Apparatus and process for mass production of film by vacuum deposition

Claim 3

The apparatus of claim 1, wherein the film forming stage is composed of a plurality of reaction chambers.

Claim 4

The apparatus of claim 1, wherein a substrate discharging stage positioned adjacent to the interconnecting stage is further provided for taking out a complete-film supporting substrate.

Claim 5

The apparatus of claim 1, wherein the substrate charging stage is provided therein with a heating means for heating in advance a substrate on which a film is to be formed.

Claim 6

The apparatus of claim 3, wherein the substrate discharging stage has a structure capable of being evacuated.

Claim 7

The apparatus of claim 3, wherein the substrate discharging stage is provided therein with a cooling means for cooling a completed-film supporting substrate to a desired temperature.

Claim 8

The apparatus of claim 1, wherein the substrate charging stage and the interconnecting stage are positioned in a single vacuum chamber.

Claim 9

The apparatus of claim 1, wherein the substrate charging stage and the interconnecting stage can be independently evacuated.

Claim 10

The apparatus of claim 2, wherein a plurality of reaction chambers may be evacuated independently of one another.

Claim 11

The apparatus of claim 2, wherein a plurality of reaction chambers have a structure permitting independent film formations.

Claim 12

The apparatus of claim 2, wherein a plurality of reaction chambers are removably attached independently of one another to the interconnecting stage.

Claim 13

The apparatus of claim 1, which is provided with a plurality of units in parallel each comprising interconnecting stage and a film forming stage.

Claim 14

A process for mass producing of films by vacuum deposition which comprises the steps of: (1) setting a substrate for film supporting in a substrate charging stage which may be evacuated, (2) evacuating thereafter said substrate charging stage to a desired pressure, (3) transferring the substrate from the substrate charging stage to an interconnecting stage evacuated in advance to a desired pressure, (4) transferring said substrate from the interconnecting stage to a reaction chamber positioned in the vicinity of and under the interconnecting stage and evacuated in advance to a desired pressure, and setting the substrate in the reaction chamber, (5) introducing thereafter a film forming raw material gas into the reaction chamber, and keeping the reaction chamber at a desire pressure, (6) forming a plasma environment of the introduced raw material gas in the reaction chamber by an electric discharge, to deposit a film on the substrate, (7) returning the completed-film supporting substrate to the interconnecting stage; and (8) cooling and taking out the completed-film supporting substrate.

Claim 15

A process for mass producing of films by vacuum deposition which comprises the steps of: (1) setting a substrate for film supporting in a substrate charging stage which may be evacuated, (2) evacuating thereafter said substrate charging stage to a desired pressure, (3) transferring the substrate from the substrate charging stage to an interconnecting stage evacuated in advance to a desired pressure, (4) transferring said substrate from the interconnecting stage to a reaction chamber positioned in the vicinity of and under the interconnecting stage and evacuated in advance to a desired pressure, and setting the substrate in the reaction chamber, (5) introducing thereafter a film forming raw material gas into the reaction chamber, and keeping the reaction chamber at a desire pressure, (6) forming a plasma environment of the introduced raw material gas in the reaction chamber by an electric discharge, to deposit a film on the substrate, (7) returning the completed-film supporting substrate to the interconnecting stage; and (8) cooling and taking out the completed-film supporting substrate.

Claim 16

The process of claim 13, wherein evacuating step (2) further comprises heating the substrate.

Claim 17

The process of claim 13, further comprising a step for heating the substrate provided after evacuating step (2) and prior to transferring step (3).

Claim 18

The process of claim 13, wherein gas introducing step (5) further comprises heating the substrate positioned in the reaction chamber.

Claim 19

The process of claim 13, further comprising a step for transporting the returned substrate to a discharge chamber provided after returning step (7) and prior to cooling step (8).

Claim 20

The apparatus of claim 1, further comprising a gate-valve provided between the substrate charging stage and the interconnecting stage.

Claim 21

The apparatus of claim 1, further comprising a gate-valve provided between the interconnecting stage and the film forming stage.

Claim 22

The apparatus of claim 1, wherein the film forming stage further comprises a means for rotating the substrate.

Claim 23

The apparatus of claim 1, wherein each of the substrate charging stage, the interconnecting stage and the film forming stage further comprises an evacuating means, said evacuating means being independently operable.

Claim 24

The apparatus of claim 1, further comprising means for heating the film forming substrate.

Claim 25

The apparatus of claim 1, wherein each of the substrate charging stage and the film forming stage further comprises a means for heating the film forming substrate.