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US5404041A Expired / Lapsed US ⏱️ 0.0 years remaining

Source contact placement for efficient ESD/EOS protection in grounded substrate MOS integrated circuit

Assignee: Texas Instruments Inc
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Filing: 1993-03-31
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Granted: 1995-04-04
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Expires: 2013-03-31
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Abstract

Abstract An ESD/EOS protection circuit (100) for protecting an integrated circuit. A MOS transistor (102) is arranged in a multi-finger configuration having a plurality of drain regions (124), a plurality of source regions (122) and a plurality of gates (118). A first metal layer (162) substantially covers each of the drain regions (124) and is in contact with each of the drain regions (124) via drain contacts (130). A second metal layer (154) substantially covers each of the source regions (122) and is in contact with each of the source regions via source contacts (128). A plurality of source contacts (128) are located at a minimum distance from gates (118). Metal-to-metal contacts (160) connect a third metal layer (156) with the second metal layer (154) over each of the source regions (122).

Inventors

  • 👤 Carlos H. Diaz
  • 👤 Charvaka Duvvury
  • 👤 Sung-Mo Kang

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 06:58
CPC Classifications
H; H10; H10D; H10D89/00; H10D89/60; H10D89/601; H10D89/811

Claims Analysis

Total Claims: 15
Claim 1
Independent Claim 91 words
An ESD/EOS protection circuit for protecting an integrated circuit comprising: a. a MOS transistor having a drain region, a source region and a gate; b. at least one source contact located above said source region at a first distance from said gate, wherein said at least one source contact comprises a plurality of source contacts arranged into a plurality of rows and columns; c. at least one drain contact located above said drain region at a second distance from said gate, wherein said first distance is smaller than said second distance.
Claim 2
Dependent Claim 91 words
An ESD/EOS protection circuit for protecting an integrated circuit comprising: a. a MOS transistor having a drain region, a source region and a gate; b. at least one source contact located above said source region at a first distance from said gate, wherein said at least one source contact comprises a plurality of source contacts arranged into a plurality of rows and columns; c. at least one drain contact located above said drain region at a second distance from said gate, wherein said first distance is smaller than said second distance.
Claim 3
Dependent Claim 22 words
The ESD/EOS protection circuit of claim 1, wherein said source region and said drain region comprise approximately the same amount of area.
Claim 4
Dependent Claim 16 words
The ESD/EOS protection circuit of claim 1, wherein said first distance is less than 2 microns.
Claim 5
Dependent Claim 16 words
The ESD/EOS protection circuit of claim 1, wherein said first distance is a lithographic minimum distance.
Claim 6
Dependent Claim 24 words
The ESD/EOS protection circuit of claim 1, wherein said at least one drain contact comprises a plurality of drain contacts arranged in a row.
Claim 7
Dependent Claim 85 words
The ESD/EOS protection circuit of claim 1, further comprising: a. a first metal layer extending over said drain region and in contact with said drain region via said at least one drain contact; b. a second metal layer extending over said source region and in contact with said source region via said at least one source contact; c. a third metal layer extending over said MOS transistor; and d. a plurality of metal-to-metal contacts for connecting said third metal layer with said second metal layer.
Claim 8
Dependent Claim 213 words
An ESD/EOS protection circuit for protecting an integrated circuit comprising: a. a MOS transistor arranged in a multi-finger configuration having a plurality of drain regions, a plurality of source regions and a plurality of gates, wherein each of said gates is located between one of said source regions and one of said drain regions; b. a plurality of source contacts located above each of said source regions at a first distance from at least one of said plurality of gates; c. a plurality of drain contacts located above each of said drain regions at a second distance from at least one of said plurality of gates, wherein said first distance is smaller than said second distance; d. a first metal layer extending over and substantially covering each of said drain regions and in contact with each of said drain regions via said plurality of drain contacts; e. a second metal layer extending over and substantially covering each of said source regions and in contact with each of said source regions via said plurality of source contacts; f. a third metal layer extending over and substantially covering said MOS transistor; and g. a plurality of metal-to-metal contacts for connecting said third metal layer with said second metal layer over each of said source regions.
Claim 9
Dependent Claim 213 words
An ESD/EOS protection circuit for protecting an integrated circuit comprising: a. a MOS transistor arranged in a multi-finger configuration having a plurality of drain regions, a plurality of source regions and a plurality of gates, wherein each of said gates is located between one of said source regions and one of said drain regions; b. a plurality of source contacts located above each of said source regions at a first distance from at least one of said plurality of gates; c. a plurality of drain contacts located above each of said drain regions at a second distance from at least one of said plurality of gates, wherein said first distance is smaller than said second distance; d. a first metal layer extending over and substantially covering each of said drain regions and in contact with each of said drain regions via said plurality of drain contacts; e. a second metal layer extending over and substantially covering each of said source regions and in contact with each of said source regions via said plurality of source contacts; f. a third metal layer extending over and substantially covering said MOS transistor; and g. a plurality of metal-to-metal contacts for connecting said third metal layer with said second metal layer over each of said source regions.
Claim 10
Dependent Claim 26 words
The ESD/EOS protection circuit of claim 7, wherein said plurality of source regions and said plurality of drain regions comprise approximately the same amount of area.
Claim 11
Dependent Claim 16 words
The ESD/EOS protection circuit of claim 7, wherein said first distance is less than 2 microns.
Claim 12
Dependent Claim 15 words
The ESD/EOS protection circuit of claim 7, wherein said first distance is a design minimum.
Claim 13
Dependent Claim 24 words
The ESD/EOS protection circuit of claim 7, wherein said plurality of drain contacts are arranged in a row above each of said drain regions.
Claim 14
Dependent Claim 28 words
The ESD/EOS protection circuit of claim 7, wherein said third metal layer is connected to a ground and said first metal layer is connected to a protected pad.
Claim 15
Dependent Claim 33 words
The ESD/EOS protection circuit of claim 7, wherein said plurality of source contacts and said plurality of metal-to-metal contacts are arranged in a plurality of alternating rows over each of said source regions.

References Cited (Backward Citations)

US4952994A Cited
US4692781A Cited
US4692781B1 Cited
US4692781B2 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-04-03 1998-10-03 1999-04-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-04-03 2002-10-03 2003-04-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-04-03 2006-10-03 2007-04-04 $7700.00 Window Closed / Lapsed

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