US5386720A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integrated AFM sensor
Assignee: Olympus Corp
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Filing: 1994-02-16
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Granted: 1995-02-07
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Expires: 2014-02-16
Abstract
Abstract An integrated AFM sensor includes a cantilever which has two beams extending from a support portion. The beams are integrated with each other at their ends to form a triangular free end, and a probe having a sharp distal end is arranged at the free end. The cantilever is formed by stacking a passivation layer, a piezoresistive layer, and a silicon layer. Electrodes electrically connected to the piezoresistive layer are formed at the fixed end of the cantilever through contact holes.
Inventors
- 👤 Akitoshi Toda
- 👤 Michio Takayama
- 👤 Katsuhiro Matsuyama
- 👤 Nobuaki Sakai
- 👤 Yasushi Nakamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 22:30
CPC Classifications
G; G01; G01Q; G01Q20/00; G01Q20/04; B; B82; B82Y; B82Y35/00; G01Q60/00; G01Q60/24; G01Q60/38; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/873
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
126 words
An integrated SPM sensor comprising: an elastically deformable cantilever having a free end portion; first detecting means for detecting displacement of a right side portion of said cantilever, with respect to a central longitudinal axis of said cantilever, and for producing a first detection signal which is a function of a detected displacement of said right side portion; and second detecting means for detecting displacement of a left side portion of said cantilever, with respect to said central longitudinal axis of said cantilever, and for producing a second detection signal which is a function of a detected displacement of said left side portion; and whereby torsion of said cantilever is detected on the basis of said detection signals obtained from said first and second detecting means.
Claim 2
Dependent Claim
126 words
An integrated SPM sensor comprising: an elastically deformable cantilever having a free end portion; first detecting means for detecting displacement of a right side portion of said cantilever, with respect to a central longitudinal axis of said cantilever, and for producing a first detection signal which is a function of a detected displacement of said right side portion; and second detecting means for detecting displacement of a left side portion of said cantilever, with respect to said central longitudinal axis of said cantilever, and for producing a second detection signal which is a function of a detected displacement of said left side portion; and whereby torsion of said cantilever is detected on the basis of said detection signals obtained from said first and second detecting means.
Claim 3
Dependent Claim
95 words
A sensor according to claim 1, further comprising: a support portion supporting said cantilever; said first and second detecting means including substantially U-shaped piezoresistive layers respectively arranged on said cantilever, each of said piezoresistive layers including end portions arranged on said support portion and a curved portion positioned near said free end portion of said cantilever, and each piezoresistive layer having a resistance which changes in accordance with deformation of a part of said cantilever on which the respective piezoelectric layer is mounted; and electrodes electrically connected to said end portions of said piezoelectric layers.
Claim 4
Dependent Claim
15 words
A sensor according to claim 2, wherein said piezoresistive layers are separated from each other.
Claim 5
Dependent Claim
14 words
A sensor according to claim 3, wherein said support portion is made of glass.
Claim 6
Dependent Claim
39 words
A sensor according to claim 2, wherein said U-shaped layers are in contact with each other to form a substantially E-shaped layer which has three ends, such that said electrodes comprise a center electrode and two outer side electrodes.
Claim 7
Dependent Claim
32 words
A sensor according to claim 2, further comprising a probe made of a conductive material, said probe having a sharp tip, and being arranged at said free end portion of said cantilever.
Claim 8
Dependent Claim
14 words
A sensor according to claim 6, wherein said support portion is made of glass.
Claim 9
Dependent Claim
31 words
A sensor according to claim 6, further comprising a strip-like conductive layer extending on said cantilever from said support portion, and said strip-like conductive layer being electrically connected to said probe.
Claim 10
Dependent Claim
34 words
A sensor according to claim 8, wherein said piezoresistive layers are arranged on a surface of said cantilever which is opposite to a surface of said cantilever on which said conductive layer is provided.
Claim 11
Dependent Claim
59 words
A sensor according to claim 8, wherein: said piezoresistive layers and said conductive layer are mounted on a surface of said cantilever; said conductive layer extends along said central longitudinal axis of said cantilever; and said piezoelectric layers are respectively arranged along both opposite sides of said conductive layer so as to guard said conductive layer against electrical noise.
