Patent US5411593A successfully refreshed from Google Patents.
US5411593A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for servicing vacuum chamber using non-reactive gas filled maintenance enclosure
Assignee: Applied Materials Inc
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Filing: 1993-12-14
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Granted: 1995-05-02
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Expires: 2013-12-14
Abstract
Abstract A process and apparatus is disclosed for providing access to the interior of a vacuum deposition chamber in a vacuum deposition apparatus without exposing residues, such as chlorosilane residues, within the chamber to moisture and/or oxygen-containing gases. The process comprises first placing over the upper surface of the vacuum deposition apparatus an enclosure which has a bottom opening large enough to completely cover the top opening to the chamber, and which is capable of being filled with one or more non-reactive gases. One or more non-reactive gases are then flowed into the enclosure to purge moisture and/or oxygen-containing gases from the enclosure. After the enclosure has been mounted on the apparatus and purged by the flow of non-reactive gases therein, the vacuum deposition chamber may be opened, while continuing the flow of non-reactive gases into the enclosure. After servicing, the vacuum deposition chamber may be resealed, the flow of non-reactive gases shut off, and the enclosure then removed from the apparatus. In a preferred embodiment, the flow of non-reactive gases into the enclosure is positioned to flow down from the top of the enclosure at a right angle to openings in the sidewall of the enclosure provided for accessing the vacuum deposition chamber, to thereby provide a gas curtain of non-reactive gas flow across the openings to inhibit ingress of moisture and/or oxygen-containing gases, as well as particulate impurities, into the enclosure.
Inventors
- 👤 David K. Carlson
- 👤 Norma B. Riley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:54
CPC Classifications
H; H10; H10P; H10P95/00; H10P72/00; H10P72/04; H10P72/0402; C; C23; C23C; C23C16/00; C23C16/44; C23C16/4401; Y; Y10; Y10S; Y10S118/00; Y10S118/07
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
186 words
Apparatus for providing access to the interior of a vacuum deposition chamber in a vacuum deposition apparatus for servicing through an opening normally covered by a cover on said chamber without exposing residues within said chamber to moisture and/or oxygen-containing gases which comprises: a) a removable enclosure capable of being temporarily placed over the upper surface of said vacuum deposition apparatus containing said vacuum deposition chamber to permit servicing of the interior of said vacuum deposition chamber, said enclosure having a bottom opening large enough to completely cover said cover on said chamber, said enclosure being capable of being filled with one or more non-reactive gases flowed into said enclosure to purge moisture and/or oxygen-containing gases from said enclosure; and b) means for flowing said one or more non-reactive gases into said enclosure; to thereby prevent moisture and/or oxygen-containing gases from entering said enclosure, whereby such undesirable gases will be excluded from contact with residues within said vacuum deposition chamber when said cover is removed to access said chamber for servicing through said opening in said chamber while said enclosure covers said opening to said chamber.
Claim 2
Dependent Claim
186 words
Apparatus for providing access to the interior of a vacuum deposition chamber in a vacuum deposition apparatus for servicing through an opening normally covered by a cover on said chamber without exposing residues within said chamber to moisture and/or oxygen-containing gases which comprises: a) a removable enclosure capable of being temporarily placed over the upper surface of said vacuum deposition apparatus containing said vacuum deposition chamber to permit servicing of the interior of said vacuum deposition chamber, said enclosure having a bottom opening large enough to completely cover said cover on said chamber, said enclosure being capable of being filled with one or more non-reactive gases flowed into said enclosure to purge moisture and/or oxygen-containing gases from said enclosure; and b) means for flowing said one or more non-reactive gases into said enclosure; to thereby prevent moisture and/or oxygen-containing gases from entering said enclosure, whereby such undesirable gases will be excluded from contact with residues within said vacuum deposition chamber when said cover is removed to access said chamber for servicing through said opening in said chamber while said enclosure covers said opening to said chamber.
