US5395481A
Expired / Lapsed
US
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Method for forming silicon on a glass substrate
Assignee: University of California
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Filing: 1993-10-18
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Granted: 1995-03-07
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Expires: 2013-10-18
Abstract
Abstract A method by which single-crystal silicon microelectronics may be fabricated on glass substrates at unconventionally low temperatures. This is achieved by fabricating a thin film of silicon on glass and subsequently forming the doped components by a short wavelength (excimer) laser doping procedure and conventional patterning techniques. This method may include introducing a heavily boron doped etch stop layer on a silicon wafer using an excimer laser, which permits good control of the etch stop layer removal process. This method additionally includes dramatically reducing the remaining surface roughness of the silicon thin films after etching in the fabrication of silicon on insulator wafers by scanning an excimer laser across the surface of the silicon thin film causing surface melting, whereby the surface tension of the melt causes smoothing of the surface during recrystallization. Applications for this method include those requiring a transparent or insulating substrate, such as display manufacturing. Other applications include sensors, actuators, optoelectronics, radiation hard and high temperature electronics.
Inventors
- 👤 Anthony M. McCarthy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 22:21
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/38; H10P14/3802; H10P14/3808; H10P14/3816; C; C30; C30B; C30B13/00; C30B25/00; C30B25/02; C30B25/18; C30B29/00; C30B29/02; C30B29/06; H10P14/382; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2926; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3211; H10P14/3212; H10P14/3242; H10P14/3244; H10P14/3248; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3438; H10P14/3441; H10P14/3444; H10P14/36; Y; Y10; Y10S; Y10S148/00; Y10S148/012; Y10S148/15; Y10S438/00; Y10S438/97
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
58 words
A method for depositing a layer of silicon on an insulator material, comprising: forming at least one layer of laser activated doped silicon on a silicon member; forming at least one layer of silicon on the doped silicon layer; bonding a layer of the thus formed silicon to an insulator member; and removing at least the silicon member.
Claim 2
Independent Claim
58 words
A method for depositing a layer of silicon on an insulator material, comprising: forming at least one layer of laser activated doped silicon on a silicon member; forming at least one layer of silicon on the doped silicon layer; bonding a layer of the thus formed silicon to an insulator member; and removing at least the silicon member.
Claim 3
Dependent Claim
24 words
The method of claim 1, additionally comprising: smoothing the surface of at least the silicon layer following removal of at least the silicon member.
Claim 4
Dependent Claim
26 words
The method of claim 1, wherein the laser actuated doped silicon layer defines an etch stop for the removal of the silicon member by an etchant.
Claim 5
Dependent Claim
13 words
The method of claim 1, additionally comprising: forming the insulator material from glass.
Claim 6
Dependent Claim
19 words
The method of claim 1, wherein the laser activated doped silicon layer is formed using a short wavelength laser.
Claim 7
Dependent Claim
21 words
The method of claim 5, additionally comprising smoothing the surface of the silicon layer following removal of the doped silicon layer.
Claim 8
Dependent Claim
42 words
The method of claim 6, wherein the smoothing of the silicon layer surface is carried out by melting the surface of the silicon layer by laser energy, whereby the surface is smoothed during recystallization of the melted surface of the silicon layer.
Claim 9
Dependent Claim
19 words
The method of claim 7, wherein an excimer laser is used for melting the surface of the silicon layer.
Claim 10
Dependent Claim
28 words
The method of claim 8, wherein the laser activated doped silicon layer is formed by boron doping of the surface of the silicon member using an excimer laser.
Claim 11
Dependent Claim
33 words
The method of claim 1, additionally comprising: forming the insulator material from glass, and boron doping a surface of the silicon member by an excimer laser to form a boron doped silicon layer.
Claim 12
Dependent Claim
29 words
The method of claim 10, additionally comprising forming a layer of silicon-germanium on the layer of silicon, and forming a layer of device quality silicon on the silicon-germanium layer.
Claim 13
Dependent Claim
47 words
The method of claim 1, wherein the layer of laser activated doped silicon comprises a first etch stop layer, and additionally including forming a second etch stop layer on the layer of silicon, and forming a layer of device quality silicon on the second etch stop layer.
