Patent US3896398A successfully refreshed from Google Patents.
Patent US5389794A successfully refreshed from Google Patents.
US5389794A
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Surface pit and mound detection and discrimination system and method
Assignee: QC Optics Inc
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Filing: 1992-11-25
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Granted: 1995-02-14
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Expires: 2012-11-25
Abstract
Abstract A surface pit and mound detection and discrimination system including a device for scanning a beam of radiation over a surface, and a mechanism for detecting a local slope on the surface for differentiating between whether the beam of radiation is scanning a pit or a mound on the surface.
Inventors
- 👤 Nicholas C. Allen
- 👤 Sergey V. Broude
- 👤 Eric T. Chase
- 👤 Pascal Miller
- 👤 Jay L. Ormsby
- 👤 Bruno Rostaing
- 👤 Lloyd P. Quackenbos
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:27
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/89; G01N21/892; G01N2021/8924; G01N21/95; G01N21/9506
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
93 words
A surface defect pit and mound detection and discrimination system comprising: means for scanning a beam of radiation over a surface; means for separately sensing radiation scattered from the surface in the near-specular region and in the far specular region for differentiating between pits and mounds and other types of defects; means for detecting a local slope on the surface from radiation scattered from the surface in the near-specular region; and means, responsive to said means for detecting, for differentiating between whether said beam of radiation is scanning a pit or a mound.
Claim 2
Dependent Claim
93 words
A surface defect pit and mound detection and discrimination system comprising: means for scanning a beam of radiation over a surface; means for separately sensing radiation scattered from the surface in the near-specular region and in the far specular region for differentiating between pits and mounds and other types of defects; means for detecting a local slope on the surface from radiation scattered from the surface in the near-specular region; and means, responsive to said means for detecting, for differentiating between whether said beam of radiation is scanning a pit or a mound.
Claim 3
Dependent Claim
56 words
The surface defect pit and mound detection system of claim 1 in which said means for differentiating includes means for indicating the presence of a pit on the surface in response to a change in slope in one manner and a mound on the surface in response to a change in slope in a different manner.
Claim 4
Dependent Claim
36 words
The surface defect pit and mound detection and discrimination system of claim 1 in which said means for scanning includes a laser source and means for providing relative motion between the laser beam and the surface.
Claim 5
Dependent Claim
35 words
The surface pit and mound detection and discrimination system of claim 3 in which means for providing relative motion includes means for rotating said surface and translating said surface in relation to the laser beam.
Claim 6
Dependent Claim
32 words
The surface pit and mound detection and discrimination system of claim 1 in which said means for scanning includes means for directing a laser beam in a direction normal to the surface.
Claim 7
Dependent Claim
60 words
The surface pit and mound detection and discrimination system of claim 1 in which said means for detecting includes first and second detectors for sensing radiation reflected from the surface, each said detector disposed and masked for separately indicating a deviation in one direction from the path expected for a nominal surface representative of a local slope on the surface.
Claim 8
Dependent Claim
66 words
The surface pit and mound detection and discrimination system of claim 1 in which said means for detecting includes sensor means, responsive to radiation reflected from the surface in the specular region, having a first output for a deviation of said reflected radiation indicative of a positive slope on the surface and a second output for a deviation indicative of a negative slope on the surface.
Claim 9
Dependent Claim
49 words
The surface pit and mound detection and discrimination system of claim 7 in which said means for differentiating includes output means denoting the presence of a mound on the surface when a deviation indicative of a positive slope is proximately followed by a deviation indicative of a negative slope.
Claim 10
Dependent Claim
40 words
The surface pit and mound detection and discrimination system of claim 1 further including means, responsive to said means for detecting, for measuring the relative height of a mound on the surface in response to radiation reflected from the surface.
Claim 11
Dependent Claim
40 words
The surface pit and mound detection and discrimination system of claim 1 further including means, responsive to said means for detecting, for assessing the relative depth of a pit on the surface in response to radiation reflected from the surface.
Claim 12
Dependent Claim
35 words
The surface pit and mound detection and discrimination system of claim 1 further including means, responsive to said means for detecting, for ascertaining the transverse extent of a pit and mound detected on the surface.
Claim 13
Dependent Claim
32 words
The surface pit and mound detection and discrimination system of claim 1 in which said means for scanning includes means for denoting the location of the pit or mound on the surface.
Claim 14
Dependent Claim
146 words
A surface pit and mound detection and discrimination system comprising: means for directing a beam of radiation to a surface; means for providing relative motion between said beam and the surface; means for separately sensing radiation scattered from the surface in the near-specular region and in the far-specular region for differentiating between pits and mounds, and other types of defects; sensor means for detecting reflected radiation from the surface in the near-specular region for determining any deviation of said reflected radiation from the path expected for a nominal surface, and for producing at least one signal representative of whether said beam directed to the surface is traversing the positive or negative slope of a defect on the surface; and means, responsive to said sensor means, for distinguishing whether said defect is a pit or a mound in response to a change of slope on the surface.
