US5393349A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor wafer processing apparatus
Assignee: Tokyo Electron Ltd
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Filing: 1993-09-27
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Granted: 1995-02-28
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Expires: 2013-09-27
Abstract
Abstract The present invention relates to semiconductor wafers which have a through hole formed at their center portion. A processing apparatus provided with a conveyor means including a wafer holder having a holding protrusion which engages with this through hole implements oxidation and dispersion processing or CVD processing to a processing surface of a semiconductor wafer so that a semiconductor wafer can have heat treatment performed without accompanying film growth faults or heat distortion.
Inventors
- 👤 Wataru Ohkase
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:23
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/54; H10P72/04; H10P72/0402; H10P72/76; H10P72/7604; H10P72/7614
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
110 words
A processing apparatus for movement of a semiconductor wafer which has a through hole at a center portion thereof, said apparatus comprising: a wafer movement fork; a shaft; and a wafer holder centrally mounted on said shaft for receiving semiconductor wafers from said wafer movement fork, said shaft partially protruding through said wafer holder, said wafer holder having a circumferential portion including at least three support protrusions thereon, whereby a semiconductor wafer received from said fork is mounted on said wafer holder and maintained in a horizontal position by inserting said shaft into the through hole of the received wafer until said support protrusions abut an under-surface of the wafer.
Claim 2
Dependent Claim
110 words
A processing apparatus for movement of a semiconductor wafer which has a through hole at a center portion thereof, said apparatus comprising: a wafer movement fork; a shaft; and a wafer holder centrally mounted on said shaft for receiving semiconductor wafers from said wafer movement fork, said shaft partially protruding through said wafer holder, said wafer holder having a circumferential portion including at least three support protrusions thereon, whereby a semiconductor wafer received from said fork is mounted on said wafer holder and maintained in a horizontal position by inserting said shaft into the through hole of the received wafer until said support protrusions abut an under-surface of the wafer.
Claim 3
Dependent Claim
17 words
The processing apparatus of claim 1, wherein said processing apparatus is a vertical type heat treatment apparatus.
Claim 4
Dependent Claim
14 words
The processing apparatus of claim 1, wherein said processing apparatus is a CVD apparatus.
Claim 5
Dependent Claim
31 words
The processing apparatus of claim 1, further having means for orienting a wafer on said wafer holder by utilizing a notch formed in a peripheral portion of the wafer through hole.
Claim 6
Dependent Claim
37 words
The processing apparatus of claim 1, wherein said shaft has a tapered end portion, for extending through the through hole of a received wafer from a side opposite of a side of the wafer to be processed.
Claim 7
Dependent Claim
22 words
The processing apparatus of claim 1, wherein said wafer movement fork has a holding surface with a plurality of suction holes therein.
Claim 8
Dependent Claim
27 words
The processing apparatus of claim 1, wherein said wafer movement fork has at least three protruding portions and each of said protruding portions has a suction hole.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-02-27 | 1998-08-29 | 1999-02-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-02-27 | 2002-08-29 | 2003-02-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-02-27 | 2006-08-29 | 2007-02-28 | $7700.00 | Window Closed / Lapsed |