Claim 14
Dependent Claim
29 words
The method of claim 12, wherein the second etch stop layer is selected from the group comprising an epitaxially grown layer of boron doped silicon, silicon-germanium, silicon-lead and silicon-tin.
Claim 15
Dependent Claim
49 words
The method of claim 13, additionally including removing the first formed layer of silicon following removal of the first etch stop layer, and removing the second etch stop layer following removal of the first formed layer of silicon leaving the layer of device quality silicon on the insulator member.
Claim 16
Dependent Claim
27 words
The method of claim 14, additionally including smoothing the surface of at least the layer of device quality silicon by the surface melting with an excimer laser.
Claim 17
Independent Claim
90 words
A method for producing glass members having a thin film of silicon deposited thereon, comprising: forming layers of doped silicon and silicon on a silicon member; securing the layer of silicon to a glass member; and removing the silicon member and the layer of doped silicon from the layer of silicon secured to the glass member, wherein the forming of the doped silicon is carried out using a short wavelength laser and directing pulsed laser energy onto the surface of the silicon member in an environment which includes a dopant.
Claim 18
Independent Claim
90 words
A method for producing glass members having a thin film of silicon deposited thereon, comprising: forming layers of doped silicon and silicon on a silicon member; securing the layer of silicon to a glass member; and removing the silicon member and the layer of doped silicon from the layer of silicon secured to the glass member, wherein the forming of the doped silicon is carried out using a short wavelength laser and directing pulsed laser energy onto the surface of the silicon member in an environment which includes a dopant.
Claim 19
Dependent Claim
21 words
The method of claim 16, wherein the short wavelength laser constitutes an excimer laser, and wherein the dopant environment contains boron.
Claim 20
Dependent Claim
36 words
The method of claim 16, additionally including depositing a layer of dielectric material on an outer of the alternate layers formed on the silicon member, and securing the layer of dielectric material on the glass member.
Claim 21
Dependent Claim
27 words
The method of claim 18, additionally including depositing a metal layer on the dielectric layer, and etching selected patterns in at least the metal and dielectric layers.
Claim 22
Dependent Claim
19 words
The method of claim 16, additionally comprising smoothing the surface of the silicon layer secured to the glass member.
Claim 23
Dependent Claim
36 words
The method of claim 20, wherein the surface smoothing of the silicon layer is carried out by scanning an excimer laser across the surface causing melting of the surface, and allowing the melted surface to recrystallize.
Claim 24
Dependent Claim
43 words
The method of claim 16, wherein at least two layers of doped silicon and at least two layers of silicon are formed on the silicon member, such that a first of said layers of doped silicon is formed directly on the silicon member.
Claim 25
Dependent Claim
27 words
The method of claim 22, wherein at least one of said two layers of doped silicon is formed using a short wavelength laser in a dopant environment.
Claim 26
Dependent Claim
82 words
method for depositing a layer of silicon on an insulator material, comprising: forming a first etch stop layer on a surface of a silicon member; forming a first silicon layer on the first etch stop layer; forming a second etch stop layer on the first silicon layer; forming a second silicon layer on the second etch stop layer; anodic bonding the second silicon layer to an insulator material; and removing the silicon member, the etch stop layers, and the first silicon layer.
Claim 27
Dependent Claim
82 words
method for depositing a layer of silicon on an insulator material, comprising: forming a first etch stop layer on a surface of a silicon member; forming a first silicon layer on the first etch stop layer; forming a second etch stop layer on the first silicon layer; forming a second silicon layer on the second etch stop layer; anodic bonding the second silicon layer to an insulator material; and removing the silicon member, the etch stop layers, and the first silicon layer.
Claim 28
Dependent Claim
22 words
The method of claim 24, additionally including smoothing at least the second silicon layer following removal of the second etch stop layer.
Claim 29
Dependent Claim
31 words
The method of claim 24, wherein at least one of said etch stop layers is formed from the group consisting of an epitaxially grown boron doped silicon, silicon-germanium, silicon-lead and silicon-tin.
Claim 30
Dependent Claim
30 words
The method of claim 24, additionally including forming at least one trench in the second silicon layer for determining the thickness of the silicon layer bonded to the insulator member.
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