 ≧T.sub.j (I)
Claim 57
Dependent Claim
62 words
The device of claim 50, wherein; the means (b) further comprises: (b-3) means for holding a transporting time T c which is a minimum time for said transporting means to circulate said transporting path; and (b-4) means for accepting said cycle time T 0 only when the following second condition (II) as well as said first condition are satisfied: T.sub.0 ≧T.sub.c (II)
Claim 58
Dependent Claim
82 words
The device of claim 51, wherein; said semiconductor substrates are classified into a plurality of lots; and the means (b) further comprises: (b-5) means for accepting said waiting time T wj only when the following third condition (III) as well as said first and second conditions are satisfied: T.sub.0 ≧T.sub.c ≧S.sub.m (III) where the value S m is defined according to the following expression (E1): ##EQU8## and the number m is a positive integer designating an m-th lot of said semiconductor substrates.
Claim 59
Dependent Claim
49 words
The device of claim 52, wherein; the means (b) further comprises: (b-6) means for accepting said waiting time T wj only when the following fourth condition (IV) as well as said first through third conditions are satisfied: T.sub.0 ≧T.sub.j +T.sub.wj (IV) where j=1, 2, . . . , N.
Claim 60
Dependent Claim
124 words
The device of claim 53, wherein; said plurality of lot include k lots of semiconductor substrates, where k is a positive integer larger than one; different sets of processing times T j for j=1, 2, . . . N are determined for said k lots of semiconductor substrates to obtain T 1 , T 2 , . . . T N2 where N2=k.N; and the means (b-6) further comprises: (b-7) means for accepting said cycle time T 0 determined according to the following expression (E2): T.sub.0 -max (T.sub.1, T.sub.2, . . . ,T.sub.N2, T.sub.c) (E2) where the symbol max represents the maximum value among the respective values of T 1 , T 2 , . . . ,T N2 , and T c .
Claim 61
Dependent Claim
30 words
The device of claim 54, wherein; the means (b) further comprises: (b-8) means for accepting a non-zero value of said waiting time T wj only for said heat processing part.
Claim 62
Dependent Claim
98 words
The device of claim 55, wherein; the means (b) further comprises: (b-8) means for inputting a trial value for said cycle time T 0 ; the means (b-2) comprises: (b-2-1) means for comparing said trial value for said cycle time T 0 with said processing times T 1 , T 2 , . . . T N2 ; (b-2-2) means for employing said trial value for said cycle time T 0 when the condition (I) is satisfied; and (b-2-3) means for inputting another trial value for said cycle time T 0 when the condition (I) is not satisfied.
Claim 63
Dependent Claim
76 words
The device of claim 56, wherein; the means (b-4) comprises: (b-4-1) means for comparing said trial value for said cycle time T 0 with said transporting time T c ; (b-4-2) means for employing said trial value for said cycle time T 0 when the condition (II) as well as said condition (I) are satisfied; and (b-4-3) means for inputting another trail value for said cycle time T 0 when the condition (II) is not satisfied.
Claim 64
Dependent Claim
152 words
The device of claim 57, wherein; the means (b) further comprises: (b-9) means for inputting respective trial values for said waiting times T 1 , T 2 , . . . T N2 ; the means (b-5) comprises: (b-5-1) means for comparing said cycle time T 0 with a sum of said transportation time T c and said respective trial values for said waiting times T 1 , T 2 , . . . T N2 ; (b-5-2) means for employing said respective trial values for said waiting times T 1 , T 2 , . . . T N2 as said waiting times T 1 , T 2 , . . . T N2 when the condition (III) is satisfied; and (b-5-3) means for inputting other respective trial values for said waiting times T 1 , T 2 , . . . T N2 when the condition (III) is not satisfied.
Claim 65
Dependent Claim
124 words
The device of claim 58, wherein; the means (b-6) comprises: (b-6-1) means for comparing said cycle time T 0 with a sum of each of trail value for said waiting times T 1 , T 2 , . . . T N2 and said processing time T j ; (b-6-2) means for employing said respective trial values for said waiting times T 1 , T 2 , . . . T N2 as said waiting times T 1 , T 2 , . . . T N2 when the condition (IV) is satisfied; and (b-6-3) means for inputting other respective trial values for said waiting times T 1 , T 2 , . . . ,T N2 when the condition (IV) is not satisfied.
Claim 66
Dependent Claim
43 words
The device of claim 59, wherein; the step (c) further comprises the step of: (c-9) controlling said transporting means so as to wait at said station until said cycle time T 0 is past since said transporting means started said station last time.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
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| 3.5 Years (Year 4) | 1998-07-24 | 1999-01-23 | 1999-07-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-07-24 | 2003-01-23 | 2003-07-25 | $3760.00 | Window Closed / Lapsed |
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