Claim 3
Dependent Claim
27 words
The apparatus of claim 1 further including opening means formed in one or more sidewalls of said enclosure to permit access to said opening in said chamber.
Claim 4
Dependent Claim
32 words
The apparatus of claim 2 wherein said opening means formed in one or more sidewalls of said enclosure comprises a plurality vertical strips which extend to said bottom opening of said enclosure.
Claim 5
Dependent Claim
29 words
The apparatus of claim 3 wherein said vertical strips extend from a point adjacent the top of said sidewall of said enclosure to said bottom opening of said enclosure.
Claim 6
Dependent Claim
39 words
The apparatus of claim 3 wherein said vertical strips extend downwardly to said bottom opening of said enclosure from a point about midway between the top of said sidewall of said enclosure and said bottom opening of said enclosure.
Claim 7
Dependent Claim
18 words
The apparatus of claim 3 wherein at least a portion of said enclosure is covered with transparent material.
Claim 8
Dependent Claim
83 words
The apparatus of claim 1 which further includes means for flowing said one or more non-reactive gases into said enclosure downwardly from the top of said enclosure at a right angle to one or more openings provided in a sidewall of said enclosure for accessing said vacuum deposition chamber, to thereby provide a gas curtain of non-reactive gas flow across said one or more enclosure sidewall openings to inhibit ingress of moisture and/or oxygen-containing gases, as well as particulate impurities, into said enclosure.
Claim 9
Dependent Claim
161 words
Apparatus for providing access to the interior of a vacuum chamber in a vacuum apparatus through a cover on an upper surface of said vacuum apparatus without exposing said residues within said chamber to moisture and/or oxygen-containing gases which comprises: a) an enclosure having a closed top, a plurality of sidewalls, and a bottom opening large enough to completely cover said cover on said chamber, and which is capable of being filled with one or more non-reactive gases; and b) means for flowing one or more non-reactive gases into said enclosure to purge moisture and/or oxygen-containing gases from said enclosure while removing said cover through one or more openings in one or more of said sidewalls of said enclosure for servicing the interior of said vacuum chamber; whereby said flow of non-reactive gas into said enclosure will inhibit ingress of moisture and/or oxygen-containing gases, as well as particulate impurities, into said interior of said vacuum chamber when said cover is removed.
Claim 10
Dependent Claim
161 words
Apparatus for providing access to the interior of a vacuum chamber in a vacuum apparatus through a cover on an upper surface of said vacuum apparatus without exposing said residues within said chamber to moisture and/or oxygen-containing gases which comprises: a) an enclosure having a closed top, a plurality of sidewalls, and a bottom opening large enough to completely cover said cover on said chamber, and which is capable of being filled with one or more non-reactive gases; and b) means for flowing one or more non-reactive gases into said enclosure to purge moisture and/or oxygen-containing gases from said enclosure while removing said cover through one or more openings in one or more of said sidewalls of said enclosure for servicing the interior of said vacuum chamber; whereby said flow of non-reactive gas into said enclosure will inhibit ingress of moisture and/or oxygen-containing gases, as well as particulate impurities, into said interior of said vacuum chamber when said cover is removed.
Claim 11
Dependent Claim
100 words
The apparatus of claim 8 wherein said means for flowing said one or more non-reactive gases into said enclosure further includes means for flowing said one or more non-reactive gases into said enclosure downwardly from said top of said enclosure and adjacent said one or more sidewalls having said one or more openings therein for accessing said vacuum chamber, to thereby provide a gas curtain of non-reactive gas flow across said one or more openings to inhibit ingress of moisture and/or oxygen-containing gases, as well as particulate impurities, into the interior of said vacuum chamber when said cover is removed.
Claim 12
Dependent Claim
57 words
The apparatus of claim 9 wherein said means for flowing said one or more non-reactive gases into said enclosure further comprise gas manifold means, disposed within said enclosure below said top and having one or more portions disposed adjacent said sidewalls having said openings therein, to thereby direct said gas flow down said sidewalls adjacent said openings.
