Patent US5407837A successfully refreshed from Google Patents.
US5407837A
Expired / Lapsed
US
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Method of making a thin film transistor
Assignee: Texas Instruments Inc
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Filing: 1993-08-18
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Granted: 1995-04-18
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Expires: 2013-08-18
Abstract
Abstract This is a method of fabricating a transistor on a wafer. The method comprises: forming a doped silicon layer; patterning the active transistor regions of the doped silicon layer and utilizing a silicon etch to remove the non-transistor regions of the doped silicon layer to create a silicon mesa; forming a gate oxide layer on a doped silicon mesa; depositing a polysilicon layer on top of the oxide layer; depositing a photoresist layer over the polysilicon mesa; patterning the photoresist layer with a gate configuration; etching to remove portions of the polysilicon layer using the photoresist as a mask to create a polysilicon gate; depositing a TEOS layer over the polysilicon gate and exposed gate oxide; etching to remove portions of the TEOS layer and the exposed gate oxide to leave sidewall spacers on sides of the polysilicon gate and sides of silicon mesa; depositing a metal layer over remaining portions of the polysilicon gate, the sidewall spacers, and the silicon mesa; annealing the wafer to react portions of the metal layer with exposed portions of the silicon mesa to form a metal silicide; etching all unreacted the metal layer to leave the silicided portions of the polysilicon gate and silicided portion of the doped silicon layer.
Inventors
- 👤 Robert H. Eklund
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:33
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/031; H10D30/0321; H10D30/0323; H10D30/60; H10D30/67; H10D30/6704; H10D30/6713; H10D30/6729; H10D30/6737; H10D30/6739; H10D64/00; H10D64/60; H10D64/64; H10D64/647
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
187 words
A method of fabricating a MOS field effect transistor on a wafer comprising: a. forming a gate oxide layer on a doped silicon layer; b. utilizing a photoresist layer to pattern a doped polysilicon layer to form a gate whereby some of said gate oxide layer is exposed; c. isotropically depositing a conformal oxide layer over said polysilicon gate and exposed gate oxide; d. anisotropically etching to remove portions of said conformal oxide layer and said exposed gate oxide to leave sidewall spacers on sides of said polysilicon gate; e. depositing a metal layer over remaining portions of said polysilicon gate, said sidewall spacers, and said silicon layer; f. annealing said wafer to react portions of said metal layer with exposed portions of said silicon layer to form a metal silicide; and g. etching all unreacted portions of said metal layer to leave the silicided portions of said polysilicon gate and silicided portions of said doped silicon layer, wherein silicided regions are over said polysilicon gate and provide source/drain regions within said silicon layer, and said silicided source/drain regions are in direct contact with said channel region.
Claim 2
Independent Claim
187 words
A method of fabricating a MOS field effect transistor on a wafer comprising: a. forming a gate oxide layer on a doped silicon layer; b. utilizing a photoresist layer to pattern a doped polysilicon layer to form a gate whereby some of said gate oxide layer is exposed; c. isotropically depositing a conformal oxide layer over said polysilicon gate and exposed gate oxide; d. anisotropically etching to remove portions of said conformal oxide layer and said exposed gate oxide to leave sidewall spacers on sides of said polysilicon gate; e. depositing a metal layer over remaining portions of said polysilicon gate, said sidewall spacers, and said silicon layer; f. annealing said wafer to react portions of said metal layer with exposed portions of said silicon layer to form a metal silicide; and g. etching all unreacted portions of said metal layer to leave the silicided portions of said polysilicon gate and silicided portions of said doped silicon layer, wherein silicided regions are over said polysilicon gate and provide source/drain regions within said silicon layer, and said silicided source/drain regions are in direct contact with said channel region.
Claim 3
Dependent Claim
16 words
The method of claim 1, wherein forming of said doped silicon layer is by ion implantation.
Claim 4
Dependent Claim
16 words
The method of claim 1, wherein said metal is titanium and said silicide is titanium silicide.
Claim 5
Dependent Claim
16 words
The method of claim 1, wherein said metal is cobalt and said silicide is cobalt silicide.
Claim 6
Dependent Claim
16 words
The method of claim 1, wherein said metal is nickel and said sfiicide is nickel silicide.
Claim 7
Dependent Claim
20 words
The method of claim 1, wherein said metal is a refractory metal and the silicide is the corresponding silicide compound.
Claim 8
Dependent Claim
11 words
The method of claim 1, wherein said silicon layer is polycrystalline.
Claim 9
Dependent Claim
22 words
The method of claim 7, wherein said polycrystalline silicon layer is annealed prior to silicide formation to provide enlarged crystals of silicon.
Claim 10
Dependent Claim
14 words
The method of claim 1, wherein said silicon layer is formed on an insulator.
Claim 11
Dependent Claim
19 words
The method of claim 9, wherein said insulator is a field oxide or nitride of thickness greater than 1000Å.
Claim 12
Dependent Claim
16 words
The method of claim 9, wherein a silicon mesa is formed out of said silicon layer.
Claim 13
Dependent Claim
15 words
The method of claim 1, wherein said silicon layer is formed on a silicon substrate.
Claim 14
Independent Claim
194 words
A method of fabricating a MOS field effect transistor on a wafer comprising: a. forming a gate oxide layer on said doped silicon layer; b. depositing a polysilicon layer on top of said gate oxide layer; c. depositing a photoresist layer over said polysilicon layer;, d. patterning said photoresist layer with a gate configuration; e. etching to remove portions of said polysilicon layer using said photoresist as a mask to create a polysilicon gate prior to silicide formation; f. depositing a TEOS layer over said polysilicon gate and exposed gate oxide; g. etching to remove portions of said TEOS layer and said exposed gate oxide to leave sidewall spacers on sides of said polysilicon gate; h. depositing a metal layer over remaining portions of said polysilicon gate, said sidewall spacers, and said silicon layer; i. annealing said wafer to react portions of said metal layer with exposed portions of said silicon layer to form a metal silicide; and j. etching all unreacted said metal layer to leave the silicided portions of said polysilicon gate and silicided portion of said doped silicon layer, wherein said silicided source/drain regions provide the source/drain regions of the transistor.
Claim 15
Independent Claim
194 words
A method of fabricating a MOS field effect transistor on a wafer comprising: a. forming a gate oxide layer on said doped silicon layer; b. depositing a polysilicon layer on top of said gate oxide layer; c. depositing a photoresist layer over said polysilicon layer;, d. patterning said photoresist layer with a gate configuration; e. etching to remove portions of said polysilicon layer using said photoresist as a mask to create a polysilicon gate prior to silicide formation; f. depositing a TEOS layer over said polysilicon gate and exposed gate oxide; g. etching to remove portions of said TEOS layer and said exposed gate oxide to leave sidewall spacers on sides of said polysilicon gate; h. depositing a metal layer over remaining portions of said polysilicon gate, said sidewall spacers, and said silicon layer; i. annealing said wafer to react portions of said metal layer with exposed portions of said silicon layer to form a metal silicide; and j. etching all unreacted said metal layer to leave the silicided portions of said polysilicon gate and silicided portion of said doped silicon layer, wherein said silicided source/drain regions provide the source/drain regions of the transistor.
Claim 16
Dependent Claim
12 words
The method of claim 1, wherein said silicon layer is single crystalline.
Claim 17
Dependent Claim
12 words
The method of claim 13, wherein said silicon layer is single crystalline.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-04-17 | 1998-10-17 | 1999-04-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-04-17 | 2002-10-17 | 2003-04-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-04-17 | 2006-10-17 | 2007-04-18 | $7700.00 | Window Closed / Lapsed |