Claim 12
Dependent Claim
38 words
A sensor according to claim 5, wherein said first and second detecting means comprise first and second electric current detecting means, respectively, which are electrically connected to the outer side electrodes, for detecting a electric currents flowing therethrough.
Claim 13
Dependent Claim
39 words
A sensor according to claim 11, wherein said first and second detecting means comprise: means for applying predetermined electric potentials to the outer side and center electrodes; and means for detecting electric currents flowing through the outer side electrodes.
Claim 14
Dependent Claim
98 words
An integrated SPM sensor comprising: an elastically deformable cantilever having a free end portion and a proximal end portion; a support portion for supporting said proximal end portion of said cantilever; a conductive probe formed on said free end portion of said cantilever; a strip-like conductive layer electrically connected to said probe and extending on said cantilever from said free end portion of said cantilever to said proximal end portion thereof, and along a central longitudinal axis thereof; and guard electrodes extending along respective opposite sides of said conductive layer, for guarding said conductive layer against electrical noise.
Claim 15
Dependent Claim
98 words
An integrated SPM sensor comprising: an elastically deformable cantilever having a free end portion and a proximal end portion; a support portion for supporting said proximal end portion of said cantilever; a conductive probe formed on said free end portion of said cantilever; a strip-like conductive layer electrically connected to said probe and extending on said cantilever from said free end portion of said cantilever to said proximal end portion thereof, and along a central longitudinal axis thereof; and guard electrodes extending along respective opposite sides of said conductive layer, for guarding said conductive layer against electrical noise.
Claim 16
Dependent Claim
123 words
An integrated SPM sensor comprising: a support member; an elastically deformable cantilever having a fixed end supported by said support member, said cantilever further having a free end and two sides, said cantilever including two side strips of piezoresistor which extend along both sides of said cantilever end which are electrically connected to each other at the free end of said cantilever, and said cantilever further including a center strip which extends on a central portion of said cantilever in parallel to the sides and said center strip being electrically connected to said two piezoresistive strips at the free end of said cantilever; and outer and center electrodes connected to said side and center strips at the fixed end of said cantilever, respectively.
Claim 17
Dependent Claim
123 words
An integrated SPM sensor comprising: a support member; an elastically deformable cantilever having a fixed end supported by said support member, said cantilever further having a free end and two sides, said cantilever including two side strips of piezoresistor which extend along both sides of said cantilever end which are electrically connected to each other at the free end of said cantilever, and said cantilever further including a center strip which extends on a central portion of said cantilever in parallel to the sides and said center strip being electrically connected to said two piezoresistive strips at the free end of said cantilever; and outer and center electrodes connected to said side and center strips at the fixed end of said cantilever, respectively.
Claim 18
Dependent Claim
16 words
A sensor according to claim 14, wherein said piezoresistive strips are made of a single layer.
Claim 19
Dependent Claim
22 words
A sensor according to claim 15, wherein said center strip is made of piezoresistor and is also made of said single layer.
Claim 20
Dependent Claim
17 words
A sensor according to claim 15, wherein said center strip is made of a low resistance material.
Claim 21
Dependent Claim
31 words
A sensor according to claim 14, further comprising: means for applying predetermined electric potentials to said outer and center electrodes; and means for detecting electric currents flowing through said outer electrodes.
Claim 22
Dependent Claim
12 words
A sensor according to claim 18, wherein said center electrode is grounded.
Claim 23
Dependent Claim
53 words
A sensor according to claim 14, further comprising: means for applying, to said outer electrodes, predetermined electric potentials which are identical in absolute value to and opposite in polarity to each other; means for detecting the electric potential at said center electrode; and means for detecting electric current flowing through said outer electrodes.
Claim 24
Dependent Claim
55 words
A sensor according to claim 14, further comprising: means for applying, to said outer electrodes, predetermined electric potentials which are identical in absolute value to and opposite in polarity to each other; means for detecting an electric current flowing through said center electrode; and means for detecting an electric current flowing through said outer electrodes.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-02-06 | 1998-08-08 | 1999-02-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-02-06 | 2002-08-08 | 2003-02-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-02-06 | 2006-08-08 | 2007-02-07 | $7700.00 | Window Closed / Lapsed |