Claim 13
Dependent Claim
45 words
The apparatus of claim 9 wherein said means for flowing said one or more non-reactive gases into said enclosure further comprises means for flowing into said enclosure one or more non-reactive gases selected from the group consisting of neon, argon, helium, nitrogen, and combinations thereof.
Claim 14
Dependent Claim
45 words
The apparatus of claim 8 which further includes means for securing a bottom surface of said enclosure to said upper surface of said vacuum apparatus to inhibit said enclosure from moving off said upper surface of said vacuum apparatus while said chamber is being serviced.
Claim 15
Dependent Claim
29 words
The apparatus of claim 8 wherein at least a portion of said sidewalls comprise transparent material to permit visual monitoring of work within said enclosure from outside said enclosure.
Claim 16
Dependent Claim
48 words
The apparatus of claim 8 wherein said one or more openings in said one or more sidewalls of said enclosure are defined by a plurality of strips of material along said sidewalls depending toward said bottom of said enclosure from a point adjacent said top of said enclosure.
Claim 17
Dependent Claim
262 words
Apparatus which permits the interior of a vacuum chamber to be serviced without exposing the interior of said chamber, including residues therein to be removed, to moisture and/or oxygen-containing gases, comprising a portable enclosure which may be removably fitted over said vacuum chamber, said apparatus further comprising: a) an enclosure capable of being placed over an upper surface of said vacuum chamber, adjacent a cover on said chamber, said enclosure comprising: i) a closed top; ii) a plurality of sidewalls in said enclosure, one or more of said sidewalls having one or more openings therein; and iii) a bottom opening large enough to completely cover said cover on said chamber, said enclosure capable of being filled with one or more non-reactive gases; b) means for flowing one or more non-reactive gases into said enclosure to purge moisture and/or oxygen-containing gases from said enclosure while said cover is removed from said vacuum chamber through said one or more openings in one or more sidewalls of said enclosure to thereby provide access to the interior of said vacuum chamber to permit said interior of said vacuum chamber to be serviced while said one or more non-reactive gases flow into said enclosure to thereby inhibit the flow of moisture and/or oxygen-containing gases into said enclosure and then into said vacuum chamber when said cover is removed; and c) means for securing a bottom surface of said enclosure to said upper surface of said vacuum chamber to inhibit said enclosure from moving off said upper surface of said vacuum chamber while said chamber is being serviced.
Claim 18
Dependent Claim
262 words
Apparatus which permits the interior of a vacuum chamber to be serviced without exposing the interior of said chamber, including residues therein to be removed, to moisture and/or oxygen-containing gases, comprising a portable enclosure which may be removably fitted over said vacuum chamber, said apparatus further comprising: a) an enclosure capable of being placed over an upper surface of said vacuum chamber, adjacent a cover on said chamber, said enclosure comprising: i) a closed top; ii) a plurality of sidewalls in said enclosure, one or more of said sidewalls having one or more openings therein; and iii) a bottom opening large enough to completely cover said cover on said chamber, said enclosure capable of being filled with one or more non-reactive gases; b) means for flowing one or more non-reactive gases into said enclosure to purge moisture and/or oxygen-containing gases from said enclosure while said cover is removed from said vacuum chamber through said one or more openings in one or more sidewalls of said enclosure to thereby provide access to the interior of said vacuum chamber to permit said interior of said vacuum chamber to be serviced while said one or more non-reactive gases flow into said enclosure to thereby inhibit the flow of moisture and/or oxygen-containing gases into said enclosure and then into said vacuum chamber when said cover is removed; and c) means for securing a bottom surface of said enclosure to said upper surface of said vacuum chamber to inhibit said enclosure from moving off said upper surface of said vacuum chamber while said chamber is being serviced.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-05-01 | 1998-10-31 | 1999-05-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-05-01 | 2002-10-31 | 2003-05-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-05-01 | 2006-10-31 | 2007-05-02 | $7700.00 | Window Closed / Lapsed |