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US5401543A
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Method for forming macroparticle-free DLC films by cathodic arc discharge
Assignee: 3M Co
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Filing: 1993-11-09
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Granted: 1995-03-28
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Expires: 2013-11-09
Abstract
Abstract The present invention provides a method for producing a diamond-like carbon coating. The method comprises the steps of providing a substrate to be coated, providing a cathode of vitreous carbon or a pyrolytic graphite cathode and initiating a cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form a coating on said substrate, said coating being substantially macroparticle free.
Inventors
- 👤 David G. O'Neill
- 👤 Jonathan G. Storer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:09
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325; C23C14/06; C23C14/0605
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
68 words
A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a cathode of vitreous carbon or a pyrolytic graphite cathode and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.
Claim 2
Independent Claim
68 words
A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a cathode of vitreous carbon or a pyrolytic graphite cathode and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.
Claim 3
Dependent Claim
17 words
The method of claim 1 wherein said cathodic arc discharge is powered by a DC power source.
Claim 4
Dependent Claim
21 words
The method of claim 1 wherein said cathodic arc discharge is powered by a capacitor to produce a pulsed arc discharge.
Claim 5
Dependent Claim
16 words
The method of claim 1 wherein the arc voltage is between about 20 to 60 volts.
Claim 6
Dependent Claim
15 words
The method of claim 1 wherein the arc current is at least about 50 amps.
Claim 7
Dependent Claim
15 words
The method of claim 1 wherein said discharge is carried out in a magnetic field.
Claim 8
Dependent Claim
20 words
The method of claim 1 wherein said coating has a plasmon energy loss of at least about 26 electron volts.
Claim 9
Dependent Claim
23 words
The method of claim 1 wherein said coating has less than 100 macroparticles in an area of 804 μm×651 μm at 106× magnification.
Claim 10
Dependent Claim
23 words
The method of claim 1 wherein said coating has less than 10 macroparticles in an area of 200 μm×162 μm at 426× magnification.
Claim 11
Independent Claim
67 words
A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a cathode of vitreous carbon in a magnetic field and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.
Claim 12
Independent Claim
67 words
A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a cathode of vitreous carbon in a magnetic field and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.
Claim 13
Dependent Claim
15 words
The method of claim 10 wherein said discharge is carried out in a magnetic field.
Claim 14
Independent Claim
62 words
A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a pyrolytic graphite cathode and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.
Claim 15
Independent Claim
62 words
A method for producing a diamond-like carbon coating comprising the steps of providing a substrate to be coated, providing a pyrolytic graphite cathode and initiating a substantially macroparticle free cathodic arc discharge with the arc spot on the cathode surface and directing the resulting carbon plasma toward the substrate to form said coating on said substrate, said coating being substantially macroparticle free.
Claim 16
Dependent Claim
15 words
The method of claim 12 wherein said discharge is carried out in a magnetic field.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-03-27 | 1998-09-26 | 1999-03-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-03-27 | 2002-09-26 | 2003-03-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-03-27 | 2006-09-26 | 2007-03-28 | $7700.00 | Window Closed / Lapsed |