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US5384952A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of connecting an integrated circuit chip to a substrate

Assignee: NEC Corp
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Filing: 1991-12-26
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Granted: 1995-01-31
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Expires: 2011-12-26
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Abstract

Abstract A method of connecting an integrated circuit chip to a wiring substrate having a wiring pattern formed thereon. The method is intended to make a connection between fine connecting portions on the substrate and connecting pads on the chip easy and reliable. The connecting method includes connecting a plurality of connecting portions formed on a major surface of a wiring substrate to a plurality of connecting pads formed on a major surface of an integrated circuit chip through metal bumps and adhering portions of the major surface of the wiring substrate which have no connecting portions to portions of the major surface of the integrated circuit chip which have no connecting pads by means of a photothermosetting resin film selectively opened at the connecting portions.

Inventors

  • 👤 Koji Matsui

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 11:11
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/20; H10W74/00; H10W74/01; H10W74/012; H10W74/10; H10W74/15; H10W72/071; H10W72/072; H10W72/07231; H10W72/07236; H10W72/073; H10W72/241; H10W72/251; H10W72/252; H10W72/30; H10W72/331; H10W72/851; H10W72/853; H10W72/856; H10W90/00; H10W90/701; H10W90/721; H10W90/724; H10W90/731; H10W90/734; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49126; Y10T29/4913; Y10T29/49144

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 201 words
A method of connecting a semiconductor chip and a wiring substrate, comprising the steps of: coating a major surface of said wiring substrate together with a plurality of connecting portions formed on said major surface of said wiring substrate with a photothermosetting resin film; selectively removing said photothermosetting resin film by photolithography to form a plurality of holes therein wherein the resin film is removed in the holes, each of said holes exposing an associated one of said connecting portions; registering, in position, said wiring substrate and said semiconductor chip having a plurality of connecting pads and a plurality of metal bumps each formed on an associated one of said connecting pads such that each of said metal bumps of said semiconductor chip faces an associated one of said connecting portions of said wiring substrate; and heating, while maintaining each of said metal bumps and each of said connecting portions in contact with each other through an associated one of said holes, to connect said wiring substrate and said semiconductor chip with each other through said photothermosetting resin film and to connect said metal bumps of said semiconductor chip and said connecting portions of said wiring substrate respectively with one another.
Claim 2
Independent Claim 201 words
A method of connecting a semiconductor chip and a wiring substrate, comprising the steps of: coating a major surface of said wiring substrate together with a plurality of connecting portions formed on said major surface of said wiring substrate with a photothermosetting resin film; selectively removing said photothermosetting resin film by photolithography to form a plurality of holes therein wherein the resin film is removed in the holes, each of said holes exposing an associated one of said connecting portions; registering, in position, said wiring substrate and said semiconductor chip having a plurality of connecting pads and a plurality of metal bumps each formed on an associated one of said connecting pads such that each of said metal bumps of said semiconductor chip faces an associated one of said connecting portions of said wiring substrate; and heating, while maintaining each of said metal bumps and each of said connecting portions in contact with each other through an associated one of said holes, to connect said wiring substrate and said semiconductor chip with each other through said photothermosetting resin film and to connect said metal bumps of said semiconductor chip and said connecting portions of said wiring substrate respectively with one another.
Claim 3
Dependent Claim 27 words
The method of connecting a semiconductor chip and a wiring substrate as claimed in claim 1, wherein said metal bumps are of indium or an alloy thereof.
Claim 4
Dependent Claim 53 words
The method of connecting a semiconductor chip and a wiring substrate as claimed in claim 1, wherein said step of heating comprises adhering portions of said semiconductor chip not having said connecting pads and portions of the wiring substrate not having the connecting portions through said photothermosetting resin film functioning as an adhesive.
Claim 5
Dependent Claim 28 words
The method of connecting a semiconductor chip and a wiring substrate as claimed in claim 3, further comprising applying a predetermined load while performing said step of heating.
Claim 6
Dependent Claim 37 words
The method as claimed in claim 1, wherein said step of coating with a photothermosetting resin film comprises coating with an epoxy resin, one of acrylic acid, maleic acid and one of triethylene glycol dimethacrylate, epoxyacrylate, benzophenone.
Claim 7
Dependent Claim 37 words
The method as claimed in claim 5 wherein said step of coating with a photothermosetting resin film comprises coating with an epoxy resin, one of acrylic acid, maleic acid and one of triethylene glycol dimethacrylate, epoxyacrylate, benzophenone.
Claim 8
Independent Claim 205 words
A method of connecting an integrated circuit chip and a wiring substrate, comprising the steps of: coating a major surface of said wiring substrate together with a plurality of metal bumps formed on respective connecting portions formed on said major surface of said wiring substrate with a photothermosetting resin film; selectively removing said photothermosetting resin film by photolithography to form a plurality of holes therein wherein the resin film is removed in the holes, each of said holes exposing an associated one of said metal bumps; registering, in position, said wiring substrate and said integrated circuit chip having a plurality of connecting pads formed on a major surface of said integrated circuit chip such that each of said metal bumps of said wiring substrate faces an associated one of said connecting pads of said integrated circuit chip; and heating, while maintaining each of said metal bumps and each of said connecting pads in contact with each other through an associated one of said holes, to connect said wiring substrate and said integrated circuit chip with each other through said photothermosetting resin film and to connect said connecting pads of said integrated circuit chip and said metal bumps of said wiring substrate respectively with one another.
Claim 9
Independent Claim 205 words
A method of connecting an integrated circuit chip and a wiring substrate, comprising the steps of: coating a major surface of said wiring substrate together with a plurality of metal bumps formed on respective connecting portions formed on said major surface of said wiring substrate with a photothermosetting resin film; selectively removing said photothermosetting resin film by photolithography to form a plurality of holes therein wherein the resin film is removed in the holes, each of said holes exposing an associated one of said metal bumps; registering, in position, said wiring substrate and said integrated circuit chip having a plurality of connecting pads formed on a major surface of said integrated circuit chip such that each of said metal bumps of said wiring substrate faces an associated one of said connecting pads of said integrated circuit chip; and heating, while maintaining each of said metal bumps and each of said connecting pads in contact with each other through an associated one of said holes, to connect said wiring substrate and said integrated circuit chip with each other through said photothermosetting resin film and to connect said connecting pads of said integrated circuit chip and said metal bumps of said wiring substrate respectively with one another.
Claim 10
Dependent Claim 28 words
The method of connecting an integrated circuit chip and a wiring substrate as claimed in claim 7, wherein said metal bumps are of indium or an alloy thereof.
Claim 11
Dependent Claim 55 words
The method of connecting an integrated circuit chip and a wiring substrate as claimed in claim 7, wherein said step of heating comprises adhering portions of said integrated circuit chip not having said connecting pads and portions of the wiring substrate not having the connecting portions through said photothermosetting resin film functioning as an adhesive.
Claim 12
Dependent Claim 29 words
The method of connecting an integrated circuit chip and a wiring substrate as claimed in claim 9, further comprising applying a predetermined load while performing said step of heating.

References Cited (Backward Citations)

US4654752A Cited
US4667401A Cited
US4857671A Cited
US4955132A Cited
US5068714A Cited
US4928387A Cited
US5086558A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-01-30 1998-08-01 1999-01-31 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-01-30 2002-08-01 2003-01-31 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-01-30 2006-08-01 2007-01-31 $7700.00 Window Closed / Lapsed

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