Claim 15
Dependent Claim
146 words
A surface pit and mound detection and discrimination system comprising: means for directing a beam of radiation to a surface; means for providing relative motion between said beam and the surface; means for separately sensing radiation scattered from the surface in the near-specular region and in the far-specular region for differentiating between pits and mounds, and other types of defects; sensor means for detecting reflected radiation from the surface in the near-specular region for determining any deviation of said reflected radiation from the path expected for a nominal surface, and for producing at least one signal representative of whether said beam directed to the surface is traversing the positive or negative slope of a defect on the surface; and means, responsive to said sensor means, for distinguishing whether said defect is a pit or a mound in response to a change of slope on the surface.
Claim 16
Dependent Claim
49 words
The surface pit and mound detection and discrimination system of claim 13 in which said means for providing relative motion between said beam and the surface includes means for controlling the location of said directed beam on the surface for establishing the location of a defect on the surface.
Claim 17
Dependent Claim
70 words
The surface pit and mound detection and discrimination system of claim 13 further including means for monitoring the surface extent of a detected pit or mound, and the strength of said signal representative of whether said beam directed to the surface is traversing a positive or negative slope of a defect on the surface, for establishing the relative height of a detected mound and the depth of a detected pit.
Claim 18
Independent Claim
82 words
A method of detecting pits and mounds on a surface and discriminating between them, comprising: scanning a beam of radiation over a surface; separately sensing radiation scattered through the surface in the near-specular region and in the far-specular region for differentiating between pits and mounds, and other types of defects; detecting a local slope on the surface from radiation scattered from the surface in the near-specular region; and differentiating between whether said beam of radiation is scanning a pit or a mound.
Claim 19
Independent Claim
82 words
A method of detecting pits and mounds on a surface and discriminating between them, comprising: scanning a beam of radiation over a surface; separately sensing radiation scattered through the surface in the near-specular region and in the far-specular region for differentiating between pits and mounds, and other types of defects; detecting a local slope on the surface from radiation scattered from the surface in the near-specular region; and differentiating between whether said beam of radiation is scanning a pit or a mound.
Claim 20
Dependent Claim
58 words
The method of claim 16 in which differentiating between whether said beam of radiation is scanning a pit or a mound includes indicating the presence of a pit on the surface in response to a change in slope in one manner and a mound on the surface in response to a change in slope in a different manner.
Claim 21
Independent Claim
141 words
A method of detecting pits and mounds on a surface and discriminating between them, comprising: directing a beam of radiation to a surface; providing relative motion between the beam and the surface; detecting reflected radiation from the surface including separately sensing radiation scattered from the surface in the near-specular region and in the far-specular region for differentiating between pits and mounds, and other types of defects; determining any deviation of the reflected radiation from radiation scattered from the surface in the near-specular region from the path expected for a nominal surface; producing a signal representative of whether the beam of radiation directed to the surface is traversing a positive or negative slope on the surface; and distinguishing whether the beam directed to the surface is traversing a pit or a mound in response to a change in slope on the surface.
Claim 22
Independent Claim
141 words
A method of detecting pits and mounds on a surface and discriminating between them, comprising: directing a beam of radiation to a surface; providing relative motion between the beam and the surface; detecting reflected radiation from the surface including separately sensing radiation scattered from the surface in the near-specular region and in the far-specular region for differentiating between pits and mounds, and other types of defects; determining any deviation of the reflected radiation from radiation scattered from the surface in the near-specular region from the path expected for a nominal surface; producing a signal representative of whether the beam of radiation directed to the surface is traversing a positive or negative slope on the surface; and distinguishing whether the beam directed to the surface is traversing a pit or a mound in response to a change in slope on the surface.
Claim 23
Dependent Claim
93 words
The method of detecting pits and mounds on a surface and discriminating between them of claim 18 further including analyzing the relative strength of said signals representative of whether the beam directed to the surface is traversing a positive or a negative slope on the surface and the time in which it takes for the beam of radiation to traverse the positive and negative slopes of a pit or mound on the surface for measuring the relative height of any detected mound and the relative depth of any detected pit below the surface.
Claim 24
Dependent Claim
95 words
A surface defect pit and mound detection and discrimination system comprising: means for scanning a beam of radiation over a surface; means for detecting a local slope on the surface including first and second detectors for sensing radiation reflected from the surface, each said detector disposed and masked for separately indicating a deviation in one direction from the path expected for a nominal surface representative of a local slope on the surface; and means, responsive to said means for detecting, for differentiating between whether said beam of radiation is scanning a pit or a mound.
Claim 25
Dependent Claim
95 words
A surface defect pit and mound detection and discrimination system comprising: means for scanning a beam of radiation over a surface; means for detecting a local slope on the surface including first and second detectors for sensing radiation reflected from the surface, each said detector disposed and masked for separately indicating a deviation in one direction from the path expected for a nominal surface representative of a local slope on the surface; and means, responsive to said means for detecting, for differentiating between whether said beam of radiation is scanning a pit or a mound.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-02-13 | 1998-08-15 | 1999-02-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-02-13 | 2002-08-15 | 2003-02-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-02-13 | 2006-08-15 | 2007-02-14 | $7700.00 | Window Closed / Lapsed |