Patent US5386266A successfully refreshed from Google Patents.
US5386266A
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US
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Projection exposure system
Assignee: Samsung Electronics Co Ltd
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Filing: 1993-11-22
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Granted: 1995-01-31
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Expires: 2013-11-22
Abstract
Abstract A projection exposure system includes a light source, a parallel-light forming lens and a fly's eyes lens which are sequentially disposed along a light traveling path. Between the parallel-light forming lens and fly's eyes lens is provided a light dispersing device which is composed of a first light dispersing lens with a concave lens or a second light dispersing lens with multiple small convex lenses. The light dispersing device diverges central light incident on the fly's eyes lens, to thereby increase peripheral light intensity. Accordingly, in tilted illumination, which uses peripheral light, light utilizing efficiency is raised.
Inventors
- 👤 Ho-young Kang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:40
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70091; G03F7/70108; H; H10; H10P; H10P95/00; G02; G02B; G02B3/00; G02B3/02
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
59 words
A projection exposure system comprising: a light source for producing light; a fly's eyes lens which receives light from said light source to illuminate a mask; and a light dispersing lens placed between said light source and said fly's eyes lens along a light traveling path for diverging centrally incident light toward a periphery of said fly's eyes lens.
Claim 2
Dependent Claim
59 words
A projection exposure system comprising: a light source for producing light; a fly's eyes lens which receives light from said light source to illuminate a mask; and a light dispersing lens placed between said light source and said fly's eyes lens along a light traveling path for diverging centrally incident light toward a periphery of said fly's eyes lens.
Claim 3
Dependent Claim
75 words
A projection exposure system comprising: a light source for producing light; a parallel-light forming lens for forming substantially parallel light from said light emitted from said light source; a fly's eyes lens which receives said parallel light; and a light dispersing element placed between said parallel-light forming lens and said fly's eyes lens on a light path of said parallel light for diverging centrally incident parallel light toward a periphery of said fly's eyes lens.
Claim 4
Dependent Claim
75 words
A projection exposure system comprising: a light source for producing light; a parallel-light forming lens for forming substantially parallel light from said light emitted from said light source; a fly's eyes lens which receives said parallel light; and a light dispersing element placed between said parallel-light forming lens and said fly's eyes lens on a light path of said parallel light for diverging centrally incident parallel light toward a periphery of said fly's eyes lens.
Claim 5
Dependent Claim
27 words
A projection exposure system according to claim 2, wherein said light dispersing element is a first light dispersing lens having a central portion comprising a concave lens.
Claim 6
Dependent Claim
29 words
A projection exposure system according to claim 2, wherein said light dispersing element is a second light dispersing lens having a central portion comprising a plurability of convex lenses.
References Cited (Backward Citations)
US4497015A
Cited
USRE34634E
Cited
US4789222A
Cited
US4619508A
Cited
US4939630A
Cited
US5160962A
Cited
US5237367A
Cited
US5245384A
Cited
US5296892A
Cited
US5311249A
Cited
US5300971A
Cited
US5309198A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-30 | 1998-08-01 | 1999-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-30 | 2002-08-01 | 2003-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-30 | 2006-08-01 | 2007-01-31 | $7700.00 | Window Closed / Lapsed |