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US5429982A
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Method for growing field oxides in LOCOS technique
Assignee: National Science and Technology Council
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Filing: 1994-02-07
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Granted: 1995-07-04
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Expires: 2014-02-07
Abstract
Abstract A method for growing field oxides in a LOCOS technique, including steps of a) pushing a wafer into a furnace, b) causing the furnace in an N 2 O atmosphere to grow a buffer oxide layer on the wafer, c) annealing the wafer, d) growing a silicon nitride layer on the buffer oxide layer, e) applying a photoresist layer on the silicon nitride layer, f) applying a desired mask to the wafer, g) etching undesired parts of the silicon nitride layer according to the mask, h) forming field oxides by an oxidation on where the undesired parts of the silicon nitride layer are etched, wherein the N 2 O atmosphere allows a layer of N atoms piling up at an interface between the wafer and the buffer oxide layer for reducing a rate of the oxidation and, consequently a bird's beak effect thereof. Such method can effectively grow field oxides in the LOCOS technique, which will reduce the bird's beak effect.
Inventors
- 👤 Tien S. Chao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:21
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/61
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
133 words
A method for growing field oxides in a LOCOS technique, comprising steps of: a) pushing a wafer into a furnace; b) providing said furnace with an atmosphere consisting essentially of N 2 O and growing a buffer oxide layer on said wafer and allowing a layer of N atoms to pile up at an interface between said wafer and said buffer oxide layer; c) annealing said buffer oxide-grown wafer; d) growing a silicon nitride layer on said buffer oxide layer; e) applying a photoresist layer on said silicon nitride layer; f) applying a mask to the resulting wafer; g) etching parts of said silicon nitride layer according to said mask to expose a portion of said wafer; and h) forming said field oxide by an oxidation on the exposed portion of said wafer.
Claim 2
Independent Claim
133 words
A method for growing field oxides in a LOCOS technique, comprising steps of: a) pushing a wafer into a furnace; b) providing said furnace with an atmosphere consisting essentially of N 2 O and growing a buffer oxide layer on said wafer and allowing a layer of N atoms to pile up at an interface between said wafer and said buffer oxide layer; c) annealing said buffer oxide-grown wafer; d) growing a silicon nitride layer on said buffer oxide layer; e) applying a photoresist layer on said silicon nitride layer; f) applying a mask to the resulting wafer; g) etching parts of said silicon nitride layer according to said mask to expose a portion of said wafer; and h) forming said field oxide by an oxidation on the exposed portion of said wafer.
Claim 3
Dependent Claim
42 words
A method according to claim 1, further comprising a step after step a) of providing said furnace with an atmosphere comprising O 2 for growing an additional buffer oxide layer on which said buffer oxide layer in step b) is integrally formed.
Claim 4
Dependent Claim
37 words
A method according to claim 1, wherein said N atoms diffuse into said buffer oxide layer for forming said layer of N atoms for reducing the rate of said oxidation and consequently the bird's beak effect thereof.
Claim 5
Dependent Claim
16 words
A method according to claim 1 wherein said wafer is first cleaned before said step a).
Claim 6
Dependent Claim
25 words
A method according to claim 1 wherein the temperature for said furnace in said step b) ranges from about 900° C. to about 1000° C.
Claim 7
Dependent Claim
22 words
A method according to claim 1 wherein said buffer oxide layer has a thickness from about 100 Å to about 300 Å.
Claim 8
Dependent Claim
24 words
A method according to claim 1 wherein said annealing procedure in said step c) is executed for about 10 minutes to about 60 minutes.
Claim 9
Dependent Claim
19 words
A method according to claim 1 wherein said silicon nitride layer is deposited by a low-pressure chemical vapor deposition.
Claim 10
Dependent Claim
23 words
A method according to claim 1 wherein said step d) is executed under a temperature from about 650° C. to about 850° C.
Claim 11
Dependent Claim
23 words
A method according to claim 1 wherein said silicon nitride layer has a thickness ranging from about 1000 Å to about 2000 Å.
Claim 12
Dependent Claim
16 words
A method according to claim 1 wherein said etching procedure is executed by a dry etch.
Claim 13
Dependent Claim
18 words
A method according to claim 1 wherein said oxidation in step h) is executed in a wet oxygen.
Claim 14
Dependent Claim
23 words
A method according to claim 1 wherein said step h) is executed at a temperature from about 950° C. to about 1100° C.
Claim 15
Dependent Claim
20 words
A method according to claim 1 wherein said step h) is executed for about 1 hour to about 3 hours.
References Cited (Backward Citations)
US4454646A
Cited
US5236862A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-07-03 | 1999-01-02 | 1999-07-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-07-03 | 2003-01-02 | 2003-07-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-07-03 | 2007-01-02 | 2007-07-04 | $7700.00 | Window Closed / Lapsed |