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Organic stripping composition

Assignee: Air Products and Chemicals Inc
•
Filing: 1992-11-30
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Granted: 1995-05-23
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Expires: 2012-11-30
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Abstract

Abstract Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.

Inventors

  • 👤 Irl E. Ward

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 13:21
CPC Classifications
C; C09; C09D; C09D9/00; C09D9/005; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; G03F7/425

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 187 words
A stripping composition for photoresists comprising: (a) from about 50 to 98% by weight of an amide compound of the formula: ##STR7## wherein R is selected from the group consisting of hydrogen, lower alkyl and phenyl; R 1 and R 2 are selected from the group consisting of hydrogen and lower alkyl; and R and R 1 together with the keto and nitrogen group to which they are attached form a five or six membered ring, (b) from about 1 to 49% by weight of an amine compound of the formula: ##STR8## wherein R 3 is selected from the group consisting of --C 2 H 5 , --C 2 H 4 OH, phenyl and CH 2 CH(OH)CH 3 , R 4 is selected from the group consisting of hydrogen, lower alkyl, alkanol and phenyl, and R 5 is selected from the group consisting of hydrogen, lower alkyl and --C 2 H 4 OH, and R 3 and R 4 together with the nitrogen group to which they are attached form a five or six membered ring, and (c) about 0.5 to 20% by weight of 8 hydroxyquinoline.
Claim 2
Dependent Claim 187 words
A stripping composition for photoresists comprising: (a) from about 50 to 98% by weight of an amide compound of the formula: ##STR7## wherein R is selected from the group consisting of hydrogen, lower alkyl and phenyl; R 1 and R 2 are selected from the group consisting of hydrogen and lower alkyl; and R and R 1 together with the keto and nitrogen group to which they are attached form a five or six membered ring, (b) from about 1 to 49% by weight of an amine compound of the formula: ##STR8## wherein R 3 is selected from the group consisting of --C 2 H 5 , --C 2 H 4 OH, phenyl and CH 2 CH(OH)CH 3 , R 4 is selected from the group consisting of hydrogen, lower alkyl, alkanol and phenyl, and R 5 is selected from the group consisting of hydrogen, lower alkyl and --C 2 H 4 OH, and R 3 and R 4 together with the nitrogen group to which they are attached form a five or six membered ring, and (c) about 0.5 to 20% by weight of 8 hydroxyquinoline.
Claim 3
Dependent Claim 246 words
In a stripping composition for photoresists which are associated with a metal or metal alloy substrate comprising: (a) from about 50 to 98% by weight of an amide compound of the formula: ##STR9## wherein R is selected from the group consisting of hydrogen, lower alkyl and phenyl, R 1 and R 2 are selected from the group consisting of hydrogen and lower alkyl; and R and R 1 together with the keto and nitrogen group to which they are attached form a five or six membered ring, (b) from about 1 to 49% by weight of an amine compound of the formula: ##STR10## wherein R 4 is selected from the group consisting of --C 2 H 5 , --C 2 H 4 OH, phenyl and CH 2 CH(OH)CH 3 , R 4 is selected from the group consisting of hydrogen, lower alkyl, alkanol and phenyl, and R 5 is selected from the group consisting of hydrogen, lower alkyl and --C 2 H 4 OH, and R 3 and R 4 together with the nitrogen group to which they are attached form a five or six membered; ring, the improvement which comprises including about 0.5 to 20% by weight of 8-hydroxyquinoline, said 8-hydroxyquinoline being an inhibitor which forms a stable 5 or 6-membered coordination complex with a metal on said substrate selected from the group consisting of Al, Zn, Cr, Ti, Ta, Ni, Cu, Ga, As, and alloys thereof whereby said complex inhibits oxidation, of said substrate.
Claim 4
Dependent Claim 246 words
In a stripping composition for photoresists which are associated with a metal or metal alloy substrate comprising: (a) from about 50 to 98% by weight of an amide compound of the formula: ##STR9## wherein R is selected from the group consisting of hydrogen, lower alkyl and phenyl, R 1 and R 2 are selected from the group consisting of hydrogen and lower alkyl; and R and R 1 together with the keto and nitrogen group to which they are attached form a five or six membered ring, (b) from about 1 to 49% by weight of an amine compound of the formula: ##STR10## wherein R 4 is selected from the group consisting of --C 2 H 5 , --C 2 H 4 OH, phenyl and CH 2 CH(OH)CH 3 , R 4 is selected from the group consisting of hydrogen, lower alkyl, alkanol and phenyl, and R 5 is selected from the group consisting of hydrogen, lower alkyl and --C 2 H 4 OH, and R 3 and R 4 together with the nitrogen group to which they are attached form a five or six membered; ring, the improvement which comprises including about 0.5 to 20% by weight of 8-hydroxyquinoline, said 8-hydroxyquinoline being an inhibitor which forms a stable 5 or 6-membered coordination complex with a metal on said substrate selected from the group consisting of Al, Zn, Cr, Ti, Ta, Ni, Cu, Ga, As, and alloys thereof whereby said complex inhibits oxidation, of said substrate.
Claim 5
Dependent Claim 13 words
The stripping composition of claim 2 wherein said inhibitor is a heterocyclic compound.
Claim 6
Dependent Claim 12 words
The stripping composition of claim 3 wherein said heterocyclic compound is 8-hydroxyquinoline.
Claim 7
Dependent Claim 41 words
A process for removing a coating from a coated substrate comprising applying to said coated substrate a stripping effective amount of the composition of claim 1, for a stripping effective period of time and then removing the coating from the substrate.
Claim 8
Dependent Claim 41 words
A process for removing a coating from a coated substrate comprising applying to said coated substrate a stripping effective amount of the composition of claim 2, for a stripping effective period of time and then removing the coating from the substrate.
Claim 9
Dependent Claim 7 words
The composition of claim 1 including water.
Claim 10
Dependent Claim 8 words
The composition of claim 1 which is non-aqueous.
Claim 11
Dependent Claim 28 words
The composition of claim 1 wherein said amine is selected from the group consisting of monoethanol amine, N-methyl aminoethanol, methylethylamine, morpholine, 1-amino-2-propanol, 2-(2-aminoethoxyethanol), 3-methoxypropylamine, 2-amino-picoline and bis (2-ethylhexyl)amine.
Claim 12
Dependent Claim 15 words
The composition of claim 1 including up to about 2% by weight of nonionic detergent.
Claim 13
Dependent Claim 25 words
The composition of claim 1 comprising about 97% by weight of dimethylacetamide, about 1% by weight of diethanolamine and about 2% by weight of 8-hydroxyquinoline.
Claim 14
Dependent Claim 42 words
A process for removing a coating from a coated substrate comprising applying to said coated substrate a stripping effective amount of a stripping composition of claim 1, for a stripping effective period of time, and then removing the coating from the substrate.

References Cited (Backward Citations)

US3972839A Cited
US4276186A Cited
US4539230A Cited
US4737195A Cited
US4770713A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-05-22 1998-11-21 1999-05-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-05-22 2002-11-21 2003-05-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-05-22 2006-11-21 2007-05-23 $7700.00 Window Closed / Lapsed

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